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    • 42. 发明申请
    • Magneto-resistive sensor with stopper layer and fabrication process
    • 具有阻塞层和制造工艺的磁阻传感器
    • US20060132983A1
    • 2006-06-22
    • US11289798
    • 2005-11-29
    • Masahiro OsugiTaku ShintaniKatsuro WatanabeNobuo Yoshida
    • Masahiro OsugiTaku ShintaniKatsuro WatanabeNobuo Yoshida
    • G11B5/33G11B5/127
    • G11B5/39G01R33/09G11B5/3163G11B5/3169
    • A high output magneto-resistive sensor is provided by suppressing leftover resist mask after lift-off and generation of a fence, and by making it easy to remove the redepositions deposited on the side wall in the track width direction or on the side wall in the sensor height direction of the magnetoresistive film. As a means to solve a fence and lift-off leftover of a resist in a process for forming a track and a process for forming a sensor height, a stopper layer is provided on the magnetoresistive film and the stopper layer on the refill film, and performing lift-off by CMP. By using a metallic material which has a small CMP polishing rate for at least the first stopper layer, the magnetoresistive film and the first stopper layer can be etched simultaneously and a pattern formed. As a result, decrease of the height of the resist mask by RIE can be suppressed and lift-off leftover can be prevented.
    • 通过在剥离和产生栅栏之后抑制剩余抗蚀剂掩模来提供高输出磁阻传感器,并且通过使得容易地去除在轨道宽度方向上或侧壁上沉积在侧壁上的再沉积 磁阻膜的传感器高度方向。 作为用于形成轨迹的工序中的抗蚀剂的栅栏和剥离残留的手段以及形成传感器高度的工序,在磁阻膜和再填充膜上的阻挡层上设置有阻挡层, 通过CMP执行剥离。 通过使用对于至少第一阻挡层具有小的CMP抛光速率的金属材料,可以同时蚀刻磁阻膜和第一阻挡层并形成图案。 结果,可以抑制RIE的抗蚀剂掩模的高度的降低,并且可以防止剥离残留物。
    • 44. 发明申请
    • Thin film magnetic head and fabrication process
    • 薄膜磁头和制造工艺
    • US20060012923A1
    • 2006-01-19
    • US11183037
    • 2005-07-15
    • Nobuo Yoshida
    • Nobuo Yoshida
    • G11B5/127G11B5/33
    • G11B5/33G11B5/127
    • Embodiments of the invention relate to keeping the insulation voltage between the upper and lower leads and preventing short-circuit failure even in the narrow track width and narrow gap length, resulting in improved yield. In one embodiment, the sensor heads are placed on both sides of the track direction of the sensor film at the side of the sensor film, upper shield, lower shield, and air bearing surface. The sensor heads comprise the first insulating film with at least a part connected to the track direction wall surface of the aforementioned sensor film and the third insulating film formed between the upper shield and the first insulating film, and have the relationship being Tw
    • 本发明的实施例涉及保持上下引线之间的绝缘电压,并且即使在窄轨道宽度和窄间隙长度中也能够防止短路故障,从而提高了产量。 在一个实施例中,传感器头位于传感器膜,上屏蔽,下屏蔽和空气支承表面侧的传感器膜的轨道方向的两侧。 传感器头包括具有至少一部分连接到上述传感器膜的轨道方向壁表面的第一绝缘膜和形成在上屏蔽和第一绝缘膜之间的第三绝缘膜,并且具有Tw
    • 49. 发明授权
    • Sensor shape of a CPP magnetic head for improving the MR ratio
    • 用于改善MR比的CPP磁头的传感器形状
    • US08355224B2
    • 2013-01-15
    • US12011904
    • 2008-01-29
    • Satoru OkamotoKoji OkazakiShuuichi KojimaNobuo YoshidaKatsuro WatanabeHiroyuki Katada
    • Satoru OkamotoKoji OkazakiShuuichi KojimaNobuo YoshidaKatsuro WatanabeHiroyuki Katada
    • G11B5/33
    • G11B5/398B82Y25/00G01R33/093G11B5/3163H01L43/08
    • Embodiments of the present invention help to prevent a head characteristic from being deteriorated by re-deposition or damage which occurs when a sensor film is etched, a track width is narrowed, and the head characteristic is stabilized. According to one embodiment, when it is assumed that the thickness of the sensor film on an air bearing surface is T, and a distance between an end of a medium layer that is interposed between a free layer and a pinned layer which comprise the sensor film and an end of the sensor film lowest portion, a relationship of 1.2×T≦X≦2.5×T is satisfied, and the ends of a pair of magnetic films which are in contact with both sides in the track-width direction through an insulator do not exist in the track central portion from the free layer end. The sensor film is etched while an incident angle of an etching beam is changed over, and when it is assumed that a direction normal to the sensor film surface is the incident angle of 0, etching is conducted under the condition where the incident angle of the etching beam becomes smaller with time.
    • 本发明的实施例有助于通过在传感器膜被蚀刻,轨道宽度变窄并且头部特性稳定时发生的再沉积或损伤来防止头部特性劣化。 根据一个实施例,当假设空气轴承表面上的传感器膜的厚度为T时,介于介于包含传感器膜的自由层和被钉扎层之间的介质层的端部之间的距离 和传感器膜最低部分的一端,满足1.2×T≦̸ X≦̸ 2.5×T的关系,并且通过绝缘体在轨道宽度方向上与两侧接触的一对磁性膜的端部 不存在于自由层末端的轨道中心部分。 在蚀刻光束的入射角变化的同时蚀刻传感器膜,并且当假定与传感器膜表面垂直的方向为入射角为0时,在其入射角 刻蚀光束随时间变小。
    • 50. 发明授权
    • Magnetic heads having a graded domain control film and methods of manufacture thereof
    • 具有梯度域控制膜的磁头及其制造方法
    • US08284527B2
    • 2012-10-09
    • US12957229
    • 2010-11-30
    • Nobuo YoshidaMasato ShiimotoKenichi AkitaKan Yasui
    • Nobuo YoshidaMasato ShiimotoKenichi AkitaKan Yasui
    • G11B5/39
    • H01L43/08B82Y25/00G01R33/093G01R33/098G11B5/3912G11B5/398
    • A magnetic head, according to one embodiment, includes a sensor film, a sensor cap film provided above the sensor film, a pair of shields including an upper magnetic shield and a lower magnetic shield which serve as electrodes that pass current in a film thickness direction of the sensor film, a track insulating film contacting both sides of the sensor film in the track width direction, a graded domain control film arranged on both sides in the track width direction of the sensor film adjacent the track insulating film, and an element height direction insulating film positioned on an opposite side of the sensor film relative to an air-bearing surface, wherein an edge position of the element height direction insulating film adjacent the sensor film on the air-bearing surface side is substantially the same as an edge position of the sensor cap film in the element height direction.
    • 根据一个实施例的磁头包括传感器膜,设置在传感器膜上方的传感器盖膜,包括上磁屏蔽和下磁屏蔽的一对屏蔽件,其用作使电流在膜厚度方向上通过的电极 传感器膜的传感器膜的两侧接触的轨道绝缘膜,布置在邻近轨道绝缘膜的传感器膜的轨道宽度方向两侧的梯度控制膜和元件高度 相对于空气轴承表面定位在传感器膜的相对侧上的方向绝缘膜,其中与空气轴承表面侧相邻的传感器膜的元件高度方向绝缘膜的边缘位置与边缘位置基本相同 传感器盖膜在元件高度方向上。