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    • 42. 发明授权
    • Method of improving gate resistance in a memory array
    • 提高存储器阵列中栅极电阻的方法
    • US07696048B2
    • 2010-04-13
    • US11425065
    • 2006-06-19
    • Hyung-Shin KwonSeug-Gyu Kim
    • Hyung-Shin KwonSeug-Gyu Kim
    • H01L21/8232H01L21/8239
    • H01L21/823468H01L27/105H01L27/1052H01L27/11H01L27/1104H01L27/1116
    • A semiconductor device is formed with a normal, non-recessed, spacer structure in a cell region and a recessed spacer structure in a peripheral region. The recessed spacer structure is formed as by etch masking those in the cell region and exposing those in the peripheral region, then performing an etch process. The increased height of the cell region spacers is adapted to further prevent over-etching during gate interconnect formation which would otherwise result in etching through the spacer to the substrate and subsequent short circuit. Therefore, it is also possible to prevent bridge defects due to over-etching, which occurs because the barrier metal layer for a subsequent interconnection contact is accidentally connected to the underlying substrate. Also, since the recessed spacer structure is provided in the peripheral region, it is possible to remarkably enhance a resistance distribution of a cobalt silicide layer occurring in a gate line width of 100 nm or less.
    • 半导体器件在单元区域中具有正常的非凹入的间隔结构,并且在周边区域中形成有凹入的间隔结构。 凹陷的间隔结构通过蚀刻掩蔽细胞区域中的那些并且暴露在外围区域中的那些,然后进行蚀刻工艺而形成。 单元区域间隔物的增加的高度适于进一步防止在栅极互连形成期间的过度蚀刻,否则将导致通过间隔物蚀刻到衬底和随后的短路。 因此,也可以防止由于用于随后的互连接触的阻挡金属层意外地连接到下面的基板而发生的由于过蚀刻而引起的桥接缺陷。 此外,由于在周边区域设置凹陷的间隔结构,因此可以显着提高出现在100nm以下的栅极线宽度的硅化钴层的电阻分布。