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51. 发明授权

US4870289A Apparatus for controlling relation in position between a photomask and a wafer 失效
标题翻译：用于控制光掩模和晶片之间的位置关系的装置
公开(公告)号：US4870289A
公开(公告)日：1989-09-26
申请号：US248051
申请日：1988-09-23
申请人： Takeo Sato , Shinichiro Aoki , Katsumasa Yamaguchi , Tadashi Kaneko , Noboru Nomura , Keisuke Koga , Kazuhiro Yamashita
发明人： Takeo Sato , Shinichiro Aoki , Katsumasa Yamaguchi , Tadashi Kaneko , Noboru Nomura , Keisuke Koga , Kazuhiro Yamashita
IPC分类号： G03F9/00 , H01L21/68
CPC分类号： G03F9/7065 , G03F9/7049 , H01L21/682
摘要： A system for controlling the relation in position between a photomask and a wafer for use in manufacturing apparatus of a highly integrated circuit such as large scale integration (LSI). The position control system includes a coherent light source for generating two light beams which are different in frequency and polarizing direction from each other. The light beams from the coherent light source is introduced into a first diffraction grating and the diffracted light from the first diffraction grating selectively pass through a telecentric lens system and are led to second and third diffraction gratings respectively disposed on the photomask and the wafer. Light beat signals are obtained in correspondance with the diffracted light from the second and third difraction gratings and the position relation between the photomask and wafer is controlled on the basis of the phase difference between the obtained light beat signals which corresponds to the position difference between the photomask and the wafer.

52. 发明授权

US4771180A Exposure apparatus including an optical system for aligning a reticle and a wafer 失效
标题翻译：曝光装置包括用于对准掩模版和晶片的光学系统
公开(公告)号：US4771180A
公开(公告)日：1988-09-13
申请号：US916738
申请日：1986-10-08
申请人： Noboru Nomura , Kazuhiro Yamashita
发明人： Noboru Nomura , Kazuhiro Yamashita
IPC分类号： G03F9/00 , G01N21/86
CPC分类号： G03F9/7049
摘要： A reduction projection type alignment and exposure apparatus having a light source, for alignment, a reticle having at least a first grating, first lens system, a spatial filter disposed around a Fourier spectral plane of the first lens system, second lens system, a wafer having at least a second grating, and a photo-detector for detecting light intensity of superimposed beams appearing on the spatial filter. An optical system for light exposure is provided separately from the optical system for alignment which includes the light source for alignment, first and second lens system, spatial filter, etc. The light beam generated from the light source for alignment is applied to the reticle at which it is divided into a plurality of difracted light beams by the first grating, and the diffracted light beams are applied through the first lens system, spatial filter and second lens system onto the wafer so that the diffracted light beams are re-diffracted by the second grating, and the re-diffracted light beams are superimposed with the diffracted light beams and the light intensity of the superimposed beams detected by the photo-detector.
摘要翻译：一种缩小投影型对准和曝光装置，具有用于对准的光源，具有至少第一光栅的掩模版，第一透镜系统，设置在第一透镜系统的傅立叶光谱平面附近的空间滤光器，第二透镜系统，晶片具有至少第二光栅，以及用于检测出现在空间滤光片上的叠加光束的光强度的光检测器。与用于对准的光学系统分开设置用于曝光的光学系统，其包括用于对准的光源，第一和第二透镜系统，空间滤光器等。从用于对准的光源产生的光束被施加到掩模版将其通过第一光栅分割为多个衍射光束，并且将衍射光束通过第一透镜系统，空间滤光器和第二透镜系统施加到晶片上，使得衍射光束被衍射的光束并且再衍射光束与衍射光束叠加，并且由光检测器检测到的叠加光束的光强度。

53. 发明授权

US07212514B2 Mobile communication device containable in ad hoc network 失效
标题翻译：移动通信设备可以在ad hoc网络中包含
公开(公告)号：US07212514B2
公开(公告)日：2007-05-01
申请号：US10535101
申请日：2004-05-21
申请人： Kiyomi Sakamoto , Atsushi Iisaka , Atsushi Yamashita , Noboru Nomura
发明人： Kiyomi Sakamoto , Atsushi Iisaka , Atsushi Yamashita , Noboru Nomura
IPC分类号： H04Q7/24
CPC分类号： H04W72/02 , H04W72/0406 , H04W84/18
摘要： In a mobile communication device, when an inquiry packet sent from another mobile communication device for inquiring whether to accept or deny the participation in an ad hoc network is transferred to a work area, a transmission/reception control section determines whether or not a denial flag set in a storage device is 1. When the denial flag is 1, the transmission/reception control section generates a first response for denying the participation in the ad hoc network, and transmits the first response through a transmission/reception section to the other mobile communication device that transmitted the inquiry packet.
摘要翻译：在移动通信装置中，当从另一个移动通信装置发送的用于询问是否接受或拒绝参与自组织网络的查询分组被传送到工作区域时，发送/接收控制部分确定拒绝标志设置在存储装置中是1.当拒绝标志为1时，发送/接收控制部分生成拒绝参与自组织网络的第一响应，并且通过发送/接收部分将第一响应发送到另一个移动通信设备发送查询报文。

54. 发明授权

US07031655B2 Transmission system and coding communication method for a transmission system 失效
公开(公告)号：US07031655B2
公开(公告)日：2006-04-18
申请号：US09953085
申请日：2001-09-14
申请人： Noboru Nomura , Takashi Yoshida , Joji Kane
发明人： Noboru Nomura , Takashi Yoshida , Joji Kane
IPC分类号： H04B7/00
CPC分类号： G08G1/096716 , G01S1/68 , G01S13/74 , G01S13/825 , G08G1/096725 , G08G1/09675 , G08G1/096775
摘要： The conventional combination cannot realize an efficient road traffic system as a whole. A transmission system has a plurality of modules installed at different positions along a predetermined road. Each of the plurality of the modules includes a receiving section for receiving an input signal and a transmission section for transmitting an output signal on the basis of the input signal according to a predetermined radio scheme. Each of the plurality of the modules receives and transmits a signal, whereby the whole or part of the information contained in the signal is transmitted along the whole or part of the predetermined road. This transmission system can construct an efficient integrated road traffic system as a whole.

55. 发明授权

US06985132B2 Display device and method for manufacturing the same 失效
标题翻译：显示装置及其制造方法
公开(公告)号：US06985132B2
公开(公告)日：2006-01-10
申请号：US09995511
申请日：2001-11-27
申请人： Noboru Nomura , Tohru Nakagawa , Masahiro Nagasawa , Tadashi Ootake
发明人： Noboru Nomura , Tohru Nakagawa , Masahiro Nagasawa , Tadashi Ootake
IPC分类号： G09G3/34
CPC分类号： G09F9/372
摘要： A display device using a cylinder-shaped pixel having a large dipole moment and high response speed and a method for manufacturing the same. In the display device, an organic film is bonded and fixed to a part of or an entire surface of a base material having a volume of less than 1 cm3 via —A—O— bond, where A denotes Si, Ge, Sn, Ti or Zr, or via —A—N— bond, where A denotes Si, Ge, Sn, Ti or Zr, in the former, the side of O is bonded to the substrate and in the latter, the side of N is bonded to the substrate; the surface region of the base material is divided into two regions in accordance with the kind of organic films or the presence or absence of the organic film, and each of the two regions accounting for 40% or more and 60% or less of the surface area of the base material, a plurality of charged substances in different charged states or with opposite polarities in the two regions. The plurality of charged substances are dipped in liquid between a pair of substrates each having an electrode, and voltage is applied to the electrode, thereby enabling the charged substances to be rotated.
摘要翻译：使用具有大偶极矩和高响应速度的圆柱形像素的显示装置及其制造方法。在显示装置中，有机膜通过-AO键键合并固定在体积小于1cm 3的基材的一部分或整个表面上，其中A表示Si ，Ge，Sn，Ti或Zr，或通过-AN-键，其中A表示Si，Ge，Sn，Ti或Zr，在前者中，O的一面与基底结合，而在后者中， N结合到基底上; 基材的表面区域根据有机膜的种类或有机膜的有无分为两个区域，两个区域中的每一个占表面积的40％以上且60％以下基底材料的面积，在两个区域中具有不同充电状态或具有相反极性的多个带电物质。将多个带电物质浸渍在各自具有电极的一对基板之间的液体中，并且向电极施加电压，从而使带电物质能够旋转。

56. 发明授权

US06891309B2 Actuator having organic molecular layers 失效
标题翻译：具有有机分子层的致动器
公开(公告)号：US06891309B2
公开(公告)日：2005-05-10
申请号：US10445610
申请日：2003-05-27
申请人： Noboru Nomura , Ichiro Yamashita , Norihisa Mino , Tohru Nakagawa
发明人： Noboru Nomura , Ichiro Yamashita , Norihisa Mino , Tohru Nakagawa
IPC分类号： H02N1/00
CPC分类号： H02N1/004 , Y10T29/49226
摘要： A novel structure comprising two substrates disposed closely each other, in which an organic molecular layer is formed on the surface of at least one substrate wherein the gap between the surface of the organic molecular layer on one substrate and the surface of the other substrate or the surface of the organic molecular layer on the other substrate is maintained to be usually less than 100 μm, preferably less than 1 μm is provided. A motor, actuator, and vibration-absorbing table comprising such structure are also provided.
摘要翻译：一种新颖的结构，包括彼此紧密相邻的两个基板，其中在至少一个基板的表面上形成有机分子层，其中一个基板上的有机分子层的表面与另一个基板的表面之间的间隙或将另一基板上的有机分子层的表面保持通常小于100μm，优选小于1μm。还提供了包括这种结构的电动机，致动器和减振台。

57. 发明授权

US06639520B2 Transmission system and coding communication method for a transmission system 失效
公开(公告)号：US06639520B2
公开(公告)日：2003-10-28
申请号：US10037968
申请日：2001-12-21
申请人： Noboru Nomura , Takashi Yoshida , Joji Kane
发明人： Noboru Nomura , Takashi Yoshida , Joji Kane
IPC分类号： G08G109
CPC分类号： G08G1/096725 , G01S1/68 , G01S13/74 , G01S13/825 , G08G1/09675 , G08G1/096775
摘要： The conventional combination cannot realize an efficient road traffic system as a whole. A transmission system has a plurality of modules installed at different positions along a predetermined road. Each of the plurality of the modules includes a receiving section for receiving an input signal and a transmission section for transmitting an output signal on the basis of the input signal according to a predetermined radio scheme. Each of the plurality of the modules receives and transmits a signal, whereby the whole or part of the information contained in the signal is transmitted along the whole or part of the predetermined road. This transmission system can construct an efficient integrated road traffic system as a whole.

58. 发明授权

US06608594B1 Antenna apparatus and communication system 失效
标题翻译：天线设备和通信系统
公开(公告)号：US06608594B1
公开(公告)日：2003-08-19
申请号：US09680263
申请日：2000-10-05
申请人： Joji Kane , Hirotaka Ishihara , Noboru Nomura , Shinji Naka , Michio Sasaki , Akinori Yanase , Satoshi Yamada , Hirokazu Kaidou , Katsuya Tanioka
发明人： Joji Kane , Hirotaka Ishihara , Noboru Nomura , Shinji Naka , Michio Sasaki , Akinori Yanase , Satoshi Yamada , Hirokazu Kaidou , Katsuya Tanioka
IPC分类号： H01Q138
CPC分类号： H01Q1/38 , H01Q5/378 , H01Q5/385 , H01Q5/40 , H01Q9/0407 , H01Q9/065 , H01Q19/005
摘要： An antenna apparatus having at least one radiating element. A second radiating element is located opposite a first radiating element. Earth is on the side opposite to the first radiating element with respect to the second radiating element thus opposite to the second radiating element. The second radiating element intervenes between the first radiating element and earth. Either the first or the second radiating element employs a feed terminal.
摘要翻译：一种具有至少一个辐射元件的天线装置。第二辐射元件位于与第一辐射元件相对的位置。地球相对于第二辐射元件在与第一辐射元件相对的一侧上，因此与第二辐射元件相对。第二辐射元件介于第一辐射元件和地之间。第一或第二辐射元件都使用馈电端子。

59. 发明授权

US5593539A Plasma source for etching 失效
标题翻译：用于蚀刻的等离子体源
公开(公告)号：US5593539A
公开(公告)日：1997-01-14
申请号：US224960
申请日：1994-04-08
申请人： Masafumi Kubota , Noboru Nomura , Tokuhiko Tamaki
发明人： Masafumi Kubota , Noboru Nomura , Tokuhiko Tamaki
IPC分类号： H01J37/32 , B44C1/22
CPC分类号： H01J37/32091 , H01J37/32155 , H01J37/32165
摘要： An apparatus for generating plasma is disclosed. The apparatus comprises: a plasma chamber; pairs of parallel plate electrodes; and a power supply for applying high-frequency powers on the pairs of electrodes. The frequencies of the high-frequency powers and the phase difference between the high-frequency powers are adjusted so as to cause each of electrons in the plasma to move in a circular path. A dense and highly uniform plasma is generated at a low pressure level, by utilizing the phenomenon of the oscillation, revolution or cycloidal motion of electrons in a high-frequency electric field formed between the parallel plate electrodes. This plasma is suitable for etching in the LSI fabrication process.
摘要翻译：公开了一种用于产生等离子体的装置。该装置包括：等离子体室; 成对平行板电极; 以及用于在所述电极对上施加高频功率的电源。调整高频功率的频率和高频功率之间的相位差，使得等离子体中的每个电子以圆形路径移动。通过利用形成在平行板电极之间的高频电场中的电子的振荡，旋转或摆线运动的现象，在低压水平下产生致密且高度均匀的等离子体。该等离子体适用于LSI制造工艺中的蚀刻。

60. 发明授权

US5330606A Plasma source for etching 失效
标题翻译：用于蚀刻的等离子体源
公开(公告)号：US5330606A
公开(公告)日：1994-07-19
申请号：US805864
申请日：1991-12-10
申请人： Masafumi Kubota , Noboru Nomura , Tokuhiko Tamaki
发明人： Masafumi Kubota , Noboru Nomura , Tokuhiko Tamaki
IPC分类号： H01J37/32 , H01L21/00
CPC分类号： H01J37/32091 , H01J37/32155 , H01J37/32165
摘要： An apparatus for generating plasma is disclosed. The apparatus comprises: a plasma chamber; pairs of parallel plate electrodes; and a power supply for applying high-frequency powers on the pairs of electrodes. The frequencies of the high-frequency powers and the phase difference between the high-frequency powers are adjusted so as to cause each of electrons in the plasma to move in a circular path. A dense and highly uniform plasma is generated at a low pressure level, by utilizing the phenomenon of the oscillation, revolution or cycloidal motion of electrons in a high-frequency electric field formed between the parallel plate electrodes. This plasma is suitable for etching in the LSI fabrication process.
摘要翻译：公开了一种用于产生等离子体的装置。该装置包括：等离子体室; 成对平行板电极; 以及用于在所述电极对上施加高频功率的电源。调整高频功率的频率和高频功率之间的相位差，使得等离子体中的每个电子以圆形路径移动。通过利用在平行板电极之间形成的高频电场中的电子的振荡，旋转或摆线运动的现象，在低压水平下产生致密且高度均匀的等离子体。该等离子体适用于在LSI制造工艺中的蚀刻。

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