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1. 发明授权

US6048774A Method of manufacturing dynamic amount semiconductor sensor 失效
标题翻译：动态量半导体传感器的制造方法
公开(公告)号：US6048774A
公开(公告)日：2000-04-11
申请号：US103935
申请日：1998-06-25
申请人： Toshimasa Yamamoto , Nobuyuki Kato , Kazuhiko Kano , Makiko Sugiura
发明人： Toshimasa Yamamoto , Nobuyuki Kato , Kazuhiko Kano , Makiko Sugiura
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84 , G01P15/13
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： In a method of manufacturing a dynamic amount sensor including a beam structure and a fixed electrode which are respectively supported by anchor parts of a substrate, opening portions are formed on a first semiconductor substrate where the anchor parts are to be formed. Each of the opening portions is composed of a plurality of stripe-like openings. Then a first thin film for forming the anchor parts and a second thin film are formed on the first semiconductor substrate in that order. After the surface of the second thin film is polished, a second semiconductor substrate is bonded to the polished surface of the second thin film. In this method, because the opening portions are composed of the plurality of stripe-like openings, the second thin film is flattened without having any steps thereon.
摘要翻译：在制造分别由基板的锚定部支撑的梁结构和固定电极的动态量传感器的制造方法中，在要形成锚定部的第一半导体基板上形成开口部。每个开口部分由多个条状开口组成。然后在第一半导体衬底上依次形成用于形成锚定部分的第一薄膜和第二薄膜。在第二薄膜的表面被抛光之后，第二半导体衬底被结合到第二薄膜的抛光表面上。在该方法中，由于开口部分由多个条状开口组成，所以第二薄膜在其上没有任何步骤而变平。

2. 发明申请

US20050001275A1 Semiconductor dynamic quantity sensor 审中-公开
标题翻译：半导体动量传感器
公开(公告)号：US20050001275A1
公开(公告)日：2005-01-06
申请号：US10849259
申请日：2004-05-20
申请人： Makiko Sugiura , Kazuhiko Kano
发明人： Makiko Sugiura , Kazuhiko Kano
IPC分类号： G01P15/125 , G01P15/08 , H01L27/14 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： An acceleration sensor comprising a spring portion joined to the base portion of a semiconductor substrate and elastically displaced in Y-direction in accordance with an applied acceleration, movable electrodes joined to the spring portion, fixed electrodes disposed to face the movable electrodes and adjusting electrodes for adjusting the spring constant of the spring portion. The spring portion has a pair of beams facing each other in the Y-direction, and is elastically deformed so that the interval between the pair of beams is varied. The adjusting electrodes are respectively equipped at the outside of one of the paired beams and at the outside of the other beam, and electrostatic force can be applied by the adjusting electrodes so that the paired beams are separated from each other.
摘要翻译：一种加速度传感器，包括：接合到半导体基板的基部的弹簧部分，并且根据施加的加速度在Y方向上弹性位移;连接到弹簧部分的可动电极;设置成面对可动电极的固定电极;以及用于调节弹簧部分的弹簧常数。弹簧部分具有在Y方向上彼此面对的一对梁，并且弹性变形，使得一对梁之间的间隔变化。调整电极分别配置在成对梁中的一个的外侧并且在另一个梁的外侧，并且可以通过调节电极施加静电力，使得成对的光束彼此分离。

3. 发明授权

US06199430B1 Acceleration sensor with ring-shaped movable electrode 有权
标题翻译：带环形可动电极的加速度传感器
公开(公告)号：US06199430B1
公开(公告)日：2001-03-13
申请号：US09241137
申请日：1999-02-02
申请人： Kazuhiko Kano , Koji Hattori , Yoshinori Ohtsuka , Makiko Sugiura , Minekazu Sakai , Inao Toyoda , Yasutoshi Suzuki , Seiichiro Ishio , Minoru Murata
发明人： Kazuhiko Kano , Koji Hattori , Yoshinori Ohtsuka , Makiko Sugiura , Minekazu Sakai , Inao Toyoda , Yasutoshi Suzuki , Seiichiro Ishio , Minoru Murata
IPC分类号： G01P15125
CPC分类号： B81B7/0006 , B81B2201/0235 , G01P15/0802 , G01P15/125 , G01P15/135 , G01P15/18 , G01P2015/0817 , G01P2015/0828 , G01V1/181 , H01H1/0036
摘要： An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which are disposed on a substrate. The movable electrode is displaced by acceleration approximately in parallel to the substrate and contacts the fixed electrode, so that the acceleration is detected. The fixed electrode is divided into a detecting fixed electrode for contacting the movable electrode and a sensitivity controlling fixed electrode insulated from the detecting fixed electrode. Accordingly, potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled to control sensitivity of acceleration.
摘要翻译：加速度传感器具有环形可动电极，其经由梁和固定电极连接到锚定部分，固定电极面向限定特定间隔的环形可动电极，该固定电极设置在基板上。可移动电极通过与基板大致平行的加速移位，并与固定电极接触，从而检测加速度。固定电极被分成用于接触可动电极的检测固定电极和与检测固定电极绝缘的灵敏度控制固定电极。因此，独立地控制可动电极和检测用固定电极之间以及可动电极与灵敏度控制固定电极之间的电位差，以控制加速度的灵敏度。

4. 发明授权

US06602428B2 Method of manufacturing sensor having membrane structure 有权
公开(公告)号：US06602428B2
公开(公告)日：2003-08-05
申请号：US09991986
申请日：2001-11-26
申请人： Hiroyuki Wado , Makiko Sugiura , Toshimasa Yamamoto , Yukihiro Takeuchi , Yasushi Kohno
发明人： Hiroyuki Wado , Makiko Sugiura , Toshimasa Yamamoto , Yukihiro Takeuchi , Yasushi Kohno
IPC分类号： H01L2100
CPC分类号： G01F1/6845 , B81B2201/0264 , B81B2203/0127 , B81C1/00182 , B81C2201/014 , B81C2201/0169 , G01L9/0042
摘要： A sensor for measuring a physical amount such as an amount of air includes a membrane structure composed of metal stripes sandwiched between first and second insulating layers. A metal layer made of platinum or the like is formed on the first insulating layer and then heat-treated to improve its properties. Then, the metal layer is etched into a form of the metal stripes. The second insulating layer made of a material such as silicon dioxide is formed on the etched metal stripes. Since the metal layer is heat-treated before it is etched into the form of metal stripes, the metal stripes are not deformed by the heat-treatment. The second insulating layer can be formed on the metal stripes without generating cracks in the second insulating layer.

5. 发明授权

US08616061B2 Ultrasonic sensor 失效
公开(公告)号：US08616061B2
公开(公告)日：2013-12-31
申请号：US13425460
申请日：2012-03-21
申请人： Makiko Sugiura , Yasuyuki Okuda , Takaaki Kawai , Takahiko Yoshida , Hisanaga Matsuoka , Toshiki Isogai , Mitsuyasu Matsuura
发明人： Makiko Sugiura , Yasuyuki Okuda , Takaaki Kawai , Takahiko Yoshida , Hisanaga Matsuoka , Toshiki Isogai , Mitsuyasu Matsuura
IPC分类号： G01N29/32 , G01S3/82 , G08G1/14 , G08G1/04 , G01N29/44
CPC分类号： G01S7/52004 , G01S7/52 , G01S7/52006 , G01S7/521 , G01S15/003 , G01S15/876 , G01S15/931 , G01S2015/939
摘要： An ultrasonic sensor includes a transmitting device, a receiving device, and a circuit device. The circuit device determines that the receiving device receives an ultrasonic wave reflected from an object, when an output voltage of the receiving device is equal to or greater than a first threshold. The circuit device includes a humidity detection section configured to detect an ambient humidity of the transmitting and receiving devices and a threshold adjustment section configured to calculate, based on the detected ambient humidity, a sound pressure of the ultrasonic wave that is received by the receiving device after propagating over a round-trip distance between the ultrasonic sensor and the object. The threshold adjustment section reduces the first threshold, when the output voltage corresponding to the calculated sound pressure is less than a second threshold that is greater the first threshold.

6. 发明申请

US20110316388A1 ULTRASONIC SENSOR 有权
标题翻译：超声波传感器
公开(公告)号：US20110316388A1
公开(公告)日：2011-12-29
申请号：US13170510
申请日：2011-06-28
申请人： Keiko Akiyama , Mitsuyasu Matsuura , Toshiki Isogai , Makiko Sugiura
发明人： Keiko Akiyama , Mitsuyasu Matsuura , Toshiki Isogai , Makiko Sugiura
IPC分类号： G10K9/125
CPC分类号： G01H11/08 , B06B3/00 , G10K11/025 , G10K13/00
摘要： An ultrasonic sensor is disclosed. The ultrasonic sensor includes a piezoelectric element and an acoustic matching member. The piezoelectric element is configured to detect ultrasonic wave transmitted from a transmitter and reflected by a detection target object located in a detection target space. The acoustic matching member is configured to conduct the received ultrasonic wave to the piezoelectric element. The piezo electric element is covered with the acoustic matching member including a principal oscillation portion and a supplement oscillation portion. Thickness of a part of the supplement oscillation portion, the part covering the piezoelectric element, is smaller than a predetermined thickness threshold.
摘要翻译：公开了一种超声波传感器。超声波传感器包括压电元件和声匹配元件。压电元件被配置为检测从发射器发射并由位于检测目标空间中的检测目标对象反射的超声波。声匹配构件被配置为将接收的超声波传导到压电元件。压电元件被包括主振荡部分和补充振荡部分的声匹配部件覆盖。辅助振荡部分的覆盖压电元件的部分的一部分的厚度小于预定的厚度阈值。

7. 发明申请

US20110261651A1 ULTRASONIC SENSOR 有权
标题翻译：超声波传感器
公开(公告)号：US20110261651A1
公开(公告)日：2011-10-27
申请号：US13158006
申请日：2011-06-10
申请人： Yasuyuki Okuda , Takaaki Kawai , Makiko Sugiura , Takayuki Ishikawa
发明人： Yasuyuki Okuda , Takaaki Kawai , Makiko Sugiura , Takayuki Ishikawa
IPC分类号： G01S15/04
CPC分类号： G01S7/521 , B06B1/0629 , G01S3/808 , G01S7/52004 , G01S15/42 , G01S15/931
摘要： An ultrasonic sensor includes a transmitting device, receiving devices arranged in an array, and a circuit device. One receiving device is configured as a reference receiving device. The circuit device includes a reference signal generator and first and second synchronous detectors. The reference signal generator generates a reference signal by using a received signal of the reference receiving device. The first synchronous detector performs synchronous detection of a received signal of one of the receiving devices based on the reference signal to detect a distance to an object. The second synchronous detector performs synchronous detection of received signals of the receiving devices except the reference receiving device based on the reference signal to detect a direction of the object.
摘要翻译：超声波传感器包括发送装置，排列成阵列的接收装置和电路装置。一个接收设备被配置为参考接收设备。电路装置包括参考信号发生器和第一和第二同步检测器。参考信号发生器通过使用参考接收装置的接收信号产生参考信号。第一同步检测器基于参考信号执行接收装置之一的接收信号的同步检测，以检测到对象的距离。第二同步检测器基于参考信号执行除基准接收装置之外的接收装置的接收信号的同步检测，以检测对象的方向。

8. 发明授权

US07643376B2 Direction detecting device and direction detecting system 有权
标题翻译：方向检测装置和方向检测系统
公开(公告)号：US07643376B2
公开(公告)日：2010-01-05
申请号：US12285715
申请日：2008-10-14
申请人： Mitsuyasu Matsuura , Toshiki Isogai , Makiko Sugiura , Toshihiro Hattori
发明人： Mitsuyasu Matsuura , Toshiki Isogai , Makiko Sugiura , Toshihiro Hattori
IPC分类号： G01S15/00
CPC分类号： G01S3/8083 , G01S15/42 , G01S15/87 , G01S15/931
摘要： In a direction detecting device, a transmitting wave generator encodes a transmitting signal with a code having a high autocorrelation so as to generate a transmitting wave. A transmitter transmits the transmitting wave and a plurality of receiver elements receives a reflected wave reflected by an object. A direction calculating unit calculates a direction of the object based on a phase difference between a correlation value calculated based on the reflected wave received by one of the receiver elements and a correlation value calculated based on the reflected wave received by another one of the receiver elements, a distance between the one of the receiver elements and the another one of the receiver elements, and a wavelength of the transmitting wave.
摘要翻译：在方向检测装置中，发送波发生器利用具有高自相关性的码对发送信号进行编码，以产生发送波。发射机发射发射波，并且多个接收机元件接收由对象反射的反射波。方向计算单元基于基于由接收器元件之一接收到的反射波计算的相关值与基于由另一个接收器元件接收的反射波计算的相关值之间的相位差来计算物体的方向，一个接收器元件和另一个接收器元件之间的距离以及发射波的波长。

9. 发明授权

US07626492B2 Ultraviolet light detection device 有权
标题翻译：紫外光检测装置
公开(公告)号：US07626492B2
公开(公告)日：2009-12-01
申请号：US11826061
申请日：2007-07-12
申请人： Makiko Sugiura
发明人： Makiko Sugiura
IPC分类号： B60Q1/00
CPC分类号： G01J1/429 , G01J5/34
摘要： A detector made of lanthanum-doped lead zirconate titanate detects intensity of ultraviolet light radiated inside of a vehicle. The detector sends ultrasonic wave to an incidence direction of ultraviolet light, and detects ultrasonic wave reflected by an object. An electrical unit determines the object to be an occupant of the vehicle or not based on the reflected ultrasonic wave. The electrical unit outputs a signal representing that a predetermined or more amount of ultraviolet light is radiated to the occupant, when the detector detects the predetermined or more amount of ultraviolet light and when the electrical unit determines the object to be the occupant.
摘要翻译：由镧掺杂的锆钛酸铅钛酸盐制成的检测器检测车辆内部照射的紫外线的强度。检测器向紫外光的入射方向发送超声波，并检测物体反射的超声波。电气单元基于反射的超声波确定作为车辆的乘客的物体。当检测器检测到预定或更多量的紫外线并且当电单元确定作为乘客的物体时，电单元输出表示预定或更多量的紫外线照射到乘员的信号。

10. 发明授权

US07612485B2 Ultrasonic sensor 有权
标题翻译：超声波传感器
公开(公告)号：US07612485B2
公开(公告)日：2009-11-03
申请号：US11898521
申请日：2007-09-13
申请人： Makiko Sugiura , Kazuaki Watanabe , Yasuyuki Okuda
发明人： Makiko Sugiura , Kazuaki Watanabe , Yasuyuki Okuda
IPC分类号： H01L41/08 , H01L41/053
CPC分类号： G10K11/004 , B06B1/0648 , G01S7/521
摘要： An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor includes: an acoustic matching layer having a first surface and a second surface, the first surface which receives the ultrasonic wave, and the second surface which is opposite to the first surface; and an ultrasonic detection element including a vibration member. The vibration member is coupled with the second surface of the acoustic matching layer. The acoustic matching layer is repeatedly deformable in accordance with a standing wave, which is generated in the acoustic matching layer by the received ultrasonic wave. The vibration member resonates with the repeat deformation of the acoustic matching layer.
摘要翻译：一种超声波传感器，用于检测从超声波发生器输出并由被检测物体反射的超声波，所述超声波传感器包括：声匹配层，具有第一表面和第二表面，所述第一表面接收所述超声波并且与第一表面相对的第二表面; 以及包括振动部件的超声波检测元件。振动构件与声匹配层的第二表面耦合。声匹配层可以根据由接收的超声波在声匹配层中产生的驻波而重复变形。振动构件与声匹配层的重复变形共振。

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