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31. 发明授权

US07506752B2 Methods and apparatus for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的方法和装置
公开(公告)号：US07506752B2
公开(公告)日：2009-03-24
申请号：US11494904
申请日：2006-07-28
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
摘要翻译：根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。

32. 发明申请

US20090030547A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 有权
标题翻译：高速装载机校准运输系统
公开(公告)号：US20090030547A1
公开(公告)日：2009-01-29
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

33. 发明申请

US20080219816A1 SMALL LOT LOADPORT CONFIGURATIONS 审中-公开
标题翻译：小载荷配置
公开(公告)号：US20080219816A1
公开(公告)日：2008-09-11
申请号：US12026452
申请日：2008-02-05
申请人： Michael R. Rice , Jeffrey C. Hudgens , Vinay K. Shah
发明人： Michael R. Rice , Jeffrey C. Hudgens , Vinay K. Shah
IPC分类号： H01L21/677
CPC分类号： H01L21/67126 , H01L21/67353 , H01L21/67373 , H01L21/67379 , H01L21/67772 , H01L21/67775
摘要： A substrate handling apparatus and method include a small lot loadport configuration having a plurality of small lot loadports adapted to be coupled to an equipment front end module (EFEM) designed for use with a large lot substrate carrier and having a large lot loadport envelope, where the small lot loadport configuration has a combined envelope substantially similar to the large lot loadport envelope, and where each small lot loadport is adapted to dock with a small lot substrate carrier. A system also is provided that includes (1) the (EFEM) and (2) the small lot loadport configuration. Numerous other aspects are provided.
摘要翻译：一种基板处理装置和方法包括小批量载荷端口配置，其具有多个小批量载荷端口，其适于耦合到设计用于大批量基板载体并且具有大批载荷端口封套的设备前端模块（EFEM），其中小批量装载端口配置具有基本上类似于大批量装载端口封套的组合封套，并且其中每个小批量装载端口适于与小批量衬底载体对准。还提供了一种系统，其中包括（1）（EFEM）和（2）小批量装载端口配置。提供了许多其他方面。

34. 发明申请

US20080101912A1 DEPOSITION ANALYSIS FOR ROBOT MOTION CORRECTION 审中-公开
标题翻译：机器人运动校正的沉积分析
公开(公告)号：US20080101912A1
公开(公告)日：2008-05-01
申请号：US11553113
申请日：2006-10-26
申请人： Todd W. Martin , Steven V. Sansoni , Michael R. Rice , Eric Ng , Jeffrey C. Hudgens , Frederick Guckel , Russel Kaplan
发明人： Todd W. Martin , Steven V. Sansoni , Michael R. Rice , Eric Ng , Jeffrey C. Hudgens , Frederick Guckel , Russel Kaplan
IPC分类号： H01L21/66 , G01R31/26
CPC分类号： H01L21/681 , G01R31/2893 , H01L21/6719 , H01L21/67196 , H01L21/67201
摘要： Methods for correcting motion of a robot are provided in the present invention. In one embodiment, a method for correcting motion of a robot includes transferring a first substrate supported on a robot to a processing position using a robotic motion routine, depositing a material on the first substrate in the processing position, determining an offset between a center of the deposited material and a center of the first substrate, adjusting the robotic motion routine to compensate for the offset. In another embodiment, a processing chamber is provided configured to obtain samples from which motion of a robot operated therein may be corrected to improve substrate placement on a substrate support through analysis of material deposited on the substrate.
摘要翻译：在本发明中提供了用于校正机器人运动的方法。在一个实施例中，一种用于校正机器人运动的方法包括：使用机器人运动程序将支撑在机器人上的第一衬底转移到处理位置，将材料沉积在处理位置的第一衬底上，沉积材料和第一衬底的中心，调整机器人运动程序以补偿偏移。在另一个实施例中，提供了一种处理室，其被配置为获得可以通过分析沉积在基板上的材料的方式来校正在其中操作的机器人的运动以便改进衬底支撑件上的衬底放置的样本。

35. 发明授权

US07299831B2 Substrate carrier having door latching and substrate clamping mechanisms 有权
标题翻译：基板载体具有门锁和基板夹紧机构
公开(公告)号：US07299831B2
公开(公告)日：2007-11-27
申请号：US11210199
申请日：2005-08-23
申请人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65B1/04
CPC分类号： H01L21/67353 , H01L21/67373 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种自动开门器，其包括：（1）适于支撑衬底载体的平台; （2）门打开机构，其适于在基板载体由平台支撑的同时打开基板载体的门; 和（3）隧道。隧道适于从洁净室壁中的开口延伸到平台并且至少部分地围绕平台。隧道还适于将来自洁净室壁的空气流引向平台并且离开隧道。提供了许多其他方面。

36. 发明授权

US06556887B2 Method for determining a position of a robot 有权
标题翻译：用于确定机器人的位置的方法
公开(公告)号：US06556887B2
公开(公告)日：2003-04-29
申请号：US09905091
申请日：2001-07-12
申请人： Marvin L. Freeman , Jeffrey C. Hudgens , Damon Keith Cox , Chris Holt Pencis , Michael Rice , David A. Van Gogh
发明人： Marvin L. Freeman , Jeffrey C. Hudgens , Damon Keith Cox , Chris Holt Pencis , Michael Rice , David A. Van Gogh
IPC分类号： G06F700
CPC分类号： H01L21/67259 , B25J9/0009 , B25J9/107 , G05B19/404 , G05B2219/37608 , G05B2219/39192 , G05B2219/49169 , G05B2219/49207 , H01L21/67742 , H01L21/67748 , H01L21/68 , Y10S414/136 , Y10S414/137 , Y10S414/139
摘要： Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.
摘要翻译：通常，提供了一种确定机器人的位置的方法。在一个实施例中，一种确定机器人位置的方法包括获取第一组位置度量，获取第二组位置度量并且利用第一组和第二组位置来解决由于热膨胀引起的机器人的位置指标获取第一和第二组位置度量可以发生在处理系统内的相同位置处，或者可以在不同位置处发生。例如，在另一个实施例中，该方法可以包括在靠近处理室的第一位置获取第一组位置度量，并在另一位置获取第二组位置度量。在另一个实施例中，使用所确定的机器人的位置校正基板中心信息。

37. 发明授权

US06379095B1 Robot for handling semiconductor wafers 有权
标题翻译：用于处理半导体晶片的机器人
公开(公告)号：US06379095B1
公开(公告)日：2002-04-30
申请号：US09549777
申请日：2000-04-14
申请人： Martin R. Elliott , Jeffrey C. Hudgens , Chris Pencis , Damon Cox
发明人： Martin R. Elliott , Jeffrey C. Hudgens , Chris Pencis , Damon Cox
IPC分类号： B65H160
CPC分类号： H01L21/68707 , H01L21/67742
摘要： An apparatus for processing semiconductor wafers has an automatic robot for independently and simultaneously handling two wafers (W) at the same time on two separate transfer planes. The robot comprises a first arm assembly having a left and a right arm each mounted at one end for independent rotation in a first horizontal plane about a center vertical axis, the other ends of the arms being movably joined together and holding a blade on which a wafer can be carried, the arms being horizontally bendable near their centers so they can be folded to retract the blade toward the center axis and rotated to a desired angular position, the arms being extendable along a radius from the center axis by moving the arms together near their centers to bring the arms nearly parallel to each other and to extend the blade from the center axis by a maximum amount; and a second arm assembly substantially identical to the first assembly and rotatable in a second horizontal plane closely spaced above the first plane, the operation of the second assembly being substantially identical to that of the first assembly but independent thereof.
摘要翻译：用于处理半导体晶片的设备具有自动机器人，用于在两个分开的转移平面上同时处理两个晶片（W）。机器人包括第一臂组件，其具有左臂和右臂，每个臂在一端安装在围绕中心垂直轴线的第一水平平面中独立旋转，臂的另一端可移动地接合在一起，可以承载晶片，臂可以在其中心附近水平弯曲，使得它们可以被折叠以使叶片朝向中心轴线缩回并且旋转到期望的角位置，臂可以通过将臂移动在一起而从中心轴线的半径延伸靠近它们的中心以使臂几乎彼此平行，并且使叶片从中心轴线延伸最大量; 以及第二臂组件，其基本上与第一组件相同，并且可在紧邻第一平面的第二水平面中旋转，第二组件的操作基本上与第一组件的操作相同，但与之独立。

38. 发明授权

US06222337B1 Mechanically clamping robot wrist 失效
标题翻译：机械手夹紧机械手
公开(公告)号：US06222337B1
公开(公告)日：2001-04-24
申请号：US09324617
申请日：1999-06-02
申请人： Tony Kroeker , Jeffrey C. Hudgens
发明人： Tony Kroeker , Jeffrey C. Hudgens
IPC分类号： B25J1500
CPC分类号： H01L21/68707 , B25J9/107 , Y10S414/137 , Y10S414/139 , Y10S414/141
摘要： The present invention generally provides a robot that can transfer a workpiece, such as a silicon wafer, at increased speeds and accelerations/decelerations. More particularly, the present invention provides a robot wrist for mechanically clamping a workpiece to a workpiece handling member of an extendable robot arm. The wafer clamp selectively applies sufficient force to center the workpiece and prevent slippage and damage to the workpiece during rapid rotation and radial movement of the handling member. In one embodiment, a clamp for securing silicon wafers uses two independent clamp fingers to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except during full extension of the wafer handling member to deliver or pickup a wafer.
摘要翻译：本发明通常提供一种可以以增加的速度和加速度/减速度传送诸如硅晶片的工件的机器人。更具体地说，本发明提供了一种用于机械地将工件夹紧到可延伸机器人臂的工件处理构件上的机械手腕。晶片夹具选择性地施加足够的力以使工件居中并防止在处理构件的快速旋转和径向运动期间滑动和损坏工件。在一个实施例中，用于固定硅晶片的夹具使用两个独立的夹钳来以最小的颗粒产生和晶片损坏来定位和保持晶片。夹具被设计成使得晶片通常被夹紧，除了晶片处理构件的完全延伸以递送或拾取晶片之外。

39. 发明授权

US08777547B2 Systems, apparatus and methods for transporting substrates 有权
标题翻译：用于运输基材的系统，设备和方法
公开(公告)号：US08777547B2
公开(公告)日：2014-07-15
申请号：US12684672
申请日：2010-01-08
申请人： Izya Kremerman , Jeffrey C. Hudgens
发明人： Izya Kremerman , Jeffrey C. Hudgens
IPC分类号： B25J9/06 , B25J9/04 , H01L21/677
CPC分类号： B65G47/904 , B25J9/042 , B25J18/00 , H01L21/67742 , Y10S414/135 , Y10S414/141 , Y10S901/15 , Y10S901/16 , Y10S901/21 , Y10S901/28 , Y10S901/29 , Y10T74/20335
摘要： A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper arm rotatable in an X-Y plane, a forearm rotatable relative to the upper arm in the X-Y plane, and a wrist member rotatable relative to the forearm in the X-Y plane, the wrist member including an end effector adapted to carry a substrate. The wrist member may be subjected to independent rotation such that various degrees of yaw may be imparted to the wrist member. In some aspects, the independent rotation is provided without a motive power device (e.g., motor) being provided on the arms or wrist member, i.e., the wrist member may be remotely driven. Systems and methods using the robot apparatus are also provided as are numerous other aspects.
摘要翻译：公开了一种基板传送机器人装置，其适于将基板输送到电子设备处理系统的室和从电子设备处理系统的室传送。该装置可以包括可在XY平面中旋转的上臂，可相对于XY平面中的上臂旋转的前臂，以及可相对于XY平面中的前臂旋转的腕部构件，所述腕构件包括适于携带的末端执行器底物。手腕构件可以经受独立的旋转，使得可以将不同程度的偏转赋予手腕构件。在一些方面，提供独立的旋转，而不需要在臂或腕构件上设置动力装置（例如，马达），即可以远程地驱动腕部件。还提供了使用机器人装置的系统和方法以及许多其它方面。

40. 发明授权

US08078304B2 Dual-mode robot systems and methods for electronic device manufacturing 有权
标题翻译：双模机器人系统和电子设备制造方法
公开(公告)号：US08078304B2
公开(公告)日：2011-12-13
申请号：US12176381
申请日：2008-07-20
申请人： Michael R. Rice , Jeffrey C. Hudgens , Todd J. Egan , Ingrid B. Peterson
发明人： Michael R. Rice , Jeffrey C. Hudgens , Todd J. Egan , Ingrid B. Peterson
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/37224 , G05B2219/45061 , H01L21/67742 , H01L21/67766 , Y02P90/22 , Y10S414/135
摘要： Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).
摘要翻译：提供电子设备制造系统和方法。在一些方面，提供一种具有双模式机器人的系统，其被布置在系统部件（例如，工厂接口或传送室）内并且适于在第一模式和第二模式中操作。在第一模式中，机器人可以在系统的部件之间（例如，在载体和处理室或室到室之间）传送基板，并且在第二模式中，机器人可以执行过程运动曲线（例如，计量）。

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