会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Scanning electron microscope
    • 扫描电子显微镜
    • US08124934B2
    • 2012-02-28
    • US12264605
    • 2008-11-04
    • Tatsuya Maeda
    • Tatsuya Maeda
    • G01N23/00
    • H04N5/76H01J37/265H01J37/28H01J2237/2487H01J2237/2817H04N5/772H04N5/775H04N5/781H04N5/907H04N9/8205
    • It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image lm(t2) obtained by retroceding from a sample image lm(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.
    • 在扫描电子显微镜中便于执行再现测试的劳动,对执行自动观察过程所引起的问题进行基本分析,并确认导致错误的细节。 扫描电子显微镜从检测到异常的误差时,提取通过从存储的与样品图像lm(te)相反的获得的样本图像lm(t2),以使与出现错误的时间t相关联的预定视频量(对于 例如,由输入 - 输出设备预先设置和登记的总记录时间段t2)从存储在记录设备中的样本图像被重写,并将所得到的样本图像存储在另一个记录设备中。
    • 3. 发明授权
    • Charged particle beam apparatus and methods for capturing images using the same
    • 带电粒子束装置及使用该装置拍摄图像的方法
    • US07807980B2
    • 2010-10-05
    • US11647348
    • 2006-12-29
    • Chie ShishidoMayuka OosakiMitsugu SatoHiroki KawadaTatsuya Maeda
    • Chie ShishidoMayuka OosakiMitsugu SatoHiroki KawadaTatsuya Maeda
    • G21K7/00A61N5/00G21G5/00
    • H01J37/263H01J37/265H01J37/28H01J2237/2826
    • The present invention provides a charged particle beam apparatus used to measure micro-dimensions (CD value) of a semiconductor apparatus or the like which captures images for measurement. For the present invention, a sample for calibration, on which a plurality of polyhedral structural objects with known angles on surfaces produced by the crystal anisotropic etching technology are arranged in a viewing field, is used. A beam landing angle at each position within a viewing field is calculated based on geometric deformation on an image of each polyhedral structural object. Beam control parameters for equalizing the beam landing angle at each position within the viewing field are pre-registered. The registered beam control parameters are applied according to the position of the pattern to be measured within the viewing field when performing dimensional measurement. Accordingly, the present invention provides methods for reducing the variation in the CD value caused by the variation in the electron beam landing angle with respect to the sample with an equal beam landing angle and methods for reducing the instrumental error caused by the difference in the electron beam landing angle between apparatuses.
    • 本发明提供一种用于测量捕获用于测量的图像的半导体装置等的微尺寸(CD值)的带电粒子束装置。 对于本发明,使用用于校准的样品,其上在视场中排列有通过晶体各向异性蚀刻技术产生的表面上具有已知角度的多个多面体结构物体。 基于每个多面体结构物体的图像上的几何变形来计算视野内的每个位置处的束着陆角。 用于均衡视场内每个位置的束着陆角的光束控制参数被预先注册。 当进行尺寸测量时,根据待测图案的位置在观察区域中应用登记的光束控制参数。 因此,本发明提供了减少相对于具有相同束着陆角的样品的电子束着角的变化引起的CD值的变化的方法,以及用于减少由电子差异引起的仪器误差的方法 设备之间的束着陆角度。
    • 8. 发明授权
    • Method for managing received radio data
    • 管理接收到的无线电数据的方法
    • US6115800A
    • 2000-09-05
    • US902523
    • 1997-07-29
    • Tatsuya Maeda
    • Tatsuya Maeda
    • G06F12/02G06F17/30H04H20/42H04H60/27H04H60/44
    • H04H20/42H04H60/27H04H2201/13H04H60/44
    • A data storing method and a data searching method for the stored data for improving memory employment efficiency of RDS reception data while maintaining searching processing speed of PI code, in the data storing method and the data searching method for the stored data, read-address is set to head of PI area, there is judged whether or not the read-address agrees with PI code of storing candidate, when the read-address disagrees with PI code of storing candidate, the read-address is set to next PI storing position. Next, there is judged whether or not check of all PI code is terminated. When the check is not terminated, the processing after judgement of agreement between address PI code and PI code of storing candidate is implemented repeatedly. When there is no agreed PI code in spite of termination of check of all PI code, the storing candidate PI code and AF data are stored at the next of the rearmost of the AF data. When PI codes agree therewith each other, head of AF area of the read PI code is searched, AF data is stored in the free area.
    • 数据存储方法和数据搜索方法,用于在保持数据存储方法和存储数据的数据搜索方法的读取地址的同时保持PI代码的搜索处理速度的同时提高RDS接收数据的存储器使用效率的存储数据 设置为PI区域的头部,当读取地址与存储候选的PI代码不一致时,判断读取地址是否与存储候选的PI代码一致,读取地址被设置为下一个PI存储位置。 接下来,判断是否终止了所有PI代码的检查。 当检查未终止时,重复执行地址PI代码和存储候选的PI代码之间的协商判断之后的处理。 当不存在所有PI代码的检查结束时,没有约定的PI代码时,存储候选PI代码和AF数据被存储在AF数据的最后面的下一个处。 当PI代码彼此一致时,搜索读取的PI代码的AF区域的头部,AF数据被存储在空闲区域中。
    • 10. 发明授权
    • Terminal crimping device
    • 端子压接装置
    • US5887469A
    • 1999-03-30
    • US901281
    • 1997-07-29
    • Tatsuya MaedaChiaki Hatano
    • Tatsuya MaedaChiaki Hatano
    • B30B1/26B30B15/14H01R43/048B21B37/00
    • H01R43/0486B30B1/266B30B15/14Y10T29/53022Y10T29/53235
    • A terminal crimping device includes an elevating crimper for crimping terminals onto exposed conductors of cables and an anvil positioned opposite to said elevating crimper so that the ascend/descend of the crimper is carried out by a servo motor. The terminal crimping device further includes a height sensor for outputting a crimp height at the time of crimping said terminals, a data storage unit for storing a pressing time range for determination on whether or not terminal crimping is normal and a crimper height value for determination of said pressing time; and determining unit for time measuring the time during which an output from said height sensor is not larger than the crimper height and determining that crimping is normal if the measured time is within said pressing time range. Thus, the determination on whether or not the terminal crimping is normal can be surely made.
    • 端子压接装置包括用于将端子压接在暴露的电缆导体上的升降压接器和与所述升降压接器相对定位的砧座,使得压接器的上升/下降由伺服电动机执行。 端子压接装置还包括用于在压接所述端子时输出压接高度的高度传感器,用于存储用于确定端子压接是否正常的按压时间范围的数据存储单元,以及用于确定端子压接装置的压接器高度值 说压力时间 以及确定单元,用于时间测量来自所述高度传感器的输出不大于所述压接器高度的时间,并且如果所测量的时间在所述按压时间范围内,则确定所述压接正常。 因此,可以确定端子压接是否正常的判定。