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    • 61. 发明申请
    • Semiconductor Light Emitting Device and Method for Manufacturing the Same
    • 半导体发光器件及其制造方法
    • US20080258166A1
    • 2008-10-23
    • US11596124
    • 2005-05-10
    • Mitsuhiko SakaiShinichi KohdaMasayuki SonobeKen Nakahara
    • Mitsuhiko SakaiShinichi KohdaMasayuki SonobeKen Nakahara
    • H01L33/00
    • H01L33/40H01L33/32
    • There is provided a semiconductor light emitting semiconductor device including an n-side electrode which has a structure capable of stably suppressing the contact resistance between the n-side electrode and a nitride semiconductor layer. Further, there is provided a light emitting device and a manufacturing method wherein an ohmic contact between the n-side electrode and the nitride semiconductor layer can be obtained by a simple manufacturing process, and the n-side electrode has an Au layer on a top surface to facilitate wire bonding. Semiconductor layers (2-8) to form a light emitting layer are laminated on a surface of a substrate (1) made of, for example, a sapphire (Al2O3 single crystal) or the like and a p-side electrode (10) is formed on the surface thereof thorough a light transmitting conductive layer (9). An n-side electrode (11) is formed on an exposed surface of an n-type layer (4), exposed by removing a part of the semiconductor layers (4-8) by etching. The n-side electrode includes actually an Al layer (11a) in contact with the n-type layer, a barrier metal layer (11b) and an Au layer (11c).
    • 提供一种包括具有能够稳定地抑制n侧电极和氮化物半导体层之间的接触电阻的结构的n侧电极的半导体发光半导体器件。 此外,提供了一种发光器件及其制造方法,其中通过简单的制造工艺可以获得n侧电极和氮化物半导体层之间的欧姆接触,并且n侧电极在顶部具有Au层 表面方便引线接合。 形成发光层的半导体层(2〜8)层压在由例如蓝宝石(Al 2 O 3·N 3)构成的基板(1)的表面上 >单晶)等,并且通过透光导电层(9)在其表面上形成p侧电极(10)。 在n型层(4)的暴露表面上形成n侧电极(11),通过蚀刻去除一部分半导体层(4-8)而露出。 n侧电极实际上包括与n型层接触的Al层(11a),阻挡金属层(11b)和Au层(11c)。
    • 63. 发明授权
    • Transparent electrode
    • 透明电极
    • US07417263B2
    • 2008-08-26
    • US10748734
    • 2003-12-30
    • Ken Nakahara
    • Ken Nakahara
    • H01L33/00H01L23/29
    • H01L33/42
    • In order to emit a light from an electrode side, in semiconductor light emitting devices such as LED and the like, and liquid crystal, the electrode is formed of a transparent material so as to transmit a light through the transparent electrode and exit the light. A ZnO, which constitutes a material for the transparent electrode, is subject to erosion by acid and alkali, thus, as the case may cause loss of a reliability of the electrode under the influence of ion-containing moisture. In order to solve such a problem, this invention has as its aim a transparent electrode film provided with stability capable of preventing any degradation under the influence of any ion-containing moisture, while being kept acid-proof and alkali-proof. In order to accomplish the above-mentioned aim, this invention provides a transparent electrode made up of a ZnO as its main material, wherein its surface is covered with a Mg-doped ZnO film.
    • 为了从电极侧发出光,在诸如LED等的半导体发光器件和液晶中,电极由透明材料形成,以便透过透明电极发出光并离开光。 构成透明电极的材料的ZnO被酸碱侵蚀,因此在离子含水分的影响的情况下可能导致电极的可靠性降低。 为了解决这个问题,本发明的目的是提供具有稳定性的透明电极膜,其能够在保持耐酸碱性的同时防止在任何含离子的水分的影响下的任何劣化。 为了实现上述目的,本发明提供一种由ZnO作为其主要材料的透明电极,其表面被掺杂了Mg的ZnO膜覆盖。
    • 68. 发明授权
    • Radical cell device and method for manufacturing groups II-VI compound semiconductor device
    • 激光电池器件及其制造方法II-VI族化合物半导体器件
    • US06472241B2
    • 2002-10-29
    • US09939719
    • 2001-08-28
    • Kakuya IwataPaul FonsAkimasa YamadaKoji MatsubaraShigeru NikiKen Nakahara
    • Kakuya IwataPaul FonsAkimasa YamadaKoji MatsubaraShigeru NikiKen Nakahara
    • H01L2100
    • C30B23/06H01L33/0087
    • The closing plates (61b), (61c) are provided on the both end portions of the cylindrical insulator body (61a), the gas introduction tube for introducing a gaseous substance is inserted into one plate (61b) of the closing plates of the plasma chamber (61) for making the gaseous substance plasmatic within it, and on the other plate (61c), the plasma radiation outlet (61d) is provided. Then, nearby the plasma jet (63) outgoing from the radiation outlet, the electrode (64) for applying a high electric field of an ion trapper is provided so as to be opposed to the grounded electrode (65) interposed the plasma jet between them. This electrode for applying a high electric field is fixed on the grounded metal plate (61e) provided on the other plate (61c) via the insulation porcelain (66) made of MgO or quartz. As a result, a radical cell device which does not blow-off and mix up Al into the layer epitaxially grown is obtained ,and a Groups II-VI compound semiconductor device because undoped Al is not contained in the semiconductor layers.
    • 封闭板(61b),(61c)设置在圆筒形绝缘体(61a)的两端部,将用于引入气态物质的气体导入管插入等离子体的封闭板的一个板(61b) 用于在其内制备气态物质的室(61),在另一个板(61c)上设置有等离子体辐射出口(61d)。 然后,在从辐射出口排出的等离子体射流(63)附近,设置用于施加离子捕获器的高电场的电极(64),以与插入其间的等离子体射流的接地电极(65)相对 。 用于施加高电场的电极经由由MgO或石英制成的绝缘瓷(66)固定在设置在另一板(61c)上的接地金属板(61e)上。 结果,可以获得不将Al吹出和外延生长的层的自由基电池器件,由于在半导体层中不含有未掺杂的Al的II-VI族化合物半导体器件。
    • 70. 发明授权
    • Semiconductor light emitting device with concave-convex pattern and method for manufacturing the same
    • 具有凹凸图案的半导体发光器件及其制造方法
    • US08304795B2
    • 2012-11-06
    • US12087173
    • 2006-12-28
    • Atsushi YamaguchiKen Nakahara
    • Atsushi YamaguchiKen Nakahara
    • H01L33/00
    • H01L33/42H01L33/20H01L33/44H01L2933/0083
    • A semiconductor lamination portion (6) is formed by laminating nitride semiconductor layers including an n-type layer (3) and a p-type layer (5) on one side of a substrate (1) so as to form a light emitting layer, and a light transmitting conductive layer (7) is provided at a surface side of the semiconductor lamination portion. A concave-convex pattern, i.e., concaves (7a), is provided on a surface of the light transmitting conductive layer. A p-side electrode (8) is provided on the light transmitting conductive layer, and an n-side electrode (9) is electrically connected to the n-type layer exposed by etching a part of the semiconductor lamination portion. Light emitted from the light emitting layer is therefore totally reflected repeatedly in the semiconductor lamination portion and the substrate and can be effectively taken out without attenuation, so external quantum efficiency can be improved.
    • 通过在衬底(1)的一侧层叠包括n型层(3)和p型层(5)的氮化物半导体层以形成发光层,形成半导体层叠部(6) 并且在半导体层叠部的表面侧设置有透光性导电层(7)。 在透光导电层的表面上设置凹凸图案,即凹部(7a)。 p侧电极(8)设置在透光导电层上,n侧电极(9)与通过蚀刻半导体层叠部分的一部分露出的n型层电连接。 因此,从半导体层叠部和基板反射全反射从发光层发出的光,能够有效地取出而不衰减,能够提高外部的量子效率。