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51. 发明申请

US20050206888A1 Method and apparatus for inspecting a pattern formed on a substrate 失效
标题翻译：用于检查在基板上形成的图案的方法和装置
公开(公告)号：US20050206888A1
公开(公告)日：2005-09-22
申请号：US11131379
申请日：2005-05-18
申请人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
发明人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
IPC分类号： G01N21/956 , G03F7/20 , G03F9/00
CPC分类号： G03F7/7065 , G01N21/95684
摘要： A pattern inspection apparatus includes a light source which emits ultraviolet light, an irradiator which reduces coherency of the ultraviolet light and irradiates the coherency reduced ultraviolet light onto a specimen on which a pattern is formed through an objective lens, and a focus control means which projects light on the specimen from outside the objective lens, detects light reflected from the specimen by the projection and adjusts a height of the specimen relative to the objective lens. The apparatus further includes an image which forms an image of the specimen irradiated with the ultraviolet light and detects the formed image with a sensor, an image processor which processes a signal outputted from the sensor to detect a defect of the specimen, and a display which displays information of the defect detected by the image processor.
摘要翻译：图案检查装置包括发出紫外线的光源，减少紫外线的相干性并将相干性降低的紫外光照射到通过物镜形成图案的样本的照射器，以及投影从物镜外部对样品进行光照射，通过投影检测从样品反射的光，并调整样本相对于物镜的高度。该装置还包括形成用紫外线照射的样本的图像并用传感器检测形成的图像的图像，处理从传感器输出的信号以检测样本的缺陷的图像处理器，以及显示器显示由图像处理器检测到的缺陷的信息。

52. 发明授权

US06947644B2 Optical fiber holding structure 失效
标题翻译：光纤保持结构
公开(公告)号：US06947644B2
公开(公告)日：2005-09-20
申请号：US10193258
申请日：2002-07-12
申请人： Katsuaki Kondo , Kazuo Imamura , Minoru Yoshida , Yasuhide Sudo , Yoshiyuki Imada , Tatsuhiro Kawamura , Takashi Okuyama , Hideki Okuno , Atsushi Toyohara
发明人： Katsuaki Kondo , Kazuo Imamura , Minoru Yoshida , Yasuhide Sudo , Yoshiyuki Imada , Tatsuhiro Kawamura , Takashi Okuyama , Hideki Okuno , Atsushi Toyohara
IPC分类号： G02B6/00 , G02B6/28 , G02B6/287 , G02B6/36 , H01S3/067 , H02G3/04 , H02G3/30 , H02G11/00 , H02G15/08 , G02B6/26 , G02B6/44
CPC分类号： G02B6/3608 , G02B6/2821 , H01S3/06704
摘要： The present invention includes a sheet material, a first optical fiber, a second optical fiber optically coupled to the first optical fiber in portions thereof, and an optical fiber coupler constituted in the portions where the two optical fibers are coupled, and those of the first and second optical fibers, and the optical fiber coupler are integrally held in the sheet material.
摘要翻译：本发明包括片材，第一光纤，在其部分光耦合到第一光纤的第二光纤，以及在两个光纤耦合的部分中构成的光纤耦合器，以及第一光纤和第二光纤，并且光纤耦合器一体地保持在片材中。

53. 发明授权

US06943876B2 Method and apparatus for detecting pattern defects 失效
标题翻译：检测图案缺陷的方法和装置
公开(公告)号：US06943876B2
公开(公告)日：2005-09-13
申请号：US10223423
申请日：2002-08-20
申请人： Minoru Yoshida , Sachio Uto , Shunji Maeda , Toshihiko Nakata
发明人： Minoru Yoshida , Sachio Uto , Shunji Maeda , Toshihiko Nakata
IPC分类号： G01B11/30 , G01N21/956 , H01L21/66 , G02N21/88
CPC分类号： G01N21/95684
摘要： A method and apparatus for detecting pattern defects which includes annularly scanning of a laser beam emitted from a laser light source on a pupil of an objective lens, illuminating the scanned laser beam, through the objective lens, onto a sample on which there is formed a pattern coated with an optically transparent thin film, acquiring an optical image of the illuminated sample, and processing the acquired image to find defects in the pattern. The annular scan diameter of the laser beam is determined based on the thickness of the optically transparent thin film.
摘要翻译：一种用于检测图案缺陷的方法和装置，其包括从物镜的瞳孔上的激光光源发射的激光束的环状扫描，将扫描的激光束通过物镜照射到其上形成有涂覆有光学透明薄膜的图案，获取照射样品的光学图像，以及处理所获取的图像以发现图案中的缺陷。基于光学透明薄膜的厚度确定激光束的环形扫描直径。

54. 发明授权

US06867749B1 Control system, display device, control-use host computer, and data transmission method 有权
公开(公告)号：US06867749B1
公开(公告)日：2005-03-15
申请号：US09674175
申请日：1999-04-23
申请人： Nobuhiro II , Minoru Yoshida , Yuichi Morigaki , Satoshi Kato , Akio Shinohara
发明人： Nobuhiro II , Minoru Yoshida , Yuichi Morigaki , Satoshi Kato , Akio Shinohara
IPC分类号： G05B9/03 , G05B11/01 , G05B15/00 , G05B19/042 , G05B19/048 , G05B19/05 , G05B19/418 , G05B23/02 , G06F13/00 , G06F15/16 , G09G5/00 , H04L12/66
CPC分类号： G05B19/0421 , G05B19/052 , G05B19/4185 , G05B2219/25012 , G05B2219/31087 , G05B2219/31088 , G05B2219/31227 , G05B2219/31369 , Y02P90/18
摘要： A control system including control devices with each control device including a control unit and a display device connected with the control unit via a dedicated communication line and being capable of display corresponding to a control state of the control unit. The display device includes a communication port connected with a control unit and a communication port connected with a data processing device, and a data processing section. Further, the data transmission method includes a dedicated protocol communication transmitting data with a processing device and a common protocol communication transmitting data with another processing device. In addition, the control-host computer used in the control system includes a control unit controlling a control target and a display device.

55. 发明授权

US06765201B2 Ultraviolet laser-generating device and defect inspection apparatus and method therefor 有权
标题翻译：紫外线激光发生装置及缺陷检查装置及其方法
公开(公告)号：US06765201B2
公开(公告)日：2004-07-20
申请号：US09764457
申请日：2001-01-19
申请人： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunji Maeda
发明人： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunji Maeda
IPC分类号： G21K700
CPC分类号： G01N21/956 , G01N21/33 , G02F2001/3505 , G02F2001/3542 , H01S3/0092
摘要： An ultraviolet laser-generating device, for use in a defect inspection apparatus and a method thereof, etc., comprising: a laser ray source for irradiating and emitting a basic wave of laser ray therefrom; a wavelength converter device for receiving the basic wave of laser ray emitted from the laser ray source and for converting it into an ultraviolet laser ray composed of a multiplied high harmonic light of the basic wave of laser ray; and a container having an inlet window, upon which the basic wave of laser ray emitted from the laser ray source is incident upon, and an outlet window for emitting the ultraviolet laser ray composed of the multiplied high harmonic light of the basic wave of laser ray, and installing the wavelength converter device therein, wherein the container is hermetically sealed and is filled up with an inert gas, such as nitrogen or argon gas, therein.
摘要翻译：一种用于缺陷检查装置及其方法的紫外线激光发生装置，包括：用于从其照射和发射激光光线的基本波的激光束源; 波长转换器装置，用于接收从激光射线源发射的激光的基波，并将其转换为由激光的基波的相乘的高次谐波构成的紫外激光; 以及具有入射窗的容器，从激光射线源发射的激光的基波入射到该入口窗口，以及用于发射由激光的基波的倍增的高次谐波构成的紫外线激光的出射窗并且在其中安装波长转换器装置，其中容器被气密密封，并在其中填充有惰性气体，例如氮气或氩气。

56. 发明授权

US06748500B2 Storage device and method for data sharing 失效
标题翻译：用于数据共享的存储设备和方法
公开(公告)号：US06748500B2
公开(公告)日：2004-06-08
申请号：US10379571
申请日：2003-03-06
申请人： Motohiro Kanda , Akira Yamamoto , Toshio Nakano , Minoru Yoshida
发明人： Motohiro Kanda , Akira Yamamoto , Toshio Nakano , Minoru Yoshida
IPC分类号： G06F1200
CPC分类号： G06F3/0601 , G06F3/0607 , G06F3/061 , G06F3/064 , G06F3/0661 , G06F3/067 , G06F3/0674 , G06F3/0676 , G06F3/0689 , G06F2003/0697
摘要： In a computer system including a disk subsystem having channel interface compatible to a count-key-data format and a SCSI interface compatible to a fixed length data format, the disk subsystem is connected to a CPU controlled by an open system operating system through the SCSI interface, and connected to an other CPU controlled by a main frame operating system through the channel interface. The CPU is provided with a CKD record access library and a VSAM access library which accesses in a FBA format the VSAM record stored by the other CPU in a CKD format in the disk subsystem and allows the access by an application program of the CPU as a VSAM record based on VSAM control information.
摘要翻译：在包括具有与计数密钥数据格式兼容的通道接口的磁盘子系统和与固定长度数据格式兼容的SCSI接口的计算机系统中，磁盘子系统通过SCSI连接到由开放系统操作系统控制的CPU 接口，并通过通道接口连接到由主框架操作系统控制的其他CPU。 CPU具有CKD记录访问库和VSAM访问库，该存储库以FBA格式访问由另一个CPU存储的另一个CPU的磁盘子系统中的CKD格式的VSAM记录，并允许CPU的应用程序访问作为 VSAM记录基于VSAM控制信息。

57. 发明授权

US06706213B2 Phosphor, radiation detector containing the same, and X-ray CT apparatus 失效
标题翻译：荧光体，含有它们的放射线检测器和X射线CT装置
公开(公告)号：US06706213B2
公开(公告)日：2004-03-16
申请号：US10258543
申请日：2002-10-25
申请人： Hiromichi Yamada , Tsuneyuki Kanai , Takaaki Kobiki , Ichiro Miura , Makoto Sato , Minoru Yoshida
发明人： Hiromichi Yamada , Tsuneyuki Kanai , Takaaki Kobiki , Ichiro Miura , Makoto Sato , Minoru Yoshida
IPC分类号： C09K1180
CPC分类号： C09K11/7774 , A61B6/032 , C04B35/01 , C04B35/44 , C04B35/645 , C04B2235/3201 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3286 , C04B2235/448 , C04B2235/449 , C04B2235/764
摘要： A novel phosphor represented by the general formula (Gd1-y-zCeyScz)3Al5-dGadO12 (wherein y, z and d are values falling in the ranges of 0.0005≦y≦0.05, 0
摘要翻译：由通式（其中y，z和d是0.0005 <= y <= 0.05,0

58. 发明授权

US06674890B2 Defect inspection method and apparatus therefor 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US06674890B2
公开(公告)日：2004-01-06
申请号：US09733092
申请日：2000-12-11
申请人： Shunji Maeda , Kenji Oka , Hiroshi Makihira , Yasuhiko Nakayama , Minoru Yoshida , Yukihiro Shibata , Chie Shishido
发明人： Shunji Maeda , Kenji Oka , Hiroshi Makihira , Yasuhiko Nakayama , Minoru Yoshida , Yukihiro Shibata , Chie Shishido
IPC分类号： G06K900
CPC分类号： G06T7/001 , G01R31/308 , G01R31/311 , G03F7/7065 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148
摘要： A pattern inspection method and apparatus in which an image of a first pattern formed on a sample and an image of a second pattern formed on the sample is detected. At least one of the first pattern image and the second pattern image is converted to a gray level so as to be substantially the same with each other by linear combination including a gain and offset. A defect of the sample is detected by using the first pattern image and the second pattern image at least one of which has been converted to the gray level and a result of the detection is outputted to an external storage or processor by a communication arrangement.
摘要翻译：检测形成在样本上的第一图案的图像和形成在样本上的第二图案的图像的图案检查方法和装置。第一图案图像和第二图案图像中的至少一个被转换为灰度级，以便通过包括增益和偏移的线性组合彼此基本相同。通过使用第一图案图像和其中至少一个已经被转换为灰度级的第二图案图像和通过通信装置将检测结果输出到外部存储器或处理器来检测样本的缺陷。

59. 发明授权

US06598129B2 Storage device and method for data sharing 失效
标题翻译：用于数据共享的存储设备和方法
公开(公告)号：US06598129B2
公开(公告)日：2003-07-22
申请号：US09873359
申请日：2001-06-05
申请人： Motohiro Kanda , Akira Yamamoto , Toshio Nakano , Minoru Yoshida
发明人： Motohiro Kanda , Akira Yamamoto , Toshio Nakano , Minoru Yoshida
IPC分类号： G06F1200
CPC分类号： G06F3/0601 , G06F3/0607 , G06F3/061 , G06F3/064 , G06F3/0661 , G06F3/067 , G06F3/0674 , G06F3/0676 , G06F3/0689 , G06F2003/0697
摘要： In a computer system including a disk subsystem having channel interface compatible to a count-key-data format and a SCSI interface compatible to a fixed length data format, the disk subsystem is connected to a CPU controlled by an open system operating system through the SCSI interface, and connected to an other CPU controlled by a main frame operating system through the channel interface. The CPU is provided with a CKD record access library and a VSAM access library which accesses in a FBA format the VSAM record stored by the other CPU in a CKD format in the disk subsystem and allows the access by an application program of the CPU as a VSAM record based on VSAM control information.
摘要翻译：在包括具有与计数密钥数据格式兼容的通道接口的磁盘子系统和与固定长度数据格式兼容的SCSI接口的计算机系统中，磁盘子系统通过SCSI连接到由开放系统操作系统控制的CPU 接口，并通过通道接口连接到由主框架操作系统控制的其他CPU。 CPU具有CKD记录访问库和VSAM访问库，该存储库以FBA格式访问由另一个CPU存储的另一个CPU的磁盘子系统中的CKD格式的VSAM记录，并允许CPU的应用程序访问作为 VSAM记录基于VSAM控制信息。

60. 发明授权

US06597886B1 Image forming apparatus 失效
标题翻译：图像形成装置
公开(公告)号：US06597886B1
公开(公告)日：2003-07-22
申请号：US10046228
申请日：2002-01-16
申请人： Minoru Yoshida
发明人： Minoru Yoshida
IPC分类号： G03G1516
CPC分类号： G03G13/013 , G03G2215/018
摘要： An image forming apparatus is provided with an image forming device for forming an image of a developing agent on a photosensitive belt, an intermediate transfer drum operating as target of transfer of the developing agent image formed by the image forming device and a transfer roller for transferring the developing agent image transferred to the intermediate transfer drum further to a sheet of paper, the intermediate transfer drum including a base pipe and an elastic belt, of which the base pipe is coated with the elastic belt, the photosensitive belt and the intermediate transfer drum being driven to rotate by a same drive source.
摘要翻译：图像形成装置设置有用于在感光带上形成显影剂的图像的图像形成装置，作为转印由图像形成装置形成的显影剂图像的转印的中间转印鼓和用于转印的转印辊显影剂图像转印到中间转印鼓上一张纸，中间转印鼓包括基管和弹性带，其中基管涂覆有弹性带，感光带和中间转印鼓被驱动以由相同的驱动源旋转。

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