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1. 发明授权

US06571183B1 Imaging using spatial frequency filtering and masking 有权
标题翻译：使用空间频率滤波和掩蔽的成像
公开(公告)号：US06571183B1
公开(公告)日：2003-05-27
申请号：US09647940
申请日：2000-10-18
申请人： Frederick Charles Wellstood , Sojiphong Chatraphorn , Erin Franklin Fleet
发明人： Frederick Charles Wellstood , Sojiphong Chatraphorn , Erin Franklin Fleet
IPC分类号： G01R2500
CPC分类号： G01R31/311 , G01N27/82 , G01R19/08 , G01R31/307 , G01R33/10
摘要： A method of, an and apparatus for, creating an image of currents flowing through current paths in a microelectronic circuit such that the image of the currents has improved spatial resolution using filters. The filters increase the spatial resolution and eliminate noise and edge artifacts in magnetic field and electric field images of electronic circuits. In accordance with the method, a magnetic field image is created with a scanning SQUID microscope. A magnetic inversion technique is then used to convert the magnetic field image into a current density image. The current density image is filtered based upon known restrictions on the wiring geometry of the microelectronic circuit being imaged. The technique can also be applied to convert electric fields of a circuit from a scanning single electron transistor microscope into images of the voltage levels on the wires in the circuit.
摘要翻译：一种用于产生流过微电子电路中的电流路径的电流的图像的方法和装置，使得电流的图像使用滤波器改善了空间分辨率。滤波器增加了空间分辨率，消除了电子电路的磁场和电场图像中的噪声和边缘伪影。根据该方法，用扫描SQUID显微镜产生磁场图像。然后使用磁反转技术将磁场图像转换成电流密度图像。基于对正在成像的微电子电路的布线几何形状的已知限制，对电流密度图像进行滤波。该技术也可以用于将扫描单电子晶体管显微镜的电路的电场转换成电路中的电线上的电压电平的图像。

2. 发明授权

US06984977B2 Scanning SQUID microscope with improved spatial resolution 有权
标题翻译：扫描SQUID显微镜具有改进的空间分辨率
公开(公告)号：US06984977B2
公开(公告)日：2006-01-10
申请号：US10416489
申请日：2001-09-14
申请人： Fred Wellstood , Erin Fleet , Sojiphong Chatraphorn
发明人： Fred Wellstood , Erin Fleet , Sojiphong Chatraphorn
IPC分类号： G01R33/02
CPC分类号： G01R33/0385 , G01N27/82 , G01Q60/54
摘要： A scanning SQUID microscope for acquiring spatially resolved images of physical properties of an object includes a SQUID sensor arranged in perpendicular to the plane of the object under investigation for detecting tangential component of the magnetic field generated by the object. During scanning of the SQUID sensor over the object under investigation, the position signal from a position interpreting unit, as well as relevant output signals from the SQUID sensor are processed by a processing unit which derives from the data, spatially resolved images of the physical properties of the object. The specific orientation of the SQUID sensor with respect to the plane of the object permits an enlarged area of the SQUID chip on which the modulation and feedback line can be fabricated in the same technological process with the SQUID sensor. Additionally, larger contact pads afforded provide for lower contact resistance and ease in forming contact with bias and read-out wires.
摘要翻译：用于获取对象的物理性质的空间分辨图像的扫描SQUID显微镜包括垂直于所研究对象的平面布置的SQUID传感器，用于检测由对象产生的磁场的切向分量。在扫描被测物体上扫描SQUID传感器之前，来自位置解释单元的位置信号以及来自SQUID传感器的相关输出信号由处理单元处理，该处理单元从数据中得出物理特性的空间分辨图像的对象。 SQUID传感器相对于物体平面的具体方向允许在与SQUID传感器相同的工艺过程中可以在其上制造调制和反馈线的SQUID芯片的放大区域。另外，提供较大的接触垫提供较低的接触电阻并且容易与偏压和读出导线形成接触。

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