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1. 发明授权

US06990265B2 Monolithic reconfigurable optical multiplexer systems and methods 失效
标题翻译：单片可重构光复用器系统和方法
公开(公告)号：US06990265B2
公开(公告)日：2006-01-24
申请号：US10721849
申请日：2003-11-25
申请人： Joel A. Kubby , Pinyen Lin , Jingkuang Chen , Yi Su
发明人： Joel A. Kubby , Pinyen Lin , Jingkuang Chen , Yi Su
IPC分类号： G02B6/26
CPC分类号： G02B6/356 , G02B6/12021 , G02B6/12033 , G02B6/2938 , G02B6/3508 , G02B6/3512 , G02B6/3584 , G02B6/3596 , G02B2006/12061 , G02B2006/12097 , G02B2006/12107 , G02B2006/12145 , G02B2006/12164
摘要： A micro-optical device having an aligned waveguide switch. The device includes a stationary input part, a stationary output part and a movable part. The stationary input part and the stationary output part each have a plurality of input and output waveguides, respectively. The movable part has a plurality of switching waveguides and is movable relative to the stationary input and output parts. A stop block limits movement of the movable part in order to align at least one of the switching waveguides with the applicable input waveguide(s) and output waveguide(s). The movement of the movable part is substantially transverse.
摘要翻译：具有对准的波导开关的微型光学器件。该装置包括固定输入部分，固定输出部分和可动部分。固定输入部分和固定输出部分别分别具有多个输入和输出波导。可移动部件具有多个开关波导，并且可相对于固定的输入和输出部件移动。止动块限制了可移动部件的移动，以便将至少一个开关波导与可应用的输入波导和输出波导对准。可移动部件的运动基本上是横向的。

2. 发明授权

US06658179B2 Monolithic reconfigurable optical multiplexer systems and methods 有权
标题翻译：单片可重构光复用器系统和方法
公开(公告)号：US06658179B2
公开(公告)日：2003-12-02
申请号：US09986395
申请日：2001-11-08
申请人： Joel A. Kubby , Pinyen Lin , Jingkuang Chen , Yi Su
发明人： Joel A. Kubby , Pinyen Lin , Jingkuang Chen , Yi Su
IPC分类号： G02B612
CPC分类号： G02B6/356 , G02B6/12021 , G02B6/12033 , G02B6/2938 , G02B6/3508 , G02B6/3512 , G02B6/3584 , G02B6/3596 , G02B2006/12061 , G02B2006/12097 , G02B2006/12107 , G02B2006/12145 , G02B2006/12164
摘要： A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.
摘要翻译：硅解复用器，多个硅开关和硅多路复用器单片集成在单个硅芯片上。在实施例中，硅解复用器和硅多路复用器各自包括衍射光栅。在其他实施例中，硅解复用器和硅多路复用器均包括阵列波导光栅。在各种示例性实施例中，硅光开关包括光开关，微机械扭转镜，静电微镜和/或倾斜微镜。在使用中，包括复用数据流的光信号被输入到单片可重构光复用器。可以输出包括修改的多路复用数据流的光信号。在光通信系统中，硅解复用器与输入光纤通信，多个硅光开关在硅解复用器和硅多路复用器之间通信，并且硅复用器与输出光纤通信。在各种实施例中，光开关被制造成自对准。

3. 发明授权

US06987920B1 Waveguide structures and methods 失效
标题翻译：波导结构和方法
公开(公告)号：US06987920B1
公开(公告)日：2006-01-17
申请号：US10878834
申请日：2004-06-28
申请人： Kristine A. German , Peter M. Gulvin , Joel A. Kubby , Pinyen Lin , Xueyuan Liu , Yao Rong Wang
发明人： Kristine A. German , Peter M. Gulvin , Joel A. Kubby , Pinyen Lin , Xueyuan Liu , Yao Rong Wang
IPC分类号： G02B6/10
CPC分类号： G02B6/122 , G02B6/105
摘要： A waveguide structure has a base having a base height (h) above a substrate and a rectangular waveguide having a waveguide height (H) above the substrate and a waveguide width (W) between opposing sides of the waveguide.
摘要翻译：波导结构具有在基板上方具有基底高度（h）的基部和在基板上方具有波导高度（H）的矩形波导和波导的相对侧之间的波导宽度（W）。

4. 发明授权

US06985651B2 Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same 失效
标题翻译：具有偏转光束段中性轴的热致动器和包括该中间轴的光波导开关
公开(公告)号：US06985651B2
公开(公告)日：2006-01-10
申请号：US10772693
申请日：2004-02-05
申请人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments with beam segment lengths. Each beam segment has a beam segment neutral axis, thus forming a corresponding plurality of beam segment neutral axes. The beam segment neutral axes are offset along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in the predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括具有梁段长度的多个梁段。每个光束段具有光束段中性轴线，从而形成相应的多个光束段中性轴线。光束段中性轴基于预定图案沿光束长度偏移。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

5. 发明授权

US06983088B2 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US06983088B2
公开(公告)日：2006-01-03
申请号：US10634941
申请日：2003-08-05
申请人： Joel A. Kubby , Jun Ma , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Joel A. Kubby , Jun Ma , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： G02B6/3576 , B81B3/0018 , G02B6/3566 , G02B6/3584
摘要： A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。每个光束的中点附加或耦合到正交耦合光束。每个阵列光束具有具有对应的光束加热参数值的光束加热参数。光束加热参数值基于预定图案在波束阵列上变化。当束被加热装置加热时，光束阵列中光束温度的分布变得不对称，从而使光束阵列发生弯曲。光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。耦合光束运动反过来操作包括的光波导开关。光束阵列中的光束通过焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种加热。

6. 发明授权

US07242825B2 Cantilever beam MEMS variable optical attenuator 失效
标题翻译：悬臂梁MEMS可变光衰减器
公开(公告)号：US07242825B2
公开(公告)日：2007-07-10
申请号：US11010769
申请日：2004-12-13
申请人： Pinyen Lin , Yao Rong Wang , Jun Ma , Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Joel A. Kubby
发明人： Pinyen Lin , Yao Rong Wang , Jun Ma , Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Joel A. Kubby
IPC分类号： G02B6/35
CPC分类号： G02B6/3508 , G02B6/266 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B6/3594 , G02B6/3596
摘要： An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：改进的悬臂光束开关设计，提供可变光衰减器（VOA）的功能。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

7. 发明授权

US06985650B2 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US06985650B2
公开(公告)日：2006-01-10
申请号：US10772564
申请日：2004-02-05
申请人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括多个梁段。每个光束段具有光束段宽度，因此光束形成相应的多个光束段宽度。光束段宽度基于预定图案沿着光束长度变化。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

8. 发明授权

US07298954B2 Waveguide shuttle MEMS variable optical attenuator 失效
标题翻译：波导梭MEMS可变光衰减器
公开(公告)号：US07298954B2
公开(公告)日：2007-11-20
申请号：US11154019
申请日：2005-06-16
申请人： Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Yao Rong Wang , Jun Ma , Pinyen Lin , Joel A. Kubby , Kathleen A. Feinberg
发明人： Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Yao Rong Wang , Jun Ma , Pinyen Lin , Joel A. Kubby , Kathleen A. Feinberg
IPC分类号： G02B6/26
CPC分类号： G02B6/358 , G02B6/266 , G02B6/3508 , G02B6/3544 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/3596
摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

9. 发明授权

US06968100B2 MEMS waveguide shuttle optical latching switch 失效
标题翻译： MEMS波导穿梭光闭锁开关
公开(公告)号：US06968100B2
公开(公告)日：2005-11-22
申请号：US10712200
申请日：2003-11-12
申请人： Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
发明人： Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
IPC分类号： G02B26/02 , B81B3/00 , G02B6/12 , G02B6/35 , G02B6/26 , G02B6/42
CPC分类号： G02B6/3508 , G02B6/356 , G02B6/358 , G02B2006/12145
摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
摘要翻译：公开了一种光学微机电系统（MEMS）开关。在优选实施例中，光学MEMS开关用作MxN光信号交换系统。光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

10. 发明授权

US07162112B2 Microfabrication process for control of waveguide gap size 失效
标题翻译：用于控制波导间隙尺寸的微加工工艺
公开(公告)号：US07162112B2
公开(公告)日：2007-01-09
申请号：US10995965
申请日：2004-11-23
申请人： Pinyen Lin , Joel A. Kubby , Yao Rong Wang
发明人： Pinyen Lin , Joel A. Kubby , Yao Rong Wang
IPC分类号： G02B6/12 , G02B6/10 , G02B6/00 , H01L21/00
CPC分类号： G02B6/3508 , G02B6/136 , G02B6/3544 , G02B6/356 , G02B6/3576 , G02B6/358 , G02B6/3584 , G02B6/3596 , G02B2006/12097
摘要： A method for forming a gap (16) of a width (d) which meets selected tolerance limits includes forming sidewalls (80, 82) in a microstructure, the sidewalls defining a gap (16) therebetween. The gap has a width defined between the sidewalls. The width of the gap between the sidewalls is determined. Where the determined width of the gap is below the selected tolerance limits for the width of the gap, the sidewalls are consumed to form a gap which meets the selected tolerance limits. The gap may be incorporated in a waveguide device (10) of a microswitch (100) and selectively connect input and output waveguides (130, 132).
摘要翻译：用于形成宽度（d）的满足所选公差极限的间隙（16）的方法包括在微观结构中形成侧壁（80,82），所述侧壁在它们之间限定间隙（16）。该间隙具有限定在侧壁之间的宽度。确定侧壁之间的间隙的宽度。在确定的间隙的宽度低于间隙宽度的所选公差极限的情况下，侧壁被消耗以形成满足所选公差极限的间隙。该间隙可以结合在微动开关（100）的波导装置（10）中并选择性地连接输入和输出波导（130,132）。

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