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    • 52. 发明申请
    • Method For Manufacturing Wraparound Shield Write Head Using Hard Masks
    • 使用硬掩模制造绕组屏蔽写头的方法
    • US20130026131A1
    • 2013-01-31
    • US13193520
    • 2011-07-28
    • Shiwen HuangFenglin LiuQiping ZhongKyusik ShinYingjian Chen
    • Shiwen HuangFenglin LiuQiping ZhongKyusik ShinYingjian Chen
    • G11B5/127
    • G11B5/3116G11B5/3163
    • The present disclosure describes a method for manufacturing a full wraparound shield damascene write head through the implementation of a three layered (tri-layered) hard mask. According to an embodiment of the invention, the various layers of hard mask are used for different purposes during the formation of a write head. The wraparound shield head of the present invention exhibits improved physical characteristics that further result in improved performance characteristics. Use of the hard mask layers according to the present invention allows for use of manufacturing processes that can be more closely controlled than those processes used in other processes. For example, smaller dimension lithographic techniques can be used. Also, reliance on certain CMP processes is not necessary where the use of CMP processes is not as well-controlled as deposition or lithographic techniques as is possible using the present invention.
    • 本公开描述了通过实施三层(三层)硬掩模制造全封装屏蔽镶嵌写头的方法。 根据本发明的实施例,在形成写入头期间,各种硬掩模层用于不同的目的。 本发明的环绕式屏蔽头表现出改进的物理特性,进一步导致改善的性能特征。 根据本发明的硬掩模层的使用允许使用可以比其它工艺中使用的那些方法更加严格地控制的制造工艺。 例如,可以使用较小尺寸的光刻技术。 此外,在使用CMP工艺不如使用本发明可能的沉积或光刻技术那样不受控制的情况下,对某些CMP工艺的依赖是不必要的。
    • 54. 发明授权
    • Method and system for providing a magnetic recording transducer having side shields
    • 用于提供具有侧屏蔽的磁记录换能器的方法和系统
    • US08231796B1
    • 2012-07-31
    • US12331238
    • 2008-12-09
    • Yun-Fei LiYingjian Chen
    • Yun-Fei LiYingjian Chen
    • B44C1/22
    • G11B5/3163G11B5/3116G11B5/315
    • A method and system provide a magnetic transducer that includes an underlayer and a nonmagnetic layer on the underlayer. The method and system include providing a trench in the nonmagnetic layer. The trench has a plurality of sides. The method and system also include providing a separation layer in the trench. A portion of the separation layer resides on the sides of the trench. The method and system include providing the main pole. At least part of the main pole resides in the trench on the portion of the separation layer and has a plurality of pole sides. The method and system further include removing at least a portion of the second nonmagnetic layer, thereby exposing the portion of the separation layer. The method and system also include providing a side shield. The separation layer magnetically separates the pole sides from the side shield.
    • 一种方法和系统提供一种在底层上包括底层和非磁性层的磁换能器。 该方法和系统包括在非磁性层中提供沟槽。 沟槽具有多个侧面。 该方法和系统还包括在沟槽中提供分离层。 分离层的一部分位于沟槽的侧面。 该方法和系统包括提供主极。 主极的至少一部分位于分离层部分上的沟槽中,并且具有多个极侧。 所述方法和系统还包括去除第二非磁性层的至少一部分,从而暴露分离层的部分。 该方法和系统还包括提供侧护罩。 分离层将极侧与侧护罩磁性地分离。
    • 58. 发明授权
    • Perpendicular magnetic recording head having a recessed magnetic base layer
    • 具有凹陷磁性基底层的垂直磁记录头
    • US08077434B1
    • 2011-12-13
    • US11942113
    • 2007-11-19
    • Yong ShenLei Larry ZhangYingjian ChenUt Tran
    • Yong ShenLei Larry ZhangYingjian ChenUt Tran
    • G11B5/147
    • G11B5/1278G11B5/3116
    • A method and system for providing a magnetic transducer having an air-bearing surface (ABS) are described. The magnetic transducer includes a base layer, a perpendicular magnetic recording (PMR) pole on the base layer, an additional pole, a write shield, a write gap between the PMR pole and a portion of the write shield, and coil(s) that energize at least the additional pole. The base layer includes a first portion proximate to the ABS and a second portion recessed from the ABS. The first portion is nonmagnetic, while the second portion is magnetic. The PMR pole has a first front portion proximate to the ABS. The additional pole has a second front portion recessed from the ABS. At least a portion of the additional pole resides between the PMR pole and write shield. At least a portion of the write gap resides on the front portion of the PMR pole.
    • 描述了一种用于提供具有空气轴承表面(ABS)的磁换能器的方法和系统。 磁换能器包括基层,基层上的垂直磁记录(PMR)极,附加极,写屏蔽,PMR极与写屏蔽的一部分之间的写间隙,以及线圈, 至少激励附加极点。 基层包括靠近ABS的第一部分和从ABS凹陷的第二部分。 第一部分是非磁性的,而第二部分是磁性的。 PMR杆具有靠近ABS的第一前部。 附加的杆具有从ABS凹入的第二前部。 附加极点的至少一部分位于PMR极和写保护罩之间。 写入间隙的至少一部分位于PMR极的前部。
    • 60. 发明授权
    • Electronic device utilizing magnetic nanotubes
    • 使用磁性纳米管的电子设备
    • US07063753B1
    • 2006-06-20
    • US10611633
    • 2003-07-01
    • Yingjian ChenXiaozhong Dang
    • Yingjian ChenXiaozhong Dang
    • D01F9/12H01L21/00
    • D01F9/127B82Y10/00B82Y25/00B82Y30/00H01L21/76838H01L51/0012H01L51/0048H01L51/0512H01L2221/1094Y10S977/75Y10S977/84Y10S977/888
    • Present invention provides enabling techniques of integrating novel nanotube elements into semiconductor devices, particularly in transistors, as gate channels or/and as interconnects. This is done in a series of process steps, which consist of fabricating magnetic-core-containing nanotubes of selected size (diameter and length), filtration of nanotube powders, preparing nanotube precursor in aqueous chemicals to form colloidal solutions of proper concentration, dispersing nanotube-containing solutions onto wafer surface, and finally positioning nanotubes at desired locations by magnetic means to complete nanotube device structure. The key to this invention is to provide miniature nanotubes with tangible physical properties, in this case, magnetic properties, so that they can be aligned, filtered, and precisely directed to desired locations for device application. Such processes enable nanotubes to be compatible with typical semiconductor wafer processing technologies.
    • 本发明提供了将新型纳米管元件集成到半导体器件中,特别是在晶体管中作为栅极通道或/或作为互连的使能技术。 这是通过一系列工艺步骤完成的,其中包括制造选定尺寸(直径和长度)的含磁芯的纳米管,纳米管粉末的过滤,在含水化学品中制备纳米管前体以形成适当浓度的胶体溶液,分散纳米管 并且最后通过磁性手段将纳米管定位在期望的位置以完成纳米管装置结构。 本发明的关键是提供具有有形物理性能的微型纳米管,在这种情况下是磁性,使得它们可以对准,过滤并精确地定向到所需的位置用于器件应用。 这样的工艺使得纳米管能够与典型的半导体晶片处理技术兼容。