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    • 53. 发明申请
    • VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS
    • 蒸气沉积装置及制造有机发光显示装置的方法
    • US20140026814A1
    • 2014-01-30
    • US13707948
    • 2012-12-07
    • Jae-Hyun KIMJin-Kwang KIMMyung-Soo HUH
    • Jae-Hyun KIMJin-Kwang KIMMyung-Soo HUH
    • H01L33/00
    • H01L33/005C23C16/452C23C16/45519C23C16/54
    • A vapor deposition apparatus includes at least one first region and at least one second region. A first blocking unit is arranged between a first exhausting unit and a first injecting unit and between the first exhausting unit and a first purging unit in the first region so as to avoid any common region between the first exhausting unit and the first injecting unit and to avoid any common region between the first exhausting unit and the first purging unit. The vapor deposition apparatus also includes another first blocking unit arranged between a second exhausting unit and a second injecting unit and between the second exhausting unit and a second purging unit in the second region so as to avoid any common region between the second exhausting unit and the second injecting unit and to avoid any common region between the second exhausting unit and the second purging unit.
    • 气相沉积设备包括至少一个第一区域和至少一个第二区域。 第一阻塞单元布置在第一排气单元和第一注入单元之间,并且在第一区域中的第一排气单元和第一排气单元之间,以避免第一排气单元和第一注入单元之间的任何共同区域,并且 避免第一排气单元和第一吹扫单元之间的任何共同区域。 蒸镀装置还包括在第二排气单元和第二喷射单元之间以及在第二区域中的第二排气单元和第二排出单元之间的另一个第一阻塞单元,以避免第二排气单元和第二排气单元之间的任何公共区域 第二喷射单元,并且避免第二排气单元和第二吹扫单元之间的任何公共区域。