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1. 发明授权

US06571183B1 Imaging using spatial frequency filtering and masking 有权
标题翻译：使用空间频率滤波和掩蔽的成像
公开(公告)号：US06571183B1
公开(公告)日：2003-05-27
申请号：US09647940
申请日：2000-10-18
申请人： Frederick Charles Wellstood , Sojiphong Chatraphorn , Erin Franklin Fleet
发明人： Frederick Charles Wellstood , Sojiphong Chatraphorn , Erin Franklin Fleet
IPC分类号： G01R2500
CPC分类号： G01R31/311 , G01N27/82 , G01R19/08 , G01R31/307 , G01R33/10
摘要： A method of, an and apparatus for, creating an image of currents flowing through current paths in a microelectronic circuit such that the image of the currents has improved spatial resolution using filters. The filters increase the spatial resolution and eliminate noise and edge artifacts in magnetic field and electric field images of electronic circuits. In accordance with the method, a magnetic field image is created with a scanning SQUID microscope. A magnetic inversion technique is then used to convert the magnetic field image into a current density image. The current density image is filtered based upon known restrictions on the wiring geometry of the microelectronic circuit being imaged. The technique can also be applied to convert electric fields of a circuit from a scanning single electron transistor microscope into images of the voltage levels on the wires in the circuit.
摘要翻译：一种用于产生流过微电子电路中的电流路径的电流的图像的方法和装置，使得电流的图像使用滤波器改善了空间分辨率。滤波器增加了空间分辨率，消除了电子电路的磁场和电场图像中的噪声和边缘伪影。根据该方法，用扫描SQUID显微镜产生磁场图像。然后使用磁反转技术将磁场图像转换成电流密度图像。基于对正在成像的微电子电路的布线几何形状的已知限制，对电流密度图像进行滤波。该技术也可以用于将扫描单电子晶体管显微镜的电路的电场转换成电路中的电线上的电压电平的图像。

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