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    • 8. 发明授权
    • Method of manufacturing conductive pattern and electronic device, and electronic device
    • 制造导电图案和电子装置的方法以及电子装置
    • US07704783B2
    • 2010-04-27
    • US10599131
    • 2005-10-14
    • Tohru Nakagawa
    • Tohru Nakagawa
    • H01L51/40
    • H05K3/061B82Y10/00B82Y40/00C23F1/02G03F7/0002H01L21/32139H01L51/0022H05K2203/013
    • The manufacturing method includes forming a molecular film 16 of at least one kind of molecule on a part of a conductive film 13 by placing, on the conductive film 13, a solution 12 containing the one kind of molecule dissolved therein, with the one kind of molecule being selected from the group consisting of: a molecule expressed by Formula (1): CF3(CF2)n(CH2)mSH, where n indicates a natural number of 3 to 7 while m denotes a natural number of 8 to 18; and a molecule expressed by Formula (2): CF3(CF2)p(CH2)qSS(CH2)q′(CF2)p′CF3, where p and p′ each are a natural number of 3 to 7 independently while q and q′ each are a natural number of 8 to 18 independently. Subsequently, the conductive film 13 located in a part where the molecular film 16 has not been formed is removed by bringing the conductive film 13 into contact with an etchant for the conductive film 13. Thus, a conductive pattern 17 is formed.
    • 制造方法包括通过在导电膜13上放置含有溶解有一种分子的溶液12,在导电膜13的一部分上形成至少一种分子的分子膜16, 分子选自由式(1)表示的分子:CF 3(CF 2)n(CH 2)m SH,其中n表示3至7的自然数,而m表示8至18的自然数; 和由式(2)表示的分子:CF 3(CF 2)p(CH 2)q SS(CH 2)q'(CF 2)p'CF 3,其中p和p'各自独立地为3至7的自然数,而q和q “每个都是8到18的自然数。 随后,通过使导电膜13与用于导电膜13的蚀刻剂接触来去除位于未形成分子膜16的部分的导电膜13.因此,形成导电图案17。
    • 10. 发明授权
    • Coating liquid for forming organic layered film, method of manufacturing field effect transistor, and field effect transistor
    • 用于形成有机层状膜的涂布液,场效应晶体管的制造方法以及场效应晶体管
    • US07560301B2
    • 2009-07-14
    • US10599096
    • 2005-08-18
    • Tohru Nakagawa
    • Tohru Nakagawa
    • H01L51/40
    • H01L51/0036H01L51/0003H01L51/0007H01L51/0055H01L51/052H01L51/0537H01L51/0541H01L51/0545
    • A method of manufacturing a field effect transistor of the present invention includes: applying a coating liquid 20 containing a solvent 13 as well as first and second organic molecules 11 and 12 that have been dissolved in the solvent 13; and forming a first layer and a second layer by removing the solvent 13 contained in the coating liquid 20 that has been applied. The first layer contains the first organic molecules 11 as its main component. The second layer adjoins the first layer and contains the second organic molecules 12 as its main component. The first organic molecules 11 are a semiconductor material or a precursor of a semiconductor material. The second organic molecules 12 are an insulator material or a precursor of an insulator material. The first organic molecules 11 and the second organic molecules 12 are not compatible with each other.
    • 制造本发明的场效应晶体管的方法包括:涂布含有溶剂13的涂布液20以及溶解在溶剂13中的第一和第二有机分子11和12; 以及通过除去涂布在涂布液20中的溶剂13而形成第一层和第二层。 第一层含有第一有机分子11作为其主要成分。 第二层与第一层邻接并且包含第二有机分子12作为其主要成分。 第一有机分子11是半导体材料或半导体材料的前体。 第二有机分子12是绝缘体材料或绝缘体材料的前体。 第一有机分子11和第二有机分子12彼此不相容。