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31. 发明授权

US06510275B1 Micro-optoelectromechanical system based device with aligned structures and method for fabricating same 失效
标题翻译：具有对准结构的微光电机电系统装置及其制造方法
公开(公告)号：US06510275B1
公开(公告)日：2003-01-21
申请号：US09986399
申请日：2001-11-08
申请人： Alex Tran , Joel A. Kubby , Jingkuang Chen , Peter Gulvin , Kathleen A. Feinberg , Yi Su
发明人： Alex Tran , Joel A. Kubby , Jingkuang Chen , Peter Gulvin , Kathleen A. Feinberg , Yi Su
IPC分类号： G02B600
CPC分类号： G02B6/3636 , G02B6/136 , G02B6/30 , G02B6/3652 , G02B6/3692 , G02B2006/12097
摘要： A micro-optoelectromechanical system based device with aligned structures comprises at least one optical structure formed in a silicon layer of the device and at least one optical fiber connection structure that is self-aligned with the at least one optical structure. In embodiments, the at least one optical fiber connection structure is formed in a substrate of the device and may comprise a V-groove. In other embodiments, the at least one optical structure may comprise a waveguide. A nitride layer may be formed on at least a portion of the waveguide. In various embodiments, the silicon layer may be a single-crystal-silicon layer of a silicon-on-insulator wafer. A method for fabricating a micro-optoelectromechanical system based device with aligned structures is provided in which the at least one optical structure and the at least one optical fiber connection structure are defined using the same masking layer.
摘要翻译：具有对准结构的基于微光机电系统的器件包括形成在器件的硅层中的至少一个光学结构以及与所述至少一个光学结构自对准的至少一个光纤连接结构。在实施例中，至少一个光纤连接结构形成在器件的衬底中，并且可以包括V形槽。在其他实施例中，所述至少一个光学结构可以包括波导。可以在波导的至少一部分上形成氮化物层。在各种实施例中，硅层可以是绝缘体上硅晶片的单晶硅层。提供一种用于制造具有对准结构的基于微光机电系统的装置的方法，其中使用相同的掩模层限定所述至少一个光学结构和所述至少一个光纤连接结构。

32. 发明授权

US08058182B2 Surface micromachining process of MEMS ink jet drop ejectors on glass substrates 有权
标题翻译： MEMS喷墨滴管在玻璃基板上的表面微加工工艺
公开(公告)号：US08058182B2
公开(公告)日：2011-11-15
申请号：US12495827
申请日：2009-07-01
申请人： Chingwen Yeh , James B. Boyce , Kathleen Boyce, legal representative , Jingkuang Chen , Feixia Pan , Joel A. Kubby
发明人： Chingwen Yeh , James B. Boyce , Jingkuang Chen , Feixia Pan , Joel A. Kubby
IPC分类号： H01L21/469
CPC分类号： B81C1/00158 , Y10T29/42
摘要： Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.
摘要翻译：用于形成膜的方法和装置包括提供玻璃基板，以及在玻璃基板上沉积薄层的铬。图案化薄层的铬以形成偏转电极和互连引线。在图案化的铬层的顶部上沉积铝的牺牲层，然后将牺牲层图案化以限定锚定区域。在牺牲层的顶部，沉积厚厚的铬层，并且将厚的铬层图案化以形成膜。然后蚀刻牺牲层以释放膜。

33. 发明授权

US06658179B2 Monolithic reconfigurable optical multiplexer systems and methods 有权
标题翻译：单片可重构光复用器系统和方法
公开(公告)号：US06658179B2
公开(公告)日：2003-12-02
申请号：US09986395
申请日：2001-11-08
申请人： Joel A. Kubby , Pinyen Lin , Jingkuang Chen , Yi Su
发明人： Joel A. Kubby , Pinyen Lin , Jingkuang Chen , Yi Su
IPC分类号： G02B612
CPC分类号： G02B6/356 , G02B6/12021 , G02B6/12033 , G02B6/2938 , G02B6/3508 , G02B6/3512 , G02B6/3584 , G02B6/3596 , G02B2006/12061 , G02B2006/12097 , G02B2006/12107 , G02B2006/12145 , G02B2006/12164
摘要： A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.
摘要翻译：硅解复用器，多个硅开关和硅多路复用器单片集成在单个硅芯片上。在实施例中，硅解复用器和硅多路复用器各自包括衍射光栅。在其他实施例中，硅解复用器和硅多路复用器均包括阵列波导光栅。在各种示例性实施例中，硅光开关包括光开关，微机械扭转镜，静电微镜和/或倾斜微镜。在使用中，包括复用数据流的光信号被输入到单片可重构光复用器。可以输出包括修改的多路复用数据流的光信号。在光通信系统中，硅解复用器与输入光纤通信，多个硅光开关在硅解复用器和硅多路复用器之间通信，并且硅复用器与输出光纤通信。在各种实施例中，光开关被制造成自对准。

34. 发明授权

US06608679B1 Spectrophotometric analysis of input light 有权
标题翻译：输入光分光光度分析
公开(公告)号：US06608679B1
公开(公告)日：2003-08-19
申请号：US09467184
申请日：1999-12-20
申请人： Jingkuang Chen , Joel A. Kubby
发明人： Jingkuang Chen , Joel A. Kubby
IPC分类号： G01J336
CPC分类号： G01J3/02 , G01J3/0213 , G01J3/0218 , G01J3/0256 , G01J3/0259 , G01J3/18 , G01J3/2803
摘要： A micro spectrophotometer is monolithically constructed on a silicon substrate. The spectrophotometer includes a concave grating, which is used for dispersing optical waves as well as focusing reflected light onto a photodiode array sited on a silicon bridge. The silicon bridge is bent 90° from the surface of the silicon substrate in order to orthogonally intersect the output light from the grating. A precision notch is defined in the silicon substrate for coupling to an optical input fiber. Signal processing circuitry is etched on the substrate using conventional CMOS processes for initial processing of information received from the photodiode array.
摘要翻译：微型分光光度计在硅衬底上单片构造。分光光度计包括凹光栅，其用于分散光波以及将反射光聚焦到位于硅桥上的光电二极管阵列上。硅桥从硅衬底的表面弯曲90°，以便与光栅的输出光正交相交。在硅衬底中限定了用于耦合到光输入光纤的精密凹口。使用常规CMOS工艺在衬底上蚀刻信号处理电路，用于对从光电二极管阵列接收的信息进行初始处理。

35. 发明授权

US06580858B2 Micro-opto-electro-mechanical system (MOEMS) 失效
公开(公告)号：US06580858B2
公开(公告)日：2003-06-17
申请号：US09844574
申请日：2001-04-30
申请人： Jingkuang Chen , Joel A. Kubby , Decai Sun
发明人： Jingkuang Chen , Joel A. Kubby , Decai Sun
IPC分类号： G02B642
CPC分类号： G02B6/35 , G02B6/3512 , G02B6/3582 , G02B6/3584 , G02B6/3598 , G02B6/4214
摘要： A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers in substrates. Movable mirrors formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment.

36. 发明授权

US06473361B1 Electromechanical memory cell 有权
标题翻译：机电式记忆体
公开(公告)号：US06473361B1
公开(公告)日：2002-10-29
申请号：US09709096
申请日：2000-11-10
申请人： Jingkuang Chen , Feixia Pan , Joel A. Kubby
发明人： Jingkuang Chen , Feixia Pan , Joel A. Kubby
IPC分类号： G11C800
CPC分类号： G11C23/00 , B81B3/0054 , B81B2203/0118 , B82Y10/00 , G11B9/14 , H01H59/0009 , H01H2001/0047 , H01H2037/008
摘要： A low power, nonvolatile microelectromechanical memory cell stores data. This memory cell uses a pair of cantilevers, to store a bit of information. The on and off state of this mechanical latch is switched by using, for example, electrostatic forces applied sequentially on the two cantilevers. The cantilevers are partially overlapping. Changing the relative position of the cantilevers determines whether they are electrically conducting or not. One state represents a logical “1”. The other state represents a logical “0”. After a bit of data is written, the cantilevers are locked by mechanical forces inherent in the cantilevers and will not change state unless a sequential electrical writing signal is applied. The sequential nature of the required writing signal makes inadvertent or noise related data corruption highly unlikely. This MEMS memory cell can be implemented, for example, using a three-polysilicon-layer surface micro-machining process. The mechanical nature of the memory cell makes the cell immune to radiation. The cell is compatible with existing VLSI processes. Therefore monolithic memory devices comprising, for example, a plurality of the memory cells, read/write circuitry, and I/O circuitry, can be made using inexpensive, standard processes. The memory devices can be used in almost any electronic device requiring memory. For example the memory device is used in document processors, cell phones and satellites.
摘要翻译：低功率，非易失性微机电存储单元存储数据。该存储单元使用一对悬臂来存储一些信息。通过使用例如依次施加在两个悬臂上的静电力来切换该机械闩锁的开和关状态。悬臂部分重叠。改变悬臂的相对位置确定它们是否导电。一个状态代表逻辑“1”。另一个状态表示逻辑“0”。在写入一些数据之后，悬臂由悬臂中固有的机械力锁定，除非应用顺序的电气写入信号，否则不会改变状态。所需写入信号的顺序性质使得无意或噪声相关的数据损坏非常不可能。该MEMS存储单元可以例如使用三晶硅层表面微加工工艺来实现。记忆细胞的机械性质使得细胞免受辐射。该小区与现有的VLSI过程兼容。因此，可以使用廉价的标准工艺来制造包括例如多个存储单元，读/写电路和I / O电路的单片存储器件。存储器件可用于几乎任何需要存储器的电子设备中。例如，存储器件用于文件处理器，蜂窝电话和卫星。

37. 发明授权

US06399405B1 Process for constructing a spectrophotometer 有权
标题翻译：构建分光光度计的方法
公开(公告)号：US06399405B1
公开(公告)日：2002-06-04
申请号：US09467482
申请日：1999-12-20
申请人： Jingkuang Chen , Joel A. Kubby
发明人： Jingkuang Chen , Joel A. Kubby
IPC分类号： H01L2100
CPC分类号： G01J3/2803 , G01J3/02 , G01J3/0213 , G01J3/0218 , G01J3/0256 , G01J3/0259 , G01J3/18
摘要： A process for constructing a monolithic spectrophotometer from a monolithic substrate, which includes the steps of etching a grating for dispersing input optical waves in the monolithic substrate, etching a suspended bridge positioned over an undercut cavity in the monolithic substrate, forming photodiode array on the suspended bridge to receive dispersed optical waves from the grating, orienting the suspended bridge to receive dispersed optical waves from the grating, locking the suspended bridge in a oriented position with an anchor, and photolithographically defining signal processing circuitry on the monolithic substrate.
摘要翻译：一种用于从单片基板构建单片分光光度计的方法，其包括以下步骤：蚀刻用于将输入光波分散在整体式衬底中的光栅，蚀刻位于整体式衬底中的底切腔上方的悬置桥，以从光栅接收分散的光波，定向悬吊的桥以接收来自光栅的分散的光波，将悬挂的桥锁定在具有锚的取向位置，并在单片基板上光刻地限定信号处理电路。

38. 发明授权

US06662448B2 Method of fabricating a micro-electro-mechanical fluid ejector 失效
标题翻译：微机电液体喷射器的制造方法
公开(公告)号：US06662448B2
公开(公告)日：2003-12-16
申请号：US09863637
申请日：2001-05-23
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B21D5376
CPC分类号： H04R17/00 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041 , Y10T29/42 , Y10T29/49128 , Y10T29/49156 , Y10T29/49401
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

39. 发明授权

US06357865B1 Micro-electro-mechanical fluid ejector and method of operating same 有权
标题翻译：微机电液体喷射器及其运行方法
公开(公告)号：US06357865B1
公开(公告)日：2002-03-19
申请号：US09416329
申请日：1999-10-12
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B41J2045
CPC分类号： B41J2/14314 , B41J2/14 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

40. 发明申请

US20080061163A1 Device and system for dispensing fluids into the atmosphere 审中-公开
标题翻译：用于将流体分配到大气中的装置和系统
公开(公告)号：US20080061163A1
公开(公告)日：2008-03-13
申请号：US11650676
申请日：2007-01-08
申请人： Joel A. Kubby , Nancy Y. Jia , Edward Francis , Robert M. Duffner , Jun Ma , Cathie J. Burke , James C. Diehl
发明人： Joel A. Kubby , Nancy Y. Jia , Edward Francis , Robert M. Duffner , Jun Ma , Cathie J. Burke , James C. Diehl
IPC分类号： B05B1/08
CPC分类号： B05B12/082 , A01M1/205 , A61L9/14 , B05B12/12
摘要： A fluid dispensing device comprises one or more micromechanical fluid dispensing mechanisms arranged to dispense fluids into the atmosphere. The fluids include any of a perfume, pheromone, fragrance, disinfectant, moisturizer, humectant, miticide, fumigant, deodorizer, sanitizing agent and insecticide. A dispenser controller communicates with the fluid micromechanical dispensing mechanisms to selectively activate the fluid micromechanical dispensing mechanisms. Optionally, the fluid dispensing device includes a sensor to detect the airborne concentration of fluids that are dispersed in the atmosphere. Optionally, one or more fluid dispensing devices may be arranged to form a system, perhaps including a system sensor and a system controller.
摘要翻译：流体分配装置包括布置成将流体分配到大气中的一个或多个微机械流体分配机构。流体包括香料，信息素，香料，消毒剂，保湿剂，保湿剂，杀螨剂，熏蒸剂，除臭剂，消毒剂和杀虫剂中的任何一种。分配器控制器与流体微机械分配机构连通，以选择性地启动流体微机械分配机构。可选地，流体分配装置包括用于检测分散在大气中的流体的空气传播浓度的传感器。可选地，一个或多个流体分配装置可以被布置成形成系统，可能包括系统传感器和系统控制器。

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