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51. 发明授权

US08649019B2 Shape determining device 有权
标题翻译：形状确定装置
公开(公告)号：US08649019B2
公开(公告)日：2014-02-11
申请号：US13138294
申请日：2010-01-28
申请人： Masato Kannaka , Eiji Takahashi , Masakazu Kajita , Hideki Matsuoka , Hidetoshi Tsunaki , Noritaka Morioka , Kazuhiko Tahara , Takuya Atsumi
发明人： Masato Kannaka , Eiji Takahashi , Masakazu Kajita , Hideki Matsuoka , Hidetoshi Tsunaki , Noritaka Morioka , Kazuhiko Tahara , Takuya Atsumi
IPC分类号： G01B9/02
CPC分类号： G01B11/0608 , G01B11/2441
摘要： A shape determining device includes first and second homodyne interferometers respectively provided for front and back surfaces of an object to be measured and a thickness distribution calculator that calculates a thickness distribution of the object based on intensities of first and second interference light beams respectively detected by the first and second homodyne interferometers for the front and back surfaces of the object at a plurality of measurement sites. The thickness distribution calculator calculates, for each interference light beam for which the intensity is detected by the first and second homodyne interferometers, a phase difference between the polarization components of a corresponding reference light beam and a corresponding object light beam in a corresponding non-interference light beam based on the intensity of the interference light beam, and calculates the thickness distribution based on a distribution of the calculated phase differences.
摘要翻译：形状确定装置包括分别设置在待测物体的前表面和后表面上的第一和第二零差干涉仪;以及厚度分布计算器，其基于由所述第一和第二干涉光束分别检测的第一和第二干涉光束的强度来计算物体的厚度分布用于在多个测量位置处的物体的前表面和后表面的第一和第二零差干涉仪。厚度分布计算器对于由第一和第二零差干涉仪检测到的强度的每个干涉光束计算相应的参考光束的偏振分量与相应的对象光束之间的相对差异基于干涉光束的强度的光束，并且基于计算出的相位差的分布来计算厚度分布。

52. 发明申请

US20130139950A1 ROTATIONAL MISALIGNMENT MEASURING DEVICE OF BONDED SUBSTRATE, ROTATIONAL MISALIGNMENT MEASURING METHOD OF BONDED SUBSTRATE, AND METHOD OF MANUFACTURING BONDED SUBSTRATE 有权
标题翻译：粘结基板的旋转误差测量装置，结合基板的旋转缺陷测量方法和制造粘结基板的方法
公开(公告)号：US20130139950A1
公开(公告)日：2013-06-06
申请号：US13691491
申请日：2012-11-30
申请人： Masato KANNAKA , Masakazu Kajita , Eiji Takahashi , Yuji Yamamoto , Masaru Akamatsu , Kunio Iba , Kenji Imanishi
发明人： Masato KANNAKA , Masakazu Kajita , Eiji Takahashi , Yuji Yamamoto , Masaru Akamatsu , Kunio Iba , Kenji Imanishi
IPC分类号： G01B11/27
CPC分类号： G01B11/272
摘要： A rotational misalignment between semiconductor wafers constituting a bonded wafer is calculated. A light source is arranged at a position which is on a front side of an opening of a notch and which is separated from an outer edge portion of a bonded wafer by a predetermined interval, and outputs light to irradiate the outer edge portion of the bonded wafer including the notch. A camera receives and photoelectrically converts reflected light that is specularly-reflected by the outer edge portion of the bonded wafer including the notch among the light outputted by the light source in order to output a brightness distribution of the reflected light as an image. A computer analyzes positions of notches from the image outputted by the camera to obtain a notch position misalignment, and further calculates a rotational misalignment between semiconductor wafers using a center position misalignment between the semiconductor wafers.
摘要翻译：计算构成接合晶片的半导体晶片之间的旋转未对准。光源布置在位于凹口的开口的前侧上并且与键合晶片的外边缘部分隔开预定间隔的位置处，并输出光以照射粘合的晶片的外边缘部分晶圆包括凹口。照相机接收并光电转换由光源输出的光中包括凹口的键合晶片的外边缘部分被镜面反射的反射光，以输出作为图像的反射光的亮度分布。计算机分析由相机输出的图像的凹口的位置以获得切口位置未对准，并且还使用半导体晶片之间的中心位置未对准来计算半导体晶片之间的旋转未对准。

53. 发明申请

US20120273767A1 ORGANIC ELECTROLUMINESCENT DEVICE 有权
标题翻译：有机电致发光器件
公开(公告)号：US20120273767A1
公开(公告)日：2012-11-01
申请号：US13503156
申请日：2010-10-22
申请人： Norimasa Yokoyama , Makoto Nagaoka , Kazunori Togashi , Shigeru Kusano , Eiji Takahashi
发明人： Norimasa Yokoyama , Makoto Nagaoka , Kazunori Togashi , Shigeru Kusano , Eiji Takahashi
IPC分类号： H01L51/54
CPC分类号： H01L51/0072 , H01L51/0059 , H01L51/0085 , H01L51/5016 , H01L51/5096 , H05B33/20
摘要： A high-efficiency, high-durability organic electroluminescent device, particularly a phosphorescent organic electroluminescent device is provided by using an organic compound of excellent characteristics that exhibits excellent hole-injecting/transporting performance and has high triplet exciton confining capability with an electron blocking ability, and that has high stability in the thin-film state and high luminous efficiency.The organic electroluminescent device includes a pair of electrodes, and a plurality of organic layers sandwiched between the pair of electrodes and including a light emitting layer and an electron blocking layer, wherein a compound of the following general formula (1) having a carbazole ring structure is used as a constituent material of the electron blocking layer and the light emitting layer.
摘要翻译：通过使用具有优异的空穴注入/输送性能的优异特性的有机化合物，具有高的三重态激子约束能力和电子阻挡能力，提供了高效率，高耐久性的有机电致发光器件，特别是磷光有机电致发光器件，并且在薄膜状态下具有高稳定性和高发光效率。有机电致发光器件包括一对电极和夹在该对电极之间的多个有机层，并且包括发光层和电子阻挡层，其中具有咔唑环结构的以下通式（1）的化合物用作电子阻挡层和发光层的构成材料。

54. 发明申请

US20120205642A1 ORGANIC ELECTROLUMINESCENT DEVICE 有权
标题翻译：有机电致发光器件
公开(公告)号：US20120205642A1
公开(公告)日：2012-08-16
申请号：US13503186
申请日：2010-10-22
申请人： Norimasa Yokoyama , Makoto Nagaoka , Kazunori Togashi , Shigeru Kusano , Eiji Takahashi
发明人： Norimasa Yokoyama , Makoto Nagaoka , Kazunori Togashi , Shigeru Kusano , Eiji Takahashi
IPC分类号： H01L51/50
CPC分类号： H01L51/0072 , C07D209/86 , C07D209/88 , C07D403/04 , C07D409/04 , C07D471/04 , H01L51/5016 , H01L51/5056 , H01L51/5088
摘要： A high-efficiency, high-durability organic electroluminescent device, particularly a phosphorescent organic electroluminescent device is provided by using an organic compound of excellent characteristics that exhibits excellent hole-injecting/transporting performance and has high triplet exciton confining capability with an electron blocking ability, and that has high stability in the thin-film state and high luminous efficiency.The organic electroluminescent device includes a pair of electrodes, and a plurality of organic layers sandwiched between the pair of electrodes and including a phosphorescent light-emitting material-containing light emitting layer and a hole transport layer, wherein a compound of the following general formula (1) having a carbazole ring structure is used as a constituent material of the hole transport layer.
摘要翻译：通过使用具有优异的空穴注入/输送性能的优异特性的有机化合物，具有高的三重态激子约束能力和电子阻挡能力，提供了高效率，高耐久性的有机电致发光器件，特别是磷光有机电致发光器件，并且在薄膜状态下具有高稳定性和高发光效率。有机电致发光器件包括一对电极和夹在该对电极之间的多个有机层，并且包括含磷光发光材料的发光层和空穴传输层，其中以下通式的化合物（ 1）使用咔唑环结构作为空穴传输层的构成材料。

55. 发明授权

US08193285B2 Block copolymers 有权
标题翻译：嵌段共聚物
公开(公告)号：US08193285B2
公开(公告)日：2012-06-05
申请号：US12300512
申请日：2007-05-16
申请人： Eiji Takahashi , Shoji Yamaguchi
发明人： Eiji Takahashi , Shoji Yamaguchi
IPC分类号： C08F293/00 , C08F291/06 , C08L53/00
CPC分类号： C08F297/026 , C08F293/005 , C08F297/02 , C08L53/00 , C08L2666/02
摘要： It is to provide a block copolymer that can form a microphase separation structure even with a small molecular size, and that can form a microphase separation structure with a small domain size.It is a block copolymer represented by the formula A-C-B (wherein A represents a segment which is a homopolymer or random or block copolymer consisting of at least 1 kind or repeat units represented by formula (II); B represents a segment which is a homopolymer, or random or block copolymer consisting of at least 1 kind of repeat units represented by formula (III); C represents A, B or A-B; however, at least 1 segment of each A has a water-repellent group, or at least 1 segment of each B has a polar group); which block copolymer has a mass average molecular weight of 50,000 or less, and that can form a microphase separation structure.
摘要翻译：提供即使具有小分子尺寸也可以形成微相分离结构的嵌段共聚物，并且可以形成具有小畴尺寸的微相分离结构。它是由式ACB表示的嵌段共聚物（其中A表示由至少1种或由式（II）表示的重复单元组成的均聚物或无规或嵌段共聚物的链段; B表示均聚物的链段，或由式（III）表示的至少1种重复单元组成的无规或嵌段共聚物; C表示A，B或AB;但是，每个A的至少1个链段具有拒水性基团或至少1个片段每个B具有极性基团）; 该嵌段共聚物的质均分子量为50,000以下，可以形成微相分离结构。

56. 发明申请

US20120123076A1 HIGH-MOLECULAR-WEIGHT COPOLYMER 有权
标题翻译：高分子量共聚物
公开(公告)号：US20120123076A1
公开(公告)日：2012-05-17
申请号：US13384929
申请日：2010-08-04
申请人： Eiji Takahashi , Shinji Marumo , Gou Mishima
发明人： Eiji Takahashi , Shinji Marumo , Gou Mishima
IPC分类号： C08F220/10
CPC分类号： C08F297/02 , C08F2/06 , C08F4/48 , C08F12/22 , C08F12/24 , C08F220/18
摘要： It is an object of the present invention to provide (1) a copolymer for a cured product that is satisfactory in properties, such as adhesion properties, as a chip stacking adhesive or the like. The present invention is a copolymer comprising repeating units represented by formula (I), formula (II), and formula (III), (wherein R1, R2, and R3 each independently represent a hydrogen atom or a methyl group, R4 represents an alkyl group or a cycloalkyl group, R5 represents a hydrogen atom or a C1 to C6 alkyl group, m, n, and k represent a molar ratio of the respective repeating units, m represents a positive number of 0 or more and less than 1, n and k each independently represent a positive number, and satisfy a relation of m+n+k=1), and having a weight-average molecular weight in the range of 50,000 to 200,000.
摘要翻译：本发明的目的是提供（1）作为芯片堆叠粘合剂等具有令人满意的固化产物等粘合性能的共聚物。本发明是包含由式（I），式（II）和式（III）表示的重复单元的共聚物，其中R 1，R 2和R 3各自独立地表示氢原子或甲基，R 4表示烷基基团或环烷基，R5表示氢原子或C1〜C6烷基，m，n和k表示各重复单元的摩尔比，m表示0以上且小于1的正数，n k分别独立地表示正数，满足m + n + k = 1的关系），重均分子量在50,000〜200,000的范围内。

57. 发明申请

US20120022385A1 Electrocardiographic Signal Detection Device 有权
标题翻译：心电图信号检测装置
公开(公告)号：US20120022385A1
公开(公告)日：2012-01-26
申请号：US13248109
申请日：2011-09-29
申请人： Toru Shimuta , Eiji Takahashi
发明人： Toru Shimuta , Eiji Takahashi
IPC分类号： A61B5/0404
CPC分类号： A61B5/0404 , A61B5/04284 , A61B5/6898 , A61B2560/0468
摘要： An electrocardiographic signal detection device that includes at least one pair of electrodes that detect electrical signals of a living body; an insulating film disposed on the at least one pair of electrodes, the insulating film having a living body contact surface; a differential amplifier that generates an electrocardiographic signal by differentially amplifying the electrical signals of the living body; and an arithmetic processing unit that obtains biological information based on the electrocardiographic signal generated by the differential amplifier, wherein the insulating film and the at least one pair of electrodes are arranged such that the electrical signals of the living body are detected through capacitive coupling between the living body in contact with the living body contact surface of the insulating film and the at least one pair of electrodes.
摘要翻译：一种心电图信号检测装置，其包括检测生物体的电信号的至少一对电极; 设置在所述至少一对电极上的绝缘膜，所述绝缘膜具有活体接触面; 差分放大器，通过差分放大生物体的电信号来产生心电图信号; 以及算术处理单元，其基于由所述差分放大器生成的心电信号获取生物信息，其中所述绝缘膜和所述至少一对电极被布置为使得通过所述生物体的电容耦合检测所述生物体的电信号，活体与绝缘膜的活体接触表面和至少一对电极接触。

58. 发明申请

US20110279822A1 PROFILE MEASURING APPARATUS 有权
标题翻译：配置测量装置
公开(公告)号：US20110279822A1
公开(公告)日：2011-11-17
申请号：US13138247
申请日：2010-01-26
申请人： Masato Kannaka , Eiji Takahashi , Masakazu Kajita
发明人： Masato Kannaka , Eiji Takahashi , Masakazu Kajita
IPC分类号： G01B11/02
CPC分类号： G01B9/02021 , G01B9/02003 , G01B9/02027 , G01B11/06 , G01B11/2441 , G01B2290/65 , G01B2290/70
摘要： A shape determining device (X) splits the original light beam from a light source (Y) into two light beams, directs the light beams to the front and back surfaces of the object (1) to be determined, and performs optical heterodyne interference using the split light beams at the front and back surfaces of the object (1) to be determined. In the shape determining device (X), each of the split light beams is further split into a main light beam and a subordinate light beam, the subordinate light beam interferes with the main light beam at each of the front and back surfaces before and after the illumination of the object (1) to be determined, the signals after the interference are phase-detected, and the difference between the phases acquired by the phase detection is detected at each of the front and back surfaces of the object (1) to be determined. In the shape determining device (X), optical modulation for performing the optical heterodyne interference is performed before the optical heterodyne interference of the split light beams after the split light beams are directed to the front and back surfaces of the object (1) to be determined. Furthermore, in the shape determining device (X), a measurement optical system before the phase detection and after the split light beams are directed to the front and back surfaces of the object (1) to be determined is maintained integrally.
摘要翻译：形状确定装置（X）将来自光源（Y）的原始光束分成两束，将光束引导到物体（1）的正面和背面以确定，并且使用在待确定物体（1）的前表面和后表面处的分束光束。在形状确定装置（X）中，每个分束光束进一步被分割成主光束和从属光束，从属光束在前后表面的每一个前后干涉主光束要确定的物体（1）的照明，干涉后的信号被相位检测，并且通过相位检测获得的相位之间的差异在物体（1）的前表面和后表面被检测到确定。在形状确定装置（X）中，在将分束光束分散在物体（1）的前后表面之前的分束光束的光学外差干涉之前进行用于执行光学外差干涉的光调制决心。此外，在形状确定装置（X）中，在相位检测之前和分割光束之后的测量光学系统被引导到待确定的物体（1）的前表面和后表面一体地保持。

59. 发明授权

US08043659B2 Substrate processing apparatus and substrate processing method 有权
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US08043659B2
公开(公告)日：2011-10-25
申请号：US12022533
申请日：2008-01-30
申请人： Eiji Takahashi , Norihiko Amikura
发明人： Eiji Takahashi , Norihiko Amikura
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： H01L21/67069 , H01L21/02071
摘要： A substrate processing method capable of controlling the internal pressure of a processing chamber to a high pressure and exhausting gases within the processing chamber at a high rate. The substrate processing method is for use in a substrate processing apparatus having a processing chamber, a supply unit supplying a processing gas into the processing chamber, a first pipe connected to the processing chamber at one end thereof, a turbo molecular pump disposed in the first pipe, a first shutoff valve disposed between the processing chamber and the turbo molecular pump in the first pipe, a second pipe connected to the processing chamber at one end thereof, a pressure control valve disposed in the second pipe, and a dry pump connected to the other end of the first pipe and to the other end of the second pipe. The substrate processing method comprises a pressure control step of controlling the internal pressure of the processing chamber using the pressure control valve after closing the first shutoff valve when performing a treatment on a substrate housed in the processing chamber; a first exhaust step of exhausting gases within the processing chamber through the second pipe using the dry pump by opening the pressure control valve after performing the treatment on the substrate; and a second exhaust step of exhausting gases within the processing chamber through the first pipe using the turbo molecular pump by closing the pressure control valve and opening the first shutoff valve after the first exhaust step.
摘要翻译：一种基板处理方法，其能够以高速率将处理室的内部压力控制到高压并且在处理室内排出气体。基板处理方法用于具有处理室的基板处理装置，向处理室供给处理气体的供给单元，在其一端与处理室连接的第一管，设置在第一个中的涡轮分子泵管道，设置在第一管中的处理室和涡轮分子泵之间的第一截止阀，在其一端连接到处理室的第二管，设置在第二管中的压力控制阀，以及连接到第一管的另一端和第二管的另一端。基板处理方法包括压力控制步骤，当在容纳在处理室中的基板上进行处理时，在关闭第一截止阀之后使用压力控制阀来控制处理室的内部压力; 第一排气步骤，通过在对所述基板进行处理之后打开所述压力控制阀，通过所述干式泵通过所述第二管排出所述处理室内的气体; 以及第二排气步骤，通过关闭所述压力控制阀并在所述第一排气步骤之后打开所述第一截止阀，通过所述涡轮分子泵通过所述第一管排出所述处理室内的气体。

60. 发明授权

US07926509B2 Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method 有权
标题翻译：聚类流体流量控制方法和方法中采用的聚类流体流量控制装置
公开(公告)号：US07926509B2
公开(公告)日：2011-04-19
申请号：US11182762
申请日：2005-07-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
IPC分类号： F16K49/00
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
摘要翻译：公开了一种使用压力式流量控制装置控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP1（其中K是常数），气体处于孔口上游侧的气体压力P1与孔口下游侧的气体压力P2之间的比P2 / P1保持在不高于气体的临界压力比的值的状态，的分子通过将压力型流量控制装置加热到高于40℃的温度来解离，或者通过将稀释气体施加到聚集流体以使其低于分压使得聚集流体被允许通过通过孔在单分子状态。

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