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    • 76. 发明申请
    • METHOD FOR FORMING AN ON-CHIP HIGH FREQUENCY ELECTRO-STATIC DISCHARGE DEVICE
    • 用于形成片上高频电静电放电装置的方法
    • US20090317970A1
    • 2009-12-24
    • US12144089
    • 2008-06-23
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng LiuAnthony K. Stamper
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng LiuAnthony K. Stamper
    • H01L21/4763
    • H01L21/76808H01L21/7682H01L27/0248
    • A method for forming an on-chip high frequency electro-static discharge device on an integrated circuit is described. In one embodiment of the method, a capped first dielectric layer with more than one electrode formed therein is provided. A second dielectric layer is deposited over the capped first dielectric layer. A first hard mask dielectric layer is deposited over the second dielectric layer. A cavity trench is formed through the first hard mask dielectric layer and the second dielectric layer to the first dielectric layer, wherein the cavity trench is formed in the first dielectric layer between two adjacent electrodes. At least one via is formed through the second dielectric layer about the cavity trench. A metal trench is formed around each of the at least one via. A release opening is formed over the cavity trench. A third dielectric layer is deposited over the second dielectric layer, wherein the third dielectric layer hermetically seals the release opening to provide electro-static discharge protection.
    • 描述了在集成电路上形成片上高频静电放电装置的方法。 在该方法的一个实施例中,提供了一种其上形成有多于一个电极的封盖的第一电介质层。 在封盖的第一介电层上沉积第二介电层。 第一硬掩模介电层沉积在第二介电层上。 通过第一硬掩模电介质层和第二电介质层形成腔沟槽到第一介电层,其中在两个相邻电极之间的第一电介质层中形成空腔沟槽。 至少一个通孔围绕腔沟槽形成穿过第二电介质层。 在所述至少一个通孔中的每一个周围形成金属沟槽。 在空腔沟槽上形成释放开口。 在第二电介质层上沉积第三电介质层,其中第三介电层气密地密封释放开口以提供静电放电保护。
    • 77. 发明申请
    • DESIGN STRUCTURE FOR AN ON-CHIP HIGH FREQUENCY ELECTRO-STATIC DISCHARGE DEVICE
    • 片上高频电子放电装置的设计结构
    • US20090316314A1
    • 2009-12-24
    • US12144095
    • 2008-06-23
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng LiuAnthony K. Stamper
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng LiuAnthony K. Stamper
    • H02H9/00G06F17/50
    • H01L23/60H01L2924/0002H01L2924/00
    • A design structure for an on-chip high frequency electro-static discharge device is described. In one embodiment, the electro-static discharge structure comprises a first dielectric layer with more than one electrode formed therein. A second dielectric layer with more than one electrode formed therein is located above the first dielectric layer. At least one via connects the more than one electrode in the first dielectric layer with the more than one electrode in the second dielectric layer. A gap is formed through the first dielectric layer and the second dielectric layer, wherein the gap extends between two adjacent electrodes in both the first dielectric layer and the second dielectric layer. A third dielectric layer is disposed over the second dielectric layer, wherein the third dielectric layer hermetically seals the gap to provide electro-static discharge protection on the integrated circuit.
    • 描述了片上高频静电放电装置的设计结构。 在一个实施例中,静电放电结构包括其中形成有多于一个电极的第一电介质层。 其中形成有多于一个电极的第二电介质层位于第一介电层的上方。 至少一个通孔将第一介电层中的多于一个的电极与第二介电层中的多于一个的电极连接。 通过第一电介质层和第二电介质层形成间隙,其中间隙在第一电介质层和第二电介质层中的两个相邻电极之间延伸。 第三电介质层设置在第二电介质层上,其中第三介电层气密地密封间隙以在集成电路上提供静电放电保护。
    • 80. 发明申请
    • SYMMETRIC CAPACITOR STRUCTURE
    • 对称电容结构
    • US20080142861A1
    • 2008-06-19
    • US12029748
    • 2008-02-12
    • David S. CollinsHanyi DingKai Di FengZhong-Xiang HeXuefeng Liu
    • David S. CollinsHanyi DingKai Di FengZhong-Xiang HeXuefeng Liu
    • H01L29/94
    • H01L27/0805
    • A structure comprising a first doped region, a second doped region, a third doped region, and a first shallow trench isolation structure formed within a substrate. The first doped region comprises a first dopant having a first polarity. The second doped region forms a first electrode of a capacitor. The third doped region forms a second electrode of the capacitor. Each of the second doped region and the third doped region comprises a second dopant having a second polarity. The first shallow trench isolation structure is formed between the second doped region and the third doped region. The capacitor comprises a main capacitance. The structure comprises a first parasitic capacitance and a second parasitic capacitance. The first parasitic capacitance is about equal to the second parasitic capacitance.
    • 一种包括形成在衬底内的第一掺杂区,第二掺杂区,第三掺杂区和第一浅沟槽隔离结构的结构。 第一掺杂区域包括具有第一极性的第一掺杂剂。 第二掺杂区域形成电容器的第一电极。 第三掺杂区域形成电容器的第二电极。 第二掺杂区域和第三掺杂区域中的每一个包括具有第二极性的第二掺杂剂。 第一浅沟槽隔离结构形成在第二掺杂区和第三掺杂区之间。 电容器包括主电容。 该结构包括第一寄生电容和第二寄生电容。 第一寄生电容约等于第二寄生电容。