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71. 发明申请

US20060181689A1 Lithographic-optical systems including isolatable vacuum chambers, and lithography apparatus comprising same 审中-公开
标题翻译：包括可隔离真空室的平版光学系统和包括其的光刻设备
公开(公告)号：US20060181689A1
公开(公告)日：2006-08-17
申请号：US11190119
申请日：2005-07-25
申请人： Alton Phillips , Douglas Watson , Hiroyuki Kondo
发明人： Alton Phillips , Douglas Watson , Hiroyuki Kondo
IPC分类号： G03B27/42
CPC分类号： G03F7/70841 , G03F7/70833
摘要： An exemplary optical system includes a first vacuum chamber and a second vacuum chamber having first and second portions. The first vacuum chamber contains an energy-beam source. The first vacuum-chamber portion contains a first optical-system portion that receives the beam from the source, and the second vacuum-chamber portion contains a second optical-system portion that receives the beam from the first optical-system portion. A first gate valve separates the first vacuum chamber and the first vacuum-chamber portion and provides, when open, communication between the first vacuum chamber and the first vacuum-chamber portion and a propagation pathway for the beam from the energy-beam source to the first optical-system portion. A second gate valve separates the first vacuum-chamber portion and the second vacuum-chamber portion and provides, when open, communication between the first vacuum-chamber portion and the second vacuum-chamber portion and a propagation pathway for the beam from the first optical-system portion to the second optical-system portion. The gate valves, when closed, allow pressure in the first vacuum-chamber portion to be changed without altering the pressures in the first vacuum chamber and the second vacuum-chamber portion.
摘要翻译：示例性的光学系统包括具有第一和第二部分的第一真空室和第二真空室。第一真空室包含能量束源。第一真空室部分包含从源极接收光束的第一光学系统部分，并且第二真空室部分包含从第一光学系统部分接收光束的第二光学系统部分。第一闸阀将第一真空室和第一真空室部分分开，并且当打开时提供第一真空室和第一真空室部分之间的连通以及用于将束从能量束源传播到第一光学系统部分。第二闸阀将第一真空室部分和第二真空室部分分开，并且当打开时提供第一真空室部分和第二真空室部分之间的连通以及来自第一光学部分的光束的传播路径系统部分到第二光学系统部分。闸阀在关闭时允许在不改变第一真空室和第二真空室部分中的压力的情况下改变第一真空室部分中的压力。

72. 发明申请

US20060151718A1 Exposure apparatus and exposure method 有权
标题翻译：曝光装置和曝光方法
公开(公告)号：US20060151718A1
公开(公告)日：2006-07-13
申请号：US11264089
申请日：2005-11-02
申请人： Hiroyuki Kondo , Takashi Miyachi
发明人： Hiroyuki Kondo , Takashi Miyachi
IPC分类号： A61N5/00
CPC分类号： H05G2/001 , B82Y10/00 , G03F7/70033 , G03F7/70041 , G03F7/70725
摘要： The present invention pertains to an exposure apparatus and exposure method that produces plasma from the target material, generates pulsed light and carries out exposure with the pulsed light; and has as its object to obtain good uniformity of exposure dose even in the case that a pulsed light generated from an exposure light source that produce plasma from target material is used. Then, it is characterized by having a light emitting means that generates pulsed light by producing plasma from an intermittently supplied target material; a reticle stage on which is disposed a reticle that is irradiated by the pulsed light; a photosensitive substrate stage on which is disposed a photosensitive substrate irradiated by the pulsed light patterned by the reticle; and a control means that controls the photosensitive substrate stage so that, before exposing the photosensitive substrate begins, the timing between exposure starting point or exposure ending point and the light emission timing are matched based on the drive timing of the photosensitive substrate stage and the light emission timing of the pulsed light.
摘要翻译：本发明涉及从目标材料产生等离子体的曝光装置和曝光方法，产生脉冲光并用脉冲光进行曝光; 其目的在于，即使在使用从目标材料产生等离子体的曝光光源产生的脉冲光的情况下，也能获得良好的曝光量均匀性。然后，其特征在于具有通过从间歇供给的目标材料产生等离子体而产生脉冲光的发光装置; 刻线台，其上设置有被脉冲光照射的掩模版; 感光基板台，其上设置有由被掩模版图案化的脉冲光照射的感光基板; 以及控制装置，其控制感光基板台，使得在曝光感光基板之前开始曝光开始点或曝光结束点之间的定时和发光定时基于感光基板台和光的驱动定时脉冲光的发射定时。

73. 发明申请

US20060012564A1 Hard disk multimedia player and method 审中-公开
标题翻译：硬盘多媒体播放器及方法
公开(公告)号：US20060012564A1
公开(公告)日：2006-01-19
申请号：US11166208
申请日：2005-06-27
申请人： Masazumi Shiozawa , Hiroyuki Kondo , Masahiko Hajiri , Kenji Miyasaka , Takamasa Ito , Shoichiro Matsuoka , Taku Sugawara , Satoshi Akagawa , Hidehiko Yamamoto , Osamu Udagawa , Naoki Mato , Koichi Sayama
发明人： Masazumi Shiozawa , Hiroyuki Kondo , Masahiko Hajiri , Kenji Miyasaka , Takamasa Ito , Shoichiro Matsuoka , Taku Sugawara , Satoshi Akagawa , Hidehiko Yamamoto , Osamu Udagawa , Naoki Mato , Koichi Sayama
IPC分类号： G09G5/00
CPC分类号： G09G3/20 , G06F1/1626 , G06F1/169 , G06F3/03547 , G06F3/038 , G06F2200/1614 , G06F2203/0339 , G09G3/3406 , G09G5/34 , G09G5/343 , G09G5/346
摘要： A hand-held display apparatus including a body which is gripped by a user's hand, and an interface to output image data. A display is also provided which displays an image received from the interface and vertically inverts the image in response to a vertical inversion signal. The device also includes a plurality of sensors, which are to be manipulated by a user's hand, and are disposed in proximity to the display symmetrically around a horizontal axis in relation to the display section. A processor is also provided which outputs the vertical inversion signal and reverses the functionality of at least one of the plurality of sensors.
摘要翻译：一种手持显示装置，包括由用户的手握住的主体，以及输出图像数据的界面。还提供了一种显示器，其显示从界面接收的图像并且响应于垂直反转信号而使图像垂直反转。该装置还包括多个传感器，其将由用户的手操纵，并且相对于显示部分围绕水平轴对称地设置在显示器附近。还提供了一个处理器，其输出垂直反转信号并反转多个传感器中的至少一个传感器的功能。

74. 发明授权

US06890600B2 SiC single crystal, method for manufacturing SiC single crystal, SiC wafer having an epitaxial film, method for manufacturing SiC wafer having an epitaxial film, and SiC electronic device 有权
标题翻译： SiC单晶，SiC单晶的制造方法，具有外延膜的SiC晶片，具有外延膜的SiC晶片的制造方法以及SiC电子器件
公开(公告)号：US06890600B2
公开(公告)日：2005-05-10
申请号：US10268103
申请日：2002-10-10
申请人： Daisuke Nakamura , Tadashi Ito , Hiroyuki Kondo , Masami Naito
发明人： Daisuke Nakamura , Tadashi Ito , Hiroyuki Kondo , Masami Naito
IPC分类号： C30B23/00 , C30B25/00 , C30B25/20 , C30B33/00 , C30B25/02 , C30B25/04 , C01B33/26
CPC分类号： C30B25/00 , C30B23/00 , C30B25/20 , C30B29/36 , C30B33/00 , H01L2924/0002 , H01L2924/00
摘要： A refined SiC single crystal that includes a small number of defects is provided as follows. At a first growth step, a first seed crystal is formed from a crude SiC single crystal, and a first grown crystal is formed on a first growth surface, which is a plane having an inclination of 20 degrees or smaller from a {1-100} plane or an inclination of 20 degrees or smaller from a {11-20} plane. At an intermediate growth step, an n growth crystal is formed on an n growth surface, which is a plane having an inclination of 45 to 90 degrees from an (n−1) growth surface and an inclination of 60 to 90 degrees from a {0001} plane. At a final growth step, a final SiC single crystal is formed on a final growth surface, which has an inclination of 20 degrees or smaller from a {0001} plane.
摘要翻译：包括少量缺陷的精制SiC单晶如下。在第一生长步骤中，由粗SiC单晶形成第一晶种，并且第一生长晶体形成在第一生长表面上，该第一生长表面是从{1-100的倾斜度为20度或更小的平面 }平面或从{11-20}平面的20度或更小的倾斜度。在中间生长步骤中，n生长晶体形成在n生长表面上，n生长表面是从（n-1）生长表面倾斜45度至90度的平面，并且从{ 0001}平面。在最终生长步骤中，在最终生长表面上形成最终的SiC单晶，其从{0001}面具有20度或更小的倾斜度。

75. 发明授权

US06786969B2 Method and apparatus for producing single crystal, substrate for growing single crystal and method for heating single crystal 有权
标题翻译：用于生产单晶的方法和装置，用于生长单晶的衬底和用于单晶加热的方法
公开(公告)号：US06786969B2
公开(公告)日：2004-09-07
申请号：US10024471
申请日：2001-12-21
申请人： Hiroyuki Kondo , Emi Oguri , Fusao Hirose , Daisuke Nakamura , Atsuto Okamoto , Naohiro Sugiyama
发明人： Hiroyuki Kondo , Emi Oguri , Fusao Hirose , Daisuke Nakamura , Atsuto Okamoto , Naohiro Sugiyama
IPC分类号： C30B3500
CPC分类号： C30B23/00 , C30B23/002 , C30B29/36 , Y10T117/10
摘要： It is the purpose of the present invention to prevent a macroscopic defect in the production of an SiC single crystal. SiC source material powder and an SiC seed crystal are disposed inside a graphite crucible, and the SiC source material powder is thermally sublimated and recrystallized on a front surface of the SiC seed crystal to grow an SiC single crystal. In this sublimation-recrystallization method, a protection layer is provided on a back surface of the SiC seed crystal. The SiC seed crystal is mechanically supported by a supporting part disposed on the graphite crucible without bonding. Thereby, it is possible to improve the thermal maldistribution on the back surface of the SiC seed crystal and possible to suppress damage of the protection layer due to the thermal maldistribution. Thus, macroscopic defects in the grown SiC single crystal are preferably suppressed.
摘要翻译：本发明的目的是防止SiC单晶的生产中的宏观缺陷。将SiC源材料粉末和SiC晶种设置在石墨坩埚内，并且将SiC源材料粉末在SiC晶种的前表面上热升华并重结晶以生长SiC单晶。在该升华重结晶方法中，在SiC晶种的背面设置有保护层。 SiC晶种由不被粘合而设置在石墨坩埚上的支撑部分机械地支撑。由此，可以提高SiC晶种的背面的热分散，并且可以抑制由于热分散而导致的保护层的损伤。因此，优选抑制生长的SiC单晶中的宏观缺陷。

76. 发明授权

US06684278B1 Microcomputer and memory access control method 失效
标题翻译：微电脑和存储器访问控制方法
公开(公告)号：US06684278B1
公开(公告)日：2004-01-27
申请号：US09456507
申请日：1999-12-08
申请人： Mamoru Sakugawa , Hiroyuki Kondo
发明人： Mamoru Sakugawa , Hiroyuki Kondo
IPC分类号： G06F1200
CPC分类号： G06F1/3275 , G06F1/3203 , Y02D10/13 , Y02D10/14
摘要： A microcomputer comprises a CPU, a built-in memory and a memory controller. The memory controller performs access control to the built-in memory in response to a memory access request from the CPU. The microcomputer further comprises a wait count register for storing a waiting period relating to memory access. The memory controller reads the waiting period upon receipt of the memory access request, and then, performs the access control to the built-in memory after a lapse of the waiting period. Low power consumption is achieved by utilizing the access control to the built-in memory without controlling a power source and an oscillator.
摘要翻译：微型计算机包括CPU，内置存储器和存储器控制器。内存控制器响应来自CPU的存储器访问请求，对内置存储器执行访问控制。微型计算机还包括用于存储与存储器访问相关的等待时段的等待计数寄存器。存储器控制器在接收到存储器访问请求时读取等待时间，然后在等待时间段之后对内置存储器执行访问控制。通过利用对内置存储器的访问控制来实现低功耗，而不需要控制电源和振荡器。

77. 发明授权

US06504903B1 Laser-excited plasma light source, exposure apparatus and its making method, and device manufacturing method 有权
标题翻译：激光等离子体光源，曝光装置及其制作方法以及器件制造方法
公开(公告)号：US06504903B1
公开(公告)日：2003-01-07
申请号：US09722817
申请日：2000-11-28
申请人： Hiroyuki Kondo , Noriaki Kandaka
发明人： Hiroyuki Kondo , Noriaki Kandaka
IPC分类号： H01L21027
CPC分类号： B82Y10/00 , G03F7/70033 , G03F7/707 , G03F7/70708 , G03F7/70916 , G03F7/70925
摘要： The end of a nozzle of a laser-excited plasma light source is made of a specific material, such as silicon Si, the transmittance of which to EUV light is higher than those of heavy metals. Therefore, even if the temperature of the end of the nozzle is higher than the melting point of the specific material because of the high temperature of the plasma produced around the focal point, the end of the nozzle is therefore eroded, and sputtered particles of the material adhere to a light-collecting mirror provided near the nozzle, the degradation of the reflectance of the light-collecting mirror is mitigated compared to the transmittance of the sputtered particles (specific material) to EUV light is higher than those of heavy metals.
摘要翻译：激光激发等离子体光源的喷嘴的端部由诸如硅Si的特定材料制成，其对EUV光的透射率高于重金属的透光率。因此，即使由于在焦点周围产生的等离子体的高温，喷嘴的端部的温度高于特定材料的熔点，因此喷嘴的端部被腐蚀，并且溅射的颗粒材料附着在靠近喷嘴的集光反射镜上，与溅射的颗粒（特定材料）对EUV光的透射率相比，聚光镜的反射率的降低比重金属高。

78. 发明授权

US06339634B1 Soft x-ray light source device 有权
标题翻译：软X射线光源装置
公开(公告)号：US06339634B1
公开(公告)日：2002-01-15
申请号：US09409063
申请日：1999-09-30
申请人： Noriaki Kandaka , Hiroyuki Kondo , Soichi Owa , Tomoko Ohtsuki
发明人： Noriaki Kandaka , Hiroyuki Kondo , Soichi Owa , Tomoko Ohtsuki
IPC分类号： H01J3526
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70233 , G21K1/06 , H05G2/008
摘要： A high-pressure krypton gas is supplied to the interior of a vessel from a gas introduction pipe. Light emitted from an optical fiber group formed by bundling together optical fibers constituting the output ends of fiber amplifiers or fiber lasers passes through a lens and exciting laser light introduction window, and is focused on the krypton gas jetting from the tip end of the nozzle. As a result, the krypton gas is excited as a plasma and soft X-rays are generated. The soft X-rays are reflected by a rotating multi-layer coat parabolic mirror and are emitted to the outside as a parallel beam of soft X-rays. Since light from fiber amplifiers is used as exciting light, and since numerous optical fibers are bundled together to form a light source, a large quantity of soft X-rays can easily be obtained.
摘要翻译：高压氪气从气体导入管供给到容器的内部。通过将构成光纤放大器或光纤激光器的输出端的光纤捆扎在一起形成的光纤组发出的光通过透镜和激光激光引入窗口，并且聚焦在从喷嘴的尖端喷射的氪气。结果，氪气被激发为等离子体并产生软X射线。软X射线被旋转的多层外壳抛物面反射镜反射并作为平行的X射线照射到外部。由于来自光纤放大器的光被用作激发光，并且由于许多光纤被捆绑在一起以形成光源，因此可以容易地获得大量的软X射线。

79. 发明授权

US06326617B1 Photoelectron spectroscopy apparatus 有权
标题翻译：光电子能谱仪
公开(公告)号：US06326617B1
公开(公告)日：2001-12-04
申请号：US09145064
申请日：1998-09-01
申请人： Toshihisa Tomie , Hideaki Shimizu , Hiroyuki Kondo , Noriaki Kandaka
发明人： Toshihisa Tomie , Hideaki Shimizu , Hiroyuki Kondo , Noriaki Kandaka
IPC分类号： C01N2300
CPC分类号： G01N23/04
摘要： Photoelectron spectroscopy apparatus are disclosed that comprise a photoelectron detector and that exhibit improved performance of the photoelectron detector and thus more reliable and accurate analysis of photoelectron energy. In performing energy analysis of photoelectrons, the photoelectron detector measures the time distribution at which photoelectrons emitted from a specimen surface traverse a flight tube when the specimen is irradiated with X-rays from a pulse X-ray source. A magnetic field generator is situated near the specimen to collect and collimate photoelectrons emitted from the specimen surface and form a photoelectron flux inside a flight tube. Any one of a deflection electrode, electrostatic lens, magnetic field lens, or electromagnetic lens, or a combination thereof, is placed at the distal end of the flight tube in front of the photoelectron detector to disperse the photoelectron flux and increase the surface area in which the photoelectron flux is incident to the photoelectron-detection surface.
摘要翻译：公开了包含光电子检测器并且显示出光电子检测器的改进性能并且因此更可靠和准确地分析光电子能量的光电子能谱仪。在对光电子进行能量分析时，光电检测器测定从X射线源向X射线照射样本时，从试样表面射出的光电子横穿飞行管的时间分布。磁场发生器位于样品附近，以收集和准直从样品表面发射的光电子，并在飞行管内形成光电子通量。偏转电极，静电透镜，磁场透镜或电磁透镜中的任何一个或其组合放置在光电子检测器前面的飞行管的远端，以分散光电子通量并增加其中的表面积光电子通量入射到光电子检测表面。

80. 发明授权

US5915099A Bus interface unit in a microprocessor for facilitating internal and external memory accesses 失效
标题翻译：微处理器中的总线接口单元，用于便于内部和外部存储器访问
公开(公告)号：US5915099A
公开(公告)日：1999-06-22
申请号：US803858
申请日：1997-02-21
申请人： Yukari Takata , Mitsugu Satou , Hiroyuki Kondo , Katsunori Sawai
发明人： Yukari Takata , Mitsugu Satou , Hiroyuki Kondo , Katsunori Sawai
IPC分类号： G06F13/36 , G06F13/16 , G06F13/40 , G06F15/78 , G06F13/00
CPC分类号： G06F13/1605 , G06F13/4027
摘要： In a microprocesssor (101), a selector (7) is connected to a bus ID through a write buffer (5) and a DRAM (27), a cache (28) and an IQ (8) are also connected to the bus ID . The bus ID and the microprocessor (101) are connected to the external memory (4) and the external bus master (41) with a data bus D through a BIU (3). The microprocessor (101) is also connected to the external memory (4) and the external bus master (41) with an address bus (58) and control bus (57). The BIU (3) controls an access to a memory integrated in the microprocessor (101) and a memory externally connected thereto. With this configuration, the DRAM and the cache can be integrated together in the microprocessor which is externally connected to the bus master.
摘要翻译：在微处理器（101）中，选择器（7）通过写缓冲器（5）和DRAM（27），高速缓存（28）和IQ（8）连接到总线ID <0：127> 连接到总线ID <0：127>。总线ID <0：127>和微处理器（101）通过BIU（3）与数据总线D <0:15>连接到外部存储器（4）和外部总线主机（41）。微处理器（101）也用地址总线（58）和控制总线（57）连接到外部存储器（4）和外部总线主机（41）。 BIU（3）控制对集成在微处理器（101）中的存储器和外部与其连接的存储器的访问。利用这种配置，DRAM和高速缓存可以集成在外部连接到总线主机的微处理器中。

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