发明申请
US20080258166A1 Semiconductor Light Emitting Device and Method for Manufacturing the Same
审中-公开
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基本信息:
- 专利标题: Semiconductor Light Emitting Device and Method for Manufacturing the Same
- 专利标题(中):半导体发光器件及其制造方法
- 申请号:US11596124 申请日:2005-05-10
- 公开(公告)号:US20080258166A1 公开(公告)日:2008-10-23
- 发明人: Mitsuhiko Sakai , Shinichi Kohda , Masayuki Sonobe , Ken Nakahara
- 申请人: Mitsuhiko Sakai , Shinichi Kohda , Masayuki Sonobe , Ken Nakahara
- 优先权: JP2004-140995 20040511; JP2005-130575 20050427
- 国际申请: PCT/JP2005/008510 WO 20050510
- 主分类号: H01L33/00
- IPC分类号: H01L33/00
摘要:
There is provided a semiconductor light emitting semiconductor device including an n-side electrode which has a structure capable of stably suppressing the contact resistance between the n-side electrode and a nitride semiconductor layer. Further, there is provided a light emitting device and a manufacturing method wherein an ohmic contact between the n-side electrode and the nitride semiconductor layer can be obtained by a simple manufacturing process, and the n-side electrode has an Au layer on a top surface to facilitate wire bonding. Semiconductor layers (2-8) to form a light emitting layer are laminated on a surface of a substrate (1) made of, for example, a sapphire (Al2O3 single crystal) or the like and a p-side electrode (10) is formed on the surface thereof thorough a light transmitting conductive layer (9). An n-side electrode (11) is formed on an exposed surface of an n-type layer (4), exposed by removing a part of the semiconductor layers (4-8) by etching. The n-side electrode includes actually an Al layer (11a) in contact with the n-type layer, a barrier metal layer (11b) and an Au layer (11c).
摘要(中):
提供一种包括具有能够稳定地抑制n侧电极和氮化物半导体层之间的接触电阻的结构的n侧电极的半导体发光半导体器件。 此外,提供了一种发光器件及其制造方法,其中通过简单的制造工艺可以获得n侧电极和氮化物半导体层之间的欧姆接触,并且n侧电极在顶部具有Au层 表面方便引线接合。 形成发光层的半导体层(2〜8)层压在由例如蓝宝石(Al 2 O 3·N 3)构成的基板(1)的表面上 >单晶)等,并且通过透光导电层(9)在其表面上形成p侧电极(10)。 在n型层(4)的暴露表面上形成n侧电极(11),通过蚀刻去除一部分半导体层(4-8)而露出。 n侧电极实际上包括与n型层接触的Al层(11a),阻挡金属层(11b)和Au层(11c)。