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51. 发明授权

US4632871A Anodic bonding method and apparatus for X-ray masks 失效
标题翻译：用于X射线掩模的阳极粘合方法和装置
公开(公告)号：US4632871A
公开(公告)日：1986-12-30
申请号：US580600
申请日：1984-02-16
申请人： Marcos Karnezos , Howard H. Nakanos , Armand P. Neukermans
发明人： Marcos Karnezos , Howard H. Nakanos , Armand P. Neukermans
IPC分类号： G03F1/22 , H01L21/027 , B32B9/00
CPC分类号： G03F1/22 , Y10T428/265
摘要： A structure for use in an X-ray membrane (pellicle) mask is provided in which anodic bonding of layers is employed. Anodic bonding as used here provides a permanent bond between the layers, has zero thickness and provides substantial improvements in the obtained flatness of the mask by eliminating conventional glue for attachment. By applying a voltage between a layer, such as silicon, and a glass plate, and simultaneously heating both elements a permanent bond is established which is extremely flat thus providing minimum misalignment of the mask during subsequent X-ray lithography fabrication.
摘要翻译：提供了用于X射线膜（防护薄膜）掩模的结构，其中采用了层的阳极结合。这里使用的阳极接合提供了层之间的永久性结合，具有零厚度，并且通过消除用于附接的常规粘合剂，可以显着改善所获得的掩模的平整度。通过在诸如硅的层和玻璃板之间施加电压，并同时加热两个元件，建立非常平坦的永久接合，从而在随后的X射线光刻制造期间提供掩模的最小的未对准。

52. 发明授权

US4608326A Silicon carbide film for X-ray masks and vacuum windows 失效
公开(公告)号：US4608326A
公开(公告)日：1986-08-26
申请号：US804331
申请日：1985-12-04
申请人： Armand P. Neukermans , Kuo L. Chiang , Frederic N. Schwettmann , Donald R. Bradbury
发明人： Armand P. Neukermans , Kuo L. Chiang , Frederic N. Schwettmann , Donald R. Bradbury
IPC分类号： G03F1/22 , G03F1/48 , G03F1/62 , G03F9/00
CPC分类号： G03F1/22 , G03F1/48 , G03F1/62 , Y10S430/167
摘要： A layered structure for use in an X-ray membrane (pellicle) mask or a vacuum window is provided in which an intermediate amorphous layer such as silicon dioxide is grown on a silicon substrate which provides a stress relief medium and surface properties which enhance and improve subsequent process layers by breaking the epitaxial nature of these later deposited layers. Upon subsequent deposition of an inorganic overcoat, such as SiC, on the intermediate amorphous layer, the overcoat produces a nearly defect-free layer with a substantially reduced stress of suitable quality for X-ray lithography mask fabrication. Furthermore, additional alternating layers of a silicon carbide film and an intermediate inorganic layer, such as silicon nitride, can be deposited to obtain an even smoother silicon carbide surface and stronger structure.

53. 发明授权

US4304997A Electron capture detector with thermionic emission electron source 失效
标题翻译：具有热离子发射电子源的电子捕获检测器
公开(公告)号：US4304997A
公开(公告)日：1981-12-08
申请号：US15688
申请日：1979-02-27
申请人： James J. Sullivan , William P. Kruger , Douglass McManigill , Armand P. Neukermans
发明人： James J. Sullivan , William P. Kruger , Douglass McManigill , Armand P. Neukermans
IPC分类号： G01N27/64 , G01N27/62 , G01N30/70 , H01J39/28
CPC分类号： G01N27/626 , G01N30/70
摘要： An electron capture detector in which a thermionic source such as a filament provides electrons for the reaction in a source chamber having a port that connects to a detection chamber having a collector. Guard gas is introduced into the source chamber and sample gas into the detection chamber, and an exhaust port is provided in the detection chamber.
摘要翻译：一种电子捕获检测器，其中诸如灯丝的热离子源在具有连接到具有收集器的检测室的端口的源室中为反应提供电子。将保护气体引入源室并将气体进入检测室，并且在检测室中设置排气口。

54. 发明授权

US07184826B2 Device and method for enhancing transdermal flux of agents being delivered or sampled 失效
标题翻译：用于增强递送或取样的试剂的经皮通量的装置和方法
公开(公告)号：US07184826B2
公开(公告)日：2007-02-27
申请号：US08877155
申请日：1997-06-17
申请人： Michel J. N. Cormier , Armand P. Neukermans , Barry Block , Felix T. Theeuwes , Alfred A. Amkraut
发明人： Michel J. N. Cormier , Armand P. Neukermans , Barry Block , Felix T. Theeuwes , Alfred A. Amkraut
IPC分类号： A61M1/30 , A61M31/00 , A61B5/00
CPC分类号： A61M37/0015 , A61B5/14514 , A61B5/150022 , A61B5/150099 , A61B5/150282 , A61B5/150427 , A61B5/150969 , A61B5/150984 , A61B5/15105 , A61B5/15113 , A61B5/15142 , A61B10/0045 , A61B17/205 , A61M2037/0007 , A61M2037/0023 , A61M2037/0038 , A61M2037/0046 , A61M2037/0053 , A61N1/30 , A61N1/303
摘要： A percutaneous agent delivery or sampling device comprising a sheet having a plurality of microblades for piercing and anchoring to the skin for increasing transdermal flux of an agent and for improving the attachment of the device to the skin.
摘要翻译：一种经皮药剂递送或取样装置，其包括具有多个微刀片的片材，用于刺穿并锚定到皮肤上以增加药剂的经皮通量并改善装置与皮肤的连接。

55. 发明授权

US06744550B2 Two-dimensional micro-mirror array enhancements 失效
标题翻译：二维微镜阵列增强
公开(公告)号：US06744550B2
公开(公告)日：2004-06-01
申请号：US10157354
申请日：2002-05-28
申请人： Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
发明人： Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
IPC分类号： G02B2500
CPC分类号： G02B6/3584 , G02B6/262 , G02B6/32 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B6/359 , G02B6/4249 , G02B26/0833 , G02B26/0841 , G02B26/085
摘要： A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
摘要翻译：提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。这些电极与旋转轴大致平行或偏移45度，形成象限。扭转传感器沿旋转轴提供，以控制象限偏转电极的偏转。

56. 发明授权

US06694072B1 Flexible, modular, compact fiber switch improvements 失效
标题翻译：灵活，模块化，紧凑的光纤交换机的改进
公开(公告)号：US06694072B1
公开(公告)日：2004-02-17
申请号：US10031159
申请日：2002-01-11
申请人： Armand P. Neukermans , Steven M. Clark , Marc R. Schuman , Timothy G. Slater , Jack D. Foster , Sam Calmes
发明人： Armand P. Neukermans , Steven M. Clark , Marc R. Schuman , Timothy G. Slater , Jack D. Foster , Sam Calmes
IPC分类号： G02B626
CPC分类号： G02B6/359 , G02B6/32 , G02B6/327 , G02B6/3518 , G02B6/3556 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/3644 , G02B6/3656 , G02B6/3672 , G02B6/3692 , G02B26/0841 , G02B26/085 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039
摘要： A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) arranged in a V-shape which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs deflectors (172) coupling a beam of light (108) between optical fibers (106).
摘要翻译：光纤开关（400）包括光纤切换模块（100），其接收和固定光纤（106）的端部（104）。模块（100）包括布置成V形的多个反射光束偏转器（172），该反射光束偏转器可被选择成对，用于耦合一对光纤（106）之间的光束（108）。模块（100）还产生来自指示其取向的每个偏转器（172）的取向信号。端口卡（406）向模块（100）提供用于定向至少一个偏转器（172）的驱动信号。端口卡（406）还接收由该偏转器（172）产生的取向信号以及指定偏转器（172）的取向的坐标。端口卡（406）将接收到的坐标与取向信号进行比较，并且调整提供给模块（100）的驱动信号，以减少所接收的坐标和取向信号之间的差异。开关（400）还采用光学对准来精确地定向耦合在光纤（106）之间的光束（108）的对偏转器（172）。

57. 发明授权

US06608297B2 Scanner document speed encoder 失效
公开(公告)号：US06608297B2
公开(公告)日：2003-08-19
申请号：US09849564
申请日：2001-05-05
申请人： Armand P. Neukermans , James P. Downing , Timothy G. Slater
发明人： Armand P. Neukermans , James P. Downing , Timothy G. Slater
IPC分类号： H04N104
CPC分类号： H04N1/00689 , H04N1/00885 , H04N1/00891 , H04N1/0476 , H04N1/107 , H04N1/1072 , H04N1/1078 , H04N1/121 , H04N1/193 , H04N2201/0096 , H04N2201/0471 , H04N2201/04732 , H04N2201/04737
摘要： A scanner, through which a document moves while being scanned by a moving beam of light, includes a wheel that rotates responsive to document movement. The wheel includes a multi-sectioned optical encoder upon which the scanning beam of light impinges when in a position at which it does not impinge upon the document. The scanner also includes an optical detector which receives light that is not absorbed by the optical encoder sections. Thus, the optical detector generates an electrical signal that indicates document movement speed. A preferred embodiment the scanner includes a pair of cup-shaped wheels one of which carries the optical encoder that encircles an inner surface of the wheel adjacent to a lip thereof. An axle, also included in the preferred embodiment, spans between, is coupled to, and supports the wheels for rotation in unison about a longitudinal axis parallel to the axle.

58. 发明授权

US06392220B1 Micromachined members coupled for relative rotation by hinges 有权
标题翻译：通过铰链相互旋转的微机械构件
公开(公告)号：US06392220B1
公开(公告)日：2002-05-21
申请号：US09388772
申请日：1999-09-02
申请人： Timothy G. Slater , Armand P. Neukermans
发明人： Timothy G. Slater , Armand P. Neukermans
IPC分类号： G01P904
CPC分类号： H04Q11/0005 , B81B3/0051 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B6/32 , G02B6/327 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/0841 , G02B26/085 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0043
摘要： A monolithically fabricated micromachined structure (52) couples a reference frame (56) to a dynamic plate (58) or second frame for rotation of the plate (58) or second frame with respect to the reference frame (56). Performance of torsional oscillators or scanners (52) benefits greatly by coupling the frame (56) to the plate (58) or second frame with torsional flexure hinges (56) rather than torsion bars (54). Appendages (122), tethers (142) or an improved drive circuit enhance electrostatic drive stability of torsional oscillators (52). Wide and thin torsional flexure hinges (96) and isotopically pure silicon enhance thermal conductivity between the plate (58) and the frame (56). Dampening material bridging slots (232) adjacent to torsional flexure hinges (96) drastically reduce the dynamic member's Q. A widened section (252) of narrow torsional flexure hinges (96) permit inclusion of a torsion sensor (108). A dynamic member (58) that includes an actuator portion (302) performs light beam switching. Reflective coatings (76), wire grid polarizers (362), photo-detectors (372) and Fresnel lenses (376) enhance optical performance of the torsional scanners (58).
摘要翻译：单片制造的微加工结构（52）将参考框架（56）耦合到动态板（58）或第二框架，用于相对于参考框架（56）转动板（58）或第二框架。扭转振荡器或扫描仪（52）的性能通过将框架（56）与扭转挠性铰链（56）而不是扭杆（54）联接到板（58）或第二框架而受益匪浅。附件（122），系绳（142）或改进的驱动电路增强了扭转振荡器（52）的静电驱动稳定性。宽和薄的扭转弯曲铰链（96）和同位素纯硅增强了板（58）和框架（56）之间的热导率。与扭转弯曲铰链（96）相邻的阻尼材料桥接槽（232）大大减小了动态构件的Q.窄扭转挠曲铰链（96）的加宽部分（252）允许包括扭转传感器（108）。包括致动器部分（302）的动态构件（58）执行光束切换。反射涂层（76），线栅偏振器（362），光电检测器（372）和菲涅尔透镜（376）增强了扭转扫描器（58）的光学性能。

59. 发明授权

US06153966A Biocompatible, implantable hearing aid microactuator 有权
标题翻译：生物相容性，植入式助听器微型致动器
公开(公告)号：US06153966A
公开(公告)日：2000-11-28
申请号：US406678
申请日：1999-09-27
申请人： Armand P. Neukermans
发明人： Armand P. Neukermans
IPC分类号： A61F2/18 , H01L41/09 , H04R17/00 , H04R25/00 , H01L41/08
CPC分类号： H04R25/604 , H01L41/098 , H04R2225/67
摘要： A biocompatible, implantable microactuator (82) for a fully implantable hearing aid system includes a hollow body (84) that has an open first end (88) and, open first and second faces (94a and 94b). Flexible diaphragms (92, 96a and 96b), respectively covering the end (88) and faces (94a and 94b), hermetically seal the body (84). An incompressible liquid (98) fills the body (84). Transducers (102), provided by laminated, stress-biased unimorphs (32 or 62) that are mechanically coupled to the flexible diaphragms (96a and 96b), deflect the diaphragms (96a and 96b) in response to an electrical driving signal. Deflections of the diaphragms (96a and 96b) are coupled by the liquid (98) to the first flexible diaphragm (92). The unimorphs (32 or 62) include a layer of biocompatible metal (36 or 66-68) deposited on one side of a biocompatible piezoelectric ceramic plate (34 or 64) to stress-bias the plate (34 or 64). A thin, biocompatible electrode (44 or 72) coats the other side of the plate (34 or 64).
摘要翻译：一种用于完全植入式助听器系统的生物相容的植入式微型致动器（82）包括具有敞开的第一端（88）和敞开的第一和第二面（94a和94b）的空心体（84）。分别覆盖端部（88）和面（94a和94b）的柔性隔膜（92,96a和96b）气密地密封主体（84）。不可压缩液体（98）填充主体（84）。通过机械耦合到柔性隔膜（96a和96b）的层压的，应力偏压的单相（32或62）提供的传感器（102）响应于电驱动信号偏转膜片（96a和96b）。隔膜（96a和96b）的偏转由液体（98）耦合到第一柔性隔膜（92）。单原子（32或62）包括沉积在生物相容性压电陶瓷板（34或64）的一侧上以对板（34或64）进行应力偏压的生物相容性金属层（36或66-68）。薄的生物相容性电极（44或72）涂覆在板（34或64）的另一侧。

60. 发明授权

US6122394A Compact, simple, 2D raster, image-building fingerprint scanner 失效
标题翻译：紧凑，简单，2D光栅，图像构建指纹扫描仪
公开(公告)号：US6122394A
公开(公告)日：2000-09-19
申请号：US846837
申请日：1997-05-01
申请人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
发明人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
IPC分类号： G02B26/08 , G06K9/00 , G06K9/20
CPC分类号： G06K9/00046 , G02B26/085 , G06K9/00013 , G06K9/00053 , G06K9/2009
摘要： A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ("2D") raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then impinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) impinges upon a radiation detector (142). Total internal reflection ("TIR") of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.
摘要翻译：由微机械扫描器（54）的移动镜板（56）偏转的电磁辐射束（38）在块（34）的扫描表面（28）上产生二维（“2D”）光栅（132）。块（34）对于预先建立的波长的电磁辐射是透明的。块体（34）的辐射入射面（36）允许射束（38）然后撞击在扫描表面（28）上，以通过辐射出射面（42）离开块体（34）。在离开块（34）之后，光束（38）撞击在辐射检测器（142）上。来自扫描表面（28）的光束（38）在指纹谷处的全内反射（“TIR”）和指纹脊上TIR的挫折使得辐射探测器（142）产生代表指纹的时变电信号。扫描表面（28）可以由弹性材料的贴片（302）形成，其可以仅在电磁辐射的预先建立的波长下被着色为透明。

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