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    • 73. 发明申请
    • INSPECTION APPARATUS AND INSPECTION METHOD
    • 检查装置和检查方法
    • US20090140180A1
    • 2009-06-04
    • US12272211
    • 2008-11-17
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/9501G01N2021/8896G01N2021/8928
    • Reflected light caused by the state of the surface of a wafer, a foreign material or a defect is superimposed on a haze frequency component caused by the type and thickness of a film or a surface irregularity. It has therefore been difficult to accurately measure the haze frequency component by use of a fixed threshold value. In order to detect a haze frequency component caused by a haze present on the surface of an object to be inspected, light propagating from the object to be inspected is detected and converted into an electric signal. The electric signal is sampled at a predetermined sampling time interval and converted into digital data. A frequency component caused by a foreign material, a defect or the like is separated from the digital data to ensure that a haze frequency component is selected. The haze frequency component is caused by a stain attached to the surface of the wafer, hazy tarnish, a surface irregularity or the like.
    • 由晶片表面的状态,异物或缺陷引​​起的反射光叠加在由膜的类型和厚度或表面不规则性引起的雾度频率分量上。 因此,难以通过使用固定的阈值来精确地测量雾度频率分量。 为了检测由待检查物体的表面上存在的雾度引起的雾度频率分量,检测从被检查物体传播的光,并将其转换为电信号。 以预定的采样时间间隔采样电信号并将其转换为数字数据。 由异物引起的频率分量,缺陷等与数字数据分离,以确保选择雾度频率分量。 雾度频率分量由附着在晶片表面的污迹,模糊晦暗,表面不规则等引起。
    • 75. 发明授权
    • Optical pickup transfer apparatus
    • 光学传送装置
    • US07489603B2
    • 2009-02-10
    • US10594621
    • 2005-03-22
    • Kazuo TakahashiIchiro Sugai
    • Kazuo TakahashiIchiro Sugai
    • G11B7/00
    • G11B7/08582
    • An apparatus including a first engaging portion for holding an optical pickup, a second engaging portion to be engaged with the first engaging portion, a transfer portion for driving the second engaging portion to transfer the first engaging portion in a radial direction, a calculating portion for calculating a backlash value between the first and second engaging portions in a transfer direction of the first engaging portion, and a driving control unit. The driving control unit controls a driving portion to transfer the optical pickup based on a calculated backlash value.
    • 一种装置,包括用于保持光学拾取器的第一接合部分,与第一接合部分接合的第二接合部分,用于驱动第二接合部分以沿径向传递第一接合部分的传送部分,用于 计算第一和第二接合部分之间在第一接合部分的传送方向上的间隙值和驱动控制单元。 驱动控制单元基于计算出的间隙值来控制驱动部分以传送光学拾取器。
    • 80. 发明申请
    • External cavity type semiconductor laser
    • 外腔型半导体激光器
    • US20070064755A1
    • 2007-03-22
    • US10579903
    • 2004-11-30
    • Tomiji TanakaKazuo TakahashiMotonobu Takeya
    • Tomiji TanakaKazuo TakahashiMotonobu Takeya
    • H01S5/00
    • H01S5/141H01S5/02212H01S5/02248H01S5/02296H01S5/02415H01S5/02438H01S5/0655H01S5/2219H01S5/32341
    • An external cavity type semiconductor laser that has a larger output and a more excellent single mode characteristic than a conventional external cavity type semiconductor laser is provided. The external cavity type semiconductor laser has a laser diode 11, a window glass 16, a grating, and a lens. The external cavity type semiconductor laser has several modifications over the conventional one. A first modification is in that the window glass 16 is inclined to a beam emission surface 19 of a laser diode 11 for a predetermined angle. A second modification is in that arrangements of the laser diode 11 and so forth are adjusted so that an S wave reaches the grating. A third modification is in that when an output power of the laser diode 11 is 45 mW or less, a kink is suppressed. The other modifications are in that a reflectance of a beam emission surface of the laser diode 11, a numerical aperture of the lens, an external cavity length, and a reflectance of a first order beam of the grating are optimized to their proper values.
    • 提供具有比常规的外腔型半导体激光器更大的输出和更优异的单模特性的外腔型半导体激光器。 外腔型半导体激光器具有激光二极管11,窗玻璃16,光栅和透镜。 外腔型半导体激光器与常规半导体激光器相比有若干种修改。 第一修改是,窗玻璃16以预定角度倾斜到激光二极管11的光束发射表面19。 第二修改是调整激光二极管11等的布置,使得S波到达光栅。 第三变形例是当激光二极管11的输出功率为45mW以下时,抑制了扭结。 其他修改在于激光二极管11的光束发射表面的反射率,透镜的数值孔径,外部空腔长度和光栅的一阶光束的反射率被优化为其适当的值。