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1. 发明申请

US20070158577A1 Method and apparatus for generating laser produced plasma 失效
标题翻译：用于产生激光产生等离子体的方法和装置
公开(公告)号：US20070158577A1
公开(公告)日：2007-07-12
申请号：US10550413
申请日：2004-03-24
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： H01J27/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the environment. In the present invention, radiation is generated from plasma produced by laser irradiation on a material. This material is a cluster of particles that is composed of many fine particles bound together with a binder that vaporizes at temperature lower than melting point of fine particles. Density of particles in a particle-cluster 8 is increased by vaporizing a solvent 7 by heating a droplet 5 with the irradiation of laser 6. Solvent of a droplet occupies large fraction of the droplet in order to stabilize droplet generation. This solvent is vaporized prior to delivery to a vacuum chamber 9 for plasma generation. This vaporization helps to avoid degradation of vacuum of the chamber 9. The diameter of a particle-cluster thus condensed is several tens μm.
摘要翻译：本发明提供了一种在足够高的目标密度的任何周围固体足够远的位置输送固体材料的方法，而不会将碎片散布到环境中。在本发明中，通过激光照射对材料产生的等离子体产生辐射。该材料是由许多细小颗粒组成的颗粒簇，该微粒与粘合剂结合在一起，该粘合剂在低于细颗粒熔点的温度下蒸发。通过用激光6的照射加热液滴5使溶剂7蒸发来增加颗粒簇8中的颗粒的密度。为了稳定液滴产生，液滴的溶剂占据了大部分液滴。该溶剂在输送到用于等离子体产生的真空室9之前蒸发。这种蒸发有助于避免室9的真空降解。如此冷凝的颗粒簇的直径为几十微米。

2. 发明授权

US06954266B2 Method and apparatus for inspecting multilayer masks for defects 有权
标题翻译：检查多层掩模缺陷的方法和装置
公开(公告)号：US06954266B2
公开(公告)日：2005-10-11
申请号：US10263699
申请日：2002-10-04
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： G01N21/956 , G03F1/24 , G03F1/84 , G03F1/86 , H01L21/027 , G01N21/88
CPC分类号： G03F1/84 , G01N21/33 , G01N21/95623 , G01N2021/8822 , G01N2021/95676 , G03F1/24
摘要： A method for inspecting multilayer masks to detect any defects includes illuminating a pixel region on a mask to be inspected, using illuminating light having a peak wavelength that is close to that of light reflected by the mask. The illuminating light specularly reflected by the mask is blocked. Scattered reflected illuminating light is collected and used to form an enlarged image. An image detector having a large plurality of pixels is used to observe the enlarged image to detect whether there are defects on the mask. The method is implemented using an mask inspection apparatus including a plasma light source for generating radiant rays, an illuminating light collecting optical system that collects radiated light from the light source for enlarged image formation illumination of a subject inspection region, a Schwarzschild optical system including convex and concave mirrors for collecting scattered light from the subject inspection region and forming an enlarged image of the inspection region, an image detector having a large plurality of pixels for recording the enlarged image that is obtained, and an analyzer that analyzes the images obtained to determine whether there is a defect.
摘要翻译：用于检查多层掩模以检测任何缺陷的方法包括使用具有接近由掩模反射的光的峰值波长的照明光照射待检查的掩模上的像素区域。被掩模镜面反射的照明光被遮挡。分散的反射照明光被收集并用于形成放大的图像。使用具有大量多个像素的图像检测器来观察放大图像以检测掩模上是否存在缺陷。该方法使用包括用于产生辐射线的等离子体光源的掩模检查装置来实现，收集来自光源的辐射光以用于对象检查区域的放大图像形成照明的照明聚光光学系统，包括凸起的施瓦茨光学系统以及用于收集来自被检查区域的散射光并形成检查区域的放大图像的凹面镜，具有用于记录所获得的放大图像的大量多个像素的图像检测器，以及分析器，其分析所获得的图像以确定是否存在缺陷。

3. 发明授权

US06326617B1 Photoelectron spectroscopy apparatus 有权
标题翻译：光电子能谱仪
公开(公告)号：US06326617B1
公开(公告)日：2001-12-04
申请号：US09145064
申请日：1998-09-01
申请人： Toshihisa Tomie , Hideaki Shimizu , Hiroyuki Kondo , Noriaki Kandaka
发明人： Toshihisa Tomie , Hideaki Shimizu , Hiroyuki Kondo , Noriaki Kandaka
IPC分类号： C01N2300
CPC分类号： G01N23/04
摘要： Photoelectron spectroscopy apparatus are disclosed that comprise a photoelectron detector and that exhibit improved performance of the photoelectron detector and thus more reliable and accurate analysis of photoelectron energy. In performing energy analysis of photoelectrons, the photoelectron detector measures the time distribution at which photoelectrons emitted from a specimen surface traverse a flight tube when the specimen is irradiated with X-rays from a pulse X-ray source. A magnetic field generator is situated near the specimen to collect and collimate photoelectrons emitted from the specimen surface and form a photoelectron flux inside a flight tube. Any one of a deflection electrode, electrostatic lens, magnetic field lens, or electromagnetic lens, or a combination thereof, is placed at the distal end of the flight tube in front of the photoelectron detector to disperse the photoelectron flux and increase the surface area in which the photoelectron flux is incident to the photoelectron-detection surface.
摘要翻译：公开了包含光电子检测器并且显示出光电子检测器的改进性能并且因此更可靠和准确地分析光电子能量的光电子能谱仪。在对光电子进行能量分析时，光电检测器测定从X射线源向X射线照射样本时，从试样表面射出的光电子横穿飞行管的时间分布。磁场发生器位于样品附近，以收集和准直从样品表面发射的光电子，并在飞行管内形成光电子通量。偏转电极，静电透镜，磁场透镜或电磁透镜中的任何一个或其组合放置在光电子检测器前面的飞行管的远端，以分散光电子通量并增加其中的表面积光电子通量入射到光电子检测表面。

4. 发明授权

US5781608A X-ray exposure system 失效
标题翻译： X射线曝光系统
公开(公告)号：US5781608A
公开(公告)日：1998-07-14
申请号：US948241
申请日：1997-10-09
申请人： Toshihisa Tomie , Hideaki Shimizu , Toshikazu Majima
发明人： Toshihisa Tomie , Hideaki Shimizu , Toshikazu Majima
IPC分类号： G21K5/02 , G03F7/20 , G21K7/00 , H01L21/027 , H05G2/00
CPC分类号： G03F7/70808 , H05G2/001
摘要： An x-ray exposure system that reduces the time required to evacuate an internal chamber of a vacuum vessel, uses a low-power laser to produce the plasma that generates the x-rays, and enables the sample to be maintained outside the vacuum vessel. The system includes a detachable cover member that hermetically seals the opening of the vacuum vessel. The cover member includes a through-hole that forms an x-ray irradiation window and is sealed by an x-ray transmission member. In the through-hole, an x-ray generation target is provided that is irradiated by an external laser beam, via a laser beam entry window.
摘要翻译：减少真空容器内腔抽真空的x射线曝光系统，使用低功率激光产生产生X射线的等离子体，并使样品保持在真空容器的外部。该系统包括密封真空容器的开口的可拆卸盖构件。盖构件包括形成x射线照射窗的通孔，并被x射线透射构件密封。在通孔中，通过激光入射窗提供由外部激光束照射的x射线产生目标。

5. 发明授权

US06275565B1 Laser plasma light source and method of generating radiation using the same 失效
标题翻译：激光等离子体光源和使用其产生辐射的方法
公开(公告)号：US06275565B1
公开(公告)日：2001-08-14
申请号：US09700720
申请日：2000-11-28
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： H05G200
CPC分类号： H05G2/001
摘要： A solid target (11) is formed with a cavity (12). The inner wall of the solid target at the cavity is ablated by ablation pulsed laser beams (13). The solid target is left standing until a highly densified portion (15) of a vaporized substance (14) is formed in the space within the cavity (14), and the highly densified portion (15) is then irradiated with heating pulsed laser beams (17), thereby forming high-temperature plasma (18) for generating radiation rays (19). As a result, good-quality radiation rays accompanied by a minimal amount of debris can be generated.
摘要翻译：固体靶（11）形成有空腔（12）。通过消融脉冲激光束（13）消除腔体处的固体靶的内壁。将固体靶留置直到在空腔（14）内的空间中形成蒸发物质（14）的高度致密部分（15），然后用加热的脉冲激光束（15）照射高致密部分（15） 17），从而形成用于产生辐射线（19）的高温等离子体（18）。因此，可以产生伴随有最少量碎片的优质辐射线。

6. 发明授权

US5569916A Electron spectroscopy apparatus 失效
标题翻译：电子光谱仪器
公开(公告)号：US5569916A
公开(公告)日：1996-10-29
申请号：US380694
申请日：1995-01-30
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： G01N23/227 , G21K7/00 , H01J37/00
CPC分类号： G01N23/2273 , G21K7/00 , G01N2223/085 , G01N2223/204
摘要： An electron spectroscopy apparatus in which pulses of EUV of a prescribed wavelength are generated from plasma produced by pulsed laser beam irradiation of a target containing specific elements, the EUV pulses are used to irradiate a specimen, producing an emission of photoelectrons from the specimen, and the time it takes these photoelectrons to pass along a flight channel is measured and analyzed.
摘要翻译：一种电子光谱装置，其中由等离子体产生的规定波长的EUV的脉冲由包含特定元素的靶的脉冲激光束照射产生，EUV脉冲用于照射样品，从样品产生光电子的发射，测量和分析这些光电子沿着飞行通道通过的时间。

7. 发明授权

US5293396A Plasma generating apparatus and method for extreme-ultaviolet laser 失效
标题翻译：用于极紫外激光的等离子体发生装置和方法
公开(公告)号：US5293396A
公开(公告)日：1994-03-08
申请号：US913174
申请日：1992-07-14
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： H01S3/097 , H01S4/00 , H05H1/22 , H05H1/24 , H01S3/30
CPC分类号： G21B1/23 , H01S4/00
摘要： A plasma generating apparatus for an extreme-ultraviolet laser that can generate high temperature plasma at high efficiency, and can form long plasma to be recombined by rapid cooling of the high temperature plasma. A shield plate including a narrow slit is disposed adjacent to a high temperature plasma source, and the high temperature plasma is discharged through the slit. Both high efficiency plasma generation and rapid expansion thereof can be simultaneously achieved by discharging high temperature plasma through the narrow slit. The rapid expansion makes it possible to form a long plasma having a large gain in an extreme-ultraviolet region. The high temperature plasma source can be readily realized by irradiating it with an exciting laser beam from behind the opposite side of the slit with regard to the high temperature plasma source directly or through a transmitting window. A closure provided in front of the slit can prevent a liquid or gas from flowing out of the slit before it is changed into plasma. This makes it possible to use a liquid or gas as a plasma source material.
摘要翻译：一种能够以高效率生成高温等离子体的极紫外激光等离子体发生装置，能够通过高温等离子体的快速冷却而形成长时间的等离子体再结合。包括窄缝的屏蔽板与高温等离子体源相邻设置，高温等离子体通过狭缝排出。高效等离子体产生及其快速膨胀都可以通过将狭缝等离子体放电而同时实现。快速膨胀使得可以在极紫外区域形成具有大增益的长等离子体。高温等离子体源可以通过直接或通过发射窗口相对于高温等离子体源从狭缝的相对侧后面的激光激光束照射而容易地实现。设置在狭缝前面的封闭体可以防止液体或气体在其变为等离子体之前从狭缝流出。这使得可以使用液体或气体作为等离子体源材料。

8. 发明授权

US07576343B2 Method and apparatus for generating laser produced plasma 失效
标题翻译：用于产生激光产生等离子体的方法和装置
公开(公告)号：US07576343B2
公开(公告)日：2009-08-18
申请号：US10550413
申请日：2004-03-24
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the environment. In the present invention, radiation is generated from plasma produced by laser irradiation on a material. This material is a cluster of particles that is composed of many fine particles bound together with a binder that vaporizes at temperature lower than melting point of fine particles. Density of particles in a particle-cluster 8 is increased by vaporizing a solvent 7 by heating a droplet 5 with the irradiation of laser 6. Solvent of a droplet occupies large fraction of the droplet in order to stabilize droplet generation. This solvent is vaporized prior to delivery to a vacuum chamber 9 for plasma generation. This vaporization helps to avoid degradation of vacuum of the chamber 9. The diameter of a particle-cluster thus condensed is several tens μm.
摘要翻译：本发明提供了一种在足够高的目标密度的任何周围固体足够远的位置输送固体材料的方法，而不会将碎片散布到环境中。在本发明中，通过激光照射对材料产生的等离子体产生辐射。该材料是由许多细小颗粒组成的颗粒簇，该微粒与粘合剂结合在一起，该粘合剂在低于细颗粒熔点的温度下蒸发。通过用激光6的照射加热液滴5来蒸发溶剂7来增加颗粒簇8中的颗粒密度。为了稳定液滴产生，液滴的溶剂占据大部分液滴。该溶剂在输送到用于等离子体产生的真空室9之前蒸发。这种蒸发有助于避免室9的真空的降解。这样冷凝的颗粒簇的直径是几十微米。

9. 发明授权

US5684852A X-ray lens 失效
标题翻译： X光透镜
公开(公告)号：US5684852A
公开(公告)日：1997-11-04
申请号：US736680
申请日：1996-10-25
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： G02B3/00 , G21K1/06
CPC分类号： G21K1/06 , G21K2201/06 , G21K2201/067
摘要： An X-ray lens includes a plurality of hollow cylinders of prescribed radius bored in a lens material piece having a phase lag coefficient appropriate for the wavelength of the X-rays to be focused such that the axes of the hollow cylinders are parallel and perpendicularly intersect a straight array axis.
摘要翻译： X射线透镜包括多个在透镜材料片上钻孔的具有规定半径的中空圆柱体，该中空圆柱体具有适于待聚焦的X射线波长的相位滞后系数，使得中空圆柱体的轴线平行并垂直相交直线阵列轴。

10. 发明授权

US5594773A X-ray lens 失效
公开(公告)号：US5594773A
公开(公告)日：1997-01-14
申请号：US389503
申请日：1995-02-16
申请人： Toshihisa Tomie
发明人： Toshihisa Tomie
IPC分类号： G02B3/00 , G21K1/06 , G21K1/00
CPC分类号： G21K1/06 , G21K2201/06 , G21K2201/067
摘要： An X-ray lens includes a plurality of hollow cylinders of prescribed radius bored in a lens material piece having a phase lag coefficient appropriate for the wavelength of the X-rays to be focused such that the axes of the hollow cylinders are parallel and perpendicularly intersect a straight array axis.

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