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71. 发明授权

US07362117B2 Cooling fin connected to a cooling unit and a pusher of the testing apparatus 有权
标题翻译：冷却翅片连接到测试装置的冷却单元和推动器
公开(公告)号：US07362117B2
公开(公告)日：2008-04-22
申请号：US11483075
申请日：2006-07-10
申请人： Noboru Saito , Hiroyuki Takahashi , Noriyuki Igarashi , Keiichi Fukumoto , Hiroto Nakamura , Yutaka Watanabe , Kenichi Shimada
发明人： Noboru Saito , Hiroyuki Takahashi , Noriyuki Igarashi , Keiichi Fukumoto , Hiroto Nakamura , Yutaka Watanabe , Kenichi Shimada
IPC分类号： G01R31/02
CPC分类号： G01R31/01 , G01R1/0458 , G01R31/2806 , G01R31/2862 , G01R31/2863 , G01R31/2868 , G01R31/2877
摘要： A device testing apparatus including a connection terminal to which an electronic device under test is detachably attached, a pusher for pushing the electronic device in the direction of the connection terminal so as to connect the electronic device to the connection terminal, and a cooling unit for cooling the electronic device. As the cooling unit, an element cooling the device using electricity is for example used. The cooling unit includes a cooling medium blower for blowing a cooling medium around the electronic device and heat exchange projections or depressions for raising the cooling efficiency by blowing a cooling medium. In the device testing apparatus, even if the electronic device generates heat on its own during testing, the electronic device is cooled through the pusher, connection terminals, or socket, so the effect of the heat generated by the electronic device is canceled out and the electronic device can be tested at the predetermined temperature as prescribed in the specification.
摘要翻译：一种装置测试装置，包括可拆卸地安装有被测试的电子设备的连接端子，用于沿着连接端子的方向推动电子设备以将电子设备连接到连接端子的推动器，以及用于冷却电子设备。作为冷却单元，例如使用电力冷却装置的元件。冷却单元包括用于吹送电子设备周围的冷却介质的冷却介质鼓风机和通过吹送冷却介质而提高冷却效率的热交换突起或凹部。在设备测试装置中，即使电子设备在测试期间自身产生热量，电子设备通过推动器，连接端子或插座被冷却，因此电子设备产生的热量的影响被消除，并且电子设备可以按照说明书中规定的预定温度进行测试。

72. 发明申请

US20080065454A1 DATABASE SYSTEM AND INFORMATION PROCESSING SYSTEM WITH PROCESS CODE INFORMATION 审中-公开
标题翻译：具有过程代码信息的数据库系统和信息处理系统
公开(公告)号：US20080065454A1
公开(公告)日：2008-03-13
申请号：US11931773
申请日：2007-10-31
申请人： Yutaka Watanabe
发明人： Yutaka Watanabe
IPC分类号： G06Q10/00
CPC分类号： G06Q10/06 , G06Q10/02 , G06Q10/063 , G06Q10/06316 , G06Q10/0633 , G06Q30/00 , Y10S707/99945 , Y10S707/99948 , Y10S707/99952
摘要： System (software) development is performed based on a state transition diagram. The workflow of a business process is partitioned for each event therein and assigns process codes to the respective process results. A process code is an identification code to indicate a certain state of a process. For example, a process code AA is assigned to the waiting state before completion of a process A, and a process code AB is assigned to the completion state thereof wherein the process code AB is set as a condition to start a process B. The process codes that are set based on the state transition diagram are managed in an external database (DB) so that flexible modification of the state transition configuration and the state transition order is possible. This provides an entirely new method of system design that facilitates business process reengineering.
摘要翻译：系统（软件）开发是基于状态转换图进行的。为每个事件分配业务流程的工作流程，并将流程代码分配给相应的流程结果。过程代码是用于指示过程的某个状态的识别代码。例如，在处理A完成之前将处理代码AA分配给等待状态，并将处理代码AB分配给其完成状态，其中处理代码AB被设置为开始处理B的条件。该处理基于状态转移图设置的代码在外部数据库（DB）中被管理，使得可以灵活地修改状态转换配置和状态转换顺序。这提供了一种全新的系统设计方法，有助于业务流程重组。

73. 发明申请

US20070209045A1 Carrier apparatus and carrier method of thin disc tray 审中-公开
标题翻译：薄盘托盘的载体装置和载体方法
公开(公告)号：US20070209045A1
公开(公告)日：2007-09-06
申请号：US11657600
申请日：2007-01-25
申请人： Yutaka Watanabe
发明人： Yutaka Watanabe
IPC分类号： G11B33/02
CPC分类号： G11B23/0014 , G11B17/225
摘要： In a carrier apparatus and a carrier method of a thin disc and a thin disc tray which are accommodated in a disc cartridge, in order to contain the drawn disc tray without bending it, a rigidity of the thin disc tray is improved in a pressed direction when containing the thin disc tray by applying a certain degree of deflection to a plane of the thin disc tray at a time of containing the thin disc and the thin disc tray within the cartridge, whereby the thin disc tray is securely contained.
摘要翻译：在容纳在盘盒中的薄盘和薄盘托盘的载体装置和载体方法中，为了容纳拉制的盘托盘而不使其弯曲，在压制方向上提高了薄盘托盘的刚性当容纳薄盘托盘时，在将薄盘和薄盘托盘容纳在墨盒内时，通过对薄盘托盘的平面施加一定程度的偏转，从而可靠地容纳薄盘托盘。

74. 发明申请

US20070202423A1 EXPOSURE APPARATUS, CONTROL METHOD FOR THE SAME, AND DEVICE MANUFACTURING METHOD 失效
标题翻译：曝光装置及其控制方法及装置制造方法
公开(公告)号：US20070202423A1
公开(公告)日：2007-08-30
申请号：US11677241
申请日：2007-02-21
申请人： Masayuki Tanabe , Yutaka Watanabe , Shigeru Terashima , Mika Kanehira
发明人： Masayuki Tanabe , Yutaka Watanabe , Shigeru Terashima , Mika Kanehira
IPC分类号： G03G15/04
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70308 , G03F7/70316 , G03F7/70925 , G21K1/062
摘要： An exposure apparatus includes a chamber where an optical element having a capping layer is arranged, and exposes a substrate by using the optical element. The exposure apparatus includes a supply unit which supplies a material to repair the capping layer into the chamber, and a providing unit which provides electromagnetic waves to the optical element. The electromagnetic waves cause a photochemical reaction of the material to grow a layer on the capping layer so as to repair the capping layer.
摘要翻译：曝光装置包括其中布置有具有盖层的光学元件的室，并且通过使用光学元件使基板曝光。曝光装置包括供给单元，该供给单元将覆盖层修复到室中的材料，以及向光学元件提供电磁波的提供单元。电磁波引起材料的光化学反应，以在覆盖层上生长层，从而修复覆盖层。

75. 发明授权

US07134985B2 Downhill speed controller 有权
标题翻译：下坡速度控制器
公开(公告)号：US07134985B2
公开(公告)日：2006-11-14
申请号：US10504818
申请日：2003-10-10
申请人： Yutaka Watanabe , Hiroshi Watanabe , Yasushi Tokuda
发明人： Yutaka Watanabe , Hiroshi Watanabe , Yasushi Tokuda
IPC分类号： B60W10/04
CPC分类号： B60T8/245 , B60K31/04 , B60T7/12 , B60T7/122 , B60T2201/04 , B60W2540/10 , B60W2540/12 , B60W2550/142 , Y10T477/80 , Y10T477/816
摘要： The invention is intended to provide a downhill speed control system which employs a method of setting a target vehicle speed in advance, thereby improving controllability when a vehicle runs down a slope, and giving an operator improved operability in setting of the target vehicle speed. Brakes are controlled so that, when the vehicle runs down the slope, an actual vehicle speed is matched with a target speed set by a switch which can set the target speed by selectively or continuously changing plural preset speeds. Also, control constants for PID control are modified depending on settings of a downslope gradient setting switch and a load setting switch. When an acceleration computed from the actual vehicle speed is larger than a target acceleration, the strength of applied brake is increased.
摘要翻译：本发明旨在提供一种采用预先设定目标车速的方法的下坡速度控制系统，从而提高了当车辆向下坡度时的可控性，并且提高了操作者在设定目标车速方面的可操作性。制动器被控制，使得当车辆沿着斜坡行驶时，实际车辆速度与由开关设置的目标速度相匹配，该开关可以通过选择性地或连续地改变多个预设速度来设定目标速度。此外，PID控制的控制常数根据下坡梯度设置开关和负载设置开关的设置进行修改。当从实际车速计算的加速度大于目标加速度时，施加制动器的强度增加。

76. 发明授权

US07072438B2 Reflection type mask 失效
标题翻译：反射型面具
公开(公告)号：US07072438B2
公开(公告)日：2006-07-04
申请号：US10736693
申请日：2003-12-17
申请人： Keiko Chiba , Masami Tsukamoto , Yutaka Watanabe , Shinichi Hara , Hiroshi Maehara
发明人： Keiko Chiba , Masami Tsukamoto , Yutaka Watanabe , Shinichi Hara , Hiroshi Maehara
IPC分类号： G21K3/00
CPC分类号： G03F1/62 , B82Y10/00 , B82Y40/00 , G03F1/24
摘要： A reflection type mask includes a substrate on which a multi-layered film for reflecting X-rays is provided, a mask pattern which is formed on the multi-layered film for absorbing the X-rays, and a cover for protecting the mask pattern. The cover is detachably attached to the substrate.
摘要翻译：反射型掩模包括其上设置有用于反射X射线的多层膜的基板，形成在用于吸收X射线的多层膜上的掩模图案，以及用于保护掩模图案的盖。盖可拆卸地附接到基板。

77. 发明授权

US06665371B1 Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method 失效
标题翻译：同步辐射测量装置，X射线曝光装置和装置制造方法
公开(公告)号：US06665371B1
公开(公告)日：2003-12-16
申请号：US09583979
申请日：2000-05-31
申请人： Hideyuki Chinju , Yutaka Watanabe , Akira Miyake , Nobuaki Ogushi
发明人： Hideyuki Chinju , Yutaka Watanabe , Akira Miyake , Nobuaki Ogushi
IPC分类号： G21K500
CPC分类号： H05H1/0025
摘要： A measurement apparatus has a first detector for measuring an intensity such that a sheet-shaped beam of synchrotron radiation is integrated over the entire range of the beam in the thickness direction thereof; a second detector for measuring the intensity of the beam at two points where positions along the direction are different; and a calculating device for calculating the magnitude of the beam in the direction on the basis of the detections by the first and second detectors.
摘要翻译：测量装置具有用于测量强度的第一检测器，使得在波束的厚度方向的整个范围上整合同步加速器辐射的片状波束; 第二检测器，用于在沿着所述方向的位置不同的两个点处测量所述光束的强度; 以及计算装置，用于基于第一和第二检测器的检测来计算沿该方向的光束的幅度。

78. 发明授权

US06645707B2 Device manufacturing method 失效
标题翻译：器件制造方法
公开(公告)号：US06645707B2
公开(公告)日：2003-11-11
申请号：US09534334
申请日：2000-03-24
申请人： Mitsuaki Amemiya , Shunichi Uzawa , Keiko Chiba , Yutaka Watanabe
发明人： Mitsuaki Amemiya , Shunichi Uzawa , Keiko Chiba , Yutaka Watanabe
IPC分类号： G03C556
CPC分类号： G03F7/70466 , G03F7/2022
摘要： A device manufacturing method includes a first exposure step for executing a multiple exposure of a first layer of a substrate by use of plural first masks, a development step for developing the first layer of the substrate and a second exposure step, executed after the development step, for executing a multiple exposure of a second layer of the substrate by use of plural second masks. A portion of at least one of the first masks has a pattern the same as a pattern formed in a portion of at least one of the second masks.
摘要翻译：一种器件制造方法包括：第一曝光步骤，用于通过使用多个第一掩模来执行衬底的第一层的多次曝光;显影步骤，用于显影衬底的第一层;以及第二曝光步骤，在显影步骤之后执行，用于通过使用多个第二掩模来执行所述基板的第二层的多次曝光。第一掩模中的至少一个的一部分具有与形成在至少一个第二掩模的部分中的图案相同的图案。

79. 发明授权

US06453001B2 X-ray exposure apparatus 失效
标题翻译： X射线曝光装置
公开(公告)号：US06453001B2
公开(公告)日：2002-09-17
申请号：US09853712
申请日：2001-05-14
申请人： Yutaka Watanabe , Mitsuaki Amemiya
发明人： Yutaka Watanabe , Mitsuaki Amemiya
IPC分类号： H01L2130
CPC分类号： G03F7/70058 , G21K1/04
摘要： An X-ray exposure apparatus has a plasma X-ray source for generating X-rays by producing a plasma, and a collimator for converging X-rays that diverge from the X-ray source and reducing a global divergence angle to irradiate a mask with the X-rays. A local convergence angle as seen from one point on the mask is changed by moving the position or angle of the collimator in a direction perpendicular or parallel to the axis of the collimator. The pattern on the mask is transferred to a wafer using X-rays having a convergence angle thus controlled. As a result, controllable parameters are increased and a more suitable resist pattern can be obtained. In addition, process tolerance in terms of exposing finer patterns is improved.
摘要翻译： X射线曝光装置具有通过产生等离子体产生X射线的等离子体X射线源和用于会聚从X射线源发散的X射线的准直仪，并且减小全局发散角以照射掩模 X光片。通过沿准直器的轴线垂直或平行的方向移动准直仪的位置或角度来改变从掩模上的一个点看到的局部会聚角度。使用具有如此控制的会聚角的X射线将掩模上的图案转印到晶片。结果，可控参数增加并且可以获得更合适的抗蚀剂图案。此外，改善了曝光更精细图案的工艺公差。

80. 发明授权

US06351512B1 X-ray exposure apparatus 失效
标题翻译： X射线曝光装置
公开(公告)号：US06351512B1
公开(公告)日：2002-02-26
申请号：US09489914
申请日：2000-01-24
申请人： Shigeru Terashima , Yutaka Watanabe
发明人： Shigeru Terashima , Yutaka Watanabe
IPC分类号： G01N2300
CPC分类号： G03F7/708 , G03F7/7035 , G03F7/70358 , G03F7/70808 , G21K5/04
摘要： An X-ray exposure apparatus includes a partition structure for defining therein an ambience of one of an atmospheric pressure and a reduced pressure, for accommodating an X-ray mask and an article to be exposed, an X-ray window provided on the partition structure for spatially isolating the inside of the partition structure and an X-ray source, and having a function for transmitting therethrough an X-ray beam with which the article as placed inside the partition structure can be exposed through the X-ray mask, and a scanning mechanism for scanningly moving the X-ray window in a direction intersecting with an optical axis of the X-ray beam, in a single exposure and without interruption at least from just before the start of the exposure to just after the end of the exposure.
摘要翻译： X射线曝光装置包括用于在其中限定大气压和减压之一的气氛的分隔结构，用于容纳X射线掩模和待曝光的物品，设置在分隔结构上的X射线窗口用于空间隔离分隔结构的内部和X射线源，并且具有透射X射线束的功能，通过该X射线束，可以通过X射线掩模将分配结构中放置的物品暴露出来，扫描机构，用于在与曝光结束之后至少从曝光开始之前到曝光结束之后的单次曝光和不间断地沿与X射线束的光轴相交的方向扫描地移动X射线窗口。

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