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1. 发明授权

US07419891B1 Method and system for providing a smaller critical dimension magnetic element utilizing a single layer mask 失效
标题翻译：用于使用单层掩模提供较小临界尺寸的磁性元件的方法和系统
公开(公告)号：US07419891B1
公开(公告)日：2008-09-02
申请号：US11352652
申请日：2006-02-13
申请人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
发明人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
IPC分类号： H01L21/20
CPC分类号： H01L43/12 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3909
摘要： The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.
摘要翻译：公开了用于提供磁性元件的方法和系统。该方法和系统包括提供包括多个层的磁性元件堆叠并在磁性元件堆叠上沉积停止层。该方法和系统还包括在停止层上提供介电抗反射涂层（DARC）层，形成用于在DARC层的一部分上限定磁性元件的单层掩模，以及去除DARC层未覆盖的DARC层的剩余部分单层面膜。 DARC层的一部分覆盖停止层的一部分。该方法还包括使用停止层的至少一部分作为掩模去除停止层的剩余部分并限定磁性元件。

2. 发明授权

US08081403B1 Magnetic element having a smaller critical dimension of the free layer 有权
标题翻译：具有较小临界尺寸的自由层的磁性元件
公开(公告)号：US08081403B1
公开(公告)日：2011-12-20
申请号：US12170619
申请日：2008-07-10
申请人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
发明人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
IPC分类号： G11B5/39
CPC分类号： H01L43/12 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3909
摘要： A magnetic element includes a pinned layer, a nonferromagnetic spacer layer, and a free layer. The nonferromagnetic spacer layer resides between the pinned layer and the free layer. The free layer has a track width of not more than 0.08 micron.
摘要翻译：磁性元件包括钉扎层，非铁磁隔离层和自由层。非铁磁间隔层位于被钉扎层和自由层之间。自由层的轨道宽度不大于0.08微米。

3. 发明授权

US08424192B1 Method for manufacturing a pole for a magnetic recording head 失效
标题翻译：磁记录头用磁极制造方法
公开(公告)号：US08424192B1
公开(公告)日：2013-04-23
申请号：US11199281
申请日：2005-08-08
申请人： Danning Yang , Lei Wang , Yingjian Chen , Brant Nease , Kyusik Sin
发明人： Danning Yang , Lei Wang , Yingjian Chen , Brant Nease , Kyusik Sin
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3169 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.
摘要翻译：公开了一种在记录头上制造磁极的方法和系统。该方法和系统包括溅射至少一个铁磁层并在铁磁层上制造硬掩模。该方法和系统还包括限定极点并在极上沉积写入间隙。极的一部分被封装在绝缘体中。

4. 发明授权

US07819979B1 Method and system for cleaning magnetic artifacts using a carbonyl reactive ion etch 有权
标题翻译：使用羰基反应离子蚀刻清洁磁伪影的方法和系统
公开(公告)号：US07819979B1
公开(公告)日：2010-10-26
申请号：US11046972
申请日：2005-01-31
申请人： Benjamin Chen , Yun-Fei Li , Hugh C. Hiner , Wei Zhang , Yingjian Chen
发明人： Benjamin Chen , Yun-Fei Li , Hugh C. Hiner , Wei Zhang , Yingjian Chen
IPC分类号： B08B7/00 , B08B7/04
CPC分类号： G01R33/098 , B82Y25/00 , B82Y40/00 , G11B5/84 , G11C11/161 , H01F10/3254 , H01F10/3268 , H01F41/308 , H01F41/32
摘要： A method and system for providing a magnetic structure that includes at least one magnetic material is disclosed. The method and system include defining the magnetic structure. The magnetic structure also includes a top layer that is insensitive to an istroropic carbonyl reactive ion etch. The defining of the magnetic structure results in at least one artifact. The method and system further includes cleaning the at least one artifact using at least one isotropic carbonyl reactive ion etch.
摘要翻译：公开了一种用于提供包括至少一种磁性材料的磁性结构的方法和系统。该方法和系统包括限定磁结构。磁性结构还包括对异构羰基反应离子蚀刻不敏感的顶层。磁结构的定义导致至少一个假象。所述方法和系统还包括使用至少一种各向同性的羰基反应离子蚀刻来清洁所述至少一个假象。

5. 发明授权

US07296339B1 Method for manufacturing a perpendicular magnetic recording head 失效
标题翻译：垂直磁记录头的制造方法
公开(公告)号：US07296339B1
公开(公告)日：2007-11-20
申请号：US10936921
申请日：2004-09-08
申请人： Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
发明人： Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3169 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.
摘要翻译：公开了用于制造垂直磁记录头的方法和系统。该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

6. 发明授权

US08149536B1 Perpendicular magnetic recording head having a pole tip formed with a CMP uniformity structure 有权
标题翻译：具有形成有CMP均匀结构的极尖的垂直磁记录头
公开(公告)号：US08149536B1
公开(公告)日：2012-04-03
申请号：US11871672
申请日：2007-10-12
申请人： Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
发明人： Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3169 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.
摘要翻译：公开了用于制造垂直磁记录头的方法和系统。该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

7. 发明授权

US08018677B1 Magnetic recording head formed by damascene process 有权
标题翻译：磁记录头由镶嵌工艺形成
公开(公告)号：US08018677B1
公开(公告)日：2011-09-13
申请号：US11923043
申请日：2007-10-24
申请人： Ki Sup Chung , Kyusik Sin , Danning Yang , Yingjian Chen , Brant Nease
发明人： Ki Sup Chung , Kyusik Sin , Danning Yang , Yingjian Chen , Brant Nease
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.
摘要翻译：一种用于制造用于磁记录头的磁极的方法和系统。该方法和系统包括提供绝缘体并在绝缘体上制造至少一个硬掩模。至少一个硬掩模在其中具有孔。该方法和系统还包括去除绝缘体的一部分以在绝缘体内形成沟槽。沟槽形成在孔下面。所述方法和系统还包括沉积至少一种铁磁材料。极包括沟槽内的铁磁材料的一部分。

8. 发明授权

US07444740B1 Damascene process for fabricating poles in recording heads 有权
标题翻译：用于在记录头中制造磁极的镶嵌工艺
公开(公告)号：US07444740B1
公开(公告)日：2008-11-04
申请号：US11047401
申请日：2005-01-31
申请人： Ki Sup Chung , Kyusik Sin , Danning Yang , Yingjian Chen , Brant Nease
发明人： Ki Sup Chung , Kyusik Sin , Danning Yang , Yingjian Chen , Brant Nease
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.
摘要翻译：一种用于制造用于磁记录头的磁极的方法和系统。该方法和系统包括提供绝缘体并在绝缘体上制造至少一个硬掩模。至少一个硬掩模在其中具有孔。该方法和系统还包括去除绝缘体的一部分以在绝缘体内形成沟槽。沟槽形成在孔下面。所述方法和系统还包括沉积至少一种铁磁材料。极包括沟槽内的铁磁材料的一部分。

9. 发明授权

US07007372B1 Method for making high speed, high areal density inductive write structure 失效
标题翻译：制造高速，高密度感应写入结构的方法
公开(公告)号：US07007372B1
公开(公告)日：2006-03-07
申请号：US10656311
申请日：2003-09-05
申请人： Yingjian Chen , Hua-Ching Tong , Lei Wang , Xizeng Shi
发明人： Yingjian Chen , Hua-Ching Tong , Lei Wang , Xizeng Shi
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3146 , G11B5/3109 , G11B5/3113 , G11B5/3116 , G11B5/313 , G11B5/3153 , G11B5/3967 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49048 , Y10T29/49052 , Y10T29/49071 , Y10T29/49073
摘要： An inductive write element is disclosed for use in a magnetic data recording system. The write element provides increased data rate and data density capabilities through improved magnetic flux flow through the element. The write element includes a magnetic yoke constructed of first and second magnetic poles. The first pole includes a pedestal constructed of a high magnetic moment (high Bsat) material, which is preferably FeRhN nanocrystalline films with lamination layers of CoZrCr. The second pole includes a thin inner layer of high Bsat material (also preferably FeRhN nanocrystalline films with lamination layers of CoZrCr), the remainder being constructed of a magnetic material capable of being electroplated, such as a Ni—Fe alloy. An electrically conductive coil passes through the yoke between the first and second poles to induce a magnetic flux in the yoke when an electrical current is caused to flow through the coil. Magnetic flux in the yoke produces a fringing field at a write gap whereby a signal can be imparted onto a magnetic medium passing thereby.
摘要翻译：公开了用于磁数据记录系统的感应写入元件。写元件通过改善通过元件的磁通量提供增加的数据速率和数据密度能力。写元件包括由第一和第二磁极构成的磁轭。第一极包括由高磁矩（高B sat sat）材料构成的基座，其优选为具有CoZrCr层压层的FeRhN纳米晶体膜。第二极包括一高层高层材料的薄层（也优选具有CoZrCr叠层的FeRhN纳米晶膜），其余部分由能够电镀的磁性材料构成，例如Ni -Fe合金。导电线圈通过第一和第二极之间的磁轭，当电流流过线圈时，引起磁轭中的磁通量。轭中的磁通在写入间隙产生边缘场，由此可以将信号传递到通过的磁介质上。

10. 发明授权

US08079135B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08079135B1
公开(公告)日：2011-12-20
申请号：US11955667
申请日：2007-12-13
申请人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
发明人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.
摘要翻译：描述了一种用于提供垂直磁记录（PMR）换能器的方法。提供的PMR传感器包括与PMR极耦合的PMR极和轭结构。该方法包括提供硬掩模和中间层。硬掩模的第一部分位于PMR杆上。硬掩模的第二部分位于另一结构上。中间层至少包围PMR极。该方法还包括在至少中间层上执行平面化，在PMR极上去除硬掩模的第一部分，而不必在另一个结构上完全去除硬掩模的第二部分。该方法还包括移除另一结构上的硬掩模的剩余部分，在PMR极上提供写入间隙，并在写入间隙上提供屏蔽。

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