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41. 发明授权

US08188427B2 Scanning electron microscope alignment method and scanning electron microscope 有权
标题翻译：扫描电子显微镜对准方法和扫描电子显微镜
公开(公告)号：US08188427B2
公开(公告)日：2012-05-29
申请号：US12182704
申请日：2008-07-30
申请人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
发明人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： A method and apparatus for alignment and astigmatism correction for a scanning electron microscope can prevent an alignment or correction error attributable to the conditions of a particular specimen. First, a difference is determined between optimal values acquired from an automatic axis alignment result on a standard sample, and those obtained from each of a plurality automatic axis alignment results on a observation target sample. An optimal value is then adjusted using the standard sample, by use of the difference thus obtained. Correspondingly, an optimal stigmator value (astigmatism correction signal) is acquired by using the standard sample, and storing the optimal stigmator value as a default value. The optimal stigmator value and the default value depending on the height of an observation target sample pattern are added, and an astigmatism correction is performed on the basis of the resultant stigmator value.
摘要翻译：用于扫描电子显微镜的对准和像散校正的方法和装置可以防止由特定样品的条件引起的对准或校正误差。首先，在从标准样品的自动轴对准结果获得的最佳值与从观察对象样本的多个自动轴对准结果中得到的最佳值之间确定差异。然后使用标准样品通过使用由此获得的差异来调整最佳值。相应地，通过使用标准样品获取最佳标称值（像散校正信号），并将最佳标定值存储为默认值。添加根据观察目标样本图案的高度的最佳标称值和默认值，并根据得到的标示符值进行像散校正。

42. 发明授权

US07545977B2 Image processing apparatus for analysis of pattern matching failure 有权
公开(公告)号：US07545977B2
公开(公告)日：2009-06-09
申请号：US11499805
申请日：2006-08-07
申请人： Mitsuji Ikeda , Tatsuya Maeda , Osamu Nasu , Fumihiro Sasajima
发明人： Mitsuji Ikeda , Tatsuya Maeda , Osamu Nasu , Fumihiro Sasajima
IPC分类号： G09K9/00
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/30148
摘要： Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.

43. 发明授权

US07409080B2 Inspection method of electric part 有权
标题翻译：电气部件检验方法
公开(公告)号：US07409080B2
公开(公告)日：2008-08-05
申请号：US11227189
申请日：2005-09-16
申请人： Tatsuya Maeda , Shigenori Miyawaki
发明人： Tatsuya Maeda , Shigenori Miyawaki
IPC分类号： G06K9/00 , H04N7/18 , G01N21/00
CPC分类号： G06T7/0004 , G01N21/8851 , G06T2207/30148
摘要： An inspection apparatus of an electric junction box is provided, by which improper mounting of electric parts can be detected. The inspection apparatus 1 has a CCD camera 5, an image-processing device 7 and a control device 8. The CCD camera picks up images of fuse 14 in the electric junction box 12 as a subject of the inspection. The image-processing device 7 stores an image consulting data 60. The image consulting data 60 includes a plurality of images of each fuse 14 having the same item symbol with regard to every item symbol, the fuses 14 being used in the electric junction box 12. The control device 8 stores normal data indicating the proper item symbol of the fuse 14 to be mounted on a corresponding mount 13. The image-processing device 7 extracts the image most analogous to the image picked up by the CCD camera 5 from the images in the image consulting data. The control device 8 judges the quality of the item symbol of the fuse 14 having the most analogous image on the basis of the normal data.
摘要翻译：提供电接线盒的检查装置，由此可以检测到电气部件的不正确的安装。检查装置1具有CCD照相机5，图像处理装置7和控制装置8。作为检查对象，CCD摄像机拾取电接线盒12中的保险丝14的图像。图像处理装置7存储图像咨询数据60。图像咨询数据60包括关于每个物品符号具有相同物品符号的每个保险丝14的多个图像，在电接线盒12中使用保险丝14。控制装置8存储指示要安装在相应的安装件13上的保险丝14的适当物品符号的正常数据。图像处理装置7从图像咨询数据中的图像提取与CCD照相机5拾取的图像最相似的图像。控制装置8基于正常数据判断具有最相似图像的熔丝14的物品符号的质量。

44. 发明授权

US07408154B2 Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes 有权
标题翻译：扫描电子显微镜，用于测量使用其的图案的尺寸的方法，以及用于校正扫描电子显微镜之间的差异的装置
公开(公告)号：US07408154B2
公开(公告)日：2008-08-05
申请号：US11260187
申请日：2005-10-28
申请人： Mayuka Oosaki , Chie Shishido , Hiroki Kawada , Tatsuya Maeda
发明人： Mayuka Oosaki , Chie Shishido , Hiroki Kawada , Tatsuya Maeda
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/28 , H01J37/222 , H01J2237/221 , H01J2237/2826
摘要： As measurement accuracy required for the scanning electron microscope (SEM) for measuring a pattern width becomes stringent, a technique of reducing the difference in a measured dimension between the SEM's is desired. However, the conventional technique of evaluating the difference in a measured dimension between the SEM's cannot separate the difference in a measured dimension between the SEM's themselves and a dimensional change resulting from deformation of the pattern itself. Moreover, the technique of reducing the difference in a measured dimension between the SEM's needs an operator for reducing the difference in a measured dimension between the SEM's for each measurement pattern shape. In this invention, a pattern at the same position is measured for a plurality of times with each SEM, and a different between extrapolated values of measured values obtained by the respective SEM's is calculated, whereby separation between the difference in a measured dimension between the SEM's and a dimensional change resulting from deformation of the pattern itself is made possible. Moreover, matching electron beam image profiles between the SEM's using an operator that simulates a difference in beam diameter between the SEM's makes it possible to reduce the difference in a measured dimension between the SEM's, not depending on a dimensional measurement pattern shape.
摘要翻译：由于用于测量图形宽度的扫描电子显微镜（SEM）所需的测量精度变得严格，所以希望减少SEM之间的测量尺寸差异的技术。然而，评估SEM之间的测量尺寸差异的常规技术不能分离SEM本身之间的测量尺寸与由图案本身的变形引起的尺寸变化之间的差异。此外，减少SEM之间的测量尺寸的差异的技术需要一个操作者，用于减小每个测量图案形状的SEM之间的测量尺寸的差异。在本发明中，通过各SEM测量同一位置的图案多次，并且计算通过各SEM得到的测量值的外推值之间的差异，由此SEM之间的测量尺寸差异之间的差异并且由于图案本身的变形引起的尺寸变化成为可能。此外，使用模拟SEM之间的光束直径差的SEM的SEM之间的匹配电子束图像轮廓可以减小SEM之间的测量尺寸的差异，而不依赖于尺寸测量图案形状。

45. 发明申请

US20060036409A1 Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication 有权
标题翻译：精细图案特征，其设备和半导体器件制造方法的评估方法
公开(公告)号：US20060036409A1
公开(公告)日：2006-02-16
申请号：US11185852
申请日：2005-07-21
申请人： Atsuko Yamaguchi , Hiroshi Fukuda , Hiroki Kawada , Tatsuya Maeda
发明人： Atsuko Yamaguchi , Hiroshi Fukuda , Hiroki Kawada , Tatsuya Maeda
IPC分类号： G06F17/00
CPC分类号： G01B15/08 , G01N23/2251 , G03F7/70625 , H01J2237/223 , H01J2237/2817
摘要： Equipment extracts components of spatial frequency that need to be evaluated in manufacturing a device or in analyzing a material or process out of edge roughness on fine line patterns and displays them as indexes. The equipment acquires data of edge roughness over a sufficiently long area, integrates a components corresponding to a spatial frequency region being set on a power spectrum by the operator, and displays them on a length measuring SEM. Alternatively, the equipment divides the edge roughness data of the sufficiently long area, computes long-period roughness and short-period roughness that correspond to an arbitrary inspection area by performing statistical processing and fitting based on theoretical calculation, and displays them on the length measuring SEM.
摘要翻译：设备提取在制造设备时需要评估的空间频率的组件，或者在细线图案上分析材料或工艺的边缘粗糙度并将其显示为索引。设备在足够长的区域上获取边缘粗糙度的数据，对与操作者在功率谱上设置的空间频率区域相对应的分量进行积分，并将其显示在长度测量SEM上。或者，设备对足够长的区域的边缘粗糙度数据进行分割，通过进行基于理论计算的统计处理和拟合来计算与任意检查区域相对应的长周期粗糙度和短周期粗糙度，并将其显示在长度测量 SEM。

46. 发明授权

US06786751B2 Combined terminal fitting 有权
公开(公告)号：US06786751B2
公开(公告)日：2004-09-07
申请号：US10628215
申请日：2003-07-28
申请人： Tatsuya Maeda , Masahide Hio , Atsushi Nishida , Masato Minakata
发明人： Tatsuya Maeda , Masahide Hio , Atsushi Nishida , Masato Minakata
IPC分类号： H01R1112
CPC分类号： H01R11/12 , H01R13/28
摘要： A combined terminal fitting assembly is provided to fix ends of three or more wires to one fixing place. Engaging portions (25, 26, 34, 35) for holding a right terminal fitting (TR) and a left terminal fitting (TL) assembled are provided on both upper and lower surfaces of terminal main bodies. Thus, the right terminal fittings (TR) and the left terminal fittings (TL) can be placed alternately one over another. As a result three or more wires (W) can be fixed to one fixing place. Upon assembling, the wire (W) of the right terminal fitting (TR) and the wire (W) of the left terminal fitting (TL) are brought gradually closer to each other from most distant positions. Thus, the left and right wires (W) neither overlap nor interfere with each other.

47. 发明授权

US06738134B2 Inspection method and inspection system of a terminal metal fitting 失效
标题翻译：端子金属接头的检查方法和检查系统
公开(公告)号：US06738134B2
公开(公告)日：2004-05-18
申请号：US09963575
申请日：2001-09-27
申请人： Tatsuya Maeda
发明人： Tatsuya Maeda
IPC分类号： G01N2188
CPC分类号： G01N21/8851 , G01N21/8806 , G01R31/045 , G01R31/308
摘要： An inspection method and an inspection system of a terminal metal fitting which can securely judge the good or bad of the fastening condition of an electric wire by a crimping piece of the terminal metal fitting is provided. The inspection system 1 of the terminal metal fitting has an illuminating lamp 4, a CCD camera 5, a dark box 6, and a control unit 7. The CCD camera 5 is arranged at a position of the light thrown from the illuminating lamp 4 and reflected by crimping pieces 212a,212b of a pressure welding terminal 200 not entering the CCD camera 5. The dark box 6 covers the illuminating lamp 4, an object side 5a of the CCD camera 5, and the pressure welding terminal 200. The control unit 7 makes a binary processing on an image of a wire connecting portion 204 taken by the CCD camera 5. The control unit 7 is provided on each of the crimping pieces 212a,212b and judges the good or bad of the crimping condition on the basis of an area in black in an inspection area in the binary image of at least some part of the crimping piece.
摘要翻译：提供一种终端金属配件的检查方法和检查系统，其可以通过端子金属配件的压接片可靠地判断电线的紧固状况的好坏。端子金属配件的检查系统1具有照明灯4，CCD照相机5，暗盒6和控制单元7. CCD照相机5配置在从照明灯4投射的光的位置，由没有进入CCD照相机5的压焊端子200的压接片212a，212b反射。暗盒6覆盖照明灯4，CCD照相机5的物体侧5a和压力焊接终端200.控制单元 7对由CCD照相机5拍摄的电线连接部分204的图像进行二进制处理。控制单元7设置在每个压接片212a，212b上，并基于以下方式判断卷曲状况的好坏：卷边片的至少一部分的二值图像中的检查区域中的黑色区域。

48. 发明授权

US5598002A Electron beam apparatus 失效
标题翻译：电子束装置
公开(公告)号：US5598002A
公开(公告)日：1997-01-28
申请号：US632664
申请日：1996-03-28
申请人： Hideo Todokoro , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
发明人： Hideo Todokoro , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
IPC分类号： H01J37/141 , H01J37/20 , H01J37/21 , H01L21/027 , G02B21/18
CPC分类号： H01J37/21 , H01J2237/216 , H01J2237/2482
摘要： An electron beam apparatus focusses an electron beam onto a specimen by means of an objective magnetic lens. In order to detect changes in the height of the specimen, a laser light beam from a laser source is incident on the specimen and the reflected laser beam is detected by a light detector. Any change in the height of the specimen changes the path of the laser beam to the detector. Therefore, by monitoring the detector, the focussing of the electron beam on the specimen can be controlled by varying the current to an excitation coil of the objective magnetic lens or by moving the specimen via a mounting stage. At least one of the pole pieces of the objective lens is on the opposite side of the path of the laser beam to the source of the electron beam, so that the objective magnetic lens may be close to the specimen, permitting a short focal length. Thus, the laser beam may pass between the pole pieces. An optical microscope may also be provided to permit the specimen to be viewed. The viewing path of the optical microscope extends through an opening in one or both of the pole pieces of the objective magnetic lens.
摘要翻译：电子束装置通过物镜磁性透镜将电子束聚焦在样本上。为了检测样品的高度变化，来自激光源的激光束入射到样品上，并且通过光检测器检测反射的激光束。样品高度的任何变化会改变激光束到检测器的路径。因此，通过监视检测器，可以通过改变到物镜磁性透镜的激励线圈的电流或通过安装级移动样本来控制电子束在样本上的聚焦。物镜的极片中的至少一个位于激光束到电子束源的路径的相对侧，使得物镜磁性透镜可能靠近样本，允许短焦距。因此，激光束可以在极片之间通过。还可以提供光学显微镜以允许观察样品。光学显微镜的观察路径延伸穿过物镜磁性透镜的一个或两个极片中的开口。

49. 发明授权

US5570191A Identification of connector terminals 失效
标题翻译：识别连接器端子
公开(公告)号：US5570191A
公开(公告)日：1996-10-29
申请号：US321035
申请日：1994-10-06
申请人： Hitoshi Uesugi , Tsutomu Maki , Kazuyoshi Tomikawa , Tatsuya Maeda , Yoshimi Masuda
发明人： Hitoshi Uesugi , Tsutomu Maki , Kazuyoshi Tomikawa , Tatsuya Maeda , Yoshimi Masuda
IPC分类号： G01J3/02 , G01J3/50 , H01R13/03 , H01R43/00 , H01R43/20 , G01J3/46
CPC分类号： G01J3/02 , G01J3/0218 , G01J3/50 , G01J3/513
摘要： Connector housings having plural kinds of terminals (plated with different materials, e.g.) are mounted at predetermined locations, positioned and secured by a drive means. A sensor probe which receives a light, of a color detection device, is transferred successively to the locations opposite to the terminals. A color sensor senses a level of a specific color component of the light received by the sensor probe. The sensed level is compared with a predetermined reference level and it can be determined based upon whether the sensed level is higher than the reference level, the kind of the terminals in the connector housings.
摘要翻译：具有多种端子（例如电镀不同材料）的连接器壳体安装在预定位置，由驱动装置定位和固定。接收颜色检测装置的光的传感器探头被连续传送到与端子相对的位置。颜色传感器感测由传感器探针接收的光的特定颜色分量的水平。将感测到的电平与预定的参考电平进行比较，并且可以基于感测电平是否高于参考电平来确定连接器壳体中的端子的种类。

50. 发明授权

US08502144B2 Tool-to-tool matching control method and its system for scanning electron microscope 有权
标题翻译：刀具对刀匹配控制方法及其扫描电子显微镜系统
公开(公告)号：US08502144B2
公开(公告)日：2013-08-06
申请号：US13190847
申请日：2011-07-26
申请人： Mayuka Oosaki , Chie Shishido , Hiroki Kawada , Tatsuya Maeda
发明人： Mayuka Oosaki , Chie Shishido , Hiroki Kawada , Tatsuya Maeda
IPC分类号： H01J37/28 , H01J37/256 , G01N23/00
CPC分类号： H01J37/28 , H01J2237/282
摘要： A system for controlling a tool-to-tool disparity between a plurality of scanning electron microscopes includes a measuring unit for measuring a tool-to-tool disparity between plural scanning electron microscopes based on information extracted from secondary electron images which are captured by imaging a reference pattern, a tool state monitoring unit for monitoring tool states of each of the plural scanning electron microscopes, and an output unit for displaying on a screen a relationship between the tool-to-tool disparity between the plural scanning electron microscopes and tool states of each of the plural scanning electron microscopes monitored by the tool state monitoring unit. The tool state monitoring unit monitors the tool states of each of the plural scanning electron microscopes while imaging the reference pattern by using each of the plural scanning electron microscopes.
摘要翻译：用于控制多个扫描电子显微镜之间的工具对工具差异的系统包括：测量单元，用于基于通过成像获得的二次电子图像提取的信息来测量多个扫描电子显微镜之间的工具对工具差异参考图案，用于监视多个扫描电子显微镜中的每一个的工具状态的工具状态监视单元和用于在屏幕上显示多个扫描电子显微镜之间的工具与工具之间的差异与工具状态之间的关系的输出单元由工具状态监视单元监视的多个扫描电子显微镜中的每一个。工具状态监视单元通过使用多个扫描电子显微镜中的每一个来对多个扫描电子显微镜中的每个扫描电子显微镜的工具状态进行监视，同时对参考图案进行成像。

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