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81. 发明申请

US20090100932A1 ACCELERATION SENSOR 有权
标题翻译：加速传感器
公开(公告)号：US20090100932A1
公开(公告)日：2009-04-23
申请号：US12254113
申请日：2008-10-20
申请人： Roland SCHEUERER , Heribert Weber
发明人： Roland SCHEUERER , Heribert Weber
IPC分类号： G01P15/125
CPC分类号： G01P15/0802 , G01P15/125
摘要： An acceleration sensor having a mass which is movably supported outside its center of gravity, first electrodes on the mass and second electrodes located at a distance therefrom forming a capacitive sensor in order to determine a change in position of the mass as a function of time. At least one spring element which generates a restoring force when the mass is deflected from its neutral position is provided on the side of the mass facing the capacitive sensor. The mass may be obtained by being exposed from a material layer, and the mass is surrounded, at least at its side faces, by this material.
摘要翻译：一种加速度传感器，其具有可移动地支撑在其重心外部的质量，质量上的第一电极和距离形成电容传感器的距离之外的第二电极，以便确定作为时间的函数的质量位置的变化。当质量从其中立位置偏转时产生恢复力的至少一个弹簧元件设置在面向电容传感器的物体侧。质量可以通过从材料层暴露而获得，并且质量至少在其侧面被该材料包围。

82. 发明授权

US07279759B2 Membrane sensor 有权
标题翻译：膜传感器
公开(公告)号：US07279759B2
公开(公告)日：2007-10-09
申请号：US10547041
申请日：2004-02-18
申请人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
发明人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
IPC分类号： H01L27/14 , H01L29/82 , H01L29/84
CPC分类号： G01L9/0042 , G01F1/6845 , G01N7/10
摘要： A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
摘要翻译：提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。膜由容纳在周围的第二材料中的第一材料制成，并且膜构造成用于感测周围的介质。至少部分地，膜在膜边缘上的断裂点被第三材料增强。膜边缘的加强增加了膜和传感器的稳定性，从而增加了膜的使用寿命。

83. 发明授权

US07193290B2 Semiconductor component and a method for producing the same 有权
标题翻译：半导体元件及其制造方法
公开(公告)号：US07193290B2
公开(公告)日：2007-03-20
申请号：US10479563
申请日：2002-07-06
申请人： Hubert Benzel , Heribert Weber , Frank Schaefer
发明人： Hubert Benzel , Heribert Weber , Frank Schaefer
IPC分类号： H01L31/058
CPC分类号： G01N27/121
摘要： A semiconductor component, such as a humidity sensor, which has a semiconductor substrate, such as, for example, made of silicon, a first electrode and a second electrode and at least one first layer that is accessible for a medium acting from the outside on the semiconductor component, the first layer being arranged at least partially between the first and the second electrode. To reduce the costs for producing the semiconductor component the first layer has pores into which the medium reaches at least partially.
摘要翻译：诸如湿度传感器的半导体部件，其具有例如由硅制成的半导体衬底，第一电极和第二电极以及至少一个第一层，该第一层可从外部作用的介质半导体部件，第一层至少部分地布置在第一和第二电极之间。为了降低制造半导体部件的成本，第一层具有至少部分介质到达的孔。

84. 发明申请

US20060037932A1 Method and micromechanical component 审中-公开
标题翻译：方法和微机械部件
公开(公告)号：US20060037932A1
公开(公告)日：2006-02-23
申请号：US10529425
申请日：2003-02-27
申请人： Gerhard Lammel , Frank Schaefer , Heribert Weber , Stefan Finkbeiner
发明人： Gerhard Lammel , Frank Schaefer , Heribert Weber , Stefan Finkbeiner
IPC分类号： C23F1/00
CPC分类号： B81C1/00476 , B81B2201/12 , B81B2203/0118 , B81C2201/0109 , B81C2201/0115
摘要： A manufacturing method and a micromechanical component are provided in which porous silicon is used as sacrificial layer and a functional layer is exposed by etching off the sacrificial layer.
摘要翻译：提供了制造方法和微机械部件，其中使用多孔硅作为牺牲层，并且通过蚀刻除去牺牲层而暴露功能层。

85. 发明授权

US06820481B1 Mass flow sensor having an improved membrane stability 失效
标题翻译：质量流量传感器具有改进的膜稳定性
公开(公告)号：US06820481B1
公开(公告)日：2004-11-23
申请号：US09699704
申请日：2000-10-30
申请人： Heribert Weber , Werner Steiner
发明人： Heribert Weber , Werner Steiner
IPC分类号： G01F168
CPC分类号： G01F1/6845
摘要： A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor, in particular the reoxide layer which is present in the known mass flow sensor is replaced by a thicker PECVD silicon oxide layer. The thickness of the silicon oxide layer deposited on the platinum layer is increased, and the known mass flow sensor is also provided with a cover layer of PECVD silicon nitride forming a moisture barrier.
摘要翻译：描述质量流量传感器。为了改善已知质量流量传感器的膜稳定性，特别是存在于已知质量流量传感器中的再氧化物层被更厚的PECVD氧化硅层代替。沉积在铂层上的氧化硅层的厚度增加，并且已知的质量流量传感器还设置有形成防潮层的PECVD氮化硅覆盖层。

86. 发明授权

US06303990B1 Conductor path contacting arrangement and method 有权
标题翻译：导体路径接触布置和方法
公开(公告)号：US06303990B1
公开(公告)日：2001-10-16
申请号：US09320603
申请日：1999-05-26
申请人： Heribert Weber
发明人： Heribert Weber
IPC分类号： H01L2348
CPC分类号： H01L21/76838 , H01L23/5226 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A conductor path contacting arrangement for contacting a first conductor path, which is applied on a substrate and covered with a first insulating layer, via a contact hole in the first insulating layer to a second conductor path. The contact hole overlies a region above the first conductor and a region, adjacent thereto, above the substrate; and inside the contact hole the second conductor path is stepped down from the contact region having the first conductor path toward the substrate therebeneath. This allows better control of the contact hole junction resistance.
摘要翻译：一种导体路径接触装置，其用于接触第一导体路径，该第一导体路径经由第一绝缘层中的接触孔施加到衬底并被第一绝缘层覆盖，以覆盖到第二导体路径。接触孔覆盖在第一导体上方的区域和与其相邻的区域，在衬底上方; 并且在所述接触孔内部，所述第二导体路径从具有所述第一导体路径的所述接触区域朝向其下方的衬底降压。这允许更好地控制接触孔结电阻。

87. 发明授权

US09791663B2 Magnetically drivable micromirror 有权
公开(公告)号：US09791663B2
公开(公告)日：2017-10-17
申请号：US13976301
申请日：2011-11-09
申请人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
发明人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
IPC分类号： G02B26/08 , G02B26/10 , G02B26/12 , G02B7/182
CPC分类号： G02B7/1821 , G02B26/085 , G02B26/101 , G02B26/105 , G02B26/12
摘要： A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

88. 发明授权

US08847336B2 Micromechanical component having an inclined structure and corresponding manufacturing method 有权
标题翻译：具有倾斜结构的微机械部件和相应的制造方法
公开(公告)号：US08847336B2
公开(公告)日：2014-09-30
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
IPC分类号： H01L29/788 , B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译：在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。

89. 发明授权

US08823116B2 Hybrid integrated component and method for the manufacture thereof 有权
标题翻译：混合集成组件及其制造方法
公开(公告)号：US08823116B2
公开(公告)日：2014-09-02
申请号：US13915249
申请日：2013-06-11
申请人： Heribert Weber
发明人： Heribert Weber
IPC分类号： H01L29/84
CPC分类号： B81B3/0018 , B81B2201/0257 , B81C1/00158 , B81C1/00246 , B81C2203/0109 , B81C2203/0735 , B81C2203/0771 , H01L2224/11 , H04R2201/003
摘要： A hybrid integrated component includes: at least one ASIC element having integrated circuit elements and a back-end stack; an MEMS element having a micromechanical structure, which extends over the entire thickness of the MEMS substrate; and a cap wafer. The hybrid integrated component is provided with an additional micromechanical function. The MEMS element is mounted on the ASIC element, so that a gap exists between the micromechanical structure and the back-end stack of the ASIC element. The cap wafer is mounted above the micromechanical structure of the MEMS element. A pressure-sensitive diaphragm structure having at least one deflectable electrode of a capacitor system is implemented in the back-end stack of the ASIC element, which diaphragm structure spans a pressure connection in the rear side of the ASIC element.
摘要翻译：混合集成部件包括：具有集成电路元件和后端叠层的至少一个ASIC元件; 具有微机械结构的MEMS元件，其在MEMS基板的整个厚度上延伸; 和盖片。混合集成组件具有额外的微机械功能。 MEMS元件安装在ASIC元件上，使得在微机械结构和ASIC元件的后端堆叠之间存在间隙。盖晶片安装在MEMS元件的微机械结构上方。在ASIC元件的后端堆叠中实现具有电容器系统的至少一个可偏转电极的压敏膜结构，该隔膜结构跨越ASIC元件后侧的压力连接。

90. 发明授权

US08779536B2 Hybrid integrated pressure sensor component 有权
标题翻译：混合集成压力传感器组件
公开(公告)号：US08779536B2
公开(公告)日：2014-07-15
申请号：US14044223
申请日：2013-10-02
申请人： Heribert Weber
发明人： Heribert Weber
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B2201/0264 , B81C1/00246 , B81C2203/0714 , B81C2203/0771 , G01L9/0073
摘要： A pressure sensor component includes a MEMS component having at least one pattern element that is able to be deflected perpendicular to the component plane, which is equipped with at least one electrode of a measuring capacitor device, and an ASIC component having integrated circuit elements and at least one back end stack, at least one counter-electrode of the measuring capacitor device being developed in a metallization plane of the back end stack. The MEMS component is mounted on the back end pile of the ASIC component. The MEMS component includes at least one pressure-sensitive diaphragm pattern and is mounted on the ASIC component in such a way that the pressure-sensitive diaphragm pattern spans a cavity between the MEMS component and the back end stack of the ASIC component.
摘要翻译：压力传感器部件包括具有至少一个能够垂直于部件平面偏转的图案元件的MEMS部件，该元件平面配备有测量电容器装置的至少一个电极和具有集成电路元件的ASIC部件至少一个后端堆叠，所述测量电容器装置的至少一个对电极在后端堆叠的金属化平面中显影。 MEMS组件安装在ASIC组件的后端堆上。 MEMS部件包括至少一个压敏光阑图案，并且以这样的方式安装在ASIC部件上，使得压敏光阑图案跨越MEMS部件和ASIC部件的后端垛之间的空腔。

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