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    • 57. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08598628B2
    • 2013-12-03
    • US13231514
    • 2011-09-13
    • Masahiro HikitaManabu Yanagihara
    • Masahiro HikitaManabu Yanagihara
    • H01L29/72
    • H01L29/42316H01L29/1066H01L29/2003H01L29/518H01L29/7786
    • A normally off semiconductor device with a reduced off-state leakage current, which is applicable to a power switching element, includes: a substrate; an undoped GaN layer formed above the substrate; an undoped AlGaN layer formed on the undoped GaN layer; a source electrode and a drain electrode, formed on the undoped GaN layer or the undoped AlGaN layer; a P-type GaN layer formed on the undoped AlGaN layer and disposed between the source electrode and the drain electrode; and a gate electrode formed on the P-type GaN layer, wherein the undoped GaN layer includes an active region including a channel and an inactive region not including the channel, and the P-type GaN layer is disposed to surround the source electrode.
    • 具有减小的截止状态漏电流的常闭半导体器件,其适用于功率开关元件,包括:衬底; 在衬底上形成未掺杂的GaN层; 在未掺杂的GaN层上形成未掺杂的AlGaN层; 源电极和漏电极,形成在未掺杂的GaN层或未掺杂的AlGaN层上; 形成在未掺杂的AlGaN层上并设置在源电极和漏电极之间的P型GaN层; 以及形成在所述P型GaN层上的栅电极,其中所述未掺杂的GaN层包括包括沟道的有源区和不包括所述沟道的非活性区,并且所述P型GaN层设置为围绕所述源电极。
    • 60. 发明授权
    • Bipolar transistor and method of producing the same
    • 双极晶体管及其制造方法
    • US4965650A
    • 1990-10-23
    • US420656
    • 1989-10-11
    • Masanori InadaKazuo EdaYorito OtaAtsushi NakagawaManabu Yanagihara
    • Masanori InadaKazuo EdaYorito OtaAtsushi NakagawaManabu Yanagihara
    • H01L21/331H01L29/08H01L29/417H01L29/737
    • H01L29/66318H01L29/0804H01L29/41708H01L29/7371Y10S148/01Y10S148/072
    • A dummy emitter (a dummy collector, in an inverted type) is formed in the portion corresponding to an emitter (a collector, in the inverted type) region, on a multiplayer structural material including layers for forming emitter, base and collector, and using it as mask, an external base region is exposed by etching, and a projection of the emitter (the collector, in the inverted type) region is formed, while the dummy emitter (the dummy collector, in the inverted type) is inverted into an emitter (a collector, in the inverted type) electrode, thereby forming an emitter (a collector, in the inverted type) electrode metal layer covering the whole upper surface of the emitter (the collector, in the inverted type). Using the thus formed emitter (the collector, in the inverted type) electrode metal layer, a base electrode metal layer is formed, by self-alignment, adjacent to the emitter (the collector, in the inverted type). In another method, on a multilayer structural material, impurities are introduced outside the portion corresponding to the base region of a bipolar transistor in order to insulate, at least, a portion of the layer forming the base, and if necessary a portion of the layer forming the emitter and a portion of the layer forming the collector. Further, an extension layers and the layer forming the collector, and an extension type dummy emitter (a dummy collector, in the inverted type) is formed which extends from the emitter (the collector, in the inverted type) on the base portion to the insulating region formed by transforming from the semiconductor material forming the base, and using it as mask, the external base region is exposed to form an emitter-including layer and the dummy emitter (the dummy collector, in the inverted type) is replaced by an emitter (a collector, in the inverted type) electrode metal layer covering the whole upper surface of the emitter-including layer.