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1. 发明申请

US20110003405A1 Surface Micromachining Process of MEMS Ink Jet Drop Ejectors On Glass Substrates 有权
标题翻译： MEMS墨滴喷射器在玻璃基板上的表面微加工工艺
公开(公告)号：US20110003405A1
公开(公告)日：2011-01-06
申请号：US12495827
申请日：2009-07-01
申请人： Chingwen Yeh , James B. Boyce , Kathleen Boyce , Jingkuang Chen , Feixia Pan , Joel A. Kubby
发明人： Chingwen Yeh , James B. Boyce , Kathleen Boyce , Jingkuang Chen , Feixia Pan , Joel A. Kubby
IPC分类号： H01L21/30
CPC分类号： B81C1/00158 , Y10T29/42
摘要： Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.
摘要翻译：用于形成膜的方法和装置包括提供玻璃基板，以及在玻璃基板上沉积薄层的铬。图案化薄层的铬以形成偏转电极和互连引线。在图案化的铬层的顶部上沉积铝的牺牲层，然后将牺牲层图案化以限定锚定区域。在牺牲层的顶部，沉积厚厚的铬层，并且将厚的铬层图案化以形成膜。然后蚀刻牺牲层以释放膜。

2. 发明授权

US06473361B1 Electromechanical memory cell 有权
标题翻译：机电式记忆体
公开(公告)号：US06473361B1
公开(公告)日：2002-10-29
申请号：US09709096
申请日：2000-11-10
申请人： Jingkuang Chen , Feixia Pan , Joel A. Kubby
发明人： Jingkuang Chen , Feixia Pan , Joel A. Kubby
IPC分类号： G11C800
CPC分类号： G11C23/00 , B81B3/0054 , B81B2203/0118 , B82Y10/00 , G11B9/14 , H01H59/0009 , H01H2001/0047 , H01H2037/008
摘要： A low power, nonvolatile microelectromechanical memory cell stores data. This memory cell uses a pair of cantilevers, to store a bit of information. The on and off state of this mechanical latch is switched by using, for example, electrostatic forces applied sequentially on the two cantilevers. The cantilevers are partially overlapping. Changing the relative position of the cantilevers determines whether they are electrically conducting or not. One state represents a logical “1”. The other state represents a logical “0”. After a bit of data is written, the cantilevers are locked by mechanical forces inherent in the cantilevers and will not change state unless a sequential electrical writing signal is applied. The sequential nature of the required writing signal makes inadvertent or noise related data corruption highly unlikely. This MEMS memory cell can be implemented, for example, using a three-polysilicon-layer surface micro-machining process. The mechanical nature of the memory cell makes the cell immune to radiation. The cell is compatible with existing VLSI processes. Therefore monolithic memory devices comprising, for example, a plurality of the memory cells, read/write circuitry, and I/O circuitry, can be made using inexpensive, standard processes. The memory devices can be used in almost any electronic device requiring memory. For example the memory device is used in document processors, cell phones and satellites.
摘要翻译：低功率，非易失性微机电存储单元存储数据。该存储单元使用一对悬臂来存储一些信息。通过使用例如依次施加在两个悬臂上的静电力来切换该机械闩锁的开和关状态。悬臂部分重叠。改变悬臂的相对位置确定它们是否导电。一个状态代表逻辑“1”。另一个状态表示逻辑“0”。在写入一些数据之后，悬臂由悬臂中固有的机械力锁定，除非应用顺序的电气写入信号，否则不会改变状态。所需写入信号的顺序性质使得无意或噪声相关的数据损坏非常不可能。该MEMS存储单元可以例如使用三晶硅层表面微加工工艺来实现。记忆细胞的机械性质使得细胞免受辐射。该小区与现有的VLSI过程兼容。因此，可以使用廉价的标准工艺来制造包括例如多个存储单元，读/写电路和I / O电路的单片存储器件。存储器件可用于几乎任何需要存储器的电子设备中。例如，存储器件用于文件处理器，蜂窝电话和卫星。

3. 发明授权

US08058182B2 Surface micromachining process of MEMS ink jet drop ejectors on glass substrates 有权
标题翻译： MEMS喷墨滴管在玻璃基板上的表面微加工工艺
公开(公告)号：US08058182B2
公开(公告)日：2011-11-15
申请号：US12495827
申请日：2009-07-01
申请人： Chingwen Yeh , James B. Boyce , Kathleen Boyce, legal representative , Jingkuang Chen , Feixia Pan , Joel A. Kubby
发明人： Chingwen Yeh , James B. Boyce , Jingkuang Chen , Feixia Pan , Joel A. Kubby
IPC分类号： H01L21/469
CPC分类号： B81C1/00158 , Y10T29/42
摘要： Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.
摘要翻译：用于形成膜的方法和装置包括提供玻璃基板，以及在玻璃基板上沉积薄层的铬。图案化薄层的铬以形成偏转电极和互连引线。在图案化的铬层的顶部上沉积铝的牺牲层，然后将牺牲层图案化以限定锚定区域。在牺牲层的顶部，沉积厚厚的铬层，并且将厚的铬层图案化以形成膜。然后蚀刻牺牲层以释放膜。

4. 发明授权

US06201633B1 Micro-electromechanical based bistable color display sheets 有权
标题翻译：基于微机电的双稳态彩色显示板
公开(公告)号：US06201633B1
公开(公告)日：2001-03-13
申请号：US09326876
申请日：1999-06-07
申请人： Eric Peeters , Jackson Ho , Feixia Pan , Raj B. Apte , Joel A. Kubby , Ronald T. Fulks , Decai Sun , Patrick Y. Maeda , David Fork , Robert Thornton , Ross Bringans , G. A. Neville Connell , Philip Don Floyd , Tuan Anh Vo , Koenraad Van Schuylenbergh
发明人： Eric Peeters , Jackson Ho , Feixia Pan , Raj B. Apte , Joel A. Kubby , Ronald T. Fulks , Decai Sun , Patrick Y. Maeda , David Fork , Robert Thornton , Ross Bringans , G. A. Neville Connell , Philip Don Floyd , Tuan Anh Vo , Koenraad Van Schuylenbergh
IPC分类号： G02B2600
CPC分类号： G09G3/3433 , G02B26/02 , G09G3/2011 , G09G3/2018 , G09G3/207 , G09G2300/06 , G09G2310/04 , G09G2310/061 , H04N5/66 , H04N5/7416 , H04N9/30 , H04N9/3102
摘要： A micro-electromechanical bistable shutter display device is provided capable of being implemented for both small screen, high resolution devices and for large billboard-type displays. The micro-electromechanical shutter assembly has bi-stability characteristics which allow the use of only a holding voltage to maintain an image. The micro-electromechanical shutter assembly includes a shutter having petal-like shutter segments covering reflective or transmittive films. To expose the film in a particular shutter assembly, its shutter segments are moved from the horizontal to a vertical position using electrostatic attraction forces to “collapse” the torsionally-hinged shutter segments. The shutter assembly can have a number of segments, as long as the resulting shutter assembly shape can be stacked to form a dense 2D array.
摘要翻译：提供了一种能够实现小屏幕，高分辨率设备和大型广告牌型显示器的微机电双稳态快门显示设备。微机电快门组件具有允许仅使用保持电压来维持图像的双稳定性特性。微机电快门组件包括具有覆盖反射或透射膜的花瓣状快门段的快门。为了在特定的快门组件中曝光胶片，使用静电吸引力使其快门部分从水平位置移动到垂直位置，以使“扭转”的快门片段“折叠”。快门组件可以具有多个段，只要所得到的快门组件形状可以被堆叠以形成致密的2D阵列。

5. 发明授权

US06662448B2 Method of fabricating a micro-electro-mechanical fluid ejector 失效
标题翻译：微机电液体喷射器的制造方法
公开(公告)号：US06662448B2
公开(公告)日：2003-12-16
申请号：US09863637
申请日：2001-05-23
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B21D5376
CPC分类号： H04R17/00 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041 , Y10T29/42 , Y10T29/49128 , Y10T29/49156 , Y10T29/49401
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

6. 发明授权

US06357865B1 Micro-electro-mechanical fluid ejector and method of operating same 有权
标题翻译：微机电液体喷射器及其运行方法
公开(公告)号：US06357865B1
公开(公告)日：2002-03-19
申请号：US09416329
申请日：1999-10-12
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B41J2045
CPC分类号： B41J2/14314 , B41J2/14 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

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