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    • 63. 发明授权
    • Liquid level detecting and warning device
    • 液位检测和报警装置
    • US4305285A
    • 1981-12-15
    • US154860
    • 1980-05-30
    • Hitoshi KubotaHironori KutsumaToshiyuki Takahashi
    • Hitoshi KubotaHironori KutsumaToshiyuki Takahashi
    • G01F23/62B60T17/22G01F23/74H01H36/02G01F23/12H01H35/18
    • G01F23/74B60T17/225H01H36/02
    • A liquid level detecting and warning device of the kind including a tubular member having a mounting portion fitted on an opening of a reservoir and a float guiding portion downwardly extending from the mounting portion, a float having a magnet and slidably fitted around the float guiding portion, a reed switch disposed within the float guiding portion, terminals connected to the reed switch through lead wires, and a cover member covering the opening of the reservoir and the mounting portion of the tubular member. The tubular member is formed to have at least two projection radially outwardly projecting from the upper end portion thereof. The cover member is formed to have an upper cover portion provided with a terminal retaining portion locating and retaining the upper sides of the terminals and a radial recess for receiving therein one radial projection formed on the upper end of the mounting portion, and a lower cover portion connected to the upper cover portion and provided with a terminal retaining portion supporting the lower sides of the terminals and a radial projecting portion cooperating with the upper cover portion to clamp therebetween the other radial projection formed on the upper end of the mounting portion.
    • 一种液面检测和警告装置,包括:管状构件,其具有安装在储存器的开口上的安装部分和从安装部分向下延伸的浮子引导部分,浮子,其具有磁体并可滑动地装配在浮子引导部分周围 设置在浮子引导部分内的舌簧开关,通过引线连接到舌簧开关的端子,以及覆盖储存器的开口和管状构件的安装部分的盖构件。 管状构件形成为具有从其上端部径向向外突出的至少两个突起。 盖构件形成为具有设置有端子保持部的上盖部,该端盖保持部定位并保持端子的上侧,并且具有径向凹部,用于容纳形成在安装部的上端上的一个径向突起,以及下盖 连接到上盖部分并且设置有支撑端子的下侧的端子保持部分和与上盖部分配合的径向突出部分,以夹紧形成在安装部分的上端上的另一个径向突出部。
    • 70. 发明授权
    • Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected
    • 半导体基板的制造方法以及检查被检查体的图案的缺陷的方法和装置
    • US07180584B2
    • 2007-02-20
    • US10686584
    • 2003-10-17
    • Shunji MaedaYasuhiko NakayamaMinoru YoshidaHitoshi KubotaKenji Oka
    • Shunji MaedaYasuhiko NakayamaMinoru YoshidaHitoshi KubotaKenji Oka
    • G01N21/00
    • G01N21/8806G01N21/9501G01N21/956G01N21/95607G01N2021/95615G01N2201/0618G01N2201/0634
    • A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.
    • 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上,检查被检查物体上的微细图案,晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制,并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较,并且检测出显示不一致的图案的一部分作为缺陷,从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外,通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。