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    • 32. 发明申请
    • RESIN AND PHOTORESIST COMPOSITION COMPRISING THE SAME
    • 树脂和光学组合物包括它们
    • US20120178021A1
    • 2012-07-12
    • US13345941
    • 2012-01-09
    • Hyungjoo KIMAkira KAMABUCHIKoji ICHIKAWA
    • Hyungjoo KIMAkira KAMABUCHIKoji ICHIKAWA
    • G03F7/20G03F7/004C07D327/04C08F228/06
    • C08F20/38C07D327/04C08F228/06G03F7/0045G03F7/0046G03F7/0397
    • The present invention provides a resin comprising a structural unit represented by the formula (aa): wherein R1 represents a C1-C6 alkyl group optionally having one or more halogen atoms, a hydrogen atom or a halogen atom, T1 represents a C4-C34 sultone ring group optionally having one or more substituents, Z1 represents a C1-C6 alkanediyl group optionally having one or more substituents, or a group represented by the formula (a-1): -A10X10-A11sX11-A12-  (a-1) wherein X10 and X11 each independently represents —O—, —NH—, —CO—, —CO—O—, —O—CO—, —CO—NH— or —NH—CO—, A10, A11 and A12 each independently represent a C1-C5 divalent aliphatic hydrocarbon group optionally having one or more substituents, and s represents 0 or 1, and Z2 represents a single bond or —CO—.
    • 本发明提供一种树脂,其包含由式(aa)表示的结构单元:其中R 1表示任选具有一个或多个卤素原子,氢原子或卤素原子的C 1 -C 6烷基,T 1表示C 4 -C 34磺内酯 具有一个或多个取代基的环基,Z1表示任选具有一个或多个取代基的C1-C6烷二基,或由式(a-1)表示的基团:-A10XX-X-A11-X11-A12-(a -1)其中X10和X11各自独立地表示-O - , - NH - , - CO - , - CO-O-,-O-CO-,-CO-NH-或-NH-CO-,A10,A11和 A 12各自独立地表示任选具有一个或多个取代基的C 1 -C 5二价脂族烃基,s表示0或1,Z 2表示单键或-CO-。
    • 36. 发明申请
    • PHOTORESIST COMPOSITION
    • 光电组合物
    • US20110123926A1
    • 2011-05-26
    • US12953606
    • 2010-11-24
    • Koji ICHIKAWATakayuki MIYAGAWAMitsuhiro HATA
    • Koji ICHIKAWATakayuki MIYAGAWAMitsuhiro HATA
    • G03F7/004G03F7/20
    • G03F7/0046G03F7/0045G03F7/0382G03F7/0392G03F7/0397G03F7/2041
    • The present invention provides a photoresist composition comprising a resin, an acid generator and a compound represented by the formula (C1): wherein Rc1 represents an aromatic group which can have one or more substituents, Rc2 and Rc3 independently each represent a hydrogen atom, an aliphatic hydrocarbon group which can have one or more substituents or an aromatic group which can have one or more substituents, Rc4 and RC6 independently each represent a hydrogen atom or an aliphatic hydrocarbon group which can have one or more substituents, or Rc4 and Rc6 are bonded each other to form an alkanediyl group, Rc5 represents an aliphatic hydrocarbon group which can have one or more substituents or an amino group which can have one or two substituents, Rc7 represents a hydrogen atom or an aliphatic hydrocarbon group which can have one or more substituents, or Rc5 and Rc7 are bonded each other to form an alkanediyl group.
    • 本发明提供一种光致抗蚀剂组合物,其包含树脂,酸产生剂和由式(C1)表示的化合物:其中Rc1表示可以具有一个或多个取代基的芳基,Rc2和Rc3各自独立地表示氢原子, 可具有一个或多个取代基的脂族烃基或可具有一个或多个取代基的芳族基团,R c4和RC 6各自独立地表示氢原子或可具有一个或多个取代基的脂族烃基,或R c4和R c6键合 彼此形成烷二基,Rc5表示可具有一个或多个取代基的脂族烃基或可具有一个或两个取代基的氨基,R c7表示氢原子或可具有一个或多个取代基的脂族烃基 ,或Rc5和Rc7彼此键合形成烷二基。
    • 37. 发明申请
    • COMPOUND, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
    • 化合物,树脂,耐蚀组合物和用于生产耐腐蚀图案的方法
    • US20110053086A1
    • 2011-03-03
    • US12873919
    • 2010-09-01
    • Kazuhiko HashimotoKoji Ichikawa
    • Kazuhiko HashimotoKoji Ichikawa
    • G03F7/004C07C69/88C07C69/96C07C69/017C08F20/10G03F7/20
    • C07C69/84C07C69/54C07C69/96C07C2603/74C08F20/30G03F7/0045G03F7/0046G03F7/0397
    • A compound of the present invention is represented by the formula (A); wherein R1 represents a hydrogen atom or a C1 to C6 alkyl group; Z1 represents a single bond, —CO—O—* or —CO—O—(CH2)k—CO—O—*; Z2 represents a single bond, *—O—CO—, *—CO—O—, *—O—(CH2)k—CO—, *—CO—(CH2)k—O—, *—O—(CH2)k—CO—O—, *—O—CO—(CH2)k—O— or *—O—CO—(CH2)k—O—CO—; k represents an integer of 1 to 6; * represents a binding position to W; W represents a C4 to C36 (n+1) valent alicyclic hydrocarbon group or a C6 to C18 (n+1) valent aromatic hydrocarbon group, one or more hydrogen atoms contained in the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be replaced by a halogen atom, a C1 to C12 alkyl group, a C1 to C12 alkoxy group, a C2 to C4 acyl group or —OR10; R10 represents a hydrogen atom or a group represented by the formula (R2-2); R2 represents a hydrogen atom, a group represented by the formula (R2-1) or (R2-2); n represents an integer of 1 to 3; R4, R5 and R6 independently represent a C1 to C12 hydrocarbon group; R7 and R8 independently represent a hydrogen atom or a C1 to C12 hydrocarbon group; R9 represents a C1 to C14 hydrocarbon group.
    • 本发明的化合物由式(A)表示; 其中R1表示氢原子或C1-C6烷基; Z1表示单键,-CO-O- *或-CO-O-(CH2)k-CO-O- *; Z2表示单键,* -O-CO-,* -CO-O-,* -O-(CH2)k-CO-,* -CO-(CH2)k-O-,* -O- )k-CO-O-,* -O-CO-(CH2)k-O-或* -O-CO-(CH2)k-O-CO-; k表示1〜6的整数, *表示与W的绑定位置; W表示C 4〜C 36(n + 1)价的脂环式烃基或C 6〜C 18(n + 1)价芳香族烃基,脂环式烃基和芳香族烃基所含有的1个以上氢原子可以被 卤素原子,C1〜C12烷基,C1〜C12烷氧基,C2〜C4酰基或-OR10; R 10表示氢原子或式(R2-2)表示的基团。 R2表示氢原子,式(R2-1)或(R2-2)表示的基团; n表示1〜3的整数, R4,R5和R6独立地表示C1〜C12烃基; R7和R8独立地表示氢原子或C1〜C12烃基; R9表示C1〜C14烃基。