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31. 发明授权

US08968054B2 Method for cooling a workpiece made of semiconductor material during wire sawing 有权
标题翻译：丝线切割时由半导体材料制成的工件的冷却方法
公开(公告)号：US08968054B2
公开(公告)日：2015-03-03
申请号：US13340719
申请日：2011-12-30
申请人： Peter Wiesner , Anton Huber
发明人： Peter Wiesner , Anton Huber
IPC分类号： B28D1/06 , B28D5/00 , B28D1/08
CPC分类号： B28D5/0076 , B28D1/08
摘要： A method for cooling a cylindrical workpiece during wire sawing includes applying a liquid coolant to a surface of the workpiece. The workpiece is made of semiconductor material having a surface including two end faces and a lateral face. The method includes sawing the workpiece with a wire saw including a wire web having wire sections arranged in parallel by penetrating the wire sections into the workpiece by an oppositely directed relative movement of the wire sections and the workpiece. Wipers are disposed so as to bear on the surface of the workpiece. The temperature of the workpiece is controlled during the wire sawing using a liquid coolant applied onto the workpiece above the wipers so as to remove the liquid coolant with the wipers bearing on the workpiece surface.
摘要翻译：在线锯切期间冷却圆柱形工件的方法包括将液体冷却剂施加到工件的表面。工件由具有包括两个端面和侧面的表面的半导体材料制成。该方法包括用线锯锯切工件，该线锯包括线网，该线网具有通过线部分和工件的相对定向的相对运动将导线部分穿入工件中而平行布置的线段。刮水器设置成承受在工件的表面上。使用在擦拭器上方施加到工件上的液体冷却剂在线锯期间控制工件的温度，以便通过在工件表面上承载的擦拭器去除液体冷却剂。

32. 发明授权

US08502585B2 Device with a data retention mode and a data processing mode 有权
标题翻译：具有数据保留模式和数据处理模式的设备
公开(公告)号：US08502585B2
公开(公告)日：2013-08-06
申请号：US13187772
申请日：2011-07-21
申请人： Thomas Kuenemund , Anton Huber , Roswitha Deppe
发明人： Thomas Kuenemund , Anton Huber , Roswitha Deppe
IPC分类号： H03K3/356
CPC分类号： H03K3/35625 , H03K3/356008 , H03K3/356156
摘要： A device includes a flip flop and a control circuit. The flip flop includes a flip flop data input terminal and a flip flop clock input terminal. The control circuit includes a control circuit data input terminal and a control circuit clock input terminal. The control circuit is configured to route, in a Data Processing Mode of the device, an incoming data signal from the control circuit data input terminal to the flip flop data input terminal and an incoming clock signal from the control circuit clock input terminal to the flip flop clock input terminal and to apply, in a Data Retention Mode of the device, a first given fixed signal value to the flip flop data input terminal independent of a value of the incoming data signal and a second given fixed signal value to the flip flop clock input terminal independent of a value of the incoming clock signal.
摘要翻译：一种装置包括触发器和控制电路。触发器包括触发器数据输入端和触发器时钟输入端。控制电路包括控制电路数据输入端和控制电路时钟输入端。控制电路被配置为在设备的数据处理模式中路由从控制电路数据输入端到触发器数据输入端的输入数据信号和从控制电路时钟输入端到触发器的输入时钟信号并且在设备的数据保留模式中，将与输入数据信号的值无关的触发器数据输入端的第一给定固定信号值和向触发器的第二给定固定信号值应用于触发器时钟输入端时钟输入端子独立于输入时钟信号的值。

33. 发明申请

US20120240915A1 METHOD FOR SLICING WAFERS FROM A WORKPIECE 有权
标题翻译：用于从工件中切割波形的方法
公开(公告)号：US20120240915A1
公开(公告)日：2012-09-27
申请号：US13423350
申请日：2012-03-19
申请人： Anton Huber , Wolfgang Gmach , Robert Kreuzeder , Peter Wiesner
发明人： Anton Huber , Wolfgang Gmach , Robert Kreuzeder , Peter Wiesner
IPC分类号： B28D5/00 , B28D1/08
CPC分类号： B23D57/0053 , B28D5/0064 , B28D5/0076 , B28D5/045
摘要： A method for slicing wafers from a workpiece includes providing wire guide rolls that each have a grooved coating with a specific thickness, providing a fixed bearing respectively associated with each wire guide roll and providing a sawing wire including wire sections disposed in a parallel fashion. The wire sections are tensioned between the wire guide rolls and are moved relative to the workpiece so as to perform a sawing operation. The wire guide rolls cooled and the fixed bearings are cooled independently of the wire guide rolls.
摘要翻译：一种用于从工件切片晶片的方法包括提供每个具有特定厚度的带槽涂层的导丝辊，提供分别与每个线导向辊相关联的固定轴承，并提供包括以平行方式设置的线段的锯线。线段在线导向辊之间张紧并相对于工件移动，以进行锯切操作。导丝辊被冷却，固定的轴承独立于导线辊被冷却。

34. 发明授权

US07704126B2 Method for producing a semiconductor wafer with profiled edge 失效
标题翻译：用于制造具有异型边缘的半导体晶片的方法
公开(公告)号：US07704126B2
公开(公告)日：2010-04-27
申请号：US11744230
申请日：2007-05-04
申请人： Joachim Mattes , Anton Huber , Joerg Moser
发明人： Joachim Mattes , Anton Huber , Joerg Moser
IPC分类号： B24B9/06
CPC分类号： H01L21/02021
摘要： Semiconductor wafers with profiled edges, are produced with decreased losses due to edge or other damage by separating a semiconductor wafer from a crystal; profiling the edge in a profile producing step wherein the edge is mechanically machined to a profile that is true to scale with respect to a predefined target profile; mechanically machining the wafer to reduce the a thickness of the semiconductor wafer; and machining the edge profile to acquire the target profile.
摘要翻译：具有成型边缘的半导体晶片由于通过将半导体晶片与晶体分离而由于边缘或其他损坏而减少的损耗产生; 在轮廓产生步骤中轮廓边缘，其中所述边缘被机械加工成相对于预定义的目标轮廓是真实的轮廓; 机械加工晶片以减小半导体晶片的厚度; 并加工边缘轮廓以获取目标轮廓。

35. 发明授权

US06861360B2 Double-sided polishing process for producing a multiplicity of silicon semiconductor wafers 有权
标题翻译：用于制造多个硅半导体晶片的双面抛光工艺
公开(公告)号：US06861360B2
公开(公告)日：2005-03-01
申请号：US10294846
申请日：2002-11-14
申请人： Guido Wenski , Thomas Altmann , Anton Huber , Alexander Heilmaier
发明人： Guido Wenski , Thomas Altmann , Anton Huber , Alexander Heilmaier
IPC分类号： B24B37/04 , B24B49/16 , C30B29/06 , C30B33/00 , H01L21/302 , H01L21/304 , H01L21/306
CPC分类号： H01L21/02024 , B24B37/0056 , B24B37/042 , B24B37/08 , B24B49/16
摘要： A silicon semiconductor wafer with a diameter of greater than or equal to 200 mm and a polished front surface and a polished back surface and a maximum local flatness value SFQRmax of less than or equal to 0.13 μm, based on a surface grid of segments with a size of 26 mm×8 mm on the front surface, wherein the maximum local height deviation P/V(10×10)max of the front surface from an ideal plane is less than or equal to 70 nm, based on sliding subregions with dimensions of 10 mm×10 mm. There is also a process for producing a multiplicity of silicon semiconductor wafers by simultaneous double-side polishing between in each case one lower polishing plate and one upper polishing plate, which rotate, are parallel to one another and to which polishing cloth has been adhesively bonded, while a polishing agent, which contains abrasives or colloids, is being supplied, with at least 2 μm of silicon being removed, wherein a predetermined proportion of the semiconductor wafers is at least partially polished using a lower polishing pressure, and a further proportion of the semiconductor wafers is polished using a higher polishing pressure.
摘要翻译：具有大于或等于200mm的直径的硅半导体晶片和抛光的前表面和抛光后表面以及小于或等于0.13μm的最大局部平坦度值SFQRmax，基于具有尺寸为26mm×8mm的前表面，其中，从理想平面的前表面的最大局部高度偏差P / V（10×10）max小于或等于70nm，基于尺寸为10mm×10mm的滑动子区域。还有一种通过在每种情况下同时进行双面抛光来生产多个硅半导体晶片的方法，其中一个下抛光板和一个上抛光板相互平行，并且抛光布已经被粘合到该抛光板上同时提供含有研磨剂或胶体的抛光剂，除去至少2个微米的硅，其中使用较低的抛光压力至少部分地抛光半导体晶片的预定比例，另外一部分使用更高的抛光压力来抛光半导体晶片。

36. 发明授权

US06421414B1 Detector for large wafer surfaces 失效
标题翻译：大晶片表面检测器
公开(公告)号：US06421414B1
公开(公告)日：2002-07-16
申请号：US09684056
申请日：2000-10-06
申请人： Anton Huber
发明人： Anton Huber
IPC分类号： G01N23223
CPC分类号： G01N23/223 , G01N2223/076
摘要： The invention relates to an apparatus for total reflection X-ray fluorescence analysis, which allows a faster and more precise detection of the X-ray fluorescence spectrums of a sample. DRIFT detectors are used in the transducer of the apparatus in which charge carriers created can be accelerated towards a collecting anode of a very small design by a radial component of the electrical field generated by annular electrodes. A faster and more precise measurement of the charge carriers generated in the detector interior is possible due to the low capacitance of the collecting anode. The X-ray fluorescence of a sample can be measured in high-sensitive resolution by an array comprising such DRIFT detectors. The surface concentrations of the different foreign atoms in the sample can be determined in high-sensitivity resolution from the X-ray fluorescence spectrums obtained.
摘要翻译：本发明涉及一种用于全反射X射线荧光分析的装置，其允许更快更准确地检测样品的X射线荧光光谱。 DRIFT检测器用于装置的换能器中，其中产生的电荷载体可以通过由环形电极产生的电场的径向分量朝非常小的设计的收集阳极加速。由于收集阳极的低电容，可以更快更精确地测量检测器内部产生的电荷载流子。可以通过包括这种DRIFT检测器的阵列以高灵敏度分辨率测量样品的X射线荧光。可以从获得的X射线荧光光谱以高灵敏度分辨率确定样品中不同外来原子的表面浓度。

37. 发明授权

US06390896B1 Method and device for cutting a multiplicity of disks from a hard brittle workpiece 失效
标题翻译：用于从硬脆的工件切割多个盘的方法和装置
公开(公告)号：US06390896B1
公开(公告)日：2002-05-21
申请号：US09387454
申请日：1999-09-01
申请人： Anton Huber , Joachim Junge , Jörg Moser
发明人： Anton Huber , Joachim Junge , Jörg Moser
IPC分类号： B24B100
CPC分类号： B23D57/0053 , B28D5/0064 , B28D5/0076 , B28D5/045
摘要： A method for cutting a multiplicity of disks from a hard brittle workpiece is by moving the workpiece at a defined feed rate through a wire web of a wire saw. In the method, the wire web is formed by a sawing wire which moves in a reciprocating manner and is covered with bonded abrasive grain. A cooling liquid is provided beneath the wire web, in which cooling liquid the sawing wire of the wire web is immersed when cutting off the disks. Also provided is a wire saw which is suitable for carrying out the method.
摘要翻译：用于从硬脆性工件切割多个盘的方法是通过以限定的进给速率通过线锯的丝网移动工件。在该方法中，金属丝网通过以往复方式移动并被粘合的磨粒覆盖的锯线形成。在丝网下方设置冷却液，当切断盘时，冷却液中浸渍有丝网的锯线。还提供了适用于执行该方法的线锯。

38. 发明授权

US5416360A Circuit configuration for the passenger protection device of a vehicle 失效
标题翻译：车辆乘客保护装置的电路配置
公开(公告)号：US5416360A
公开(公告)日：1995-05-16
申请号：US38505
申请日：1993-03-29
申请人： Anton Huber , Dieter Neugebauer
发明人： Anton Huber , Dieter Neugebauer
IPC分类号： B60R21/16 , B60R21/01 , B60R21/32
CPC分类号： B60R21/0132 , G01P15/09 , B60R2021/01322
摘要： A circuit configuration for a passenger protection device, such as an airbag, includes at least first and second collision sensors having triggering thresholds individually assigned thereto, for triggering a passenger protection device if the collision sensors exceed the triggering thresholds. The first sensor supplies an output signal exceeding the triggering threshold assigned to it before the second sensor issues an output signal exceeding the triggering threshold assigned to it, in the event of a collision. One of the sensors is a clock-generating sensor setting a beginning of a time period when its output signal exceeds a threshold value assigned to it, during the collision. One of the sensors mechanically actuates a switch and supplies an essentially binary output signal, in the event of a collision. Both of the sensors are required to exceed their triggering thresholds no later than a point in time within the time period, for the protection system to be finally triggered. The other of the sensors is an electronic sensor, such as a piezoresistive or a piezoelectric sensor, supplying an analog output signal, in the event of a collision. A programmable read-only memory PROM records a collision occurrence and stores data regarding a behavior of the output signals of at least one of the sensors occurring during the time period, at least if both of the sensors had exceeded their triggering thresholds during the point in time.
摘要翻译：用于乘客保护装置（例如气囊）的电路配置包括至少具有单独分配给其的触发阈值的第一和第二碰撞传感器，用于如果碰撞传感器超过触发阈值则触发乘客保护装置。在发生碰撞的情况下，第一传感器提供超过其分配的触发阈值的输出信号，在第二传感器发出超过分配给它的触发阈值的输出信号之前。其中一个传感器是一个产生时钟的传感器，它在碰撞期间设置其输出信号超过分配给它的阈值的时间周期的开头。在发生碰撞的情况下，其中一个传感器机械地致动开关并提供基本二进制输出信号。两个传感器都必须超过其触发阈值，不得晚于该时间段内的一个时间点，以便最终触发保护系统。传感器中的另一个是在发生碰撞的情况下提供模拟输出信号的诸如压阻传感器或压电传感器的电子传感器。可编程只读存储器PROM记录碰撞发生并且存储关于在该时间段期间发生的至少一个传感器的输出信号的行为的数据，至少如果两个传感器在该点期间已超过其触发阈值时间。

39. 发明授权

US4927382A Electrical function group for a vehicle 失效
标题翻译：车辆电气功能组
公开(公告)号：US4927382A
公开(公告)日：1990-05-22
申请号：US249763
申请日：1988-09-21
申请人： Anton Huber
发明人： Anton Huber
IPC分类号： G08B21/00 , H01R13/641
CPC分类号： H01R13/641
摘要： In an electrical function group, a useful circuit having electrical module units is electrically connected via a plug-type connector. The plug-type connector is equipped with a longer and with a shorter contact pin, so that the shorter contact pin separates first when the plug-type connector comes apart. The longer contact pin is a useful contact that closes the useful circuit and the shorter contact pin is a signal contact that closes a signal circuit. The signal circuit contains a monitoring arrangement that generates an alarm when the signal circuit is parted by the signal contact. As a result thereof, an incipient parting event of the plug-type connector is recognized before the useful circuit is separated.
摘要翻译：在电功能组中，具有电模块单元的有用电路经由插头式连接器电连接。插头型连接器配有一个较长的和较短的触针，以便当插头型连接器分开时，较短的触针将首先分离。较长的接触针是闭合有用电路的有用触点，较短的触针是闭合信号电路的信号触点。信号电路包含监视装置，当信号电路被信号触点分离时，该装置产生报警。结果，在有用电路分离之前，识别插头式连接器的初始分离事件。

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