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    • 37. 发明授权
    • Fuse construction for integrated circuit structure having low dielectric constant dielectric material
    • 具有低介电常数介电材料的集成电路结构的保险丝结构
    • US06806551B2
    • 2004-10-19
    • US10376401
    • 2003-02-28
    • Yauh-Ching LiuRuggero CastagnettiRamnath Venkatraman
    • Yauh-Ching LiuRuggero CastagnettiRamnath Venkatraman
    • H01L2900
    • H01L23/5258H01L23/5329H01L2224/05022H01L2924/01019
    • Fuses, and optionally metal pads, are formed over a layer of low k dielectric material structure having first openings lined with conductive barrier material and filled to form metal interconnects in the upper surface of the low k dielectric material. A dielectric layer is formed over the low k dielectric material and over the metal interconnects, and patterned to form second openings therein communicating with the metal interconnects. A conductive barrier layer is formed over this dielectric layer in contact with the metal interconnects, and patterned to form fuse portions between some of the metal interconnects, and a liner over one or more of the metal interconnects. A dielectric layer is then formed over the patterned conductive barrier layer to form a window above each fuse, and patterned to form openings over at least some of the conductive barrier liners filled with metal to form metal pads.
    • 保险丝和可选的金属焊盘形成在低k电介质材料结构的层上,其具有衬有导电阻挡材料的第一开口并且被填充以在低k电介质材料的上表面中形成金属互连。 电介质层形成在低k电介质材料上方和金属互连之上,并被图案化以形成其中与金属互连连通的第二开口。 导电阻挡层形成在与金属互连件接触的该电介质层上,并被图案化以在一些金属互连件之间形成熔丝部分,以及在一个或多个金属互连件上的衬垫。 然后在图案化的导电阻挡层上方形成电介质层,以形成每个保险丝上方的窗口,并且图案化以在填充有金属的至少一些导电阻挡衬里上形成开口以形成金属焊盘。
    • 38. 发明授权
    • Fuse construction for integrated circuit structure having low dielectric constant dielectric material
    • 具有低介电常数介电材料的集成电路结构的保险丝结构
    • US06566171B1
    • 2003-05-20
    • US09882404
    • 2001-06-12
    • Yauh-Ching LiuRuggero CastagnettiRamnath Venkatraman
    • Yauh-Ching LiuRuggero CastagnettiRamnath Venkatraman
    • H01L2182
    • H01L23/5258H01L23/5329H01L2224/05022H01L2924/01019
    • Fuses, and optionally metal pads, are formed over a layer of low k dielectric material structure having first openings lined with conductive barrier material and filled to form metal interconnects in the upper surface of the low k dielectric material. A dielectric layer is formed over the low k dielectric material and over the metal interconnects, and patterned to form second openings therein communicating with the metal interconnects. A conductive barrier layer is formed over this dielectric layer in contact with the metal interconnects, and patterned to form fuse portions between some of the metal interconnects, and a liner over one or more of the metal interconnects. A dielectric layer is then formed over the patterned conductive barrier layer to form a window above each fuse, and patterned to form openings over at least some of the conductive barrier liners filled with metal to form metal pads.
    • 保险丝和可选的金属焊盘形成在低k电介质材料结构的层上,其具有衬有导电阻挡材料的第一开口并且被填充以在低k电介质材料的上表面中形成金属互连。 电介质层形成在低k电介质材料上方和金属互连之上,并被图案化以形成其中与金属互连连通的第二开口。 导电阻挡层形成在与金属互连件接触的该电介质层上,并被图案化以在一些金属互连件之间形成熔丝部分,以及在一个或多个金属互连件上的衬垫。 然后在图案化的导电阻挡层上方形成电介质层,以形成每个保险丝上方的窗口,并且图案化以在填充有金属的至少一些导电阻挡衬里上形成开口以形成金属焊盘。