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61. 发明授权

US06616759B2 Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor 有权
标题翻译：监控和/或控制半导体制造装置的方法及其系统
公开(公告)号：US06616759B2
公开(公告)日：2003-09-09
申请号：US09946732
申请日：2001-09-06
申请人： Junichi Tanaka , Hiroyuki Kitsunai , Akira Kagoshima , Daisuke Shiraishi , Hideyuki Yamamato , Shoji Ikuhara , Toshio Masuda
发明人： Junichi Tanaka , Hiroyuki Kitsunai , Akira Kagoshima , Daisuke Shiraishi , Hideyuki Yamamato , Shoji Ikuhara , Toshio Masuda
IPC分类号： B05C1302
CPC分类号： H01L22/20 , G05B13/048 , G05B19/41865 , G05B23/024 , G05B2219/31357 , G05B2219/32058 , H01L21/67276 , H01L2924/0002 , Y02P90/12 , Y02P90/14 , Y02P90/18 , Y02P90/20 , H01L2924/00
摘要： A method and system are provided for controlling and/or monitoring a semiconductor processing apparatus while predicting its processing results. The system includes a sensor for monitoring a processing state of the processing apparatus, a sensed data storage unit for preserving sensed data sent from the sensor, an input device for inputting measured values for processing results of semiconductor devices processed by the processing apparatus, a processing result measured value storage unit for preserving the inputted processing result measured values, a model equation generation unit for generating a model equation from preserved sensed data and processing result measured values, a model equation storage unit for preserving the generated model equation, a model equation based prediction unit for predicting processing results from the preserved model equation and the sensed data, and a process recipe control unit for controlling processing conditions of the processing apparatus from predicted processing results.
摘要翻译：提供一种用于在预测其处理结果的同时控制和/或监视半导体处理装置的方法和系统。该系统包括用于监视处理装置的处理状态的传感器，用于保存从传感器发送的感测数据的感测数据存储单元，用于输入用于处理由处理装置处理的半导体装置的处理结果的测量值的输入装置，结果测量值存储单元，用于保存输入的处理结果测量值;模型方程生成单元，用于从保存的感测数据和处理结果测量值生成模型方程;模型方程式存储单元，用于保存生成的模型方程;基于模型方程预测单元，用于从保存的模型方程和感测数据预测处理结果;以及处理配方控制单元，用于根据预测的处理结果控制处理装置的处理条件。

62. 发明授权

US06171438B2 Plasma processing apparatus and plasma processing method 失效
标题翻译：等离子体处理装置和等离子体处理方法
公开(公告)号：US06171438B2
公开(公告)日：2001-01-09
申请号：US09227332
申请日：1999-01-08
申请人： Toshio Masuda , Kazue Takahashi , Mitsuru Suehiro , Tetsunori Kaji , Saburo Kanai
发明人： Toshio Masuda , Kazue Takahashi , Mitsuru Suehiro , Tetsunori Kaji , Saburo Kanai
IPC分类号： C23C1600
CPC分类号： H01J37/32504 , H01J37/32522 , H01J2237/022 , H01L21/3065 , H01L21/67069 , H01L21/67109 , H01L21/6831
摘要： A plasma etching apparatus including a vacuum processing chamber, a plasma generation device, a processing gas supply for supplying processing gas to the processing chamber, an electrode for holding a sample to be processed in the vacuum processing chamber, and an evacuation system for reducing the pressure of the vacuum processing chamber. The processing gas includes at least one kind of gas having a composition for forming a polymerized film by plasma discharge, wherein the processing gas is made plasmatic by plasma discharge in the processing chamber. At least one surface of an inner wall surface of the processing chamber in contact with plasma in the processing chamber and a surface of an internal component part is controlled to a predetermined temperature which is lower than the temperature of the sample to be processed and a strong polymerized film is formed on the inner wall surface of the processing chamber.
摘要翻译：一种等离子体蚀刻装置，包括真空处理室，等离子体产生装置，用于向处理室供应处理气体的处理气体供应源，用于保持真空处理室中待处理样品的电极和用于减少处理气体的排气系统真空处理室的压力。处理气体包括至少一种具有通过等离子体放电形成聚合膜的组成的气体，其中处理气体通过在处理室中的等离子体放电而制成。与处理室中的等离子体接触的处理室的内壁表面的至少一个表面和内部部件的表面被控制到比待处理样品的温度低的预定温度，并且强聚合膜形成在处理室的内壁表面上。

63. 发明授权

US5893978A Purifying method and purification system for lakes and marshes 失效
标题翻译：湖泊和沼泽净化方法及净化系统
公开(公告)号：US5893978A
公开(公告)日：1999-04-13
申请号：US794902
申请日：1997-02-04
申请人： Hiroaki Yoda , Shiro Nakadaira , Toshio Masuda , Takashi Mizumori , Koichi Tsuzuki
发明人： Hiroaki Yoda , Shiro Nakadaira , Toshio Masuda , Takashi Mizumori , Koichi Tsuzuki
IPC分类号： E02B3/00 , C02F3/08 , C02F7/00 , E02B15/10 , E02B15/04
CPC分类号： C02F7/00 , Y02W10/15 , Y02W10/33 , Y02W10/37
摘要： A purification system is provided for purifying the water of eutrophic lakes and marshes by partitioning the target lake/marsh to form a specified water treating area therein. For this purpose, a partitioning structure is provided for enclosing and partitioning the whole or part of an area around the mouth of each river flowing into the target eutrophic lake/marsh in the direction of depth to form a water treating water area; and a purifier for taking in water from the water treating area operates to separate and remove pollutants from the water, and then discharges treated water outside the water treating area.
摘要翻译：提供净化系统，用于通过划分目标湖/沼泽来在其中形成指定的水处理区域来净化富营养化湖泊和沼泽的水。为此，提供一种分隔结构，用于围绕并划分沿着深度方向流入目标富营养化湖/沼泽的每条河流的口部的整个或部分区域，以形成水处理水区域; 用于从水处理区吸入水的净化器用于分离和去除水中的污染物，然后将处理水排出水处理区域外。

64. 发明授权

US5533324A Method for loading liquids into containers made of resins 失效
标题翻译：将液体装入由树脂制成的容器中的方法
公开(公告)号：US5533324A
公开(公告)日：1996-07-09
申请号：US126656
申请日：1993-09-27
申请人： Masahiko Furukawa , Toshio Masuda , Toru Kenmotsu
发明人： Masahiko Furukawa , Toshio Masuda , Toru Kenmotsu
IPC分类号： B65B3/18 , B65B3/04 , B65B7/00 , B65B7/02 , B65B1/04 , B65B35/56
CPC分类号： B65B3/04
摘要： A method for loading a liquid into a container made of a resin comprises the steps of holding a portion of a bag, which is made of a resin film and which is provided with an opening, the portion surrounding the opening, and thereby suspending the bag in a case housing, which is to accommodate the bag therein. A predetermined amount of a liquid is poured through the opening into the bag, which is being suspended in the case housing, and thereafter the opening is closed. After the liquid has been poured into the bag, but before the opening is closed, the case housing is moved up, and the bag is thereby pushed up a predetermined distance, an appropriate amount of air being thus introduced into the bag having been loaded with the liquid. Worsening of the orientation or form of the bag and scratching or flawing of the bag are thus prevented from occurring due to vibrations given to the bag during its transportation, or the like.
摘要翻译：将液体装载到由树脂制成的容器中的方法包括以下步骤：保持由树脂膜制成并且设置有开口的袋的一部分，围绕开口的部分，从而悬挂袋在其中容纳袋子的壳体壳体中。将预定量的液体通过开口倒入被悬挂在壳体中的袋中，然后关闭开口。在液体已经倒入袋子之后，但是在开口关闭之前，壳体的壳体向上移动，并且袋子被推上预定的距离，因此将适量的空气引入到已经装入袋子的袋子中液体。因此，防止袋子的取向或形式的恶化以及袋子的划伤或瑕疵由于在运输过程中给予袋的振动等而被发生。

65. 发明授权

US5482533A Method for manufacturing foam aluminum product and product 失效
标题翻译：泡沫铝产品和产品的制造方法
公开(公告)号：US5482533A
公开(公告)日：1996-01-09
申请号：US202366
申请日：1994-02-25
申请人： Toshio Masuda , Shigemi Kanbayashi
发明人： Toshio Masuda , Shigemi Kanbayashi
IPC分类号： B22D27/00
CPC分类号： B22D27/00 , Y10T29/49798 , Y10T29/49988 , Y10T29/49989 , Y10T428/12479
摘要： A method is disclosed for forming a foamed aluminum article. A foaming vessel is used including a peripheral wall and a plurality of vertical rod members to form mounting holes at given positions in the vicinity of the inside surface of the peripheral wall. The melt of aluminum or its alloy is stirred with a viscosity increaser and a foaming material. The solidified aluminum block is then sliced to a given thickness to obtain a product of foamed aluminum having mounting holes in given positions in the vicinity of the outer edge thereof. A hard portion around the holes is used as the surface site for mounting the product. The products are used for sound and heat insulation.
摘要翻译：公开了一种用于形成泡沫铝制品的方法。使用发泡容器，其包括周壁和多个垂直杆构件，以在周壁的内表面附近的给定位置处形成安装孔。铝或其合金的熔体与增粘剂和发泡材料一起搅拌。然后将固化的铝块切片至给定的厚度，以获得具有在其外边缘附近的给定位置的安装孔的发泡铝的产品。孔周围的硬质部分用作安装产品的表面部位。产品用于隔音和隔音。

66. 发明授权

US5174805A Organic neutral liquid fertilizer and process for preparing the same 失效
标题翻译：有机中性液体肥料及其制备方法
公开(公告)号：US5174805A
公开(公告)日：1992-12-29
申请号：US651661
申请日：1991-02-06
申请人： Toshio Masuda
发明人： Toshio Masuda
IPC分类号： C05B11/10 , C05F11/00 , C05F11/10 , C05G3/00 , C05G5/00
CPC分类号： C05G3/0064 , C05B11/10 , C05F11/00 , C05F11/10 , Y10S71/02
摘要： The present invention provides a neutral liquid fertilizer comprising as essential ingredients nitrogenous, phosphatic and potash fertilizers and an organic acid, and a thickener, and also provides a process for preparing the same.
摘要翻译：本发明提供一种中性液体肥料，其包含作为必需成分的含氮，磷酸盐和钾肥和有机酸，以及增稠剂，并且还提供其制备方法。

67. 发明授权

US4591440A Membranes for liquid separations 失效
标题翻译：液体分离膜
公开(公告)号：US4591440A
公开(公告)日：1986-05-27
申请号：US656607
申请日：1984-10-01
申请人： Toshinobu Higashimura , Toshio Masuda
发明人： Toshinobu Higashimura , Toshio Masuda
IPC分类号： C08F38/00 , B01D71/26 , B01D71/44 , B01D71/70 , C08F138/00 , D01F6/00 , D01F6/26 , B01D13/00
CPC分类号： B01D61/362 , B01D71/44
摘要： Provided is a membrane for liquid separation which comprises mainly poly(substituted acetylene) having a repeating unit represented by the following formula: ##STR1## wherein R.sub.1 represents a hydrogen atom or a methyl group, and R.sub.2 represents an alkyl group having from 1 to 3 carbon atoms.
摘要翻译：本发明提供一种液体分离用膜，主要由具有下述式表示的重复单元的聚（取代乙炔）组成：其中，R 1表示氢原子或甲基，R 2表示1〜3的烷基碳原子。

68. 发明授权

US08108084B2 Vehicle display device 有权
标题翻译：车载显示装置
公开(公告)号：US08108084B2
公开(公告)日：2012-01-31
申请号：US11783275
申请日：2007-04-06
申请人： Toshio Masuda , Kenichi Yamamoto , Kenji Hijikata , Satoshi Satomura , Hiroshi Oishi , Toyohide Sunaguchi , Yoshio Iwakami , Munenori Homma , Atsushi Atake , Kouji Kaneda , Tatsuru Fukuda , Minoru Yuki , Masayuki Ushiki , Tsuyoshi Kobayashi , Masahito Motoi , Naoki Shibata , Hiroshi Ogiwara , Katsumasa Igarashi , Junzo Shinozuka , Akihisa Nakamura
发明人： Toshio Masuda , Kenichi Yamamoto , Kenji Hijikata , Satoshi Satomura , Hiroshi Oishi , Toyohide Sunaguchi , Yoshio Iwakami , Munenori Homma , Atsushi Atake , Kouji Kaneda , Tatsuru Fukuda , Minoru Yuki , Masayuki Ushiki , Tsuyoshi Kobayashi , Masahito Motoi , Naoki Shibata , Hiroshi Ogiwara , Katsumasa Igarashi , Junzo Shinozuka , Akihisa Nakamura
IPC分类号： G06F19/00
CPC分类号： G01D7/08 , G01D1/18 , G01D7/12 , G07C5/0825 , G07C5/0841
摘要： The present invention provides a vehicle display device which allows a driver to instantaneously grasp driving force information. A meter_ECU displays a driving force display image which displays driving force information of a vehicle on an MID, displays an acceleration-torque line (driving force characteristic line) L corresponding to the currently selected mode M and, at the same time, changes a power level which is indicated in a power display region P set within the acceleration-torque line L interlockingly with an accelerator operation of a driver. Due to such a constitution, the vehicle display device allows the driver to instantaneously grasp the driving force information.
摘要翻译：本发明提供一种车辆显示装置，其允许驾驶员即时掌握驱动力信息。米_ECU显示在MID上显示车辆的驱动力信息的驱动力显示图像，显示与当前选择的模式M对应的加速度 - 转矩线（驱动力特性线）L，并且同时改变功率在加速扭矩线L内设置的功率显示区域P中指示的电平与驾驶员的加速器操作互锁。由于这样的构成，车辆用显示装置能够使驾驶员立即掌握驱动力信息。

69. 发明授权

US07742865B2 Driving force control unit for a vehicle 有权
标题翻译：用于车辆的驱动力控制单元
公开(公告)号：US07742865B2
公开(公告)日：2010-06-22
申请号：US11783267
申请日：2007-04-06
申请人： Toshio Masuda , Kenichi Yamamoto , Kenji Hijikata , Satoshi Satomura , Hiroshi Oishi , Toyohide Sunaguchi , Yoshio Iwakami , Munenori Homma , Atsushi Atake , Kouji Kaneda , Tatsuru Fukuda , Minoru Yuki , Masayuki Ushiki , Tsuyoshi Kobayashi , Masahito Motoi , Naoki Shibata , Hiroshi Ogiwara , Katsumasa Igarashi , Junzo Shinozuka , Akihisa Nakamura
发明人： Toshio Masuda , Kenichi Yamamoto , Kenji Hijikata , Satoshi Satomura , Hiroshi Oishi , Toyohide Sunaguchi , Yoshio Iwakami , Munenori Homma , Atsushi Atake , Kouji Kaneda , Tatsuru Fukuda , Minoru Yuki , Masayuki Ushiki , Tsuyoshi Kobayashi , Masahito Motoi , Naoki Shibata , Hiroshi Ogiwara , Katsumasa Igarashi , Junzo Shinozuka , Akihisa Nakamura
IPC分类号： G06F19/00
CPC分类号： F02D11/105 , B60W30/18036 , B60W2510/0638 , B60W2510/0676 , B60W2540/10 , B60W2540/16 , Y10T477/30 , Y10T477/33 , Y10T477/60 , Y10T477/675 , Y10T477/688
摘要： The driving force control unit comprises a plurality of control modes for controlling a driving force, each of control modes having each driving force characteristic; a vehicle driving condition detecting unit for detecting a vehicle driving condition; a selector for selecting one control mode from the plurality of control modes; a driving force setting unit for setting a driving force indication value according to the driving force characteristic selected by the selector based on the vehicle driving condition; and a shift lever position detector for detecting a shift lever position of a transmission. The control mode includes a reverse control mode having a reverse driving force characteristic suitable for traveling the vehicle in reverse direction. The driving force setting unit changes the control mode to the reverse control mode when the shift lever is detected in a position of a reverse range, and sets the driving force indication value according to the reverse driving force characteristic.
摘要翻译：驱动力控制单元包括用于控制驱动力的多个控制模式，每个控制模式具有每个驱动力特性; 用于检测车辆驾驶状况的车辆驾驶状况检测单元; 选择器，用于从所述多个控制模式中选择一个控制模式; 驱动力设定单元，用于根据由所述选择器根据所述车辆驾驶状况选择的驱动力特性来设定驱动力指示值; 以及用于检测变速器的变速杆位置的变速杆位置检测器。控制模式包括具有适于在相反方向上行驶车辆的反向驱动力特性的反向控制模式。当在反向范围的位置检测到变速杆时，驱动力设定单元将控制模式改变为反向控制模式，并且根据反向驱动力特性来设定驱动力指示值。

70. 发明授权

US07601240B2 Disturbance-free, recipe-controlled plasma processing system and method 有权
标题翻译：无干扰，配方控制等离子体处理系统和方法
公开(公告)号：US07601240B2
公开(公告)日：2009-10-13
申请号：US11346298
申请日：2006-02-03
申请人： Akira Kagoshima , Hideyuki Yamamoto , Shoji Ikuhara , Toshio Masuda , Hiroyuki Kitsunai , Junichi Tanaka , Natsuyo Morioka , Kenji Tamaki
发明人： Akira Kagoshima , Hideyuki Yamamoto , Shoji Ikuhara , Toshio Masuda , Hiroyuki Kitsunai , Junichi Tanaka , Natsuyo Morioka , Kenji Tamaki
IPC分类号： H01L21/00 , C23C16/00 , C23C14/00
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/45031 , H01J37/32935 , H01L22/26 , Y02P90/20 , Y02P90/22
摘要： A plasma processing system includes a first unit for plasma-processing a sample based on a recipe for plasma processing, and a second unit for modifying the recipe in accordance with a monitored value obtained during the plasma processing of the sample in the first unit. A next sample is plasma processed in the first unit based on the modified recipe.
摘要翻译：等离子体处理系统包括：基于等离子体处理的配方对样品进行等离子体处理的第一单元;以及用于根据在第一单元中的样品的等离子体处理期间获得的监视值修改配方的第二单元。基于改进的配方，下一个样品在第一单元中进行等离子体处理。

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