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    • 31. 发明申请
    • Method for determining a current density distribution in a fuel cell stack
    • 用于确定燃料电池堆中的电流密度分布的方法
    • US20030020454A1
    • 2003-01-30
    • US10208413
    • 2002-07-29
    • Karl-Heinz Hauer
    • G01R033/02
    • G01R19/08G01R31/3606
    • A method for detecting a current density distribution in a fuel cell stack by detecting the magnetic field, which surrounds the fuel cell stack and which is caused by a current flow in the fuel cell stack, is provided. Sensors for an x-component, a y-component and a z-component of the magnetic flux density detect the magnetic flux density at several points outside the fuel cell stack. The position of the sensors for the magnetic flux density is detected in relation to the fuel cell stack. The thus detected values for the magnetic flux density and the allocated position are converted into current density values according to the position in the fuel cell stack by using a Maxwell equation which defines the magnetic field strength and the material equation which relates the magnetic field strength to the magnetic flux density.
    • 提供了一种通过检测包围燃料电池堆并且由燃料电池堆中的电流引起的磁场来检测燃料电池堆中的电流密度分布的方法。 用于x分量,y分量和z分量的磁通密度的传感器检测在燃料电池堆外部的几个点处的磁通密度。 相对于燃料电池堆检测用于磁通密度的传感器的位置。 通过使用定义磁场强度的麦克斯韦方程式和将磁场强度与磁场强度相关联的材料方程式,将这样检测的磁通密度值和分配位置的值转换为根据燃料电池堆中的位置的电流密度值 磁通密度。
    • 32. 发明授权
    • Beam current sensor
    • 光束电流传感器
    • US4687987A
    • 1987-08-18
    • US655487
    • 1984-09-28
    • Moyses KuchnirFrederick E. Mills
    • Moyses KuchnirFrederick E. Mills
    • G01R19/00G01R19/08
    • G01R19/0061G01R19/08Y10S336/01Y10S505/843
    • A current sensor for measuring the DC component of a beam of charged particles employs a superconducting pick-up loop probe, with twisted superconducting leads in combination with a Superconducting Quantum Interference Device (SQUID) detector. The pick-up probe is in the form of a single-turn loop, or a cylindrical toroid, through which the beam is directed and within which a first magnetic flux is excluded by the Meisner effect. The SQUID detector acts as a flux-to-voltage converter in providing a current to the pick-up loop so as to establish a second magnetic flux within the electrode which nulls out the first magnetic flux. A feedback voltage within the SQUID detector represents the beam current of the particles which transit the pick-up loop. Meisner effect currents prevent changes in the magnetic field within the toroidal pick-up loop and produce a current signal independent of the beam's cross-section and its position within the toroid, while the combination of superconducting elements provides current measurement sensitivites in the nano-ampere range.
    • 用于测量带电粒子束的DC分量的电流传感器采用超导拾音环路探针,其中超导引线与超导量子干涉器件(SQUID)检测器结合。 拾音探头采用单圈环或圆柱形环形的形式,光束通过该环形导向,其中Meisner效应排除第一磁通。 SQUID检测器用作向电流回路提供电流的磁通电压转换器,以便在电极内建立第二磁通,使第一磁通无效。 SQUID检测器内的反馈电压表示传递拾波回路的粒子的束流。 Meisner效应电流防止环形拾音环路内的磁场变化,并产生独立于光束横截面的电流信号及其在环形面内的位置,而超导元件的组合可提供纳米安培中的电流测量灵敏度 范围。
    • 33. 发明授权
    • Generation of beams of charged particles
    • 充电颗粒物的生成
    • US3857090A
    • 1974-12-24
    • US36652273
    • 1973-06-04
    • NAT RES DEV
    • CHICK D
    • G01R19/08G01R33/028G01R33/02
    • H01J37/3045G01R19/08G01R33/028H01J2237/24507H01J2237/30472H01J2237/31749
    • Apparatus for and methods of monitoring the current comprised by a beam of charged particles, for example a focussed ion beam as used for ion implantation of surfaces such as semiconductor circuit substrates, is described. The beam is amplitude modulated and the resultant corresponding modulation of the magnetic field strength of the beam is detected, for example by a toroidal coil, to produce an output signal proportional to the field strength modulation and therefore proportional to the beam current. A plurality, for example four, of said output signals may be derived from positions spaced around the beam to enable any deviation of the beam from the desired path to be determined, and any deviation signal obtained may be used to return the beam to the desired path.
    • 描述了用于监测由带电粒子束包括的电流的装置和方法,例如用于诸如半导体电路基板的表面的离子注入所使用的聚焦离子束。 波束被幅度调制,并且例如通过环形线圈来检测波束的磁场强度的相应调制,以产生与场强调制成比例的输出信号,并因此与束电流成比例。 多个(例如四个)所述输出信号可以从围绕光束间隔的位置导出,以使波束与所要求的路径的任何偏离被确定,并且可以使用获得的任何偏差信号将光束返回到期望的 路径。
    • 37. 发明授权
    • Imaging using spatial frequency filtering and masking
    • 使用空间频率滤波和掩蔽的成像
    • US06571183B1
    • 2003-05-27
    • US09647940
    • 2000-10-18
    • Frederick Charles WellstoodSojiphong ChatraphornErin Franklin Fleet
    • Frederick Charles WellstoodSojiphong ChatraphornErin Franklin Fleet
    • G01R2500
    • G01R31/311G01N27/82G01R19/08G01R31/307G01R33/10
    • A method of, an and apparatus for, creating an image of currents flowing through current paths in a microelectronic circuit such that the image of the currents has improved spatial resolution using filters. The filters increase the spatial resolution and eliminate noise and edge artifacts in magnetic field and electric field images of electronic circuits. In accordance with the method, a magnetic field image is created with a scanning SQUID microscope. A magnetic inversion technique is then used to convert the magnetic field image into a current density image. The current density image is filtered based upon known restrictions on the wiring geometry of the microelectronic circuit being imaged. The technique can also be applied to convert electric fields of a circuit from a scanning single electron transistor microscope into images of the voltage levels on the wires in the circuit.
    • 一种用于产生流过微电子电路中的电流路径的电流的图像的方法和装置,使得电流的图像使用滤波器改善了空间分辨率。 滤波器增加了空间分辨率,消除了电子电路的磁场和电场图像中的噪声和边缘伪影。 根据该方法,用扫描SQUID显微镜产生磁场图像。 然后使用磁反转技术将磁场图像转换成电流密度图像。 基于对正在成像的微电子电路的布线几何形状的已知限制,对电流密度图像进行滤波。 该技术也可以用于将扫描单电子晶体管显微镜的电路的电场转换成电路中的电线上的电压电平的图像。