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1. 发明授权

US06615871B2 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US06615871B2
公开(公告)日：2003-09-09
申请号：US10277147
申请日：2002-10-22
申请人： Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
IPC分类号： F16K1110
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
摘要翻译：设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开 - 关装置具有二通阀，开口阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。所有类型的开 - 关装置的双口阀的主体构造相同，并且每个在其底面具有入口和出口。所有类型的开关装置的三通阀的主体的结构相同，并且在其底面中形成有入口，总是与入口连通的出口以及入口 - 出口开口。

2. 发明授权

US5983933A Shutoff-opening device 失效
标题翻译：开关装置
公开(公告)号：US5983933A
公开(公告)日：1999-11-16
申请号：US974550
申请日：1997-11-19
申请人： Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
发明人： Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
IPC分类号： F16K27/00 , F15B13/00 , F15B13/08 , F17D1/02 , F16K3/00
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87917
摘要： A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.
摘要翻译：具有两个可自由拆卸地安装在其上的阀的阀座具有一个流入通道形成构件，该流入通道形成构件具有与设置在其一端的阀的入口连通的通道;连通通道形成构件，具有通道，所述阀的端部的出口与与其相邻的另一阀的入口连通，具有与所述另一个阀的出口连通的通道的流出通道形成构件，以及具有与入口连通的通道的子通道形成构件 - 出口端口形成在另一个阀门中。

3. 发明授权

US6039360A Couplings for fluid controllers 失效
标题翻译：流体控制器联轴器
公开(公告)号：US6039360A
公开(公告)日：2000-03-21
申请号：US73387
申请日：1998-05-06
申请人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara , Shigeru Itoi , Keiji Hirao , Yuji Kawano , Shigeaki Tanaka , Kosuke Yokoyama , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara , Shigeru Itoi , Keiji Hirao , Yuji Kawano , Shigeaki Tanaka , Kosuke Yokoyama , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16L15/00 , F16K27/00 , F16L39/00 , F16L41/02 , F17D1/02 , F16L3/26
CPC分类号： F16K27/003 , F16L39/00
摘要： A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.
摘要翻译：联轴器包括具有U形横截面的保持构件和由保持构件保持的通道构件。保持构件具有形成有用于将保持构件附接到流体控制器的螺钉孔的上壁。通道构件包括具有内通道并配合在保持构件的上壁和其下壁之间的空间中的主体，与主体的内部通道连通的管状向上突出部，并且具有插入通孔位于保持构件的上壁中，以与流体控制器的向下通道连通，以及与主体的内部通道连通并且横向延伸的管状横向突出部。通道构件的上端具有向外的凸缘，并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘。

4. 发明授权

US5988217A Shutoff-opening device 失效
标题翻译：开关装置
公开(公告)号：US5988217A
公开(公告)日：1999-11-23
申请号：US972436
申请日：1997-11-18
申请人： Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16K7/16 , F16K15/16 , F16K27/00 , F16K51/00 , F16K31/12
CPC分类号： F16K27/003 , F16K51/00 , Y10T137/7783 , Y10T137/87917 , Y10T137/88054
摘要： A valve body has a main body formed with an inflow channel for a first fluid, an inflow channel for a second fluid, and an outflow channel for the first and second fluids in common. The first fluid inflow channel is always in communication with the common outflow channel through a valve chamber. A valve element operates to bring the second fluid inflow channel into or out of communication with the first fluid inflow channel and the common outflow channel.
摘要翻译：阀体具有形成有用于第一流体的流入通道，第二流体的流入通道和用于第一流体和第二流体的流出通道的主体。第一流体流入通道总是通过阀室与公共流出通道连通。阀元件操作以使第二流体流入通道进入或流出与第一流体流入通道和公共流出通道的连通。

5. 发明授权

US6035893A Shutoff-opening devices and fluid control apparatus comprising such devices 失效
标题翻译：包括这种装置的切开装置和流体控制装置
公开(公告)号：US6035893A
公开(公告)日：2000-03-14
申请号：US882291
申请日：1997-06-25
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Masayuki Hatano , Kosuke Yokoyama , Shigeaki Tanaka
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Masayuki Hatano , Kosuke Yokoyama , Shigeaki Tanaka
IPC分类号： F16K1/52 , F15B13/00 , F15B13/08 , F15C3/00 , F16K27/00 , G05D7/00 , G05D7/06 , F16K11/10
CPC分类号： F15B13/0814 , F15B13/0825 , F15B13/0835 , F15B13/0871 , F15B13/0892 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87877 , Y10T137/87885
摘要： A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.
摘要翻译：阀主体内部形成有从其后端面延伸到第一阀致动器的主通道，以及分别经由第二和第三阀致动器与主通道连通的两个子通道。阀主体具有向前延伸并且安装有第一阀致动器的倾斜面。

6. 发明授权

US5769110A Fluid control apparatus 失效
标题翻译：流体控制装置
公开(公告)号：US5769110A
公开(公告)日：1998-06-23
申请号：US672668
申请日：1996-06-28
申请人： Tadahiro Ohmi , Keiji Hirao , Michio Yamaji , Shigeru Itoi , Tsutomu Shinohara , Nobukazu Ikeda , Hiroshi Morokoshi , Tetsuya Kojima
发明人： Tadahiro Ohmi , Keiji Hirao , Michio Yamaji , Shigeru Itoi , Tsutomu Shinohara , Nobukazu Ikeda , Hiroshi Morokoshi , Tetsuya Kojima
IPC分类号： G05D7/06 , F15B13/00 , F15B13/08 , G05D16/20 , F16K11/22
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
摘要翻译：流体控制装置包括质量流量控制器，设置在控制器入口侧的两个开关阀和设置在控制器出口侧的三个开关阀。在入口侧，主流体开关阀位于净化流体开关阀上，并且在出口侧，通气开关阀位于真空吸入开关阀上，主通道开关阀进一步定位在通气开关阀上。

7. 发明授权

US06408879B1 Fluid control device 失效
公开(公告)号：US06408879B1
公开(公告)日：2002-06-25
申请号：US09127817
申请日：1998-08-03
申请人： Tadahiro Ohmi , Yukio Minami , Akihiro Morimoto , Nobukazu Ikeda , Keiji Hirao , Takashi Hirose , Michio Yamaji , Kazuhiro Yoshikawa
发明人： Tadahiro Ohmi , Yukio Minami , Akihiro Morimoto , Nobukazu Ikeda , Keiji Hirao , Takashi Hirose , Michio Yamaji , Kazuhiro Yoshikawa
IPC分类号： F16K1100
CPC分类号： F16K27/003 , Y10T137/87684
摘要： A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

8. 发明授权

US06257270B1 Fluid control device 失效
标题翻译：流体控制装置
公开(公告)号：US06257270B1
公开(公告)日：2001-07-10
申请号：US09389475
申请日：1999-09-03
申请人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
IPC分类号： F16K1120
CPC分类号： F16K27/003 , Y10T137/4259 , Y10T137/87684
摘要： A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
摘要翻译：流体控制装置在阀主体中形成有与质量流量控制器内的通道的入口连通的主通道，以及与主通道连通的相对长的子通道和相对短的子通道。要保证高纯度的工艺气体通过较长的子通道。

9. 发明授权

US5975112A Fluid control device 失效
标题翻译：流体控制装置
公开(公告)号：US5975112A
公开(公告)日：1999-11-02
申请号：US853347
申请日：1997-05-08
申请人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
IPC分类号： F15B11/00 , F15B13/00 , F15B13/02 , F15B13/08 , F16K27/00 , H01L21/02 , F16K11/20
CPC分类号： F16K27/003 , Y10T137/4259 , Y10T137/87684
摘要： A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
摘要翻译：流体控制装置在阀主体中形成有与质量流量控制器内的通道的入口连通的主通道，以及与主通道连通的相对长的子通道和相对短的子通道。要保证高纯度的工艺气体通过较长的子通道。

10. 发明授权

US06273139B1 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US06273139B1
公开(公告)日：2001-08-14
申请号：US09168858
申请日：1998-10-09
申请人： Tadahiro Ohmi , Michio Yamaji , Naoya Masuda , Takashi Hirose , Kosuke Yokoyama , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Michio Yamaji , Naoya Masuda , Takashi Hirose , Kosuke Yokoyama , Nobukazu Ikeda
IPC分类号： F16K100
CPC分类号： F16K27/003 , Y10T137/87885
摘要： A fluid control apparatus having a plurality of fluid control members each further having, a blocklike body with an upper side and a lower side, at least one monofunctional member for controlling fluid mounted on the upper side of the blocklike body, and at least one fluid channel formed between the monofunctional member for controlling fluid and the bottom side of the blocklike body; a plurality of couplings each further having, a blocklike body mounted to the bottom surface of at least one fluid control member, at least one communication channel for fluids communicating between at least two fluid channels of at least two different fluid control members; and a base plate for supporting a plurality of couplings. Each of the plurality of fluid control members is mounted to each of the plurality of couplings so as to be individually removable therefrom.
摘要翻译：一种流体控制装置，具有多个流体控制构件，每个流体控制构件还具有：具有上侧和下侧的块状体，至少一个用于控制安装在所述块状体的上侧的流体的单功能构件，以及至少一个流体用于控制流体的单功能构件和块状体的底侧之间形成的通道; 多个联接器还具有安装到至少一个流体控制构件的底表面的块状体，至少一个连通通道，用于在至少两个不同流体控制构件的至少两个流体通道之间连通的流体; 以及用于支撑多个联接件的基板。多个流体控制构件中的每一个安装到多个联接器中的每一个，以便可以单独地从其中移除。

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