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31. 发明授权

US06302130B1 Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
标题翻译：用于检测压力型流量控制器孔堵塞的方法和装置
公开(公告)号：US06302130B1
公开(公告)日：2001-10-16
申请号：US09529985
申请日：2000-07-18
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
IPC分类号： F17D116
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
摘要翻译：一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路（32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为由计算流量QC和设定流量QS之间的差分信号QY控制。该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报警电路（46）从标准压力衰减数据Y（t）到特定程度或以上。

32. 发明授权

US06289923B1 Gas supply system equipped with pressure-type flow rate control unit 有权
标题翻译：供气系统配有压力式流量控制单元
公开(公告)号：US06289923B1
公开(公告)日：2001-09-18
申请号：US09463514
申请日：2000-06-02
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Nobukazu Ikeda , Kouji Nishino , Kazuhiro Yoshikawa , Eiji Ideta , Ryousuke Dohi , Tomio Uno , Michio Yamaji
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Nobukazu Ikeda , Kouji Nishino , Kazuhiro Yoshikawa , Eiji Ideta , Ryousuke Dohi , Tomio Uno , Michio Yamaji
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, and to raise the flow rate control accuracy and reliability of facilities. That eliminates non-uniformity of products or semiconductors and raises the production efficiency. The gas supply system equipped with a pressure-type flow rate control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream side pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc=KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.
摘要翻译：公开了一种改进的，尺寸较小的低成本的气体供应系统，其配备有例如半导体制造设备中使用的压力式流量控制单元。提高瞬态流量特性，防止气体开始时气体过冲，提高设备的流量控制精度和可靠性。这消除了产品或半导体的不均匀性并提高了生产效率。配置有压力式流量控制单元的气体供给系统被配置为使得在孔口的上游侧的压力保持为比下游侧压力高大约两倍或更多的气体，气体流量被控制以供应气体通过孔口相关阀进行气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置在控制阀之间的压力检测器所述控制阀和所述节流孔相关阀，设置在所述节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中，基于由所述压力检测器检测到的压力P1，流量Qc 用公式Qc = KP1（K：常数）计算，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制信号Qy i n是用于控制阀的驱动器，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

33. 发明授权

US5308124A Thrust ring for pipe joints 失效
标题翻译：管接头用推力环
公开(公告)号：US5308124A
公开(公告)日：1994-05-03
申请号：US865542
申请日：1992-04-09
申请人： Michio Yamaji , Nobukazu Ikeda , Naoya Masuda , Tetsuya Kojima
发明人： Michio Yamaji , Nobukazu Ikeda , Naoya Masuda , Tetsuya Kojima
IPC分类号： F16B39/24 , F16L19/025 , F16L19/03 , F16L47/04 , F16L25/00
CPC分类号： F16L19/025 , F16B39/24 , F16L47/04
摘要： A pipe joint thrust ring to be interposed between a joint member of a pipe joint and a connecting threaded member rotatably fitted to the joint member. The thrust ring comprises a C-shaped body in the form of a circle partly cut away and having spring elasticity. The inner width between opposed ends of the C-shaped body is maller than the outside diameter of the joint member and can be increased to a value equal to the outside diameter of the joint member.
摘要翻译：管接头推力环，其插入在管接头的接头构件和可旋转地配合到接头构件的连接螺纹构件之间。推力环包括圆形形状的C形体，其部分切除并具有弹性弹性。 C形本体的相对端部之间的内部宽度比接头构件的外径更大，并且可以增加到与接头构件的外径相等的值。

34. 发明授权

US6135155A Fluid control device 失效
标题翻译：流体控制装置
公开(公告)号：US6135155A
公开(公告)日：2000-10-24
申请号：US655022
申请日：1996-05-29
申请人： Tadahiro Ohmi , Michio Yamaji , Hiroshi Morokoshi , Shigeru Itoi , Nobukazu Ikeda , Tetsuya Kojima
发明人： Tadahiro Ohmi , Michio Yamaji , Hiroshi Morokoshi , Shigeru Itoi , Nobukazu Ikeda , Tetsuya Kojima
IPC分类号： F16K27/00 , G05D7/01 , G05D16/04 , F16K11/10
CPC分类号： F16K27/003 , G05D16/04 , G05D7/01 , Y10T137/87885
摘要： A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.
摘要翻译：用于调节流速的调节器设置有具有与调节器连通的向下打开的通道的上连接器。连接到调节器的开关阀设置有具有与开关阀连通的向上开口的通道的下连接器。上连接器在下连接器上被覆盖并且用螺钉可拆卸地连接到其上，以便使向下打开的通道与向上打开的通道连通。因此，可以单独地去除调节器，例如当故障时。

35. 发明授权

US09631777B2 Raw material vaporizing and supplying apparatus equipped with raw material concentration 有权
公开(公告)号：US09631777B2
公开(公告)日：2017-04-25
申请号：US14343226
申请日：2012-07-17
申请人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
发明人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
IPC分类号： F17D3/00 , C23C16/448 , G05D11/13 , C23C16/455
CPC分类号： F17D3/00 , C23C16/4482 , C23C16/45561 , G05D11/135 , Y10T137/8158
摘要： An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.

36. 发明授权

US09233347B2 Mixed gas supply device 有权
标题翻译：混合供气装置
公开(公告)号：US09233347B2
公开(公告)日：2016-01-12
申请号：US13520824
申请日：2010-10-22
申请人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K11/20 , B01J4/02 , G05D11/13 , H01L21/67
CPC分类号： B01J4/02 , G05D11/132 , H01L21/67017 , Y10T137/87249
摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.
摘要翻译：混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为歧管彼此通信。

37. 发明申请

US20130319551A1 OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE 有权
标题翻译：用于自动操作阀的开启程度检测装置
公开(公告)号：US20130319551A1
公开(公告)日：2013-12-05
申请号：US13988836
申请日：2011-11-17
申请人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
发明人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
IPC分类号： F16K37/00
CPC分类号： F16K37/0041 , F16K31/1221 , F16K37/00 , F16K37/0083 , Y10T137/8158 , Y10T137/8242
摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.
摘要翻译：为了提供易于组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀。开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上，并且传感器支撑构件21通过引导装置支撑在基板4上。

38. 发明授权

US08587180B2 Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function 有权
标题翻译：压力式流量控制装置的压力控制阀驱动电路具有流量自我诊断功能
公开(公告)号：US08587180B2
公开(公告)日：2013-11-19
申请号：US12989614
申请日：2009-02-18
申请人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
发明人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
IPC分类号： H01L41/09
CPC分类号： G05D7/0635 , Y10T137/7762
摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
摘要翻译：为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能，两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过高速降压指令电路降压。

39. 发明申请

US20120273061A1 Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device 有权
标题翻译：压电驱动阀和压电驱动流量控制装置
公开(公告)号：US20120273061A1
公开(公告)日：2012-11-01
申请号：US13505620
申请日：2010-11-04
申请人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
发明人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： F16K49/00 , F16K31/02
CPC分类号： F16K31/007 , F16K7/14 , F16K25/005 , G05D7/0629 , Y10T137/6416 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.
摘要翻译：提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

40. 发明申请

US20120074339A1 REGULATING VALVE DEVICE 审中-公开
标题翻译：调节阀装置
公开(公告)号：US20120074339A1
公开(公告)日：2012-03-29
申请号：US13138670
申请日：2010-03-08
申请人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanigawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
发明人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanigawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
IPC分类号： F16K31/12
CPC分类号： F16K31/126 , F16K31/1268 , F16K41/10
摘要： [Problem] To provide a regulating valve device having a valve element opened or closed by a working fluid.[Solution to Problem] A valve element 310 has a structure in which a valve head 310a and a valve body 310b are coupled by a valve stem 310c. In the valve box 305, the valve element 310 and a power transmitting member 320a are slidably housed. A first bellows 320b is fixed to the power transmitting member 320a and the valve box 305 to form a first space Us at a position on a side of the power transmitting member 320a opposite the valve element. A second bellows 320c is fixed to the power transmitting member 320a and the valve box 305 to form a second space Ls at a position on a side of the power transmitting member 320a closer to the valve element. According to a ratio of air supplied to the first space Us from a first pipe 320d and air supplied to the second space Ls from a second pipe 320e, the power transmitting member 320a transmits power to the valve head 310a to open or close a transport channel 200a.
摘要翻译： [问题]提供一种具有由工作流体打开或关闭的阀元件的调节阀装置。问题的解决方案阀元件310具有阀头310a和阀体310b通过阀杆310c联接的结构。在阀箱305中，阀元件310和动力传递部件320a可滑动地容纳。第一波纹管320b固定到动力传递部件320a和阀箱305，以在与阀元件相对的动力传递部件320a的一侧的位置处形成第一空间Us。第二波纹管320c固定在动力传递部件320a和阀箱305上，在动力传递部件320a的靠近阀体的一侧的位置形成第二空间Ls。根据从第一管320d向第一空间Us供给的空气的比例和从第二管320e供给到第二空间Ls的空气的比例，动力传递构件320a向阀头310a传递动力以打开或关闭运送通道 200a。

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