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61. 发明授权

US08069718B2 Thermal flowmeter 有权
标题翻译：热流量计
公开(公告)号：US08069718B2
公开(公告)日：2011-12-06
申请号：US12121520
申请日：2008-05-15
申请人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/699
摘要： A simply configured thermal flowmeter can provide high measurement accuracy over a long period of time by suppressing the characteristics degradation due to adhering contaminants. On the surface of a diaphragm part, a heater resistor is formed. Temperature difference sensors through are disposed on the two sides of the heater resistor (upstream and downstream sides in the flow direction of an air stream). The temperature difference sensors are disposed upstream of the heater resistor while the temperature difference sensors are disposed downstream of the heater resistor. Outside the temperature difference sensors, heating temperature sensors are formed. Control is performed so that the temperature of the heating temperature sensors is set higher than the air stream temperature by a certain degree. Therefore, even if contaminants adhere to the sensor device, the temperature of the heating temperature sensors is held constant. Since the temperature difference sensors to detect the flow rate is located between the heating temperature sensors, the temperature change due to the contamination is small. This suppresses the characteristics degradation, making it possible to provide high measurement accuracy over a long period of time.
摘要翻译：简单配置的热流量计可以通过抑制由于污染物附着引起的特性劣化，从而在长时间内提供高测量精度。在隔膜部件的表面上形成加热电阻器。温差传感器通孔设置在加热电阻器的两侧（气流的流动方向的上游侧和下游侧）。温度差传感器设置在加热电阻器的上游，而温差传感器设置在加热电阻器的下游。在温差传感器之外，形成加热温度传感器。进行控制，使得加热温度传感器的温度被设定为高于气流温度一定程度。因此，即使污染物粘附到传感器装置上，加热温度传感器的温度也保持恒定。由于用于检测流量的温差传感器位于加热温度传感器之间，因污染导致的温度变化小。这抑制了特性劣化，从而可以在长时间内提供高测量精度。

62. 发明申请

US20110048127A1 Thermal Humidity Sensor 有权
标题翻译：热湿度传感器
公开(公告)号：US20110048127A1
公开(公告)日：2011-03-03
申请号：US12855347
申请日：2010-08-12
申请人： Masahiro MATSUMOTO , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
发明人： Masahiro MATSUMOTO , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
IPC分类号： G01N19/10 , G01F1/692
CPC分类号： G01N27/18
摘要： Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.
摘要翻译：提供了一种高精度，机械坚固的热湿度传感器。本发明的热湿度传感器的检测元件1具有形成在由诸如硅或陶瓷等导热性高的材料形成的平面基板上的隔膜（桥结构）2。形成在隔膜2上的是温度检测电阻4,5,6和7以及围绕温度检测电阻器布置的加热电阻3。基于温度检测电阻4,5,6和7的输出检测湿度。因此，可以减少由于通过隔膜2的热量泄漏到平面基板而可能发生的湿度测量误差。

63. 发明申请

US20100218614A1 Measurement Element 有权
标题翻译：测量元件
公开(公告)号：US20100218614A1
公开(公告)日：2010-09-02
申请号：US12707438
申请日：2010-02-17
申请人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01L9/02
CPC分类号： G01N27/18 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01P5/10
摘要： An object of the present invention is to provide a structure unlikely to break in the dicing process while allowing easy execution of screening, for a measurement element in which a resistor constituting a heater is formed on a thin wall part thermally insulated from a semiconductor substrate by providing a cavity part formed in the semiconductor substrate.Provided is a measurement element including: a semiconductor substrate; an electrical insulating film formed on the semiconductor substrate; a resistor formed on the electrical insulating film, the resistor constituting a heater; and a cavity formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof. The measurement element has a film formed covering a region of the opening or the slit.
摘要翻译：本发明的目的是提供一种在切割过程中不易破裂的结构，同时允许轻松执行筛选，对于其中构成加热器的电阻器形成在与半导体衬底热绝缘的薄壁部分上的测量元件提供形成在半导体衬底中的空腔部分。提供了一种测量元件，包括：半导体衬底; 形成在所述半导体基板上的电绝缘膜; 形成在所述电绝缘膜上的电阻器，所述电阻器构成加热器; 以及通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分而形成的腔。形成电阻器的主体部分的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成任何开口和狭缝以穿透薄壁部分在其厚度方向上。测量元件具有覆盖开口或狭缝的区域的膜。

64. 发明授权

US07656624B2 IC power protection circuit 失效
标题翻译： IC电源保护电路
公开(公告)号：US07656624B2
公开(公告)日：2010-02-02
申请号：US11656994
申请日：2007-01-24
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Ryo Sato
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Ryo Sato
IPC分类号： H02H7/00
CPC分类号： H02H9/046 , H01L27/0248 , H02H11/002
摘要： An IC power protection circuit functions as a surge protection circuit and reverse connection protection circuit. The IC power protection circuit includes an error amplification circuit, positioned and integrated within an integrated circuit and a transistor positioned as a stand-alone element that is separate from the integrated circuit. The integrated circuit includes a sensor signal processing circuit that processes a signal of a sensor. A transistor protects the integrated circuit against a surge voltage from a battery terminal. A resistor is positioned between an output terminal of an error amplifier and a base terminal of the transistor to provide reverse connection protection. Another resistor is connected between a ground and a connection point between the above resistor and the output terminal to provide overvoltage protection for the integrated circuit. A starting resistor is connected between a collector and base of the transistor.
摘要翻译： IC电源保护电路用作浪涌保护电路和反向连接保护电路。 IC电源保护电路包括位于并集成在集成电路内的误差放大电路和定位为与集成电路分离的独立元件的晶体管。集成电路包括处理传感器的信号的传感器信号处理电路。晶体管保护集成电路免受来自电池端子的浪涌电压的影响。电阻器位于误差放大器的输出端子和晶体管的基极端子之间，以提供反向连接保护。另一个电阻连接在上述电阻和输出端之间的接地点和连接点之间，为集成电路提供过压保护。启动电阻连接在晶体管的集电极和基极之间。

65. 发明授权

US07631555B2 Thermal flowmeter for measuring a flow rate of fluid 有权
标题翻译：用于测量流体流量的热流量计
公开(公告)号：US07631555B2
公开(公告)日：2009-12-15
申请号：US10580112
申请日：2003-11-20
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6845
摘要： A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter includes a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and a heating temperature control disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.
摘要翻译：具有优异的温度特性和改进的测量精度的热空气流量计。热空气流量计包括设置在空气流量计的壳体中的温度传感器，用于使用温度传感器校正来自测量元件的流量检测电压的计算单元，以及设置在温度控制电路中的加热温度控制，用于执行加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差，并且可以实现具有优异的测量精度的热空气流量计。

66. 发明授权

US07617723B2 Thermal type flow rate measuring apparatus having decrease in coupling capacitance between wiring portions of detection element 有权
标题翻译：热式流量测量装置，其检测元件的布线部分之间的耦合电容降低
公开(公告)号：US07617723B2
公开(公告)日：2009-11-17
申请号：US11765736
申请日：2007-06-20
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Yasuhiro Kanamaru
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Yasuhiro Kanamaru
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/6986
摘要： The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.
摘要翻译：热式流量测量装置的布线部分的耦合电容减小，以防止响应特性的下降。热式流量测量装置的检测元件包括其中形成有隔膜的由硅，陶瓷等制成的平面基板。在隔膜的表面上设置有发热电阻器作为发热元件，其被加热到与要测量的空气流的温度的预定温度差，用于检测的发热元件温度检测电阻器发热电阻器的温度和设置在发热电阻器两侧的温度检测电阻器。检测元件还包括具有与发热电阻器电连接的连接端子的布线部分和与平面基板的表面电连接的布线图案。

67. 发明申请

US20050091428A1 Serial data transferring apparatus 有权
标题翻译：串行数据传输设备
公开(公告)号：US20050091428A1
公开(公告)日：2005-04-28
申请号：US10491285
申请日：2001-10-02
申请人： Masahiro Matsumoto , Fumio Murabayashi , Hiromichi Yamada , Keiji Hanzawa , Hiroyasu Sukesako
发明人： Masahiro Matsumoto , Fumio Murabayashi , Hiromichi Yamada , Keiji Hanzawa , Hiroyasu Sukesako
IPC分类号： H04L7/02 , H04L7/04 , H04L7/06 , H04L7/10 , G06F3/00
CPC分类号： H04L7/10 , H04J3/24 , H04J7/00 , H04L7/046 , H04L7/06
摘要： A master unit sends a start signal to a slave unit. When receiving the start signal from the master unit, the slave unit sends, to the master unit, a synchronization field that is a data train (pulse signal) indicative of a transfer clock with which the slave unit is able to perform transferring and receiving operations. The master unit sends, to the slave unit, command data in accordance with the transfer clock indicated by the synchronization field sent from the slave unit. In response to the command data sent from the master unit, the slave unit sends, to the master unit, response data in accordance with the transfer clock indicated by the synchronization field. Thus, in a communication system employing a serial data transferring apparatus of the present invention, the master unit establishes the synchronization for the data transfer, while the slave unit is free from a burden of establishing the synchronization for the data transfer. A serial data transferring apparatus is realized which can simplify the structure of the slave unit, cut the total cost, and reduce noise.
摘要翻译：主单元向从单元发送启动信号。当从主单元接收到起始信号时，从单元向主单元发送同步字段，该同步字段是指示从单元能够执行传送和接收操作的传送时钟的数据串（脉冲信号）。主单元根据从从单元发送的同步字段指示的传送时钟向从属单元发送命令数据。响应于从主单元发送的命令数据，从单元根据由同步字段指示的传送时钟向主单元发送响应数据。因此，在采用本发明的串行数据传送装置的通信系统中，主单元建立用于数据传送的同步，而从单元没有建立用于数据传送的同步的负担。实现了串行数据传送装置，其可以简化从单元的结构，降低总成本并降低噪声。

68. 发明授权

US06631645B1 Semiconductor pressure sensor utilizing capacitance change 失效
标题翻译：半导体压力传感器利用电容变化
公开(公告)号：US06631645B1
公开(公告)日：2003-10-14
申请号：US09653165
申请日：2000-09-01
申请人： Shinya Satou , Keiji Hanzawa , Satoshi Shimada , Naohiro Monma , Atsushi Miyazaki
发明人： Shinya Satou , Keiji Hanzawa , Satoshi Shimada , Naohiro Monma , Atsushi Miyazaki
IPC分类号： G01L912
CPC分类号： G01L9/0073 , G01L9/125
摘要： An S/N ratio of an output of a semiconductor pressure sensor is improved, the sensor being of an electrostatic capacitance type pressure sensor for generating an output based upon a ratio between capacitances of a pressure sensitive capacitance element and a reference capacitance element. This semiconductor pressure sensor has: a pressure sensitive capacitance element having an electrostatic capacitance Cs changing with a pressure to be detected; a reference capacitance element having an electrostatic capacitance Cr not changing with the pressure; and a unit for detecting the pressure by outputting a signal corresponding to a ratio between the capacitances Cs and Cr, wherein an initial value Cr0 of the capacitance Cr and an initial value Cs0 of the capacitance Cs are defined by 1.2
摘要翻译：提高半导体压力传感器的输出的S / N比，该传感器是用于根据压敏电容元件的电容与参考电容元件之间的比率产生输出的静电电容式压力传感器。该半导体压力传感器具有：静电电容Cs随着要检测的压力而变化的压敏电容元件; 具有不随压力变化的静电电容Cr的参考电容元件; 以及用于通过输出对应于电容Cs和Cr之间的比率的信号来检测压力的单元，其中电容Cr的初始值Cr 0 和初始值Cs 电容Cs的 0 由1.2 0 / Cs 0 <1.8。通过改变两个元件的电极面积等来调节CR 0 / Cs 0 的比例。以这种方式，可以获得较大的压力表输出DeltaV，降低放大器的放大系数，并提供传感器的高精度。

69. 发明授权

US06188340B1 Sensor adjusting circuit 有权
标题翻译：传感器调节电路
公开(公告)号：US06188340B1
公开(公告)日：2001-02-13
申请号：US09167984
申请日：1998-10-08
申请人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
发明人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
IPC分类号： H03M100
CPC分类号： G01D3/022 , G01D3/02
摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.
摘要翻译：提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

70. 发明授权

US06167761A Capacitance type pressure sensor with capacitive elements actuated by a diaphragm 失效
标题翻译：电容型压力传感器，其电容元件由隔膜驱动
公开(公告)号：US06167761A
公开(公告)日：2001-01-02
申请号：US09103612
申请日：1998-06-24
申请人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
发明人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
IPC分类号： G01L912
CPC分类号： G01L9/0073
摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.
摘要翻译：在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变薄膜和可动电极。固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

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