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    • 5. 发明授权
    • Use of selective oxidation conditions for dielectric conditioning
    • 使用选择性氧化条件进行电介质调理
    • US06734531B2
    • 2004-05-11
    • US10391266
    • 2003-03-18
    • Ronald A. WeimerDon Carl Powell
    • Ronald A. WeimerDon Carl Powell
    • H01L2328
    • H01L28/91H01L21/3105Y10S438/958
    • A method for conditioning or repairing a dielectric structure of a semiconductor device structure with selectivity over an adjacent conductive or semiconductive structure of the semiconductor device structure, such as a capacitor dielectric and an adjacent bottom electrode of the capacitor. The method includes exposing the dielectric structure and at least an adjacent surface of the conductive or semiconductive structure to an oxidizing atmosphere that includes at least one oxidant and hydrogen species. The at least one hydrogen species adsorbs to a surface of the conductive or semiconductive structure so as to substantially prevent passage of the at least one oxidant into or through the conductive or semiconductive structure. The oxidant oxidizes or repairs voids or other defects that may be present in the dielectric structure. Semiconductor device structures fabricated by employing the method are also disclosed.
    • 用于调节或修复半导体器件结构的电介质结构的方法,其具有对半导体器件结构的相邻导电或半导体结构(诸如电容器电介质和电容器的相邻底部电极)的相邻导电或半导体结构的选择性。 该方法包括将导电或半导体结构的介电结构和至少相邻表面暴露于包括至少一种氧化剂和氢物质的氧化气氛。 所述至少一种氢物质吸附到导电或半导体结构的表面,以便基本上防止至少一种氧化剂进入导电或半导体结构中。 氧化剂氧化或修复可能存在于电介质结构中的空隙或其它缺陷。 还公开了通过采用该方法制造的半导体器件结构。
    • 9. 发明授权
    • Containment fence apparatus and potting method
    • 遏制围栏装置和灌封方法
    • US06541701B1
    • 2003-04-01
    • US09608932
    • 2000-06-30
    • Robert LooseScott Eastman
    • Robert LooseScott Eastman
    • H01L2328
    • H05K5/064H05K3/284H05K7/205
    • A fluid containment fence apparatus provides a border around the perimeter of an area to be potted on one or both sides of the board. First, or first and second and second (top and bottom), containment walls are secured in place using interlocking elements integral to the walls such that no external fasteners are needed. The interlocking elements permit snug adhesion of the fence to the board even when the board has variations in thickness. The interlocking elements extend through and interlock through engagement with another fence or the board. The size of the holes is minimized. As a result, a minimum amount of board space is occupied by the fence, and the overall size of the board is maintained. A potting fluid containment fence for a board having components to be encased in a potting fluid includes a first wall. The components to be encased are arranged on an upper face of the board, at least. The first wall has segments that form a closed first polygon and a protrusion for engaging a corresponding hole on the upper face of the board. The protrusion is on a lower face of the first wall. The first wall is formed of material which is rigid before the protrusion is engaged in the corresponding hole.
    • 流体容纳围栏装置围绕要在板的一侧或两侧上封装的区域的周边提供边界。 首先,或第一和第二和第二(顶部和底部),安全壳使用与墙壁成一体的互锁元件固定就位,使得不需要外部紧固件。 互锁元件即使当板的厚度变化时,也可以将栅栏紧贴到板上。 互锁元件通过与另一个围栏或板的接合而延伸通过并互锁。 孔的尺寸最小化。 因此,栅栏占用最少的电路板空间,并保持电路板的整体尺寸。 用于板的灌封液容纳挡板包括第一壁,所述挡板包含封装在灌封液中的部件。 待封装的部件至少布置在板的上表面上。 第一壁具有形成封闭的第一多边形的段和用于接合板的上表面上的相应孔的突起。 突起位于第一壁的下表面上。 第一壁由突出物接合在相应的孔中之前刚性的材料形成。