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    • 1. 发明授权
    • Sensor attachment structure and ultrasonic sensing device
    • 传感器附件结构和超声波感应装置
    • US07490517B2
    • 2009-02-17
    • US11488140
    • 2006-07-18
    • Takahiko YoshidaMakiko SugiuraYasuyuki OkudaYuta Hasebe
    • Takahiko YoshidaMakiko SugiuraYasuyuki OkudaYuta Hasebe
    • G01H5/00
    • G01D11/30G01S7/521
    • A sensor attachment structure includes a sound receiving member for receiving an ultrasound, an ultrasonic sensor attached to the sound receiving member. The ultrasonic sensor includes a semiconductor substrate having first and second surfaces opposite to each other and a substrate recess portion recessed from the first surface of the semiconductor substrate so as to form a membrane in the semiconductor substrate. Furthermore, a cap member is located between the sound receiving member and the semiconductor substrate to cover the second surface of the semiconductor substrate. In addition, the cap member has a first surface bonded to the sound receiving member, and a second surface that is bonded to the second surface of the semiconductor substrate at an outer periphery section of the membrane while having a gap between the cap member and the membrane.
    • 传感器附接结构包括用于接收超声波的声音接收构件,附接到声音接收构件的超声波传感器。 超声波传感器包括具有彼此相对的第一和第二表面的半导体衬底和从半导体衬底的第一表面凹陷的衬底凹部,以在半导体衬底中形成膜。 此外,盖构件位于声音接收构件和半导体衬底之间以覆盖半导体衬底的第二表面。 此外,盖构件具有接合到声音接收构件的第一表面和在膜的外周部分处接合到半导体衬底的第二表面的第二表面,同时在盖构件和盖构件之间具有间隙 膜。
    • 2. 发明申请
    • Sensor attachment structure and ultrasonic sensing device
    • 传感器附件结构和超声波感应装置
    • US20070079661A1
    • 2007-04-12
    • US11488140
    • 2006-07-18
    • Takahiko YoshidaMakiko SugiuraYasuyuki OkudaYuta Hasebe
    • Takahiko YoshidaMakiko SugiuraYasuyuki OkudaYuta Hasebe
    • G01D21/00
    • G01D11/30G01S7/521
    • A sensor attachment structure includes a sound receiving member for receiving an ultrasound, an ultrasonic sensor attached to the sound receiving member. The ultrasonic sensor includes a semiconductor substrate having first and second surfaces opposite to each other and a substrate recess portion recessed from the first surface of the semiconductor substrate so as to form a membrane in the semiconductor substrate. Furthermore, a cap member is located between the sound receiving member and the semiconductor substrate to cover the second surface of the semiconductor substrate. In addition, the cap member has a first surface bonded to the sound receiving member, and a second surface that is bonded to the second surface of the semiconductor substrate at an outer periphery section of the membrane while having a gap between the cap member and the membrane.
    • 传感器附接结构包括用于接收超声波的声音接收构件,附接到声音接收构件的超声波传感器。 超声波传感器包括具有彼此相对的第一和第二表面的半导体衬底和从半导体衬底的第一表面凹陷的衬底凹部,以在半导体衬底中形成膜。 此外,盖构件位于声音接收构件和半导体衬底之间以覆盖半导体衬底的第二表面。 此外,盖构件具有接合到声音接收构件的第一表面和在膜的外周部分处接合到半导体衬底的第二表面的第二表面,同时在盖构件和盖构件之间具有间隙 膜。
    • 7. 发明授权
    • Ultrasonic sensor
    • 超声波传感器
    • US08098000B2
    • 2012-01-17
    • US12230039
    • 2008-08-21
    • Yasuyuki OkudaMakiko SugiuraKenji FukumuraTakahiko YoshidaTetsuo Fujii
    • Yasuyuki OkudaMakiko SugiuraKenji FukumuraTakahiko YoshidaTetsuo Fujii
    • H01L41/08
    • G01S7/521
    • An ultrasonic sensor for detecting an object includes: a piezoelectric element having a piezoelectric body and first and second electrodes for sandwiching the piezoelectric body; an acoustic matching element having a reception surface, which receives an ultrasonic wave reflected by the object; and a circuit electrically coupled with the piezoelectric element via a wire. The piezoelectric element is embedded in the acoustic matching element so that the acoustic matching element covers at least the first electrode, a part of a sidewall of the piezoelectric element and a part of the wire between the circuit and the piezoelectric element, and the sidewall of the piezoelectric element is adjacent to the first electrode.
    • 一种用于检测物体的超声波传感器包括:具有压电体的压电元件和用于夹持压电体的第一和第二电极; 具有接收表面的声匹配元件,其接收由所述物体反射的超声波; 以及经由导线与压电元件电耦合的电路。 压电元件被嵌入在声匹配元件中,使得声匹配元件至少覆盖第一电极,压电元件的侧壁的一部分和电路与压电元件之间的线的一部分,以及侧壁 压电元件与第一电极相邻。
    • 8. 发明授权
    • Ultrasonic sensor
    • 超声波传感器
    • US07613073B2
    • 2009-11-03
    • US11797205
    • 2007-05-01
    • Yasuyuki OkudaTakahiko YoshidaMakiko SugiuraRyounosuke TeraYuuta Hasebe
    • Yasuyuki OkudaTakahiko YoshidaMakiko SugiuraRyounosuke TeraYuuta Hasebe
    • G01S15/00G01H11/00
    • G01S15/931G01H11/08G01S7/521
    • An ultrasonic sensor includes a plurality of vibrating parts, a plurality of receiving elements, and a waveguide. Each of the vibrating parts vibrates when a corresponding ultrasonic wave reflected by a detection object is transmitted thereto, and receives the ultrasonic wave. Each of the elements includes corresponding one of the vibrating parts and detects the object using the corresponding ultrasonic wave. The ultrasonic wave is transmitted through the waveguide to each of the elements. The waveguide includes a first opening facing the object, a second opening, and a reflecting surface that reflects the ultrasonic wave in a direction to each of the vibrating parts. The ultrasonic wave enters through the first opening. The second opening is not viewable from the first opening. The second opening holds the elements such that the each of the vibrating parts faces a direction where the each of the vibrating parts receives the ultrasonic wave.
    • 超声波传感器包括多个振动部件,多个接收元件和波导管。 当由检测对象反射的相应的超声波被传送到每个振动部分时,其振动,并接收超声波。 每个元件包括对应的一个振动部件,并使用相应的超声波检测物体。 超声波通过波导传输到每个元件。 波导包括面向物体的第一开口,第二开口和反射表面,该反射表面朝向每个振动部分的方向反射超声波。 超声波通过第一个开口进入。 第二个开口不能从第一个开口看到。 第二开口保持元件,使得每个振动部件面对每个振动部件接收超声波的方向。
    • 9. 发明申请
    • ULTRASONIC SENSOR
    • 超声波传感器
    • US20080072675A1
    • 2008-03-27
    • US11902366
    • 2007-09-20
    • Yasuyuki OkudaTakahiko YoshidaMakiko SugiuraKazuaki WatanabeTetsuo YoshiokaHisanaga Matsuoka
    • Yasuyuki OkudaTakahiko YoshidaMakiko SugiuraKazuaki WatanabeTetsuo YoshiokaHisanaga Matsuoka
    • G01H11/08H01L41/08H01L41/187
    • G01H11/08
    • An ultrasonic sensor includes an ultrasonic detecting element, an acoustic matching member, and an oscillation damping member. The ultrasonic detecting element detects an ultrasonic wave. The acoustic matching member has a receiving surface that is adapted on a side of the certain object to be exposed to a space, in which the detected body exists. The receiving surface receives the ultrasonic wave reflected by the detected body. The acoustic matching member is made of a material having an acoustic impedance larger than that of air and smaller than that of the ultrasonic detecting element. The oscillation damping member is disposed between an attachment portion and the acoustic matching member. The attachment portion is adapted for attaching the ultrasonic sensor to the certain object. The oscillation damping member damps transmission of oscillation from the certain object to the acoustic matching member.
    • 超声波传感器包括超声波检测元件,声匹配元件和振荡阻尼元件。 超声波检测元件检测超声波。 声匹配构件具有接收表面,该接收表面适于在某一物体的一侧暴露于被检测体存在的空间。 接收表面接收被检测体反射的超声波。 声匹配构件由声阻抗大于空气的声阻抗小于超声波检测元件的材料制成。 振动阻尼构件设置在安装部分和声匹配构件之间。 附接部分适于将超声波传感器附接到该物体。 振动阻尼构件阻止从特定物体到声匹配构件的振荡传播。