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31. 发明申请

US20080073526A1 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20080073526A1
公开(公告)日：2008-03-27
申请号：US11699065
申请日：2007-01-29
申请人： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , H01J2237/21 , H01J2237/2817
摘要： A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.
摘要翻译：一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从样本和比较与不平坦表面的边缘部分相对应的轮廓波形。

32. 发明授权

US07329868B2 Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US07329868B2
公开(公告)日：2008-02-12
申请号：US11515732
申请日：2006-09-06
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

33. 发明授权

US07082224B2 Statistic calculating method using a template and corresponding sub-image to determine similarity based on sum of squares thresholding 失效
标题翻译：使用模板和相应子图像的统计计算方法根据平方和阈值确定相似度
公开(公告)号：US07082224B2
公开(公告)日：2006-07-25
申请号：US11060400
申请日：2005-02-18
申请人： Mitsuji Ikeda , Syoji Yoshida , Keisuke Nakashima , Koyo Katsura , Shigeru Shibukawa , Haruo Yoda , Takashi Hotta
发明人： Mitsuji Ikeda , Syoji Yoshida , Keisuke Nakashima , Koyo Katsura , Shigeru Shibukawa , Haruo Yoda , Takashi Hotta
IPC分类号： G06K9/64
CPC分类号： G06K9/6203 , G06T7/20
摘要： An apparatus for calculating a normalized correlation coefficient used as a similarity evaluation measure by using image data values of pixels in a template image and image data values of pixels in a subimage, included in a search image, corresponding to the template image, has a memory that stores image data values of pixels in the search image and calculating means that calculate a sum of image data values of pixels in the template image and a sum of image data values of pixels in the first rectangular region in the search image or a sum of squares of image data values of pixels in the template image and a sum of squares of image data values of pixels in the first rectangular region in the search image. Normalized correlation coefficient calculating means calculate a normalized correlation coefficient on the basis of the sum of image data values of pixels in the template image and the sum of image data values of pixels in the first rectangular region in the search image, or the sum of squares of image data values of pixels in the template image and the sum of squares of image data values of pixels in the first rectangular region in the search image.
摘要翻译：一种用于计算通过使用模板图像中的像素的图像数据值和相应于模板图像的包括在搜索图像中的子图像中的像素的图像数据值而用作相似性评估度量的归一化相关系数的装置，具有存储器其存储搜索图像中的像素的图像数据值;以及计算装置，其计算模板图像中的像素的图像数据值的和和搜索图像中的第一矩形区域中的像素的图像数据值之和，或者模板图像中的像素的图像数据值的平方和搜索图像中的第一矩形区域中的像素的图像数据值的平方和。归一化相关系数计算装置基于模板图像中的像素的图像数据值之和和搜索图像中的第一矩形区域中的像素的图像数据值之和或平方和来计算归一化相关系数的模板图像中的像素的图像数据值和搜索图像中的第一矩形区域中的像素的图像数据值的平方和。

34. 发明授权

US5339381A Optical fiber composite insulators 失效
标题翻译：光纤复合绝缘子
公开(公告)号：US5339381A
公开(公告)日：1994-08-16
申请号：US033751
申请日：1993-03-18
申请人： Mitsuji Ikeda , Ryoichi Mine , Masayuki Nozaki , Tadashi Sugiura
发明人： Mitsuji Ikeda , Ryoichi Mine , Masayuki Nozaki , Tadashi Sugiura
IPC分类号： B29C70/84 , G02B6/36 , G02B6/44
CPC分类号： G02B6/442 , B29C70/84 , B29L2031/3412 , G02B6/3644
摘要： An optical fiber composite insulator includes an insulator body in which a through hole having a substantially radially circular cross section is provided, a plurality of optical fibers passed through the through hole, and an organic insulating material gas-tightly sealing the optical fibers in the through hole, wherein a diameter of the through hole is not more than 13 mm, the optical fibers are located inside a hypothetical circle drawn on any plane orthogonal to an axis of the through hole and having a center coaxial with that of the through hole, the hypothetical circle having a diameter equal to 95% of that of the through hole, and a distance between any optical fibers is set at not less than 0.1 mm.
摘要翻译：一种光纤复合绝缘体包括：绝缘体，其中设置有具有大致圆形横截面的通孔，穿过所述通孔的多根光纤，以及将所述光纤气密地密封在所述通孔中的有机绝缘材料其中，所述通孔的直径不大于13mm，所述光纤位于与所述通孔的与所述通孔的轴正交的任意平面上的假想圆的内侧，并且与所述通孔的中心同轴，假想圆的直径等于通孔的95％，任何光纤之间的距离设定为不小于0.1mm。

35. 发明授权

US5329532A Logic circuit with additional circuit for carrying out delay test 失效
标题翻译：具有进行延迟测试的附加电路的逻辑电路
公开(公告)号：US5329532A
公开(公告)日：1994-07-12
申请号：US755837
申请日：1991-09-06
申请人： Mitsuji Ikeda , Kazumi Hatayama , Terumine Hayashi
发明人： Mitsuji Ikeda , Kazumi Hatayama , Terumine Hayashi
IPC分类号： G01R31/28 , G01R31/3185 , H04B17/00
CPC分类号： G01R31/318541 , G01R31/31858
摘要： The first and second flip-flop circuits are connected in series included within a combinational logic for carrying out a delay test. The first and second flip-flop circuits are provided with control pins, system clock pins, scan clock pins, system data pins and scan data pins, respectively. A delay time propagated from the first flip-flop circuit to the second flip-flop circuit through the path of the combinational logic to be tested is measured by detecting an input time to the first flip-flop circuit by the system clock signal to the first flip-flop circuit in response to an input signal to the control pins and a time stored in the second flip-flop circuit corresponding to output system data from the first flip-flop circuit. By measuring the delay time, whether the combinational logic is normal or abnormal is detected.
摘要翻译：第一和第二触发器电路串联连接在用于进行延迟测试的组合逻辑中。第一和第二触发器电路分别具有控制引脚，系统时钟引脚，扫描时钟引脚，系统数据引脚和扫描数据引脚。通过检测到第一触发器电路的输入时间，通过系统时钟信号检测到第一触发器电路的第一触发器电路到第一触发器电路的第一触发器电路触发器电路响应于对控制引脚的输入信号以及与第一触发器电路的输出系统数据相对应的存储在第二触发器电路中的时间。通过测量延迟时间，检测组合逻辑是正常还是异常。

36. 发明授权

US08335397B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08335397B2
公开(公告)日：2012-12-18
申请号：US12124666
申请日：2008-05-21
申请人： Atsushi Takane , Mitsuji Ikeda , Atsushi Kobaru
发明人： Atsushi Takane , Mitsuji Ikeda , Atsushi Kobaru
IPC分类号： G06K9/40
CPC分类号： G01N23/225 , G06K9/00134 , G06K9/03 , H01J2237/221 , H01J2237/28
摘要： In a method and apparatus for removing artifacts from an image generated a charged partial beam scanning device, a scanning method is determined, and the frequency of an artifact appearing on an image can then be determined, based on scanning method. A step 703, a frequency domain for removing an artifact can be determined from the vertical and horizontal widths determined by experimentation in advance with respect to the frequency position Photography is performed to obtain an image, which is Fourier transformed and the determined frequency domain is replaced, for example, by “0.” The resulting image is subjected to inverse Fourier transformation, and displayed and stored. The flow of such processing enables decreasing an artifact appearing on an image, depending on a scanning method. The frequency domain (vertical and horizontal widths) that is to be eliminated and a method for replacement by “0” are determined in advance, depending on the kind of inspected samples and a method can be selected depending on the kind of samples.
摘要翻译：在从产生带电部分光束扫描装置的图像中去除伪像的方法和装置中，确定扫描方法，然后基于扫描方法确定出现在图像上的伪影的频率。步骤703，用于去除伪影的频域可以根据预先相对于频率位置的实验确定的垂直和水平宽度来确定，执行摄影以获得被傅立叶变换并且确定的频域被替换的图像，例如乘以0.将所得到的图像进行傅里叶逆变换，并显示和存储。这种处理的流程可以根据扫描方法减少出现在图像上的伪影。根据检查样品的种类，预先确定要消除的频域（垂直和水平宽度）和替换方法0，并且可以根据样品的种类来选择方法。

37. 发明授权

US08263935B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08263935B2
公开(公告)日：2012-09-11
申请号：US12651209
申请日：2009-12-31
申请人： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01N23/225 , H01J2237/21 , H01J2237/2817
摘要： A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.
摘要翻译：一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从样本和比较与不平坦表面的边缘部分相对应的轮廓波形。

38. 发明授权

US07642514B2 Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US07642514B2
公开(公告)日：2010-01-05
申请号：US12005387
申请日：2007-12-27
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

39. 发明申请

US20080292199A1 Charged Particle Beam Apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20080292199A1
公开(公告)日：2008-11-27
申请号：US12124666
申请日：2008-05-21
申请人： Atsushi Takane , Mitsuji Ikeda , Atsushi Kobaru
发明人： Atsushi Takane , Mitsuji Ikeda , Atsushi Kobaru
IPC分类号： G06K9/44 , G01N23/225
CPC分类号： G01N23/225 , G06K9/00134 , G06K9/03 , H01J2237/221 , H01J2237/28
摘要： In step 701, the scanning method is determined. In step 702, according to the scanning method determined in step 701, the frequency of an artifact appearing on an image can be determined based on the relation depicted with reference to FIG. 5. In step 703, a frequency domain for removing an artifact is determined from the vertical and horizontal widths determined by such as experimental in advance with respect to the frequency position of step 702. In steps 704 and 705, photography is performed to obtain an image. An image obtained is Fourier transformed in step 706 and the frequency domain determined in step 703 is replaced, for example, by “0.” Its image is subjected to inverse Fourier transformation in step 708, and then displayed and stored in step 709. The flow of such processing enables decreasing an artifact appearing on an image, depending on a scanning method. A frequency domain (vertical and horizontal widths) eliminated in the step 703 and a method for replacement by “0” in the step 707 is determined in advance depending on the kind of inspected samples and a method can be selected depending on the kind of samples.
摘要翻译：在步骤701中，确定扫描方法。在步骤702中，根据在步骤701中确定的扫描方法，可以基于参照图7描绘的关系确定出现在图像上的伪影的频率。在步骤703中，从根据步骤702的频率位置预先确定的垂直和水平宽度确定用于去除伪像的频域。在步骤704和705中，执行摄影以获得图片。在步骤706中对获得的图像进行傅里叶变换，并将步骤703中确定的频域例如替换为“0”。其图像在步骤708中进行傅立叶逆变换，然后在步骤709中显示和存储。这种处理的流程可以根据扫描方法减少出现在图像上的伪影。在步骤703中消除的频域（垂直和水平宽度）和步骤707中的替换方法“0”根据检查样品的种类而预先确定，并且可以根据样品的种类来选择方法。

40. 发明申请

US20050219523A1 Foreign matter detecting system 审中-公开
标题翻译：异物检测系统
公开(公告)号：US20050219523A1
公开(公告)日：2005-10-06
申请号：US11060499
申请日：2005-02-18
申请人： Chieko Onuma , Mitsuji Ikeda , Noriko Ilzumi , Jun Maeda , Takashi Matsuyama
发明人： Chieko Onuma , Mitsuji Ikeda , Noriko Ilzumi , Jun Maeda , Takashi Matsuyama
IPC分类号： G01B11/00 , G01N21/88 , G01N21/90
CPC分类号： G01N21/9027 , G01N21/8806
摘要： A foreign matter detecting system which can acquire a clear image and detect a foreign matter with high accuracy based on the acquired image regardless of whether a subject is located far or near from an image capturing device in spite of a depth variation or a level difference. An image capturing unit having an externally controllable focus position is disposed above or below a liquid surface, and a ray of light from an LED is illuminated toward the liquid surface from above or the side at least at a focus position of the image capturing unit so that a foreign matter on the liquid surface causes mirror reflection. The focus position of the image capturing unit is changed over the range from the top of a container containing a liquid to the bottom thereof. At each focus position, an input image from the image capturing unit is taken into an image input unit of an image processing section. An image selecting unit of the image processing section selects an image focused on the liquid surface or a clearest image of the liquid surface from among the input images. An image detecting unit of the image processing section checks the presence and position of the mirror reflection, thereby detecting the foreign matter.
摘要翻译：不管深度变化还是水平差，即使拍摄对象远离摄影装置，无论拍摄对象是远距离还是远离拍摄装置，均可以基于获取的图像，以高精度获取清晰图像并检测异物的异物检测系统。具有外部可控焦点位置的图像捕获单元设置在液面的上方或下方，并且来自LED的光线至少在图像捕获单元的焦点位置从上方或侧面向液体表面照射，液面上的异物引起镜面反射。图像拍摄单元的聚焦位置在从包含液体的容器的顶部到其底部的范围内改变。在每个焦点位置，将来自图像捕获单元的输入图像带入图像处理部分的图像输入单元。图像处理部分的图像选择单元从输入图像中选择聚焦在液面上的图像或液面的最清晰图像。图像处理部的图像检测单元检查镜面反射的存在和位置，从而检测异物。

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