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    • 42. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20090239348A1
    • 2009-09-24
    • US12478345
    • 2009-06-04
    • Sun-Ghil LeeYoung-Pil KimYu-Gyun ShinJong-Wook LeeYoung-Eun Lee
    • Sun-Ghil LeeYoung-Pil KimYu-Gyun ShinJong-Wook LeeYoung-Eun Lee
    • H01L21/336
    • C30B29/06C30B15/00
    • A semiconductor device formed on a strained silicon layer and a method of manufacturing such a semiconductor device are disclosed. In accordance with this invention, a first silicon germanium layer is formed on a single crystalline silicon substrate; a second silicon germanium layer is formed on the first silicon germanium layer, the second silicon germanium layer having a concentration of germanium in a range of about 1 percent by weight to about 15 percent by weight based on the total weight of the second silicon germanium layer; a strained silicon layer is formed on the second silicon germanium layer; an isolation layer is formed at a first portion of the strained silicon layer; a gate structure is formed on the strained silicon layer; and, source/drain regions are formed at second portions of the strained silicon layer adjacent to the gate structure to form a transistor.
    • 公开了一种形成在应变硅层上的半导体器件及其制造方法。 根据本发明,在单晶硅衬底上形成第一硅锗层; 第二硅锗层形成在第一硅锗层上,第二硅锗层的锗浓度在约1重量%至约15重量%的范围内,基于第二硅锗层的总重量 ; 在第二硅锗层上形成应变硅层; 在应变硅层的第一部分处形成隔离层; 在应变硅层上形成栅极结构; 并且源极/漏极区域形成在与栅极结构相邻的应变硅层的第二部分处以形成晶体管。
    • 46. 发明授权
    • Fin field effect transistors having multi-layer fin patterns
    • 鳍场效应晶体管具有多层翅片图案
    • US07323710B2
    • 2008-01-29
    • US10870743
    • 2004-06-17
    • Young-Pil KimSun-Ghil LeeSi-Young Choi
    • Young-Pil KimSun-Ghil LeeSi-Young Choi
    • H01L29/06H01L31/00
    • H01L29/785H01L29/66795H01L29/78687
    • A fin field effect transistor has a fin pattern protruding from a semiconductor substrate. The fin pattern includes first semiconductor patterns and second semiconductor patterns which are stacked. The first and second semiconductor patterns have lattice widths that are greater than a lattice width of the substrate in at least one direction. In addition, the first and second semiconductor patterns may be alternately stacked to increase the height of the fin pattern, such that one of the first and second patterns can reduce stress from the other of the first and second patterns. The first and second semiconductor patterns may be formed of strained silicon and silicon-germanium, where the silicon-germanium patterns can reduce stress from the strained silicon patterns. Therefore, both the number of carriers and the mobility of carriers in the transistor channel may be increased, improving performance of the fin field effect transistor. Related methods are also discussed.
    • 鳍状场效应晶体管具有从半导体衬底突出的鳍状图案。 鳍状图案包括堆叠的第一半导体图案和第二半导体图案。 第一和第二半导体图案具有在至少一个方向上大于衬底的晶格宽度的晶格宽度。 此外,第一和第二半导体图案可以交替堆叠以增加鳍片图案的高度,使得第一和第二图案中的一个可以减小来自第一和第二图案中的另一个的应力。 第一和第二半导体图案可以由应变硅和硅 - 锗形成,其中硅 - 锗图案可以减小应变硅图案的应力。 因此,可以增加晶体管沟道中的载流子数和载流子的迁移率,从而提高鳍式场效应晶体管的性能。 还讨论了相关方法。
    • 47. 发明授权
    • Semiconductor device test patterns and related methods for precisely measuring leakage currents in semiconductor cell transistors
    • 用于精确测量半导体单元晶体管中的漏电流的半导体器件测试图案和相关方法
    • US07271408B2
    • 2007-09-18
    • US10796672
    • 2004-03-09
    • Young-pil KimBeom-jun Jin
    • Young-pil KimBeom-jun Jin
    • H01L23/58
    • H01L27/10882H01L22/32H01L27/108H01L27/10814H01L27/10894H01L27/10897H01L2924/0002H01L2924/00
    • Semiconductor device test patterns are provided that include a word line on a semiconductor substrate and an active region having a first impurity doped region and a second impurity doped region in at the semiconductor substrate. A first self-aligned contact pad is electrically connected to the first impurity doped region, and a first direct contact is electrically connected to the first self-aligned contact pad. A first bit line is electrically connected to the first direct contact, and a first probing pad is electrically connected to the first bit line. The test pattern further includes a second self-aligned contact pad that is electrically connected to the second impurity doped region, and a second direct contact electrically connected to the second self-aligned contact pad. A second conductive line is electrically connected to the second direct contact, and a second probing pad is electrically connected to the second conductive line. These test patterns may be used to measure leakage current in a cell transistor of the semiconductor device.
    • 提供半导体器件测试图案,其包括在半导体衬底上的字线和在半导体衬底中具有第一杂质掺杂区和第二杂质掺杂区的有源区。 第一自对准接触焊盘电连接到第一杂质掺杂区域,第一直接接触电连接到第一自对准接触焊盘。 第一位线电连接到第一直接触点,并且第一探针焊盘电连接到第一位线。 测试图案还包括电连接到第二杂质掺杂区的第二自对准接触焊盘和电连接到第二自对准接触焊盘的第二直接接触。 第二导电线电连接到第二直接接触,第二探测焊盘电连接到第二导线。 这些测试图案可用于测量半导体器件的单元晶体管中的漏电流。