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    • 84. 发明授权
    • Silicon micromechanical gyroscope
    • 硅微机械陀螺仪
    • US07805994B2
    • 2010-10-05
    • US11906200
    • 2007-09-29
    • Fuxue ZhangWei Zhang
    • Fuxue ZhangWei Zhang
    • G01P9/04G01C19/00
    • G01C19/5769G01C19/5726
    • The present invention relates to a novel silicon micromechanical gyroscope, which is used in control technology field to measure pose measurement of a rotating body, such as aerobat, motor tire and drilling platform, wherein the novel silicon micromechanical gyroscope main includes a sensing element and a signal process circuit. The sensing element further comprises a silicon slice frame, a silicon slice, an upper electrode ceramics plate and a bottom electrode ceramics plate. The signal process circuit further comprises a signal detecting bridge circuit used as bridge arm of the capacitor sensing element, and a SCM signal process circuit with data process module. The novel silicon micromechanical gyroscope is able to replace a drive force from the drive conformation with a rotating force from the rotation of the rotating body so as to achieve a novel silicon micromechanical gyroscope without a drive conformation. The novel silicon micromechanical gyroscope without a drive conformation to mostly achieve purposes like minify in craft, simply in structure and reduced in volume so as to effectively lower cost and save energy.
    • 本发明涉及一种新型的硅微机械陀螺仪,其用于控制​​技术领域,用于测量旋转体的姿态测量,如旋转体,如马来西亚,马达轮胎和钻井平台,其中新型硅微机械陀螺仪主要包括感测元件和 信号处理电路。 感测元件还包括硅片框,硅片,上电极陶瓷板和底电极陶瓷板。 信号处理电路还包括用作电容器感测元件的桥臂的信号检测桥电路和具有数据处理模块的SCM信号处理电路。 新型硅微机械陀螺仪能够利用来自旋转体的旋转的旋转力代替来自驱动构造的驱动力,从而实现不具有驱动构造的新型硅微机械陀螺仪。 新型硅微机械陀螺仪无驱动构型,主要实现工艺简化,结构简单,体积减小等目的,有效降低成本,节约能源。