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51. 发明授权

US6048774A Method of manufacturing dynamic amount semiconductor sensor 失效
标题翻译：动态量半导体传感器的制造方法
公开(公告)号：US6048774A
公开(公告)日：2000-04-11
申请号：US103935
申请日：1998-06-25
申请人： Toshimasa Yamamoto , Nobuyuki Kato , Kazuhiko Kano , Makiko Sugiura
发明人： Toshimasa Yamamoto , Nobuyuki Kato , Kazuhiko Kano , Makiko Sugiura
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84 , G01P15/13
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： In a method of manufacturing a dynamic amount sensor including a beam structure and a fixed electrode which are respectively supported by anchor parts of a substrate, opening portions are formed on a first semiconductor substrate where the anchor parts are to be formed. Each of the opening portions is composed of a plurality of stripe-like openings. Then a first thin film for forming the anchor parts and a second thin film are formed on the first semiconductor substrate in that order. After the surface of the second thin film is polished, a second semiconductor substrate is bonded to the polished surface of the second thin film. In this method, because the opening portions are composed of the plurality of stripe-like openings, the second thin film is flattened without having any steps thereon.
摘要翻译：在制造分别由基板的锚定部支撑的梁结构和固定电极的动态量传感器的制造方法中，在要形成锚定部的第一半导体基板上形成开口部。每个开口部分由多个条状开口组成。然后在第一半导体衬底上依次形成用于形成锚定部分的第一薄膜和第二薄膜。在第二薄膜的表面被抛光之后，第二半导体衬底被结合到第二薄膜的抛光表面上。在该方法中，由于开口部分由多个条状开口组成，所以第二薄膜在其上没有任何步骤而变平。

52. 发明申请

US20140214209A1 COMPLEX DEVICE AND ROBOT HAND DRIVE CONTROL APPARATUS 有权
标题翻译：复杂装置和机器人手动控制装置
公开(公告)号：US20140214209A1
公开(公告)日：2014-07-31
申请号：US14343526
申请日：2012-08-28
申请人： Makiko Sugiura , Hirofumi Higuchi
发明人： Makiko Sugiura , Hirofumi Higuchi
IPC分类号： B25J9/16 , G01L1/16 , B06B1/06
CPC分类号： B25J9/1612 , B06B1/0674 , B25J13/082 , G01B17/00 , G01L1/16 , G01L1/162 , G01L1/255 , G01L5/226
摘要： A complex device includes: a substrate having a thick portion, a cavity and a membrane for bridging the cavity; and multiple piezoelectric elements having a lower electrode, a piezoelectric film and an upper electrode. A part of the piezoelectric elements has a projecting portion arranged on the upper electrode. The part of piezoelectric elements (30) provides a vertical pressure detection element. The piezoelectric elements further have an ultrasonic element other than the vertical pressure detection element. The ultrasonic element is arranged over at least the cavity of the substrate in a horizontal direction.
摘要翻译：复杂装置包括：具有厚部分的基底，用于桥接空腔的空腔和膜; 以及具有下电极，压电膜和上电极的多个压电元件。压电元件的一部分具有布置在上电极上的突出部分。压电元件（30）的一部分提供垂直压力检测元件。压电元件还具有除垂直压力检测元件之外的超声波元件。超声波元件在水平方向上至少布置在基板的空腔上。

53. 发明授权

US07730785B2 Ultrasonic sensor and manufacture method of the same 有权
标题翻译：超声波传感器及其制造方法相同
公开(公告)号：US07730785B2
公开(公告)日：2010-06-08
申请号：US11790298
申请日：2007-04-24
申请人： Hiroyuki Wado , Makiko Sugiura
发明人： Hiroyuki Wado , Makiko Sugiura
IPC分类号： G01N9/24 , H01L41/00
CPC分类号： B06B1/0688 , H01L41/0973
摘要： An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled portion and the piezoelectric oscillator construct a membrane structure which will resonate at a predetermined frequency.
摘要翻译：超声波传感器设置有布置有薄壁部分的基板单元和形成在基板单元处的压电振荡器。压电振荡器包括两个电极和位于两个电极之间的压电薄膜。薄壁部分和压电振荡器构成将以预定频率谐振的膜结构。

54. 发明授权

US07622849B2 Ultrasonic sensor having vibrator mounted on substrate 失效
标题翻译：具有安装在基板上的振动器的超声波传感器
公开(公告)号：US07622849B2
公开(公告)日：2009-11-24
申请号：US11712511
申请日：2007-03-01
申请人： Kazuaki Watanabe , Takahiko Yoshida , Makiko Sugiura , Noboru Endoh , Yasuyuki Okuda
发明人： Kazuaki Watanabe , Takahiko Yoshida , Makiko Sugiura , Noboru Endoh , Yasuyuki Okuda
IPC分类号： H01L41/07
CPC分类号： G10K9/122
摘要： An ultrasonic sensor composed of a substrate and a piezoelectric vibrator mounted on the substrate is advantageously used as a sensor for detecting a distance to an object located in front of an automotive vehicle. Ultrasonic waves transmitted from the sensor are reflected by the object, and the reflected waves are received by the sensor. Based on the reflected waves, the distance from the vehicle to the object is calculated. To reduce rigidity and thereby to lower a resonant frequency of the substrate to a desirable level, grooves are formed in the substrate. A thickness of the substrate is not reduced to maintain its mechanical strength against an impact force. A resonant frequency which is desirable to realize a sufficiently high directivity and sensitivity is obtained in this manner without enlarging a size of the ultrasonic sensor.
摘要翻译：作为用于检测到位于机动车辆前方的物体的距离的传感器，有利地使用由基板和安装在基板上的压电振动器构成的超声波传感器。从传感器发射的超声波被物体反射，反射波被传感器接收。基于反射波，计算从车辆到物体的距离。为了降低刚性，从而将基板的谐振频率降低到期望的水平，在基板中形成凹槽。不降低基板的厚度以保持其抵抗冲击力的机械强度。以这种方式获得期望实现足够高的方向性和灵敏度的共振频率，而不扩大超声波传感器的尺寸。

55. 发明授权

US07490517B2 Sensor attachment structure and ultrasonic sensing device 有权
标题翻译：传感器附件结构和超声波感应装置
公开(公告)号：US07490517B2
公开(公告)日：2009-02-17
申请号：US11488140
申请日：2006-07-18
申请人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
发明人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
IPC分类号： G01H5/00
CPC分类号： G01D11/30 , G01S7/521
摘要： A sensor attachment structure includes a sound receiving member for receiving an ultrasound, an ultrasonic sensor attached to the sound receiving member. The ultrasonic sensor includes a semiconductor substrate having first and second surfaces opposite to each other and a substrate recess portion recessed from the first surface of the semiconductor substrate so as to form a membrane in the semiconductor substrate. Furthermore, a cap member is located between the sound receiving member and the semiconductor substrate to cover the second surface of the semiconductor substrate. In addition, the cap member has a first surface bonded to the sound receiving member, and a second surface that is bonded to the second surface of the semiconductor substrate at an outer periphery section of the membrane while having a gap between the cap member and the membrane.
摘要翻译：传感器附接结构包括用于接收超声波的声音接收构件，附接到声音接收构件的超声波传感器。超声波传感器包括具有彼此相对的第一和第二表面的半导体衬底和从半导体衬底的第一表面凹陷的衬底凹部，以在半导体衬底中形成膜。此外，盖构件位于声音接收构件和半导体衬底之间以覆盖半导体衬底的第二表面。此外，盖构件具有接合到声音接收构件的第一表面和在膜的外周部分处接合到半导体衬底的第二表面的第二表面，同时在盖构件和盖构件之间具有间隙膜。

56. 发明申请

US20080307888A1 ULTRASONIC SENSOR 失效
标题翻译：超声波传感器
公开(公告)号：US20080307888A1
公开(公告)日：2008-12-18
申请号：US12137048
申请日：2008-06-11
申请人： Tetsuo Yoshioka , Makiko Sugiura , Yasuyuki Okuda , Takahiko Yoshida , Kazuaki Watanabe
发明人： Tetsuo Yoshioka , Makiko Sugiura , Yasuyuki Okuda , Takahiko Yoshida , Kazuaki Watanabe
IPC分类号： G01N29/00
CPC分类号： B60Q1/0023 , G01S7/521 , G01S15/931 , G01S2015/939 , G10K11/02
摘要： An ultrasonic sensor includes an ultrasonic detector for detecting an ultrasonic wave, an acoustic matching member joined to the ultrasonic detector, a housing in which the ultrasonic detector and the acoustic matching member are accommodated, a vibration isolator located between the acoustic matching member and an inner side wall of the housing to damp an unwanted vibration from outside, and a cushion member located between the ultrasonic detector and an inner bottom wall of the housing to absorb external force applied to the ultrasonic sensor The cushion member is not in contact with the acoustic matching member.
摘要翻译：一种超声波传感器，包括：超声波检测用超声波检测器，与超声波检测器接合的声匹配部件，容纳超声波检测器和声匹配部件的壳体;位于声匹配部件与内窥镜外壳的侧壁，以阻止来自外部的不需要的振动，以及位于超声波检测器和壳体的内底壁之间的缓冲构件，以吸收施加到超声波传感器的外力。缓冲构件不与声匹配会员。

57. 发明授权

US07466064B2 Ultrasonic element 有权
标题翻译：超声波元件
公开(公告)号：US07466064B2
公开(公告)日：2008-12-16
申请号：US11355114
申请日：2006-02-16
申请人： Makiko Sugiura , Tomoki Itoh
发明人： Makiko Sugiura , Tomoki Itoh
IPC分类号： H01L41/08
CPC分类号： H03H9/588 , B06B1/0692 , H03H3/02 , H03H9/02133 , H03H9/172 , H03H9/564 , H03H9/583
摘要： An ultrasonic element has a membrane formed as a thin walled portion of a substrate, on which a piezoelectric vibrator is formed. The piezoelectric vibrator comprises a piezoelectric thin film and metal electrode films, which are formed into a sandwiched structure. The piezoelectric vibrator resonates with the membrane at a predetermined ultrasonic wave-band frequency. A hollow-out pattern is formed in the piezoelectric thin film to divide the piezoelectric vibrator into multiple portions, wherein the hollow-out pattern is formed in such an area corresponding to stress concentrated area which appears in vibrations of the membrane in diametrical directions thereof. The membrane is made to be easily deformed in response to vibration of the piezoelectric vibrator, so that an ultrasound of a higher sound pressure can be emitted.
摘要翻译：超声波元件具有形成为基板的薄壁部分的膜，在其上形成压电振动器。压电振子包括形成为夹层结构的压电薄膜和金属电极膜。压电振动器以预定的超声波频带频率与膜谐振。在压电薄膜中形成中空图案，以将压电振动器分成多个部分，其中，中空图案形成在对应于在其沿直径方向的膜的振动中出现的应力集中区域的区域中。该膜由于压电振子的振动而容易变形，能够发出较高声压的超声波。

58. 发明授权

US07406871B2 Fuel type identifying apparatus 失效
标题翻译：燃料型识别装置
公开(公告)号：US07406871B2
公开(公告)日：2008-08-05
申请号：US11032222
申请日：2005-01-11
申请人： Makiko Sugiura
发明人： Makiko Sugiura
IPC分类号： G01N29/00 , F02B33/00
CPC分类号： F02D41/0025 , F02D2200/0611 , G01N21/31 , G01N33/28
摘要： A fuel tank is allowed to hold any of types of liquid fuels and currently hold one type of liquid fuel. A light emitting element outputs a light beam of a predetermined emission spectrum to the liquid fuel of the fuel tank. The liquid fuel changes the light beam to a reflected light beam of a reflection spectrum according to spectral characteristics of the liquid fuel. The reflection spectrum is peculiar to the type of the liquid fuel of the fuel tank. A light receiving element detects the reflection spectrum, and a control circuit receives the detected reflection spectrum from the light receiving element. The control circuit collates the detected reflection spectrum with a referential reflection spectrum corresponding to each fuel type and identified the type of the liquid fuel of the fuel tank according to a collation result.
摘要翻译：允许燃料箱容纳任何类型的液体燃料，并且目前保持一种液体燃料。发光元件将预定发射光谱的光束输出到燃料箱的液体燃料。液体燃料根据液体燃料的光谱特性将光束改变成反射光谱的反射光束。反射光谱是燃料箱液体燃料类型所特有的。光接收元件检测反射光谱，并且控制电路从光接收元件接收检测到的反射光谱。控制电路将检测到的反射光谱与对应于每种燃料类型的参考反射光谱进行比较，并根据核对结果识别燃料箱的液体燃料的类型。

59. 发明授权

US07275435B2 Capacitance type semiconductor dynamic quantity sensor 有权
标题翻译：电容式半导体动态量传感器
公开(公告)号：US07275435B2
公开(公告)日：2007-10-02
申请号：US10926137
申请日：2004-08-26
申请人： Makiko Sugiura
发明人： Makiko Sugiura
IPC分类号： G01P15/125
CPC分类号： G01C19/5719 , G01P15/125 , G01P2015/0814
摘要： A capacitance type semiconductor dynamic quantity sensor includes a beam-shaped movable electrode displaceable in a predetermined direction in response to application of a dynamic quantity to a support substrate, and beam-shaped fixed electrodes which are fixedly supported on the support substrate and disposed so that the side surface thereof faces a side surface of the movable electrode. The applied dynamic quantity is detected on the basis of variation of electric capacitance between the side surface of the movable electrode and the side surface of the fixed electrodes. Countermeasures are included to prevent sticking between the fixed electrodes and the movable electrode.
摘要翻译：电容型半导体动态量传感器包括响应于向支撑基板施加动态量而沿预定方向移位的波束状可动电极和固定地支撑在支撑基板上的梁状固定电极，其侧表面面向可动电极的侧表面。基于可动电极的侧面和固定电极的侧面之间的电容的变化来检测所施加的动态量。包括对策以防止固定电极和可动电极之间的粘连。

60. 发明申请

US20070079661A1 Sensor attachment structure and ultrasonic sensing device 有权
标题翻译：传感器附件结构和超声波感应装置
公开(公告)号：US20070079661A1
公开(公告)日：2007-04-12
申请号：US11488140
申请日：2006-07-18
申请人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
发明人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
IPC分类号： G01D21/00
CPC分类号： G01D11/30 , G01S7/521
摘要： A sensor attachment structure includes a sound receiving member for receiving an ultrasound, an ultrasonic sensor attached to the sound receiving member. The ultrasonic sensor includes a semiconductor substrate having first and second surfaces opposite to each other and a substrate recess portion recessed from the first surface of the semiconductor substrate so as to form a membrane in the semiconductor substrate. Furthermore, a cap member is located between the sound receiving member and the semiconductor substrate to cover the second surface of the semiconductor substrate. In addition, the cap member has a first surface bonded to the sound receiving member, and a second surface that is bonded to the second surface of the semiconductor substrate at an outer periphery section of the membrane while having a gap between the cap member and the membrane.
摘要翻译：传感器附接结构包括用于接收超声波的声音接收构件，附接到声音接收构件的超声波传感器。超声波传感器包括具有彼此相对的第一和第二表面的半导体衬底和从半导体衬底的第一表面凹陷的衬底凹部，以在半导体衬底中形成膜。此外，盖构件位于声音接收构件和半导体衬底之间以覆盖半导体衬底的第二表面。此外，盖构件具有接合到声音接收构件的第一表面和在膜的外周部分处接合到半导体衬底的第二表面的第二表面，同时在盖构件和盖构件之间具有间隙膜。

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