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    • 52. 发明授权
    • Vertical parasitic PNP device in a BiCMOS process and manufacturing method of the same
    • BiCMOS工艺中的垂直寄生PNP器件及其制造方法
    • US08637959B2
    • 2014-01-28
    • US13220485
    • 2011-08-29
    • Wensheng QianDonghua LiuJun Hu
    • Wensheng QianDonghua LiuJun Hu
    • H01L21/02
    • H01L29/7371H01L21/76224H01L21/8249H01L29/0817H01L29/161H01L29/41708H01L29/66242
    • The invention discloses a vertical parasitic PNP transistor in a BiCMOS process and manufacturing method of the same, wherein an active region is isolated by STIs. The transistor includes a collector region, a base region, an emitter region, pseudo buried layers, and N-type polysilicon. The pseudo buried layers, formed at the bottom of the STIs located on both sides of the collector region, extend laterally into the active region and contact with the collector region, whose electrodes are picked up through making deep-hole contacts in the STIs. The N-type polysilicon is formed on the base region and contacts with it, whose electrodes are picked up through making metal contacts on the N-type polysilicon. The transistors can be used as output devices in high-speed and high-gain circuits, efficiently reducing the transistors area, diminishing the collector resistance, and improving the transistors performance. The method can reduce the cost without additional technological conditions.
    • 本发明公开了一种BiCMOS工艺中的垂直寄生PNP晶体及其制造方法,其中有源区由STI分离。 晶体管包括集电极区域,基极区域,发射极区域,伪掩埋层和N型多晶硅。 形成在位于集电区域两侧的STI的底部的伪掩埋层横向延伸到有源区并与集电区接触,该集电极区通过在STI中形成深孔接触来拾取电极。 N型多晶硅形成在基极区上并与其接触,其电极通过在N型多晶硅上形成金属接触来拾取。 晶体管可以用作高速和高增益电路中的输出器件,有效降低晶体管面积,减小集电极电阻,并提高晶体管的性能。 该方法可以降低成本而不需要额外的技术条件。
    • 53. 发明授权
    • Parasitic vertical PNP bipolar transistor and its fabrication method in BiCMOS process
    • 寄生垂直PNP双极晶体管及其在BiCMOS工艺中的制造方法
    • US08598678B2
    • 2013-12-03
    • US12963242
    • 2010-12-08
    • Wensheng QianJun HuDonghua Liu
    • Wensheng QianJun HuDonghua Liu
    • H01L29/732H01L21/8228
    • H01L29/732H01L21/8249H01L27/0623H01L29/66272
    • A parasitic vertical PNP bipolar transistor in BiCMOS process comprises a collector, a base and an emitter. The collector is formed by active region with p-type ion implanting layer (P type well in NMOS). It connects a P-type conductive region, which formed in the bottom region of shallow trench isolation (STI). The collector terminal connection is through the P-type buried layer and the adjacent active region. The base is formed by N type ion implanting layer above the collector which shares a N-type lightly doped drain (NLDD) implanting of NMOS. Its connection is through the N-type poly on the base region. The emitter is formed by the P-type epitaxy layer on the base region with heavy p-type doped, and connected by the extrinsic base region of NPN bipolar transistor device. This invention also includes the fabrication method of this parasitic vertical PNP bipolar transistor in BiCMOS process. And this PNP bipolar transistor can be used as the I/O (input/output) device in high speed, high current and power gain BiCMOS circuits. It also provides a device option with low cost.
    • BiCMOS工艺中的寄生垂直PNP双极晶体管包括集电极,基极和发射极。 集电极由具有p型离子注入层(P型阱在NMOS中)的有源区形成。 它连接形成在浅沟槽隔离(STI)的底部区域中的P型导电区域。 集电极端子连接通过P型掩埋层和相邻的有源区。 基极由收集器上方的N型离子注入层形成,其共享NMOS的N型轻掺杂漏极(NLDD)注入。 其连接是通过基底区域上的N型聚合物。 发射极由P型掺杂的P型外延层构成,并由NPN双极晶体管器件的非本征基极区连接。 本发明还包括在BiCMOS工艺中该寄生垂直PNP双极晶体管的制造方法。 该PNP双极晶体管可用作高速,大电流和功率增益BiCMOS电路中的I / O(输入/输出)器件。 它还提供低成本的设备选项。
    • 57. 发明申请
    • Dual Key Bi-Step Lock
    • 双重双向锁
    • US20120060571A1
    • 2012-03-15
    • US13321549
    • 2010-05-20
    • Yongyao YuJun HuZhongwei Cao
    • Yongyao YuJun HuZhongwei Cao
    • E05B35/10
    • E05B27/0053E05B27/0007E05B27/0042E05B35/12E05B63/0069E05C3/042Y10T70/5788Y10T70/7446Y10T70/7458Y10T70/7463Y10T70/7565Y10T70/7605
    • A dual key bi-step lock having a shell and a cylindrical plug in the shell. The plug has a primary keyway and a secondary keyway and at least one set of primary pin stack and at least one set of secondary pin stack between the shell and the plug, respectively coupling with the primary and the secondary keys. a longitudinal stage is formed on a cylindrical surface of the plug. An involute side face extending from the stage to the cylindrical surface of the plug. The primary key is able to dive the plug to a position of first step open at which the stage is stopped by the key pin of the secondary pin stack. The secondary pin stack is unlocked by the secondary key and the plug is able to be further driven to a position of second step open by the primary and the secondary keys from the first step open.
    • 双键双向锁具有外壳和外壳中的圆柱塞。 插头具有主键槽和辅助键槽以及分别与主键和副键耦合的壳和插头之间的至少一组主引脚叠层和至少一组次级引脚叠层。 在插头的圆柱形表面上形成纵向台。 从阶段延伸到插头的圆柱形表面的渐开线侧面。 主键能够将插头潜入第一级打开的位置,在该位置,辅助引脚堆叠的键销停止该级。 辅助销堆叠由辅助钥匙解锁,并且插头能够被进一步驱动到第一阶段打开的主键和辅助键的第二阶段打开的位置。
    • 59. 发明申请
    • High Voltage Bipolar Transistor with Pseudo Buried Layers
    • 具有伪埋层的高电压双极晶体管
    • US20110140239A1
    • 2011-06-16
    • US12966078
    • 2010-12-13
    • Tzuyin CHIUTungYuan CHUWensheng QIANYungChieh FANJun HUDonghua LIUYukun LV
    • Tzuyin CHIUTungYuan CHUWensheng QIANYungChieh FANJun HUDonghua LIUYukun LV
    • H01L29/70
    • H01L21/76232H01L21/8249H01L27/0623H01L29/0657H01L29/0821H01L29/41708H01L29/66242H01L29/66287H01L29/7322H01L29/7378
    • A high voltage bipolar transistor with shallow trench isolation (STI) comprises the areas of a collector formed by implanting first electric type impurities into active area and connected with pseudo buried layers at two sides; Pseudo buried layers which are formed by implanting high dose first type impurity through the bottoms of STI at two sides if active area, and do not touch directly; deep contact through field oxide to contact pseudo buried layers and pick up the collectors; a base deposited on the collector by epitaxial growth and in-situ doped by second electric type impurity, in which the intrinsic base touches local collector and extrinsic base is used for base pick-up; a emitter which is a polysilicon layer deposited on the intrinsic base and doped with first electric type impurities. This invention makes the depletion region of collector/base junction from 1D (vertical) distribution to 2D (vertical and lateral) distribution. The bipolar transistor's breakdown voltages are increased by only enlarge active critical dimension (CD). This is low-cost process.
    • 具有浅沟槽隔离(STI)的高电压双极晶体管包括通过将第一电型杂质注入有源区并且在两侧与伪掩埋层连接而形成的集电极的区域; 伪埋层是通过在两侧的STI两侧植入高剂量第一类杂质而形成的,如果有活动区域,并且不直接接触; 通过场氧化物深接触接触伪埋层并拾取集电器; 通过外延生长沉积在集电体上并通过第二电型杂质原位掺杂的基极,其中本征基极接触局部集电极和外部基极用于基极拾取; 作为沉积在本征基底上并掺杂有第一电型杂质的多晶硅层的发射极。 本发明使集电极/基极结的耗尽区从1D(垂直)分布到2D(垂直和横向)分布。 双极晶体管的击穿电压仅通过增加主动临界尺寸(CD)来增加。 这是低成本的过程。