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41. 发明申请

US20050109967A1 Valve with an integral orifice 有权
公开(公告)号：US20050109967A1
公开(公告)日：2005-05-26
申请号：US11011379
申请日：2004-12-15
申请人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
IPC分类号： F04F1/08 , F16K7/14 , F16K7/16 , F16K25/00 , F16K27/00 , F16K31/02 , F16K47/00 , H04B17/00 , H04W4/22 , H04W48/12 , H04W74/08
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

42. 发明授权

US06615871B2 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US06615871B2
公开(公告)日：2003-09-09
申请号：US10277147
申请日：2002-10-22
申请人： Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
IPC分类号： F16K1110
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
摘要翻译：设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开 - 关装置具有二通阀，开口阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。所有类型的开 - 关装置的双口阀的主体构造相同，并且每个在其底面具有入口和出口。所有类型的开关装置的三通阀的主体的结构相同，并且在其底面中形成有入口，总是与入口连通的出口以及入口 - 出口开口。

43. 发明授权

US06289923B1 Gas supply system equipped with pressure-type flow rate control unit 有权
标题翻译：供气系统配有压力式流量控制单元
公开(公告)号：US06289923B1
公开(公告)日：2001-09-18
申请号：US09463514
申请日：2000-06-02
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Nobukazu Ikeda , Kouji Nishino , Kazuhiro Yoshikawa , Eiji Ideta , Ryousuke Dohi , Tomio Uno , Michio Yamaji
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Nobukazu Ikeda , Kouji Nishino , Kazuhiro Yoshikawa , Eiji Ideta , Ryousuke Dohi , Tomio Uno , Michio Yamaji
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, and to raise the flow rate control accuracy and reliability of facilities. That eliminates non-uniformity of products or semiconductors and raises the production efficiency. The gas supply system equipped with a pressure-type flow rate control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream side pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc=KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.
摘要翻译：公开了一种改进的，尺寸较小的低成本的气体供应系统，其配备有例如半导体制造设备中使用的压力式流量控制单元。提高瞬态流量特性，防止气体开始时气体过冲，提高设备的流量控制精度和可靠性。这消除了产品或半导体的不均匀性并提高了生产效率。配置有压力式流量控制单元的气体供给系统被配置为使得在孔口的上游侧的压力保持为比下游侧压力高大约两倍或更多的气体，气体流量被控制以供应气体通过孔口相关阀进行气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置在控制阀之间的压力检测器所述控制阀和所述节流孔相关阀，设置在所述节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中，基于由所述压力检测器检测到的压力P1，流量Qc 用公式Qc = KP1（K：常数）计算，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制信号Qy i n是用于控制阀的驱动器，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

44. 发明授权

US06158679A Orifice for pressure type flow rate control unit and process for manufacturing orifice 有权
标题翻译：用于压力式流量控制单元的孔口和用于制造孔口的工艺
公开(公告)号：US06158679A
公开(公告)日：2000-12-12
申请号：US284372
申请日：1999-06-16
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Osamu Fukada , Susumu Ozawa , Yoshihiro Satou , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Osamu Fukada , Susumu Ozawa , Yoshihiro Satou , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
IPC分类号： G01F1/40 , G05D7/01 , A62C31/02
CPC分类号： G01F1/40 , G05D7/0186
摘要： An orifice for a pressure-type flow rate controller, which can be produced by a simple method at a low cost, that provides a linearity--between the pressure P1 on the upstream side of the orifice and the flow rate--over a wide range of the pressure ratio P2/P1 of the pressure P2 on the downstream side of the orifice to the upstream pressure P1 and that permits adjustment with ease of flow characteristics among a plurality of orifices. The orifice comprises an inlet taper 1 in the shape of a bugle and a short narrowed straight section 2 adjoining the inlet taper 1, both formed by cutting one opening end of a preliminary hole 6 made in an orifice plate D, and further comprises a short inner taper 3 and an enlarged straight section 4 connecting with the taper 3 which are formed by enlarging the preliminary hole 6 at the other opening end, the short inner taper 3 adjoining the narrowed straight section 2 on one side and neighboring the enlarged straight section 4 on the other side.
摘要翻译： PCT No.PCT / JP98 / 03621 Sec。 371日期1999年6月16日第 102（e）1999年6月16日PCT PCT 1998年8月13日PCT公布。出版物WO99 / 09324 日期1999年2月25日，一种用于压力式流量控制器的孔口，其可以通过简单的方法以低成本生产，其在孔口上游侧的压力P1和流量 - 在孔的下游侧的压力P2的压力比P2 / P1的宽范围到上游压力P1，并且允许在多个孔中容易地调节流动特性。孔口包括一个具有插针形状的入口锥形1和邻近入口锥形1的短缩窄直线部分2，两者都是通过切割在孔板D中制成的预备孔6的一个开口端而形成的，还包括一个短内圆锥体3和与锥体3连接的扩大的直线部分4，其通过在另一个开口端扩大预备孔6而形成，短内锥形件3在一侧邻接变窄的直线部分2并且与扩大的直线部分4相邻另一方面。

45. 发明授权

US06152168A Pressure-type flow rate control apparatus 有权
标题翻译：压力式流量控制装置
公开(公告)号：US06152168A
公开(公告)日：2000-11-28
申请号：US284352
申请日：1999-05-24
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
IPC分类号： F16K17/22 , G05D7/06
CPC分类号： G05D7/0647 , Y10T137/7759 , Y10T137/7761
摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q=KP1 (K=constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves a variable orifice wherein the gap is adjusted by the orifice drive.
摘要翻译： PCT No.PCT / JP98 / 03620 Sec。 371日期1999年5月24日 102（e）日期1999年5月24日PCT提交1998年8月13日PCT公布。公开号WO99 / 09463 日期1999年2月25日一种特别用于半导体制造设备中的气体供给系统的压力式流量控制装置。流量控制装置设置有可变孔口，其允许容易地切换流体流量控制范围以及压力型流量控制装置的尺寸减小，并且提供其它优点，包括改进的气体替换性，防止灰尘形成和降低流量控制系统的制造成本。该装置包括孔口，设置在孔口的上游侧的控制阀，设置在控制阀和孔口之间的压力检测器，以及控制单元，用于根据检测到的压力P1计算流体流量Q 压力检测器具有等式Q = KP1（K =常数），并且在控制阀的驱动器中输出设定流量信号Qs和计算流量信号Q之间的差作为控制信号Qy，其中压力P1 on 孔口的上游侧通过致动用于控制孔口下游流体的流速的控制阀来调节，孔口上游侧的压力P1与保持在不同的孔口的下游压力P2之间的比率P2 / P1 高于受控流体的临界压力的比例，其特征在于，直接触摸式金属隔膜阀单元用作孔口，并且阀海之间的环形间隙并且隔膜用于可变孔口，其中间隙由孔口驱动器调节。

46. 发明授权

US6035893A Shutoff-opening devices and fluid control apparatus comprising such devices 失效
标题翻译：包括这种装置的切开装置和流体控制装置
公开(公告)号：US6035893A
公开(公告)日：2000-03-14
申请号：US882291
申请日：1997-06-25
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Masayuki Hatano , Kosuke Yokoyama , Shigeaki Tanaka
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Masayuki Hatano , Kosuke Yokoyama , Shigeaki Tanaka
IPC分类号： F16K1/52 , F15B13/00 , F15B13/08 , F15C3/00 , F16K27/00 , G05D7/00 , G05D7/06 , F16K11/10
CPC分类号： F15B13/0814 , F15B13/0825 , F15B13/0835 , F15B13/0871 , F15B13/0892 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87877 , Y10T137/87885
摘要： A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.
摘要翻译：阀主体内部形成有从其后端面延伸到第一阀致动器的主通道，以及分别经由第二和第三阀致动器与主通道连通的两个子通道。阀主体具有向前延伸并且安装有第一阀致动器的倾斜面。

47. 发明授权

US5850853A Fluid control system and valve to be used therein 失效
标题翻译：流体控制系统和阀门用于其中
公开(公告)号：US5850853A
公开(公告)日：1998-12-22
申请号：US630081
申请日：1996-04-09
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Hiroshi Morokoshi
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Hiroshi Morokoshi
IPC分类号： B01J4/00 , C30B25/14 , C30B31/16 , F16K31/122 , F16K31/42
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译：流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。流体控制系统包括主控制线（L）和多个分支控制线（L1，L2 ...），用于将多种类型的流体（G1，G2 ...）馈送到耦合到主控制线和并入分支控制线（L1，L2 ...）中的多个阀组件（V），用于切换供给到处理装置（C）中的流体（G1，G2 ...）。每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀（V“）阀（V'）将工作流体（A）输送到流体压力致动器（1）中。

48. 发明授权

US06618922B2 Cooperating fixing jigs for aligning a plurality of lower members on a support member 有权
标题翻译：用于对准支撑构件上的多个下部构件的协作固定夹具
公开(公告)号：US06618922B2
公开(公告)日：2003-09-16
申请号：US10097872
申请日：2002-03-15
申请人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
发明人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
IPC分类号： B25B2714
CPC分类号： F16K27/003 , Y10T29/49895 , Y10T29/49899 , Y10T29/49902 , Y10T29/53913 , Y10T29/53978
摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.
摘要翻译：使用第一和第二两个间隔夹具81，每个具有在其底表面上形成有长方体的平行六面体81a，突出部82以等于参考孔106之间的预定间隔的间隔并排布置。首先，第一夹具81装配在下部构件31,32,33的前参考孔106中，第二夹具82的突起82装配在下部构件的后部参考孔106中。具有矩形框架形式的直角保持夹具84，其内侧面可分别与第一夹具81的前侧面，第二夹具81的后侧面和第二夹具81的左右侧面接触两个夹具81围绕两个夹具81的主体81a配合，以将孔106的布置调整成直角。在这种状态下，下部构件通过拧紧螺钉构件110而固定到支撑构件。

49. 发明授权

US5837907A Method of tightening threaded members 失效
标题翻译：拧紧螺纹构件的方法
公开(公告)号：US5837907A
公开(公告)日：1998-11-17
申请号：US862292
申请日：1997-05-22
申请人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
发明人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
IPC分类号： B23P19/06 , B25B23/14 , G01L3/06
CPC分类号： B23P19/069 , B23P19/066 , B25B23/14
摘要： A method is provided for tightening up threaded members with proper tightening torque free of unequivalent tightening. In tightening a plurality of threaded members by drive means, the amount of tightening and tightening torque of each threaded member are detected as the members are progressively tightened, and when the tightening amount of each member has reached a value within a specified range, the difference in tightening torque between the threaded members is checked as to whether it is within a predetermined range.
摘要翻译：提供了一种方法，用于以不受等效收紧的适当紧固扭矩拧紧螺纹部件。在通过驱动装置拧紧多个螺纹构件时，随着构件逐渐紧固，检测每个螺纹构件的拧紧和紧固扭矩的量，并且当每个构件的紧固量达到特定范围内的值时，检查螺纹构件之间的紧固扭矩是否在预定范围内。

50. 发明授权

US06199260B1 Method of fixing a plurality of lower members each having reference bore for installing upper member, and fixing jigs 失效
标题翻译：固定多个下部构件的方法，每个下部构件具有用于安装上部构件的基准孔和固定夹具
公开(公告)号：US06199260B1
公开(公告)日：2001-03-13
申请号：US09168859
申请日：1998-10-09
申请人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
发明人： Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara
IPC分类号： B23Q300
CPC分类号： F16K27/003 , Y10T29/49895 , Y10T29/49899 , Y10T29/49902 , Y10T29/53913 , Y10T29/53978
摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.
摘要翻译：使用第一和第二两个间隔夹具81，每个具有在其底表面上形成有长方体的平行六面体81a，突出部82以等于参考孔106之间的预定间隔的间隔并排布置。首先，第一夹具81装配在下部构件31,32,33的前参考孔106中，第二夹具82的突起82装配在下部构件的后部参考孔106中。具有矩形框架形式的直角保持夹具84，其内侧面可分别与第一夹具81的前侧面，第二夹具81的后侧面和第二夹具81的左右侧面接触两个夹具81围绕两个夹具81的主体81a配合，以将孔106的布置调整成直角。在这种状态下，下部构件通过拧紧螺钉构件110而固定到支撑构件。

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