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51. 发明授权

US06178995B2 Fluid supply apparatus 有权
标题翻译：流体供应装置
公开(公告)号：US06178995B2
公开(公告)日：2001-01-30
申请号：US09355872
申请日：1999-08-05
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Yukio Minami , Kouji Nishino , Kouji Kawata , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Yukio Minami , Kouji Nishino , Kouji Kawata , Nobukazu Ikeda , Michio Yamaji
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A fluid feeding apparatus includes parallel flow passages connected at their downstream side, each parallel passage including a pressure flow controller (C) for regulating the flow of fluid and a fluid changeover valve (D) for opening and closing the passage on the downstream side of the pressure flow controller. A fluid feeding control unit (B) controls the pressure flow controllers and changeover valves so that when a changeover valve is closed a control valve (1) upstream of the changeover valve is also closed to prevent a pressure buildup at the changeover valve. In addition to the control valve (1), each pressure flow controller includes an orifice (5) downstream from the control valve, a pressure detector (3) for sensing pressure (P1) in the passage at a point between the control valve and the orifice, and a calculation control unit (6) for producing a control signal Qy for controlling the drive (2) for the control valve. The calculation control unit first calculates a flow rate signal Qc=KP1, where K is a constant and P1 is the pressure sensed by the pressure detector. The calculation control unit then calculates Qy as the difference between a set point or flow rate specifying signal Qs and the calculated value Qc. Thus, the flow rate on the downstream side of the orifice is controlled by regulating the pressure P1 on the upstream side of the orifice via the control valve. The fluid feeding apparatus avoids transient overshooting at the start of fluid feeding and at fluid changeover time and is suitable for use in semiconductor manufacturing facilities and other gas supply systems where high precision is required.
摘要翻译：流体供给装置包括在其下游侧连接的平行流路，每个平行通道包括用于调节流体流动的压力流量控制器（C）和用于打开和关闭流体的下游侧的通道的流体切换阀（D）压力流量控制器。流体供给控制单元（B）控制压力流量控制器和切换阀，使得当切换阀关闭时，转换阀上游的控制阀（1）也被关闭以防止在转换阀处产生压力。除了控制阀（1）之外，每个压力流量控制器包括在控制阀下游的孔口（5），压力检测器（3），用于感测通道中压力（P1）在控制阀和控制阀孔，以及用于产生用于控制用于控制阀的驱动器（2）的控制信号Qy的计算控制单元（6）。计算控制单元首先计算流量信号Qc = KP1，其中K是常数，P1是由压力检测器感测的压力。计算控制单元然后计算Qy作为设定点或流量指定信号Qs与计算值Qc之间的差。因此，通过控制阀调节孔口上游侧的压力P1来控制孔口下游侧的流量。流体供给装置在流体供给开始时和流体切换时间期间避免瞬时过冲，并且适用于需要高精度的半导体制造设备和其它气体供应系统。

52. 发明授权

US5988217A Shutoff-opening device 失效
标题翻译：开关装置
公开(公告)号：US5988217A
公开(公告)日：1999-11-23
申请号：US972436
申请日：1997-11-18
申请人： Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16K7/16 , F16K15/16 , F16K27/00 , F16K51/00 , F16K31/12
CPC分类号： F16K27/003 , F16K51/00 , Y10T137/7783 , Y10T137/87917 , Y10T137/88054
摘要： A valve body has a main body formed with an inflow channel for a first fluid, an inflow channel for a second fluid, and an outflow channel for the first and second fluids in common. The first fluid inflow channel is always in communication with the common outflow channel through a valve chamber. A valve element operates to bring the second fluid inflow channel into or out of communication with the first fluid inflow channel and the common outflow channel.
摘要翻译：阀体具有形成有用于第一流体的流入通道，第二流体的流入通道和用于第一流体和第二流体的流出通道的主体。第一流体流入通道总是通过阀室与公共流出通道连通。阀元件操作以使第二流体流入通道进入或流出与第一流体流入通道和公共流出通道的连通。

53. 发明授权

US5975112A Fluid control device 失效
标题翻译：流体控制装置
公开(公告)号：US5975112A
公开(公告)日：1999-11-02
申请号：US853347
申请日：1997-05-08
申请人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
IPC分类号： F15B11/00 , F15B13/00 , F15B13/02 , F15B13/08 , F16K27/00 , H01L21/02 , F16K11/20
CPC分类号： F16K27/003 , Y10T137/4259 , Y10T137/87684
摘要： A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
摘要翻译：流体控制装置在阀主体中形成有与质量流量控制器内的通道的入口连通的主通道，以及与主通道连通的相对长的子通道和相对短的子通道。要保证高纯度的工艺气体通过较长的子通道。

54. 发明授权

US08662471B2 Solenoid valve 有权
标题翻译：电磁阀
公开(公告)号：US08662471B2
公开(公告)日：2014-03-04
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ome，1KHz的等效串联电阻为0.03 为0.09Omega，并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

55. 发明申请

US20110121217A1 SOLENOID VALVE 有权
标题翻译：电磁阀
公开(公告)号：US20110121217A1
公开(公告)日：2011-05-26
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

56. 发明申请

US20090202957A1 Gas heating method, and gas-heating piping member 审中-公开
标题翻译：气体加热方法和气体加热管道构件
公开(公告)号：US20090202957A1
公开(公告)日：2009-08-13
申请号：US11663557
申请日：2005-08-02
申请人： Nobukazu Ikeda , Akihiro Morimoto , Naofumi Yasumoto , Michio Yamaji , Tsuyoshi Tanikawa , Tadayuki Yakushijin , Hidehiro Doya
发明人： Nobukazu Ikeda , Akihiro Morimoto , Naofumi Yasumoto , Michio Yamaji , Tsuyoshi Tanikawa , Tadayuki Yakushijin , Hidehiro Doya
IPC分类号： F23L99/00 , F28F1/10
CPC分类号： F28F13/12 , F16L53/35 , F24H3/0405 , F28F1/40
摘要： Provided are a heating method making it possible that when a gas inside the body of a piping member, such as a pipe, is heated, the heating efficiency is improved; and a gas-heating piping member making it possible to perform such a heating method easily.A heat keeping member 4 which can transmit a gas to be heated is inserted to the inside of a piping member body 1 into which the gas can be passed in a state that the heat keeping member is brought into close contact with the inside, and further the piping member body 1 is heated from the outside thereof by means of a heating means 2.
摘要翻译：提供一种加热方法，使得当诸如管道的管道构件的主体内的气体被加热时，提高了加热效率; 以及能够容易地进行这样的加热方法的燃气加热配管部件。另外，在将保温体与内部紧密接触的状态下，将能够透过被加热气体的保温体4插入到能够通过气体的管道构件本体1的内部，管道构件主体1通过加热装置2从外部加热。

57. 发明授权

US07416165B2 Diaphragm valve for the vacuum exhaustion system 有权
标题翻译：用于真空排气系统的隔膜阀
公开(公告)号：US07416165B2
公开(公告)日：2008-08-26
申请号：US10546032
申请日：2004-02-09
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
IPC分类号： F16K31/122 , F16K7/17
CPC分类号： F16K7/16 , F16K51/02
摘要： A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body 2 to allow the diaphragm 3 to rest on and move away from the valve seat 8, wherein synthetic resin films 5 of predetermined thickness are coated on fluid-contacting parts 25 of the afore-mentioned body 2 and diaphragm 3. A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.
摘要翻译：隔膜阀1设置有主体2，主体2具有形成在通道之间的流入通道6，流出通道7和阀座8; 隔膜3安装在主体2中并允许搁置在阀座8上并远离阀座8; 以及安装在主体2上的驱动装置4，以允许隔膜3搁置在阀座8上并远离阀座8，其中预定厚度的合成树脂膜5涂覆在上述主体2的流体接触部分25上和隔膜3.根据本发明的隔膜阀防止由热分解产生的物质的积聚和粘附引起的阀构件的腐蚀，并且防止由所产生的物质引起的堵塞，并且当应用于真空排气系统时防止阀座泄漏的半导体制造设施。

58. 发明申请

US20050109967A1 Valve with an integral orifice 有权
公开(公告)号：US20050109967A1
公开(公告)日：2005-05-26
申请号：US11011379
申请日：2004-12-15
申请人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
IPC分类号： F04F1/08 , F16K7/14 , F16K7/16 , F16K25/00 , F16K27/00 , F16K31/02 , F16K47/00 , H04B17/00 , H04W4/22 , H04W48/12 , H04W74/08
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

59. 发明授权

US06615871B2 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US06615871B2
公开(公告)日：2003-09-09
申请号：US10277147
申请日：2002-10-22
申请人： Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
IPC分类号： F16K1110
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
摘要翻译：设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开 - 关装置具有二通阀，开口阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。所有类型的开 - 关装置的双口阀的主体构造相同，并且每个在其底面具有入口和出口。所有类型的开关装置的三通阀的主体的结构相同，并且在其底面中形成有入口，总是与入口连通的出口以及入口 - 出口开口。

60. 发明授权

US06387158B2 Method of removing moisture in gas supply system 失效
标题翻译：排气系统除湿方法
公开(公告)号：US06387158B2
公开(公告)日：2002-05-14
申请号：US09848208
申请日：2001-05-04
申请人： Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Teruo Honiden , Kouji Kawada , Katunori Komehana , Touru Hirai , Michio Yamaji
发明人： Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Teruo Honiden , Kouji Kawada , Katunori Komehana , Touru Hirai , Michio Yamaji
IPC分类号： F17D314
CPC分类号： B01D53/26 , F17D3/14
摘要： A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than a minimum pressure at which the gas flow becomes viscous and not higher than a water saturated vapor pressure at a flow temperature of the gas to remove moisture. The gas to remove moisture achieves a viscous flow when a mean free path of gas molecules is smaller than a diameter of piping of the gas supply system. If the gas for removing moisture is evacuated at normal temperature under such conditions, the adsorbed moisture on an inside surface of the piping and in the valves and filters can be removed effectively.
摘要翻译：一种通过在常温抽真空而不使用烘烤方法在气体供给系统中有效除去水分的方法。该方法包括使气体流动以除去气体的流量的气体中的水分，以除去在不低于气体流变粘度的最低压力并且不高于水的饱和蒸气压的水分气体的流动温度去除水分。当气体分子的平均自由程小于气体供应系统的管道直径时，去除水分的气体达到粘性流动。如果用于除去水分的气体在这样的条件下在常温下抽真空，则能够有效地除去管道内表面和阀门和过滤器中的吸附水分。

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