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1. 发明申请

US20110072897A1 Heating Resistance Type Air Flow Rate Measuring Device 审中-公开
标题翻译：加热电阻型空气流量测量装置
公开(公告)号：US20110072897A1
公开(公告)日：2011-03-31
申请号：US12829105
申请日：2010-07-01
申请人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa , Yasuo Onose
发明人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa , Yasuo Onose
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6845 , G01F15/006 , G01F15/12
摘要： A temperature of the heating resistor is set at a temperature equal to or higher than a temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Alternatively, when a heating resistance type air flow rate measuring device starts to operate or stops operating, the temperature of the heating resistor may be set at a temperature equal to or higher than the temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Moreover, a water-repellent and oil-repellent protective coating may be provided on the surface of the heating resistor.
摘要翻译：加热电阻器的温度被设定为等于或高于与加热电阻器的表面接触的液滴蒸发并通过薄膜沸腾而消失的温度。或者，当加热电阻型空气流量测量装置开始运行或停止运行时，加热电阻器的温度可以设定在等于或高于液滴接触加热电阻器的表面的温度通过薄膜沸腾蒸发并消失。此外，可以在加热电阻器的表面上设置防水和防油涂层。

2. 发明申请

US20100218614A1 Measurement Element 有权
标题翻译：测量元件
公开(公告)号：US20100218614A1
公开(公告)日：2010-09-02
申请号：US12707438
申请日：2010-02-17
申请人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01L9/02
CPC分类号： G01N27/18 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01P5/10
摘要： An object of the present invention is to provide a structure unlikely to break in the dicing process while allowing easy execution of screening, for a measurement element in which a resistor constituting a heater is formed on a thin wall part thermally insulated from a semiconductor substrate by providing a cavity part formed in the semiconductor substrate.Provided is a measurement element including: a semiconductor substrate; an electrical insulating film formed on the semiconductor substrate; a resistor formed on the electrical insulating film, the resistor constituting a heater; and a cavity formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof. The measurement element has a film formed covering a region of the opening or the slit.
摘要翻译：本发明的目的是提供一种在切割过程中不易破裂的结构，同时允许轻松执行筛选，对于其中构成加热器的电阻器形成在与半导体衬底热绝缘的薄壁部分上的测量元件提供形成在半导体衬底中的空腔部分。提供了一种测量元件，包括：半导体衬底; 形成在所述半导体基板上的电绝缘膜; 形成在所述电绝缘膜上的电阻器，所述电阻器构成加热器; 以及通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分而形成的腔。形成电阻器的主体部分的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成任何开口和狭缝以穿透薄壁部分在其厚度方向上。测量元件具有覆盖开口或狭缝的区域的膜。

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