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71. 发明授权

US07489004B2 Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness 有权
标题翻译：用于射频应用的微机电可变电容器，具有减小的表面粗糙度的影响
公开(公告)号：US07489004B2
公开(公告)日：2009-02-10
申请号：US11338427
申请日：2006-01-24
申请人： Chantal Combi , Andrea Rusconi Clerici Beltrami , Benedetto Vigna
发明人： Chantal Combi , Andrea Rusconi Clerici Beltrami , Benedetto Vigna
IPC分类号： H01L27/108 , H01L29/94
CPC分类号： H01G5/18 , H01L28/60
摘要： A micro-electro-mechanical variable capacitor has a first and a second electrode, and a dielectric region arranged on the first electrode. An intermediate electrode is arranged on the dielectric region. The first electrode is fixed and anchored to a substrate, and the second electrode includes a membrane movable with respect to the first electrode according to an external actuation, in particular an electrostatic force due to an actuation voltage applied between an actuation electrode and the first electrode. The second electrode is suspended over the intermediate electrode in a first operating condition, and contacts the intermediate electrode in a second operating condition; in particular, in the second operating condition, a short-circuit is established between the second electrode and the intermediate electrode.
摘要翻译：微机电可变电容器具有第一和第二电极以及布置在第一电极上的电介质区域。中间电极布置在电介质区域上。第一电极被固定并固定到基底，并且第二电极包括根据外部致动而相对于第一电极可移动的膜，特别是由于施加在致动电极和第一电极之间的致动电压引起的静电力。第二电极在第一操作状态下悬挂在中间电极上，并在第二操作状态下接触中间电极; 特别是在第二工作状态下，在第二电极和中间电极之间建立起短路。

72. 发明申请

US20050208696A1 Method for manufacturing a semiconductor pressure sensor 审中-公开
标题翻译：半导体压力传感器的制造方法
公开(公告)号：US20050208696A1
公开(公告)日：2005-09-22
申请号：US11082491
申请日：2005-03-16
申请人： Flavio Villa , Gabriele Barlocchi , Pietro Corona , Benedetto Vigna , Lorenzo Baldo
发明人： Flavio Villa , Gabriele Barlocchi , Pietro Corona , Benedetto Vigna , Lorenzo Baldo
IPC分类号： G01L9/00 , H01L21/00 , G06K11/16
CPC分类号： G01L9/0073 , G01L9/0045
摘要： Method for manufacturing a semiconductor pressure sensor, wherein, in a silicon substrate, trenches are dug and delimit walls; a closing layer is epitaxially grown, that closes the trenches at the top and forms a suspended membrane; a heat treatment is performed so as to cause migration of the silicon of the walls and to form a closed cavity underneath the suspended membrane; and structures are formed for transducing the deflection of the suspended membrane into electrical signals.
摘要翻译：制造半导体压力传感器的方法，其中在硅衬底中，挖沟和界定壁; 闭合层外延生长，封闭顶部的沟槽并形成悬浮膜; 进行热处理以使壁的硅迁移并在悬浮膜下方形成封闭空腔; 并且形成用于将悬浮膜的偏转转换成电信号的结构。

73. 发明授权

US06513898B1 Integrated inkjet print head and manufacturing process thereof 失效
标题翻译：集成喷墨打印头及其制造工艺
公开(公告)号：US06513898B1
公开(公告)日：2003-02-04
申请号：US09103016
申请日：1998-06-23
申请人： Benedetto Vigna , Riccardo Maggi
发明人： Benedetto Vigna , Riccardo Maggi
IPC分类号： B41J29393
CPC分类号： B41J2/1603 , B41J2/125 , B41J2/14129 , B41J2/14153 , B41J2/164 , B41J2002/14354 , B41J2202/13
摘要： An inkjet print head includes an ink drop emission mini-gun and a drop emission sensor integrated in a chip of semiconductor material. The mini-gun is formed by an ink chamber and a nozzle in communication with the ink chamber and the drop emission sensor includes a resistive element arranged in a position adjacent to the ink chamber. The resistance of the resistive element depends on the pressure exerted thereon, so that when the mini-gun emits an ink drop, it is subjected to a recoil movement which causes a change of pressure and hence of resistance in the resistive element; this change in resistance may be detected through suitable circuitry to identify whether and when a drop of ink has been emitted.
摘要翻译：喷墨打印头包括集成在半导体材料芯片中的墨滴发射微型枪和液滴发射传感器。微型枪由墨水室和与墨水室连通的喷嘴形成，并且液滴发射传感器包括布置在与墨水腔相邻的位置的电阻元件。电阻元件的电阻取决于施加在其上的压力，使得当微型枪发射墨滴时，其受到反冲运动，其导致电阻元件中的压力变化并因此导致电阻的变化; 可以通过合适的电路来检测电阻的这种变化，以识别是否和何时已经发射一滴墨水。

74. 发明授权

US06469330B1 Process for manufacturing integrated devices comprising microstructures and associated suspended electrical interconnections 有权
标题翻译：用于制造包括微结构和相关联的悬挂电互连的集成器件的工艺
公开(公告)号：US06469330B1
公开(公告)日：2002-10-22
申请号：US09422049
申请日：1999-10-20
申请人： Benedetto Vigna , Ubaldo Mastromatteo
发明人： Benedetto Vigna , Ubaldo Mastromatteo
IPC分类号： H01L2720
CPC分类号： H01L23/4821 , H01L23/5221 , H01L2924/0002 , H01L2924/00
摘要： An integrated device comprises an epitaxial layer forming a first and a second region separated by at least one air gap. The first region forms, for example, a suspended mass of an accelerometer. A bridge element extends on the air gap and has a suspended electrical connection line electrically connecting the first and the second region and a protective structure of etch-resistant material, which surrounds the electrical connection line on all sides. The protective structure is formed by a lower portion of silicon nitride and an upper portion of silicon carbide, the silicon carbide surrounding the electrical connection line at the upper and lateral sides.
摘要翻译：集成器件包括形成由至少一个气隙隔开的第一和第二区域的外延层。第一区域形成例如加速度计的悬挂质量。桥接元件在气隙上延伸并且具有电连接第一和第二区域的悬挂电连接线以及围绕所有侧面的电连接线的耐蚀刻材料的保护结构。保护结构由氮化硅的下部和碳化硅的上部形成，碳化硅在上侧和外侧围绕电连接线。

75. 发明授权

US06446326B1 Method for manufacturing a hard disk read/write unit, with micrometric actuation 有权
标题翻译：制造硬盘读/写单元的方法，具有微动作动
公开(公告)号：US06446326B1
公开(公告)日：2002-09-10
申请号：US09305862
申请日：1999-05-05
申请人： Ubaldo Mastromatteo , Bruno Murari , Benedetto Vigna , Sarah Zerbini
发明人： Ubaldo Mastromatteo , Bruno Murari , Benedetto Vigna , Sarah Zerbini
IPC分类号： G11B5127
CPC分类号： H02N1/006 , G11B5/5552 , G11B5/58 , Y10T29/49027 , Y10T29/49032 , Y10T29/49052 , Y10T29/49053
摘要： The method comprises the steps of: forming an integrated device including a microactuator in a semiconductor material wafer; forming an immobilization structure of organic material on the wafer; simultaneously forming a securing flange integral with the microactuator and electrical connections for connecting the integrated device to a read/write head; bonding a transducer supporting the read/write head to the securing flange; connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the microactuator to a suspension; and removing the immobilization structure.
摘要翻译：该方法包括以下步骤：在半导体材料晶片中形成包括微致动器的集成器件; 在晶片上形成有机材料的固定结构; 同时形成与微致动器一体的固定凸缘和用于将集成装置连接到读/写头的电连接; 将支撑读/写头的换能器接合到固定凸缘; 将电气连接连接到读/写头; 将晶片切成骰子; 将微致动器粘合到悬浮液上; 并去除固定结构。

76. 发明授权

US06259584B1 Integrated device comprising a semiconductor material microactuator, in particular for a hard disk read/write head 有权
标题翻译：集成器件包括半导体材料微致动器，特别是用于硬盘读/写头
公开(公告)号：US06259584B1
公开(公告)日：2001-07-10
申请号：US09357443
申请日：1999-07-20
申请人： Dario Cini , Benedetto Vigna
发明人： Dario Cini , Benedetto Vigna
IPC分类号： G11B2102
CPC分类号： G11B21/02 , H02N1/006
摘要： A microactuator comprises an outer stator and an inner rotor electrostatically coupled to a stator. The rotor comprises a suspended mass with a substantially circular shape, and a plurality of mobile arms extending radially towards the exterior, starting from the suspended mass. The stator has a plurality of pairs of fixed arms extending radially to the suspended mass, a respective mobile arm being arranged between each pair of fixed arms. The fixed arms are divided into fixed drive arms connected to a drive stage for actuating the microactuator, and into fixed measure arms connected to a measure stage, and define a capacitive uncoupling structure.
摘要翻译：微型致动器包括外部定子和静电耦合到定子的内部转子。转子包括具有大致圆形形状的悬挂质量和从悬挂质量开始的径向向外延伸的多个移动臂。定子具有多个径向延伸到悬挂质量块的固定臂，相应的可动臂布置在每对固定臂之间。固定臂被分成固定的驱动臂，连接到用于致动微型致动器的驱动级，并且连接到测量台的固定的测量臂中，并且限定了电容解耦结构。

77. 发明授权

US08901925B2 Magnetoresistive sensor and manufacturing method thereof 有权
标题翻译：磁阻传感器及其制造方法
公开(公告)号：US08901925B2
公开(公告)日：2014-12-02
申请号：US13608965
申请日：2012-09-10
申请人： Benedetto Vigna , Simone Sassolini , Lorenzo Baldo , Francesco Procopio
发明人： Benedetto Vigna , Simone Sassolini , Lorenzo Baldo , Francesco Procopio
IPC分类号： G01R33/12 , B82Y25/00 , G01C17/28 , G01R33/09
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译：一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。横向部分形成在挖掘的横向壁上。通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。

78. 发明申请

US20140009430A1 COMBINING TOUCH SCREEN AND OTHER SENSING DETECTIONS FOR USER INTERFACE CONTROL 有权
标题翻译：组合触摸屏和用户界面控制的其他感应检测
公开(公告)号：US20140009430A1
公开(公告)日：2014-01-09
申请号：US13544713
申请日：2012-07-09
申请人： Francesco Italia , Giuseppe Noviello , Chee Yu Ng , Benedetto Vigna
发明人： Francesco Italia , Giuseppe Noviello , Chee Yu Ng , Benedetto Vigna
IPC分类号： G06F3/044
CPC分类号： G06F3/044 , G06F3/0416
摘要： A touch sensitive display includes a capacitive touch sensor configured to output capacitance values. A motion sensor makes a motion detection and generates a motion signal including a motion value indicative of sensed motion detection. A touch detection circuit is coupled to receive the capacitance values and motion values. The touch detection circuit processes the capacitance values to make a hovering detection and a touching detection with respect to the display. The touch detection circuit further generates an output signal including the motion value correlated in time with each of the hovering detection and touching detection. The output signal may be processed as a user interface control signal. The output signal may also be processed to determine an impulsive strength of the touching detection as a function of an elapsed time between hover and touch and the measured motion values.
摘要翻译：触敏显示器包括被配置为输出电容值的电容式触摸传感器。运动传感器进行运动检测并产生运动信号，该运动信号包括指示检测到的运动检测的运动值。耦合触摸检测电路以接收电容值和运动值。触摸检测电路处理电容值以对显示进行悬停检测和触摸检测。触摸检测电路进一步生成包括与悬停检测和触摸检测中的每一个相关的运动值的输出信号。可以将输出信号作为用户界面控制信号进行处理。还可以处理输出信号以确定触摸检测的脉冲强度作为在悬停和触摸之间经过的时间以及所测量的运动值的函数。

79. 发明授权

US08433084B2 Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof 有权
公开(公告)号：US08433084B2
公开(公告)日：2013-04-30
申请号：US12777058
申请日：2010-05-10
申请人： Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
发明人： Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
IPC分类号： H04R25/00
CPC分类号： B81C1/00158 , B81B3/0018 , B81B7/0061 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48479 , H01L2924/00014 , H01L2924/16151 , H01L2924/16152 , H04R1/04 , H04R1/06 , H04R1/086 , H04R1/2838 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2224/48471 , H01L2224/4554 , H01L2924/00012
摘要： A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.

80. 发明申请

US20130000136A1 MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF 有权
标题翻译：磁传感器及其制造方法
公开(公告)号：US20130000136A1
公开(公告)日：2013-01-03
申请号：US13608965
申请日：2012-09-10
申请人： Benedetto Vigna , Simone Sassolini , Lorenzo Baldo , Francesco Procopio
发明人： Benedetto Vigna , Simone Sassolini , Lorenzo Baldo , Francesco Procopio
IPC分类号： H01L29/82 , H01L21/82 , G01C17/02
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译：一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。横向部分形成在挖掘的横向壁上。通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。

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