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    • 31. 发明授权
    • Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
    • 制造薄膜的方法,其抑制源材料的不必要的散射和沉积
    • US08865258B2
    • 2014-10-21
    • US13392433
    • 2011-06-01
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • C23C14/00C23C14/24C23C14/56C23C14/54
    • C23C14/24C23C14/243C23C14/542C23C14/562H01M4/0423H01M4/1391H01M4/1395
    • The present invention provides a thin film manufacturing method which realizes stable, highly-efficient film formation using a nozzle-type evaporation source while avoiding unnecessary scattering and deposition of a film formation material after the termination of the film formation. Used is a film forming apparatus including: an evaporation chamber 16; a film forming chamber 17 in which a substrate 21 is provided; an evaporation source 19 holding a film formation material 15 and including an opening surface 14; a moving mechanism 35 configured to cause the evaporation source 19 to move; and a conductance variable structure 34. The film formation is performed in a state where the opening surface 14 of the evaporation source 19 holding the heated film formation material is located close to the substrate 21 while evacuating the evaporation chamber 16 and the film forming chamber 17 without shutting off communication between the evaporation chamber 16 and the film forming chamber 17 by the conductance variable structure 34. Next, the evaporation of the film formation material is suppressed by introducing a nonreactive gas to the evaporation chamber 16 and the film forming chamber 17 to adjust pressure in each chamber to predetermined pressure or more. Then, the evaporation source 19 is moved by the moving mechanism 35 such that the opening surface 14 is located away from the substrate 21. The conductance variable structure is activated to shut off the communication between these chambers, and the film formation material is cooled while continuously introducing the nonreactive gas to the evaporation chamber 16.
    • 本发明提供一种薄膜制造方法,其使用喷嘴型蒸发源实现稳定,高效的成膜,同时避免成膜材料终止后不必要的成膜材料的散射和沉积。 使用的成膜装置包括:蒸发室16; 设置有基板21的成膜室17; 保持成膜材料15并包括开口表面14的蒸发源19; 构造成使蒸发源19移动的移动机构35; 和导电可变结构34.成膜是在保持加热成膜材料的蒸发源19的开口表面14位于靠近基板21的同时抽空蒸发室16和成膜室17的状态下进行的 而不用电导可变结构34关闭蒸发室16和成膜室17之间的连通。接下来,通过向蒸发室16和成膜室17引入非反应性气体来抑制成膜材料的蒸发, 将每个室中的压力调节至预定压力或更大。 然后,蒸发源19被移动机构35移动,使得开口表面14远离基板21.导电可变结构被激活以切断这些室之间的连通,并且成膜材料被冷却,同时 将非反应性气体连续引入蒸发室16。
    • 33. 发明申请
    • METHOD OF MANUFACTURING THIN FILM
    • 制造薄膜的方法
    • US20120148746A1
    • 2012-06-14
    • US13392433
    • 2011-06-01
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • C23C16/448C23C16/455
    • C23C14/24C23C14/243C23C14/542C23C14/562H01M4/0423H01M4/1391H01M4/1395
    • The present invention provides a thin film manufacturing method which realizes stable, highly-efficient film formation using a nozzle-type evaporation source while avoiding unnecessary scattering and deposition of a film formation material after the termination of the film formation. Used is a film forming apparatus including: an evaporation chamber 16; a film forming chamber 17 in which a substrate 21 is provided; an evaporation source 19 holding a film formation material 15 and including an opening surface 14; a moving mechanism 35 configured to cause the evaporation source 19 to move; and a conductance variable structure 34. The film formation is performed in a state where the opening surface 14 of the evaporation source 19 holding the heated film formation material is located close to the substrate 21 while evacuating the evaporation chamber 16 and the film forming chamber 17 without shutting off communication between the evaporation chamber 16 and the film forming chamber 17 by the conductance variable structure 34. Next, the evaporation of the film formation material is suppressed by introducing a nonreactive gas to the evaporation chamber 16 and the film forming chamber 17 to adjust pressure in each chamber to predetermined pressure or more. Then, the evaporation source 19 is moved by the moving mechanism 35 such that the opening surface 14 is located away from the substrate 21. The conductance variable structure is activated to shut off the communication between these chambers, and the film formation material is cooled while continuously introducing the nonreactive gas to the evaporation chamber 16.
    • 本发明提供一种薄膜制造方法,其使用喷嘴型蒸发源实现稳定,高效的成膜,同时避免成膜材料终止后不必要的成膜材料的散射和沉积。 使用的成膜装置包括:蒸发室16; 设置有基板21的成膜室17; 保持成膜材料15并包括开口表面14的蒸发源19; 构造成使蒸发源19移动的移动机构35; 和导电可变结构34.成膜是在保持加热成膜材料的蒸发源19的开口表面14位于靠近基板21的同时抽空蒸发室16和成膜室17的状态下进行的 而不用电导可变结构34关闭蒸发室16和成膜室17之间的连通。接下来,通过向蒸发室16和成膜室17引入非反应性气体来抑制成膜材料的蒸发, 将每个室中的压力调节至预定压力或更大。 然后,蒸发源19被移动机构35移动,使得开口表面14远离基板21.导电可变结构被激活以切断这些室之间的连通,并且成膜材料被冷却,同时 将非反应性气体连续引入蒸发室16。
    • 40. 发明授权
    • Nondestructive inspection apparatus for inspecting an internal defect in an object
    • 用于检查物体内部缺陷的非破坏性检查装置
    • US06591681B1
    • 2003-07-15
    • US10111168
    • 2002-04-22
    • Takashi ShimadaShinichi HattoriTakahiro SakamotoSyuichi Nakamura
    • Takashi ShimadaShinichi HattoriTakahiro SakamotoSyuichi Nakamura
    • G01N2920
    • G01N29/045G01N29/11G01N29/2412G01N29/4454G01N2291/014G01N2291/0232G01N2291/02827G01N2291/0427G01N2291/044G01N2291/102
    • A nondestructive inspection apparatus includes a vibrating section 11 which is adapted to be placed in pressure contact with a surface of a measuring object 16 for generating an acoustic elastic wave W, a receiving section 12 for receiving a reflected wave, a pushing mechanism 13 for pushing the vibrating section and the receiving section against the measuring object, a pushing force measurement section 14 for detecting pushing forces Fa, Fb during vibration, a vibration control section 10 for driving the vibrating section, and a reception signal processing section 15 for determining the internal defect based on a reception signal R. The reception signal processing section includes a reflection energy calculation section for calculating a reflection energy level due to elasticity vibration of the measuring object, a reflection energy correction section for normalizing the reflection energy level by the pushing force to calculate a correction value; and an internal defect determination section for detecting the internal defect based on the correction value. With this arrangement, the absolute reflection energy level of the reflected wave is determined through comparison, thereby making it possible to improve the evaluation accuracy of the internal defect to a substantial extent.
    • 非破坏性检查装置包括:振动部11,其适于与测量对象16的表面压力接触以产生声弹性波W;接收部12,用于接收反射波;推动机构13,用于推动 振动部分和接收部分相对于测量对象,用于检测振动期间的推动力Fa,Fb的推力测量部分14,用于驱动振动部分的振动控制部分10以及用于确定内部振动的接收信号处理部分15 基于接收信号R的缺陷。接收信号处理部分包括:反射能量计算部分,用于计算由于测量对象的弹性振动引起的反射能量水平;反射能量校正部分,用于通过推力使反射能量级别归一化 计算校正值; 以及内部缺陷确定部分,用于基于所述校正值来检测所述内部缺陷。 通过这种布置,通过比较来确定反射波的绝对反射能级,从而可以在很大程度上提高内部缺陷的评估精度。