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    • 7. 发明专利
    • Semiconductor device, manufacturing method therefor, and electronic device
    • 半导体器件及其制造方法和电子器件
    • JP2005033172A
    • 2005-02-03
    • JP2004079273
    • 2004-03-18
    • Masashi KawasakiHideo OnoSharp Corpシャープ株式会社英男 大野雅司 川崎
    • SUGIHARA TOSHINORIONO HIDEOKAWASAKI MASASHI
    • H01L21/336H01L29/786
    • H01L29/7869H01L29/66969
    • PROBLEM TO BE SOLVED: To allow practical use of a semiconductor device which uses zinc oxide for its active layer and has a protective layer isolating the active layer from the atmosphere. SOLUTION: A thin film transistor 1 has a semiconductor layer 5 which is formed on a gate electrode 3 on an insulating substrate 2 through a gate insulating layer 4, a source electrode 6 and a drain electrode 7 which are formed on the semiconductor layer 5, and a protective layer 8 which covers the electrodes and isolates the semiconductor layer 5 from the atmosphere. The semiconductor layer 5 (active layer) is formed by using a semiconductor in a polycrystalline form of ZnO doped with a Group-V element or the like. Because the surface level is decreased by the protective layer 8 and expansion of a depletion layer into the inside is inhibited, ZnO becomes an n-type semiconductor exhibiting its original resistance value and has excess free electrons. The doped element acts as an acceptor impurity for ZnO, which reduces excess free electrons. Thus, the gate voltage for excluding excess free electrons is reduced, thereby making the threshold voltage become nearly 0 V. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了实际使用使用氧化锌作为其有源层的半导体器件,并且具有将活性层与大气隔离的保护层。 解决方案:薄膜晶体管1具有半导体层5,其通过栅极绝缘层4,源电极6和漏电极7形成在绝缘基板2上的栅电极3上,半导体层5形成在半导体 层5和覆盖电极并将半导体层5与大气隔离的保护层8。 半导体层5(有源层)通过使用以V族元素等掺杂的多晶型的半导体形成。 由于保护层8降低了表面水平,并且消耗层向内部的膨胀被抑制,所以ZnO成为表现出其原始电阻值且具有过量自由电子的n型半导体。 掺杂元素作为ZnO的受主杂质,其减少过量的自由电子。 因此,用于排除过量自由电子的栅极电压降低,从而使阈值电压变为接近0V。(C)2005年,JPO和NCIPI